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CN-121978269-A - Intelligent quality monitoring method and system for carbonized wafers

CN121978269ACN 121978269 ACN121978269 ACN 121978269ACN-121978269-A

Abstract

The application discloses an intelligent quality monitoring method and system for carbonized wafers, and relates to the field of carbonized wafer monitoring, wherein the intelligent quality monitoring method comprises a box body, a power distribution cabinet and a control unit, wherein a display screen is arranged at the top of the box body, and the power distribution cabinet is arranged at the bottom of the inner surface of the box body; the device comprises a box body, a detection mechanism and a turnover mechanism, wherein the detection mechanism is arranged in the inner cavity of the box body and comprises a support frame arranged at the bottom of the inner surface of the box body, the turnover mechanism is arranged in the inner cavity of the box body and comprises a U-shaped frame arranged at the top of the inner surface of the box body, and a lifting plate is movably arranged in the U-shaped frame. According to the application, the carbonized wafer clamped by the clamping cylinder is driven to complete the overturning action by the overturning mechanism, the wafer monitoring surface can be switched without manual intervention, the problem that the back surface of the wafer cannot be covered by unidirectional monitoring is solved, the wafer monitoring flow forms an automatic closed loop of clamping, detecting, overturning and re-detecting, the monitoring period of single wafers is shortened, and the production efficiency of batch monitoring is improved.

Inventors

  • Que Xiaoli
  • CHEN QI

Assignees

  • 合肥露笑半导体材料有限公司

Dates

Publication Date
20260505
Application Date
20251219

Claims (10)

