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CN-121978108-A - Semiconductor side-pumped laser bar inspection device and inspection method

CN121978108ACN 121978108 ACN121978108 ACN 121978108ACN-121978108-A

Abstract

The utility model provides a semiconductor side pumping laser bar verifying attachment and inspection method, belongs to semiconductor laser technical field, including the base, fixed the being equipped with pivot on the base, pivot swing joint has puts the thing platform, puts the thing platform and is used for bearing side pumping laser module, the pivot vertically runs through the center of putting the thing platform, the fixed speculum that is equipped with in top of pivot, the speculum slope sets up, during the inspection, can adjust the speculum and be located the intersection point position department of the bar outgoing light that side pumping laser module inner periphery was to detect. The bearing side pump laser module rotates around the shaft or moves vertically, and is matched with the inclined reflecting mirror arranged at the position of the intersection point of Zhou Juanba emergent lights in the module, so that the emergent lights of the bars in the annular or polygonal shell structure can be reflected efficiently, a microscope does not need to directly extend into the shell, clear observation of assembled bars can be realized, the applicable scene of bar inspection is greatly expanded, and the convenience and feasibility of inspection operation are improved.

Inventors

  • WANG DECHAO
  • Fu Chuanshang
  • ZHENG ZHAOHE
  • SUN SUJUAN
  • WEI XIAOFENG
  • Sun Wanggen
  • DENG DACHAO

Assignees

  • 山东华光光电子股份有限公司

Dates

Publication Date
20260505
Application Date
20260114

Claims (10)

  1. 1. The utility model provides a semiconductor side pumping laser bar verifying attachment, including base (1), its characterized in that is fixed on base (1) and is equipped with pivot (3), pivot (3) swing joint has put thing platform (2), put thing platform (2) and be used for bearing side pumping laser module (8), the center of putting thing platform (2) is vertically run through to pivot (3), the top of pivot (3) is fixed and is equipped with reflector (4), reflector (4) slope setting, during the inspection, can adjust reflector (4) and be located the intersection point position department of bar (9) exit light that the inner periphery circle of side pumping laser module (8) is to be detected.
  2. 2. The semiconductor side-pumped laser bar inspection device according to claim 1, characterized in that the mirror surface of the mirror (4) forms an angle of 45 ° with the surface of the object table (2).
  3. 3. The semiconductor side pumped laser bar inspection device according to claim 1, characterized in that the surface of the mirror (4) is plated with a silver layer and a protective layer, the protective layer being located outside the silver layer.
  4. 4. A semiconductor side pumped laser bar inspection device according to claim 3, wherein the protective layer is a SiO 2 protective film.
  5. 5. The semiconductor side-pumped laser bar inspection device according to claim 1, characterized in that two positioning pins (5) are fixedly arranged on the upper surface of the object placing table (2), and the two positioning pins (5) are relatively distributed on two sides of the reflecting mirror (4).
  6. 6. The semiconductor side-pumped laser bar inspection device according to claim 1, characterized in that a through hole (21) is formed in the center of the object placing table (2), and the through hole (21) is movably connected with the rotating shaft (3) through a shaft sleeve (7).
  7. 7. The semiconductor side-pumped laser bar inspection device according to claim 1, characterized in that an elevating mechanism (6) is arranged between the base (1) and the object placing table (2), the elevating mechanism (6) comprises a guide sleeve (61) and an elevating rod (62), the guide sleeve (61) is vertically and fixedly arranged at the bottom of the base (1), the guide sleeve (61) is positioned at one side of the rotating shaft (3), the elevating rod (62) is vertically and movably arranged in the guide sleeve (61), and the upper end of the elevating rod (62) is abutted against the lower surface of the object placing table (2).
  8. 8. The bar inspection device of a semiconductor side-pumped laser according to claim 7, wherein a guiding groove is formed in the lower surface of the object placing table (2), the guiding groove is arranged in the circumferential direction, the top end of the lifting rod (62) is inserted into the guiding groove, and the top end of the lifting rod (62) is rotatably provided with a ball.
  9. 9. A method of testing, comprising: placing the semiconductor side-pumped laser bar inspection device of any of claims 1-8 under a high power microscope (10) with the objective view center aligned with the center position of the mirror (4); Placing the side pumping laser module (8) on the object placing table (2), and adjusting the position of the side pumping laser module (8) to enable the reflector (4) to be positioned at the position of an emergent light intersection point of a bar (9) to be detected in the inner periphery of the side pumping laser module (8); Adjusting the vertical relative position of the objective lens and the reflector (4) until a clear object image is observed through the ocular lens; The vertical position of the object placing table (2) is manually adjusted, so that the side pump laser module (8) moves up and down relative to the reflecting mirror (4), and the state of the whole bar (9) is observed through an eyepiece and manually cleaned.
  10. 10. A method of inspection according to claim 9, characterized in that after inspection and cleaning of one bar (9) is completed, the placement table (2) is manually turned to align the next adjacent bar (9) with the mirror (4), and the above is repeated.

