CN-121978493-A - Source measuring circuit and electronic chip

CN121978493ACN 121978493 ACN121978493 ACN 121978493ACN-121978493-A

Abstract

The source measurement circuit and the electronic chip provided by the embodiment of the disclosure are characterized in that a main control module generates a first voltage signal according to working voltage or working current of a device to be measured, generates a first control signal to a first switch module according to a current range, generates a first gain adjustment signal to the voltage generation module according to the voltage range, adjusts the output first voltage signal according to a third voltage signal and a fourth voltage signal, determines a conduction mode of a resistance module according to the first control signal, the voltage generation module is configured to receive the first voltage signal, adjusts the range of the first voltage signal according to the first gain adjustment signal and then outputs a second voltage signal, a voltage acquisition module acquires the third voltage signals at two ends of a first output port and a second output port, and a current acquisition module acquires the fourth voltage signal of the resistance module connected between the output end of the voltage generation module and the first input end of the current acquisition module.

Inventors

YU XUELI
SUN HAOQI
LIU WEI
SHI YIMENG

Assignees

杭州飞仕得科技股份有限公司

Dates

Publication Date: 20260505
Application Date: 20260120

Claims (10)

1. The source measurement circuit is characterized by at least comprising a main control module, a first switch module, a voltage generation module, a voltage acquisition module, a current acquisition module, a resistor module, a first output port and a second output port; The main control module is configured to respond to the received working voltage or working current, current range and voltage range of a device to be tested submitted by a target object, generate a first voltage signal according to the working voltage or working current of the device to be tested, generate a first control signal to the first switch module according to the current range, generate a first gain adjustment signal to the voltage generation module according to the voltage range, and adjust the output first voltage signal according to a third voltage signal and a fourth voltage signal, wherein the device to be tested is a bare chip on a wafer; the first switch module is configured to determine a conduction mode of the resistor module between the output end of the voltage generation module and the first output port according to the first control signal, and determine a conduction mode of the resistor module between the output end of the voltage generation module and the first input end of the current acquisition module; The voltage generation module is configured to receive the first voltage signal and output a second voltage signal after adjusting the range of the first voltage signal according to the first gain adjustment signal; The voltage acquisition module is configured to acquire third voltage signals at two ends of the first output port and the second output port and feed the acquired third voltage signals back to the main control module; the current acquisition module is configured to acquire a fourth voltage signal of the resistor module connected between the output end of the voltage generation module and the first input end of the current acquisition module, and feed back the acquired fourth voltage signal to the main control module.
2. The circuit of claim 1, wherein the resistor module comprises N resistors connected in series between an output of the voltage generation module and a first output port, the first switch module comprises a first single-pole, multi-throw switch and a second single-pole, multi-throw switch, a first end of the first single-pole, multi-throw switch is electrically connected to the first output port, a second end of the first single-pole, multi-throw switch is electrically connected to a second end of the first resistor, an i-th end of the first single-pole, multi-throw switch is electrically connected to a second end of the i-1 resistor, a first end of the second single-pole, multi-throw switch is electrically connected to a first input of the current acquisition module, a second end of the second single-pole, multi-throw switch is electrically connected to a second end of the first resistor, an i-th end of the second single-pole, multi-throw switch is electrically connected to a second end of the i-1 resistor, a first control signal is received by the first single-pole, multi-throw switch and a second control signal, 。
3. The circuit of claim 1, wherein the voltage generation module comprises a first digital-to-analog converter, an attenuator, a first operational amplifier, and a high voltage power amplifier, wherein an input of the first digital-to-analog converter receives the first voltage signal, an output of the first digital-to-analog converter is electrically connected to an input of the attenuator, an output of the attenuator is electrically connected to an input of the first operational amplifier, an output of the first operational amplifier is electrically connected to an input of the high voltage power amplifier, an output of the high voltage power amplifier outputs the second voltage signal, and a control of the attenuator receives the first gain adjustment signal.