  1. 1. A quality intelligent monitoring system of carbonization wafer, characterized by comprising: The box body (1), a display screen (5) is installed at the top of the box body (1), and a power distribution cabinet (6) is installed at the bottom of the inner surface of the box body (1); The detection mechanism (2) is arranged in the inner cavity of the box body (1), the detection mechanism (2) comprises a support frame (201) arranged at the bottom of the inner surface of the box body (1), a limiting plate a (202) is arranged at the top of the support frame (201), a cross slide block a (204) is movably arranged in the limiting plate a (202), a raising plate (205) is arranged at the top of the cross slide block a (204), a limiting plate b (206) is arranged at the top of the cross slide block a (204), a cross slide block b (208) is movably arranged in the inner cavity of the limiting plate b (206), an adjusting plate (209) is arranged at the top of the cross slide block b (208), and a monitoring head (210) is arranged in the adjusting plate (209); The turnover mechanism (3) is arranged in the inner cavity of the box body (1), the turnover mechanism (3) comprises a U-shaped frame (301) arranged at the top of the inner surface of the box body (1), a lifting plate (302) is movably arranged in the U-shaped frame (301), a mounting plate (303) is arranged on one side of the lifting plate (302), a rotating disc (305) is arranged on one side of the mounting plate (303), a clamping cylinder (306) is arranged on one side of the rotating disc (305), an adjusting sliding block (312) is arranged in the center of the other side of the lifting plate (302), and a screw rod c (310) is arranged on one side of the U-shaped frame (301); Grafting mechanism (4), this mechanism symmetry set up in box (1) inner chamber, grafting mechanism (4) including install backup pad (401) at box (1) internal surface top through the bolt, backup pad (401) one side is provided with puts thing board (402), put thing board (402) one side equipartition and install inserted bar (403), inside equipartition movable mounting of backup pad (401) have a plurality of with spacer pin (404) that inserted bar (403) adaptation used.
  2. 2. The intelligent monitoring system for the quality of the carbonized wafers according to claim 1, wherein the supporting frame (201) is connected with the box body (1) through bolts, a screw rod a (203) is movably installed in the limiting plate a (202) through a bearing seat, a raising plate (205) is arranged at the top of the cross slide block a (204), and a screw rod b (207) is movably installed in the limiting plate b (206) through a bearing seat.
  3. 3. The intelligent quality monitoring system for carbonized wafers of claim 2, wherein the cross slide block a (204) and the cross slide block b (208) are movably installed at the outer sides of the screw rod a (203) and the screw rod b (207) respectively through threaded sleeves, the raising plate (205) is connected with the limiting plate b (206), a motor a (211) is installed at one end of the screw rod a (203) extending to the outer side of the limiting plate a (202), and a motor b (212) is arranged at one end of the screw rod b (207) extending to the outer side of the limiting plate b (206).
  4. 4. The intelligent monitoring system for the quality of the carbonized wafer according to claim 3, wherein limiting grooves matched with the cross slide block a (204) and the cross slide block b (208) are respectively formed in the limiting plate a (202) and the limiting plate b (206), and the cross slide block a (204) and the cross slide block b (208) are both in sliding connection in the limiting grooves.
  5. 5. The intelligent quality monitoring system for carbonized wafers of claim 4, wherein the inner surface of the U-shaped frame (301) is symmetrically provided with slide ways which are matched with the lifting plate (302), the lifting plate (302) is slidably connected inside the slide groove, the screw rod c (310) is respectively connected with the U-shaped frame (301) and the box body (1) through bearing seats, the adjusting slide block (312) is movably arranged outside the screw rod c (310) through threaded sleeves, one side of the mounting plate (303) is provided with a motor c (308), and the output end of the motor c (308) penetrates through the mounting plate (303) to be connected with the rotating disc (305).
  6. 6. The intelligent monitoring system for the quality of the carbonized wafers according to claim 5, wherein limit bearings (304) are uniformly distributed on one side of the mounting plate (303), limit rings (307) which are matched with the limit bearings (304) are arranged on one side of the rotating plate (305), a motor d (311) is arranged on one end of the screw rod c (310) extending to the top of the U-shaped frame (301), and pushing cylinders (309) are symmetrically arranged on the top of the lifting plate (302).
  7. 7. The intelligent monitoring system for the quality of the carbonized wafers according to claim 6, wherein the output ends of the two pushing cylinders (309) are arranged on one side of the mounting plate (303), the limiting bearing (304) is slidably connected with the limiting ring (307), and the motor c (308) is positioned on the top of the lifting plate (302) and is not in contact with the lifting plate.
  8. 8. The intelligent monitoring system for the quality of the carbonized wafers according to claim 1, wherein a stress plate (405) is arranged on the outer surface of the limiting pin (404), a spring (408) is arranged at the bottom of the stress plate (405), an extension plate (406) is arranged at the bottom of the limiting pin (404), and a lower pressing strip (407) is arranged at one end of the extension plate (406) extending to the outer side of the supporting plate (401).
  9. 9. The intelligent monitoring system for the quality of the carbonized wafers according to claim 8, wherein the outer surface of the inserting rod (403) is provided with a jack which is matched with the limiting pin (404), the limiting pin (404) is movably inserted into the jack, and the extending plate (406) is slidably connected into the supporting plate (401).
  10. 10. A monitoring method is characterized by comprising the intelligent monitoring system for the quality of the carbonized wafers as set forth in claims 1-9, and the monitoring method comprises the following steps: S1, according to the size of the carbonized wafer, replacing two object placing plates (402) with the size matched with the carbonized wafer, and placing the carbonized wafer on the top of the two object placing plates (402); S2, controlling a motor a (211) and a motor b (212) to operate, enabling a monitoring head (210) to move in the horizontal direction and the longitudinal direction, and detecting the carbonized wafer through the monitoring head (210); s3, placing clamping arms of a clamping cylinder (306) on the upper side and the lower side of the carbonized wafer, clamping and lifting the carbonized wafer to a certain height, then rotating the carbonized wafer, and finally placing the carbonized wafer back to the tops of two object placing plates (402); And S4, finally, adjusting the position of the monitoring head (210) in the horizontal direction by matching the motor a (211) and the motor b (212) again, and detecting the other surface of the carbonized wafer.

