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CN-121978012-A - Optical detection equipment based on semiconductor electronic element production and processing

CN121978012ACN 121978012 ACN121978012 ACN 121978012ACN-121978012-A

Abstract

The invention discloses optical detection equipment based on production and processing of semiconductor electronic elements, which relates to the technical field of optical detection of monocrystalline silicon rods and comprises a control cabinet, wherein two support plates are fixed at the top of the control cabinet, the optical detection equipment also comprises a monocrystalline silicon rod rotating mechanism connected with the support plates, the anti-reflection plate is driven to downwards move by an anti-reflection mechanism, the anti-reflection plate is bent and wrapped on the top and attached to reduce reflection, quality and accuracy of optical detection pictures are improved, a supporting frame is driven to downwards move by a push rod motor, a ball body I, a ball body II, a rod body and a connecting block are driven to downwards move, the center of the anti-reflection plate is limited, the edges form an arc shape, the connecting block is pulled and the like to incline, complete attachment is ensured, hard pulling is avoided, the optical detection equipment is suitable for monocrystalline silicon rods with different sizes, a motor II is controlled by an anti-reflection plate cleaning mechanism to drive a gear II to reversely rotate, a reciprocating screw II is driven by a one-way gear II to drive a sliding block IV and a scraping plate to horizontally move, and the scraping plate is prevented from affecting detection accuracy.

Inventors

  • ZHANG HAOLAI
  • Peng Guocong

Assignees

  • 武汉嘉圣华技术有限公司

Dates

Publication Date
20260505
Application Date
20260407

Claims (7)

  1. 1. An optical detection device based on semiconductor electronic element production and processing comprises a control cabinet (1), and is characterized in that two support plates (2) are fixed at the top of the control cabinet (1); Further comprises: The single crystal silicon rod rotating mechanism (3) is connected with the supporting plate (2), the single crystal silicon rod rotating mechanism (3) comprises two rotating shafts (31), and a plurality of rubber wheels (32) are fixed outside the rotating shafts (31); a single crystal silicon rod (4) mounted on the single crystal silicon rod rotation mechanism (3); a defect detection mechanism (5) connected with the support plate (2), wherein the defect detection mechanism (5) comprises a moving mechanism and an optical microscopy mechanism (54), and the optical microscopy mechanism (54) comprises an industrial camera, a micro objective lens and a light source; an anti-reflection mechanism (6) connected with the support plate (2) and comprising an anti-reflection sheet (612), wherein the anti-reflection sheet (612) comprises a transparent sheet, and both sides of the transparent sheet are plated with anti-reflection films; the anti-reflection sheet cleaning mechanism (7) is connected with the supporting plate (2) and comprises a scraping plate (75); and a driving mechanism (8) mounted on one side of the support plate (2).
  2. 2. Optical inspection apparatus based on semiconductor electronic component production and processing according to claim 1, characterized in that said single crystal silicon rod rotation mechanism (3) further comprises pulleys (33) fixed at one ends of two rotation shafts (31), respectively, the external transmission of two pulleys (33) being connected with a belt (34); One side of one supporting plate (2) is fixedly provided with a first motor (35), and the output end of the first motor (35) is fixedly connected with one rotating shaft (31); the two rotating shafts (31) are rotatably connected inside the two supporting plates (2).
  3. 3. The optical detection device based on semiconductor electronic component production and processing according to claim 2, wherein the moving mechanism comprises a reciprocating screw rod I (51) rotatably connected inside two support plates (2), a one-way gear I (52) is installed at one end of the reciprocating screw rod I (51), a slide block I (53) is sleeved on the outer thread of the reciprocating screw rod I (51), one side of the slide block I (53) is fixedly connected with an optical microscopy mechanism (54), a slide block II (55) is fixedly connected on one side of the optical microscopy mechanism (54), a guide rod I (56) is sleeved inside the slide block II (55), and the guide rod I (56) is fixedly connected with the two support plates (2).
  4. 4. An optical detection device based on semiconductor electronic component production and processing according to claim 3, wherein the anti-reflection mechanism (6) further comprises a plurality of push rod motors (613), one sides of the push rod motors (613) are fixed with mounting plates (614), the mounting plates (614) are fixedly connected with the supporting plates (2), and the output ends of the plurality of push rod motors (613) are fixed with supporting frames (61).
  5. 5. The optical inspection device based on semiconductor electronic component manufacturing process according to claim 4, wherein the anti-reflection mechanism (6) further comprises a plurality of first spheres (69) rotatably connected to the bottom, a rod body (68) is fixed to the bottom of the first spheres (69), a second spheres (610) is fixed to the bottom of the rod body (68), a connecting block (611) is rotatably connected to the outer part of the second spheres (610), and the anti-reflection sheet (612) is fixed to the bottom of the plurality of connecting blocks (611); The outside of the rod body (68) is fixedly provided with a fixed block (67), one side, close to the optical microscopy mechanism (54), of the fixed block (67) is rotationally connected with a connecting rod (66), one end, far away from the fixed block (67), of the connecting rod (66) is rotationally connected with a sliding block III (64), the inside of the sliding block III (64) is sleeved with a sliding rod (63), the outside of the sliding rod (63) is sleeved with a spring (65), and one end of the spring (65) is fixedly connected with the sliding block III (64); a plurality of sliding grooves (62) are formed in the bottom of the supporting frame (61), three sliding blocks (64) are sleeved in the sliding grooves (62), sliding rods (63) are fixed on the inner walls of the sliding grooves (62), and the other ends of springs (65) are fixedly connected with the sliding grooves (62).
  6. 6. The optical detection device based on semiconductor electronic component production and processing according to claim 5, wherein the anti-reflection sheet cleaning mechanism (7) further comprises a reciprocating screw rod II (71) rotatably connected inside the two support plates (2), a one-way gear II (72) is installed at one end of the reciprocating screw rod II (71), a sliding block IV (73) is sleeved on an external thread of the reciprocating screw rod II (71), a guide rod II (74) is sleeved inside the sliding block IV (73), the guide rod II (74) is fixedly connected with the two support plates (2), and the scraping plate (75) is fixedly connected with the sliding block IV (73).
  7. 7. The optical inspection device based on semiconductor electronic component manufacturing process according to claim 6, wherein the driving mechanism (8) further comprises a second motor (81) fixed on one side of one of the support plates (2), a gear (82) is fixed at an output end of the second motor (81), one side of the gear (82) is meshed with the first unidirectional gear (52), and the other side of the gear (82) is meshed with the second unidirectional gear (72).

