CN-121978010-A - Large-view-field multi-focus shimming laser spectrometer based on view field modulation

CN121978010ACN 121978010 ACN121978010 ACN 121978010ACN-121978010-A

Abstract

The invention discloses a large-view-field multi-focus shimming laser spectrometer based on view field modulation, which comprises a laser light path module, a lighting light path module, a large-view-field multi-focus shimming light path module, a controller and a display module. The large-view-field multi-focus shimming light path module comprises a view field modulation module which is used for modulating and splitting incident laser beams into a plurality of sub-laser beams with different view fields, modulating and integrating the sub-spectrum beams generated by excitation of the sub-laser beams into a total spectrum beam with the same view field, focusing the modulated sub-laser beams on the surface of a sample to form multi-focus laser arrays, returning the sub-spectrum beams excited by each focus laser array along the incident light path, converging the sub-spectrum beams into a total spectrum beam, and realizing multi-focus laser spectrum acquisition. The invention effectively solves the problem of low sample representativeness caused by small single focus laser spot.

Inventors

ZHAO YING
WANG ZHANKUO
CHEN JIWEN

Assignees

北方工业大学

Dates

Publication Date: 20260505
Application Date: 20260210

Claims (8)

1. The large-field-of-view multi-focus shimming laser spectrometer based on field modulation is characterized by comprising a large-field-of-view multi-focus shimming optical path module and a controller, wherein the large-field-of-view multi-focus shimming optical path module comprises a field modulation module for modulating and splitting a laser beam into a plurality of sub-laser beams with different fields, the sub-laser beams act on the surface of a sample through a focusing mirror to form a multi-focus laser array, and a spectrum signal received by the controller is the sum of spectrums generated by the multi-focus laser array.
2. The field modulation-based large field-of-view multi-focal-spot shimming laser spectrometer according to claim 1, characterized in that the field modulation module is composed of a polyhedral transmissive prism or a polyhedral reflective prism combination, and the effective aperture of each prism is kept uniform.
3. The large-field-of-view multi-focus shimming laser spectrometer based on field modulation according to claim 2, characterized in that the sub-laser beams generated by the field modulation module in beam splitting have angular offset in the propagation directions of meridian plane (XOZ) and sagittal plane (YOZ) relative to the original incident laser 、 ) When the field modulation module adopts a polyhedral reflecting prism, the angle offset is satisfied, =2·Δx, =2·Δy, where Δx, Δy are the modulated reflection angles of the sub-laser beams at the meridian plane and sagittal plane, respectively.
4. The field-of-view modulated large field-of-view multi-focus shimming laser spectrometer according to claim 3, characterized in that the large field-of-view multi-focus shimming optical path module further comprises a focusing mirror for focusing the sub-laser beams to form an m x n (m, n. Gtoreq.2) multi-focus laser array, where m and n are determined by the prism parameters of the field-of-view modulation module.
5. The field modulation based large field multi-focal shimming laser spectrometer as claimed in claim 4, wherein the focusing lens is a single lens, a double cemented lens, a flat field lens or an achromatic flat field lens.
6. The large-field-of-view multi-focus shimming laser spectrometer based on field modulation as claimed in claim 5, further comprising a laser light path module, wherein the laser light path module comprises a laser, a beam expander, a diaphragm and a reflector; The laser is a continuous laser or a pulse laser and is used for generating a laser beam for detection; The beam expander is used for expanding the diameter of the laser beam, the diaphragm is a rectangular or circular mechanical hole, and the reflector is used for adjusting the direction of the light path; The laser path module ensures that the energy of each sub-laser beam after field modulation is consistent.
7. The large-field-of-view multi-focus shimming laser spectrometer based on field modulation of claim 7, further comprising a lighting light path module, wherein the signal acquisition light path module comprises a coupling beam splitter, a lighting focusing lens, an optical fiber and a spectrometer; the coupling beam splitter is used for coupling and separating the laser light path module and the lighting light path module, and the type of the coupling beam splitter comprises a dichroic mirror, a reflecting mirror with holes, a circular coating reflecting mirror or a central coating reflecting mirror; The lighting focusing mirror is used for coupling the total spectrum light beam to the optical fiber; The lighting focusing lens can adopt a single lens, a double-cemented lens, a flat field lens or an achromatic flat field lens; The optical fiber is used for transmitting the total spectrum light beam, types include single mode fiber, multimode fiber, single core fiber, or multi-core fiber; the spectrometer is used for receiving the total spectrum signal transmitted by the optical fiber and carrying out light splitting and detection on the total spectrum signal.
8. The large-field-of-view multi-focus shimming laser spectrometer based on field modulation according to claim 7, wherein the controller sends out a synchronous command, the laser is started and delay acquisition parameters of a spectrum analysis unit are set, laser emitted by the laser sequentially passes through the beam expander to be collimated and expanded, the diaphragm to be shaped, the reflector adjusts the direction of an optical path and finally enters the coupling beam splitter, the laser beam enters the field modulation module after being transmitted/reflected by the coupling beam splitter, the module modulates and splits the incident laser into a plurality of sub-laser beams with different fields of view, the sub-laser beams are focused on the surface of a sample through the focusing lens to form a multi-focus laser array, sub-spectrum signals excited by each sub-laser focus are collected by the focusing objective lens and returned in an original way, the returned sub-laser spectrums are integrated into a total spectrum beam with the same field of view again through the field modulation module, the total spectrum beam is reflected/transmitted by the coupling beam splitter to the lighting focusing lens, the total spectrum signals are converged and collected into the optical fiber, the optical fiber is transmitted to the spectrometer to be detected in a spectrum, and the detection data is transmitted to the controller to be subjected to chemical composition and content analysis, and the received by the controller is the spectrum signals generated by the multi-focus laser array.

