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CN-121978113-A - Optical detection device

CN121978113ACN 121978113 ACN121978113 ACN 121978113ACN-121978113-A

Abstract

The application relates to an optical detection device which is used for detecting an object to be detected and placed at a test station, and comprises a first coaxial light source, wherein the first coaxial light source comprises a first light emitting part and a first light splitting part, the first light emitting part is used for emitting a first illumination light beam towards a first side surface of the object to be detected along a first direction, the first light splitting part is arranged in a light emitting light path of the first light emitting part, the first highlight light source is arranged on one side of the first coaxial light source and is used for emitting a first light supplementing light beam, the first light supplementing light beam is projected to a second side surface of the object to be detected along a direction opposite to the first direction, and the light path turning unit is arranged at intervals with the first light splitting part along a second direction, and the second direction intersects with the first direction and is not coplanar. The optical detection device provided by the application has high detection sensitivity, reduces risks of missing report and false report, and improves the accuracy and reliability of detection.

Inventors

  • DENG JUNGUANG
  • JIANG ZEJIAN
  • ZHANG YAFEI
  • MO JIANGTAO

Assignees

  • 东莞康视达自动化科技有限公司

Dates

Publication Date
20260505
Application Date
20260209

Claims (10)

  1. 1. An optical inspection device for inspecting an object (100) to be inspected placed at a test station, the optical inspection device comprising: The first coaxial light source (10) comprises a first light emitting part (11) and a first light splitting part (12), wherein the first light emitting part (11) is used for emitting a first illumination light beam towards a first side surface of the object (100) to be detected along a first direction, and the first light splitting part (12) is arranged in a light emitting light path of the first light emitting part (11); A first highlight light source (21) arranged on one side of the first coaxial light source (10) and used for emitting a first light supplementing beam, wherein the first light supplementing beam is projected to a second side surface of the object (100) to be detected along a direction opposite to the first direction; an optical path turning unit (30) which is arranged at intervals with the first light splitting member (12) along a second direction, and the second direction intersects with the first direction and is not coplanar; An imaging unit (60) provided on one side of the first coaxial light source (10); the first illumination light beam is reflected by the first side face to form a first imaging light beam, the first imaging light beam is incident to the light path deflection unit (30) after passing through the first light splitting piece (12), and the light path deflection unit (30) deflects the first imaging light beam and guides the first imaging light beam to the imaging unit (60).
  2. 2. The optical detection device according to claim 1, further comprising a second coaxial light source (40), a second highlighting light source (23) and a first refractive element (50), wherein the second coaxial light source (40) is arranged at a side of the first coaxial light source (10) facing away from the imaging unit (60), the second coaxial light source (40) comprises a second light emitting element (41) and a second light splitting element (42), the second light emitting element (41) is used for emitting a second illumination light beam towards a third side of the object (100) to be detected along a third direction, the second light splitting element (42) is arranged in a light-emitting light path of the second light emitting element (41), and the second highlighting light source (23) is arranged at an opposite interval from the second coaxial light source (40) and is used for emitting a second light-supplementing light beam which is projected to a fourth side of the object (100) to be detected along a direction opposite to the third direction; The first refraction element (50) is arranged at an interval opposite to the second beam splitter (42) along the second direction, the reflection surface of the first refraction element (50) faces the imaging unit (60), the second direction intersects with the third direction and is not coplanar, the second illumination light beam is reflected by the third side surface and forms a second imaging light beam, the second imaging light beam is incident to the first refraction element (50) after passing through the second beam splitter (42), and the first refraction element (50) reflects the second imaging light beam to the imaging unit (60).
  3. 3. The optical detection device of claim 2, wherein the third direction is perpendicular to the first direction.
  4. 4. The optical detection device according to claim 2, wherein the optical path deflecting unit (30) comprises a second deflecting element (31) and a third deflecting element (32), the second deflecting element (31) and the first beam splitter (12) are arranged at a distance opposite to each other, and are configured to receive and reflect the first imaging beam, the third deflecting element (32) is disposed on a reflection optical path of the second deflecting element (31), and a reflection surface of the third deflecting element (32) faces the imaging unit (60) and is configured to reflect the first imaging beam to the imaging unit (60).
  5. 5. The optical detection device according to claim 4, wherein the third refractive element (32) and the first refractive element (50) are sequentially spaced apart along the optical axis direction of the imaging unit (60), and the third refractive element (32) and the first refractive element (50) are disposed so as to be offset from each other in a direction perpendicular to the optical axis of the imaging unit (60).
  6. 6. The optical detection device according to claim 2, wherein the first coaxial light source (10) further comprises a first diffuser (13), the first diffuser (13) being arranged between the first light emitting element (11) and the first light splitting element (12), the second coaxial light source (40) further comprises a second diffuser (43), the second diffuser (43) being arranged between the second light emitting element (41) and the second light splitting element (42).
  7. 7. The optical detection device according to claim 2, wherein the first coaxial light source (10) further comprises a first heat sink (14), the first heat sink (14) being thermally connected to a side of the first light emitting element (11) facing away from the first light splitting element (12), and the second coaxial light source (40) further comprises a second heat sink (44), the second heat sink (44) being thermally connected to a side of the second light emitting element (41) facing away from the second light splitting element (42).
  8. 8. The optical detection apparatus according to claim 2, wherein the first coaxial light source (10) further includes a first shielding member (15) disposed between the first light-splitting member (12) and the light path turning unit (30), the first shielding member (15) being located at an end of the first light-splitting member (12) near the object (100) to be measured for blocking stray light; The second coaxial light source (40) further comprises a second shielding piece (45) arranged between the second light splitting piece (42) and the first turning element (50), and the second shielding piece (45) is positioned at one end, close to the object to be detected (100), of the second light splitting piece (42) and used for blocking stray light.
  9. 9. The optical detection device according to claim 2, further comprising a mounting housing (25) and a fourth turning element (22), wherein the first highlighting light source (21) and the second highlighting light source (23) are arranged side by side in the mounting housing (25), the fourth turning element (22) is arranged outside the light outlet of the mounting housing (25) and positioned at the first highlighting light source (21) for reflecting the first light-compensating light beam to the second side, and the light outlet of the second highlighting light source (23) is oriented towards the second coaxial light source (40).
  10. 10. Optical detection device according to claim 9, characterized in that in the second direction, an orthographic projection of the mounting housing (25) at least partly covers the imaging unit (60).