Description

Semiconductor side-pumped laser bar inspection device and inspection method Technical Field The invention relates to the technical field of semiconductor lasers, in particular to a semiconductor side-pumped laser bar inspection device and an inspection method. Background The semiconductor laser side-pumped solid laser has the advantages of compact structure, high stability, long service life, high beam quality and the like, and is widely applied to the fields of military weapons, laser medical treatment, material processing, space communication, laser display and the like. The bar is a core device of the semiconductor laser, and the state and packaging quality of the bar are directly related to the quality of a pumping laser beam, and even influence the stability and service life of the laser. Currently, an optical microscope is generally used to check whether scratches, edge chipping, pollution or oxidized spots exist in a light-emitting area (cavity surface) to confirm the encapsulation of the bar. The existing bar inspection method is only suitable for the prior bar assembly, but the existing semiconductor laser is provided with a plurality of shell structures such as a ring shape, a polygon shape and the like in order to ensure that bars are uniformly distributed around a crystal, and the side pumping laser is limited by the ring shape or the polygon shell structure and cannot directly extend into the shell to inspect the bars by using a microscope. Disclosure of Invention The invention provides a semiconductor side-pumped laser bar inspection device and a semiconductor side-pumped laser bar inspection method, which are used for solving the technical problem that the existing bar inspection method in the background technology is only suitable for bar inspection before assembly and is limited by an annular or polygonal shell structure after assembly, and cannot be directly extended into a microscope for bar inspection. The technical scheme of the invention is as follows: The invention provides a semiconductor side-pumped laser bar inspection device, which comprises a base, wherein a rotating shaft is fixedly arranged on the base, the rotating shaft is movably connected with a storage table, the storage table is used for bearing a side-pumped laser module, the rotating shaft vertically penetrates through the center of the storage table, a reflecting mirror is fixedly arranged at the top of the rotating shaft, the reflecting mirror is obliquely arranged, and the reflecting mirror can be adjusted to be positioned at the position of an intersection point of bar emergent light to be detected in the inner periphery of the side-pumped laser module during inspection. By means of movable connection of the rotating shaft and the object placing table, the bearing side pump laser module rotates around the shaft or moves vertically, the inclined reflecting mirror is matched with the inclined reflecting mirror arranged at the position of the intersection point of the bar emergent light to be detected in the inner periphery of the module, the bar emergent light in the annular or polygonal shell structure can be efficiently reflected, a microscope does not need to directly extend into the shell, clear observation of assembled bars can be achieved, applicable scenes of bar inspection are greatly expanded, and convenience and feasibility of inspection operation are improved. Preferably, the mirror surface of the reflecting mirror forms an included angle of 45 degrees with the surface of the object placing table, so that the propagation direction of the bar emergent light can be changed, reflected light can vertically and upwards enter the observation field of the microscope objective lens, the stable and clear imaging light received by the microscope is ensured, reliable optical conditions are provided for accurately judging the bar state, meanwhile, the angle of an optical path is not required to be additionally adjusted, and the debugging process before inspection is simplified. Preferably, silver layer and inoxidizing coating have been plated on the surface of speculum, and the inoxidizing coating is located the outside of silver layer, and the silver layer can effectively promote the reflection efficiency of light, reduces the loss of optical signal at reflection in-process, lets the object image that the microscope caught brighter and clearer, and the inoxidizing coating in outside can form effective protection to the silver layer, avoids the silver layer to receive external environment's corruption or wearing and tearing in long-term use, prolongs the life of speculum, guarantee device long-term steady operation, maintains the uniformity of inspection precision. Preferably, the protective layer is a SiO 2 protective film, has excellent chemical stability and light transmittance, can not cause extra absorption or refraction interference on reflected light while protecting the silver layer from external corrosion, ens