Description

Optical detection equipment based on semiconductor electronic element production and processing Technical Field The invention relates to the technical field of optical detection of monocrystalline silicon rods, in particular to optical detection equipment based on semiconductor electronic element production and processing. Background In the prior art, the monocrystalline silicon rod is extremely easy to produce surface scratches, edge breakage and particle pollution in the processes of growing, cutting, grinding and polishing. The surface defects can not only cause wire breakage and silicon wafer breakage in the subsequent diamond wire slicing process to reduce the production yield and equipment loss, but also cause microcracks formed by scratches and broken edges to become stress concentration sources and impurity diffusion channels, and dislocation initiation can be induced when the semiconductor device is manufactured to directly cause the device to fail. The traditional single crystal silicon rod optical detection adopts a single side light source and single-phase camera shooting, and a cylindrical curved surface causes mirror reflection and local overexposure/underexposure, so that the defect omission ratio is higher. Disclosure of Invention The invention provides optical detection equipment based on semiconductor electronic element production and processing, which aims to solve the defects in the prior art. In order to achieve the above purpose, the present invention adopts the following technical scheme: an optical detection device based on semiconductor electronic element production and processing comprises a control cabinet, wherein two support plates are fixed at the top of the control cabinet; Further comprises: The single crystal silicon rod rotating mechanism is connected with the supporting plate and comprises two rotating shafts, and a plurality of rubber wheels are fixed outside the rotating shafts; A single crystal silicon rod mounted on the single crystal silicon rod rotating mechanism; the defect detection mechanism is connected with the supporting plate and comprises a moving mechanism and an optical microscopy mechanism, wherein the optical microscopy mechanism comprises an industrial camera, a microscope objective and a light source; the anti-reflection mechanism is connected with the supporting plate and comprises an anti-reflection sheet, wherein the anti-reflection sheet comprises a transparent sheet, and the two sides of the transparent sheet are plated with anti-reflection films; the anti-reflection sheet cleaning mechanism is connected with the supporting plate and comprises a scraping plate; and a driving mechanism installed at one side of the support plate. Further, the single crystal silicon rod rotating mechanism further comprises belt pulleys respectively fixed at one ends of the two rotating shafts, and belts are connected to the outer parts of the two belt pulleys in a transmission manner; One side of one supporting plate is fixed with a first motor, and the output end of the first motor is fixedly connected with one rotating shaft; the two rotating shafts are rotatably connected inside the two supporting plates. Further, the moving mechanism comprises a first reciprocating screw rod which is rotatably connected inside the two supporting plates, a first unidirectional gear is arranged at one end of the first reciprocating screw rod, a first sliding block is sleeved on the outer thread of the first reciprocating screw rod, one side of the first sliding block is fixedly connected with the optical microscopy mechanism, a second sliding block is fixedly arranged on one side of the optical microscopy mechanism, a first guide rod is sleeved on the inner portion of the second sliding block, and the first guide rod is fixedly connected with the two supporting plates. Further, the anti-reflection mechanism further comprises a plurality of push rod motors, one sides of the push rod motors are fixedly provided with mounting plates, the mounting plates are fixedly connected with the supporting plates, and the output ends of the push rod motors are fixedly provided with supporting frames. Further, the anti-reflection mechanism further comprises a plurality of first spheres rotationally connected to the bottom, a rod body is fixed to the bottom of the first spheres, second spheres are fixed to the bottom of the rod body, connecting blocks are rotationally connected to the outer parts of the second spheres, and the anti-reflection sheet is fixed to the bottoms of the connecting blocks; The outside of the rod body is fixedly provided with a fixed block, one side, close to the optical microscopy mechanism, of the fixed block is rotationally connected with a connecting rod, one end, far away from the fixed block, of the connecting rod is rotationally connected with a sliding block III, the inside of the sliding block III is sleeved with a sliding rod, the outside of the sliding rod is sleev