Description

Optical detection device Technical Field The application relates to the technical field of detection, in particular to an optical detection device. Background With the development of precision manufacturing technology, non-contact, high-precision and high-efficiency optical detection of microscopic defects on the side surface of a workpiece has become a key for improving the yield and the process stability of products. At present, a detection mode of matching vertical overlooking with oblique illumination is commonly used in the industry, namely, imaging the side face through the combination of a overlooking camera and a side light source. However, the detection mode has low sensitivity, is easy to cause the problems of missing detection, false alarm and the like, and has low reliability and limited detection capability. In addition, there are detection methods using a fixed folded optical path, but it is difficult to ensure a sufficient imaging signal-to-noise ratio in such detection methods, and it is difficult to improve detection accuracy. Disclosure of Invention Accordingly, it is necessary to provide an optical detection device for the problems of low detection sensitivity and limited detection capability. An optical inspection apparatus for inspecting an object to be inspected placed at a test station, the optical inspection apparatus comprising: The first coaxial light source comprises a first light emitting piece and a first light splitting piece, wherein the first light emitting piece is used for emitting a first illumination light beam towards the first side surface of the object to be detected along a first direction; The first highlight light source is arranged on one side of the first coaxial light source and is used for emitting a first light supplementing beam, and the first light supplementing beam is projected to the second side surface of the object to be detected along the direction opposite to the first direction; the light path turning unit is arranged at intervals with the first light splitting piece along a second direction, and the second direction intersects with the first direction and is not coplanar; an imaging unit arranged at one side of the first coaxial light source; The first illumination light beam is reflected by the first side face to form a first imaging light beam, the first imaging light beam enters the light path deflection unit after passing through the first light splitting piece, and the light path deflection unit deflects the first imaging light beam and guides the first imaging light beam to the imaging unit. In one embodiment, the optical detection device further comprises a second coaxial light source, a second highlighting light source and a first turning element, wherein the second coaxial light source is arranged on one side of the first coaxial light source, which is away from the imaging unit, the second coaxial light source comprises a second light emitting piece and a second light splitting piece, the second light emitting piece is used for emitting a second illumination light beam towards a third side surface of the object to be detected along a third direction, the second light splitting piece is arranged in a light-emitting light path of the second light emitting piece, the second highlighting light source and the second coaxial light source are arranged at an opposite interval, and the second highlighting light source and the second coaxial light source are used for emitting a second light-supplementing light beam, and the second light-supplementing light beam is projected to a fourth side surface of the object to be detected along a direction opposite to the third direction; The first refraction element is arranged at an interval relative to the second beam splitting element along the second direction, the reflection surface of the first refraction element faces the imaging unit, the second direction intersects with the third direction and is not coplanar, the second illumination light beam is reflected by the third side face and forms a second imaging light beam, the second imaging light beam is incident to the first refraction element after passing through the second beam splitting element, and the first refraction element reflects the second imaging light beam to the imaging unit. In one embodiment, the third direction is perpendicular to the first direction. In one embodiment, the optical path turning unit includes a second turning element and a third turning element, where the second turning element is disposed opposite to the first beam splitter at an interval and is configured to receive and reflect the first imaging beam, and the third turning element is disposed on a reflection optical path of the second turning element, and a reflection surface of the third turning element faces the imaging unit and is configured to reflect the first imaging beam to the imaging unit. In one embodiment, the third turning element and the first turning eleme