Description

Intelligent quality monitoring method and system for carbonized wafers Technical Field The invention relates to the technical field of carbonized wafer monitoring, in particular to an intelligent quality monitoring method and system for carbonized wafers. Background The carbonized wafer is used as a core substrate of a third-generation semiconductor, is widely applied to the high-end fields of new energy automobiles, 5G communication, aerospace and the like by virtue of excellent high-temperature resistance, high breakdown field strength and high frequency characteristics, and can directly influence the performance stability and service life of subsequent devices due to the problems of micro scratches, impurity defects, lattice distortion and the like on the surface of the wafer, so that a quality monitoring link is important in the production flow of the carbonized wafer. Firstly, a carbonized wafer is placed on a fixed bearing table through a manual or mechanical arm, the wafer is initially limited by a positioning assembly, then a monitoring head is started, the sensing function of the monitoring head is utilized to collect data on the single-side surface of the wafer, linear scanning of the surface of the wafer is realized, and finally, the collected data is transmitted to a terminal for analysis, so that quality judgment is completed. The existing intelligent monitoring system for quality of carbonized wafers depends on manual wafer turning operation, has low efficiency, and is easy to cause secondary pollution or physical damage on the surfaces of the wafers in the operation process, and the accuracy of detection data is affected, so that the intelligent monitoring method for quality of carbonized wafers and the system thereof are provided. Disclosure of Invention Aiming at the problems in the prior art, the invention provides an intelligent quality monitoring method and system for carbonized wafers. In order to achieve the purpose, the invention is realized by the following technical scheme that the intelligent monitoring system for the quality of the carbonized wafer comprises: the display screen is arranged at the top of the box body, and the power distribution cabinet is arranged at the bottom of the inner surface of the box body; The detection mechanism is arranged in the inner cavity of the box body, the detection mechanism comprises a support frame arranged at the bottom of the inner surface of the box body, a limit plate a is arranged at the top of the support frame, a cross slide block a is movably arranged in the limit plate a, a heightening plate is arranged at the top of the cross slide block a, a limit plate b is arranged at the top of the cross slide block a, a cross slide block b is movably arranged in the inner cavity of the limit plate b, an adjusting plate is arranged at the top of the cross slide block b, and a monitoring head is arranged in the adjusting plate; The turnover mechanism is arranged in the inner cavity of the box body and comprises a U-shaped frame arranged at the top of the inner surface of the box body, a lifting plate is movably arranged in the U-shaped frame, a mounting plate is arranged on one side of the lifting plate, a rotating disc is arranged on one side of the mounting plate, a clamping cylinder is arranged on one side of the rotating disc, an adjusting sliding block is arranged at the center of the other side of the lifting plate, and a screw rod c is arranged on one side of the U-shaped frame; the plug-in mechanism is symmetrically arranged in the inner cavity of the box body and comprises a supporting plate which is arranged at the top of the inner surface of the box body through bolts, a storage plate is arranged on one side of the supporting plate, plug rods are uniformly distributed on one side of the storage plate, and a plurality of limiting pins which are movably arranged in the supporting plate and are matched with the plug rods are movably arranged in the supporting plate. As an optimal scheme of the intelligent quality monitoring system for the carbonized wafers, the supporting frame is connected with the box body through bolts, the screw rod a is movably arranged in the limiting plate a through the bearing seat, the heightening plate is arranged at the top of the cross slide block a, and the screw rod b is movably arranged in the limiting plate b through the bearing seat. As a preferable scheme of the intelligent quality monitoring system for the carbonized wafers, the cross slide block a and the cross slide block b are movably arranged on the outer sides of the screw rod a and the screw rod b respectively through threaded sleeves, the heightening plate is connected with the limiting plate b, a motor a is arranged on one end of the screw rod a extending to the outer side of the limiting plate a, and a motor b is arranged on one end of the screw rod b extending to the outer side of the limiting plate b. As a preferable scheme of the intelligent q