Description

Large-view-field multi-focus shimming laser spectrometer based on view field modulation Technical Field The invention belongs to the technical field of photoelectric detection, and particularly relates to a large-field-of-view multi-focus shimming laser spectrometer based on field-of-view modulation. Background Laser spectrum analysis is a spectrum detection technology using laser as a light source, and covers typical methods such as laser Raman spectrum, laser fluorescence spectrum, laser Induced Breakdown Spectroscopy (LIBS) and the like. The technology has remarkable advantages in the scientific research and engineering fields due to the monochromaticity, directivity and high brightness characteristics of laser. The traditional scheme focuses laser on a single point of a sample for spectrum acquisition, and can improve the signal intensity by improving the laser energy or power density, but has two inherent defects of ① micrometer-level light spot limitation, too small focusing area (usually in micrometer level), difficulty in representing a large-size or heterogeneous sample, ② thermal damage risk, and easiness in causing thermal effect due to local ultrahigh power density, so that a sensitive sample is denatured or damaged. In view of the above problems, the prior art employs a scanning mobile platform or multiple measurement strategy, but adds significant detection time. See also patent documents (CN 202020154359.5, CN202010081839.8, CN201710104524.9, CN202310616284.6 and CN 201910576546.4) which realize shimming excitation through a micro lens array, but have the following limitations of high manufacturing cost, severe requirements on the processing precision of optical elements, limited space bandwidth, insufficient field of view expansion capability, difficult multi-focus confocal plane calibration, poor light path stability, light splitting coupling efficiency loss, effective excitation energy reduction, high system complexity and difficult integrated application. Disclosure of Invention In order to solve the problems in the prior art, the invention provides an XXX method, an XXX device, an XXX system and a XXX storage medium. In order to achieve the above object, the present invention provides the following solutions: A large-field-of-view multi-focus shimming laser spectrometer based on field modulation comprises a large-field-of-view multi-focus shimming optical path module and a controller, wherein the large-field-of-view multi-focus shimming optical path module comprises a field modulation module for modulating and splitting a laser beam into a plurality of sub-laser beams with different fields of view, the sub-laser beams act on the surface of a sample through a focusing mirror to form a multi-focus laser array, and a spectrum signal received by the controller is the sum of spectrums generated by the multi-focus laser array. Preferably, the field modulation module is composed of a polyhedral transmissive prism or a polyhedral reflective prism, and the effective aperture of each prism is kept consistent. Preferably, the sub-laser beams generated by the view field modulation module in a beam splitting way have angular offset relative to the original incident laser in the propagation directions of a meridian plane (XOZ) and a sagittal plane (YOZ)、) When the field modulation module adopts a polyhedral reflecting prism, the angle offset is satisfied,=2·Δx,=2·Δy, where Δx, Δy are the modulated reflection angles of the sub-laser beams at the meridian plane and sagittal plane, respectively. Preferably, the large-field multi-focus shimming optical path module further comprises a focusing mirror for focusing the sub-laser beams to form an m multiplied by n (m, n is more than or equal to 2) multi-focus laser array, wherein m and n are determined by prism parameters of the field modulation module. Preferably, the focusing lens is a single lens, a double cemented lens, a flat field lens or an achromatic flat field lens. The laser beam path module comprises a laser, a beam expander, a diaphragm and a reflecting mirror; the laser is a continuous laser or a pulse laser and is used for generating a laser beam for detection. The beam expander is used for expanding the diameter of the laser beam, the diaphragm is a rectangular or circular mechanical hole, and the reflector is used for adjusting the direction of the light path; The laser path module ensures that the energy of each sub-laser beam after field modulation is consistent. The system is characterized by also comprising a lighting light path module, wherein the signal acquisition light path module comprises a coupling beam splitter, a lighting focusing lens, an optical fiber and a spectrometer; the coupling beam splitter is used for coupling and separating the laser light path module and the lighting light path module, and the type of the coupling beam splitter comprises a dichroic mirror, a reflecting mirror with holes, a circular coating reflecting m