4. The circuit of claim 1, wherein the voltage acquisition module comprises a second operational amplifier, a third operational amplifier, a first high voltage differential operational amplifier, a first full differential operational amplifier, and a first analog-to-digital converter, wherein an input of the second operational amplifier is electrically connected to the first output port, an output of the second operational amplifier is electrically connected to the first input of the first high voltage differential operational amplifier, an input of the third operational amplifier is electrically connected to the second output port, an output of the third operational amplifier is electrically connected to the second input of the first high voltage differential operational amplifier, an output of the first high voltage differential operational amplifier is electrically connected to the input of the first full differential operational amplifier, an output of the first full differential operational amplifier is electrically connected to the input of the first analog-to-digital converter, and an output of the first analog-to-digital converter outputs a third voltage signal.
5. The circuit of claim 2, wherein the current collection module comprises a fourth operational amplifier, a fifth operational amplifier, a second high voltage differential operational amplifier, a second full differential operational amplifier, and a second analog-to-digital converter, wherein an input of the fourth operational amplifier is electrically connected to an output of the voltage generation module, an output of the fourth operational amplifier is electrically connected to a first input of the second high voltage differential operational amplifier, an input of the fifth operational amplifier is electrically connected to a first end of a second single-pole, multiple-throw switch, an output of the fifth operational amplifier is electrically connected to a second input of the second high voltage differential operational amplifier, an output of the second high voltage differential operational amplifier is electrically connected to an input of the second full differential operational amplifier, an output of the second full differential operational amplifier is electrically connected to an input of the second analog-to-digital converter, and an output of the second analog-to-digital converter outputs a fourth voltage signal.
6. The circuit of claim 4, further comprising a first detection port, a second detection port, and a second switch module; The main control module is further configured to generate a second control signal to the second switch module according to a voltage sampling mode submitted by the target object; The second switch module is configured to determine that the first input end of the voltage acquisition module is electrically connected with the first output port when the second control signal is at a high level, determine that the first input end of the voltage acquisition module is electrically connected with the first detection port when the second control signal is at a low level, and electrically connect the second input end of the voltage acquisition module with the second detection port.
7. The circuit of claim 6, wherein the second switch module comprises a first single-pole double-throw switch and a second single-pole double-throw switch, a first end of the first single-pole double-throw switch is electrically connected to the input of the second op-amp, a second end of the first single-pole double-throw switch is electrically connected to the first output port, a third end of the first single-pole double-throw switch is electrically connected to the first detection port, a first end of the second single-pole double-throw switch is electrically connected to the input of the third op-amp, a second end of the second single-pole double-throw switch is electrically connected to the second output port, and a third end of the second single-pole double-throw switch is electrically connected to the second detection port.
8. A circuit according to claim 3, wherein the voltage generation module further comprises a circuit protection unit; The circuit protection unit is configured to collect an output voltage signal, an output current signal and a temperature signal of the high-voltage power amplifier, and generate an enabling signal to the high-voltage power amplifier according to the relation between the output voltage signal and a preset voltage signal, the relation between the output current signal and a preset current signal and the relation between the temperature signal and a preset temperature signal.
9. The circuit of claim 8, wherein the circuit protection unit comprises a second digital-to-analog converter, a plurality of comparators and an or gate, the second digital-to-analog converter receives the preset voltage signal, the preset current signal and the preset temperature signal, the output end of the second digital-to-analog converter is electrically connected with the input end of one comparator, the output end of each comparator is electrically connected with the input end of the or gate, and the output end of the or gate outputs the enable signal.
10. An electronic chip comprising the circuit of any one of claims 1-9.

Description

Source measuring circuit and electronic chip Technical Field The present invention relates to the technical field of integrated circuits and related technical fields, and in particular, to a source measurement circuit and chip suitable for use. Background The source measuring unit (SMU, source Measure Unit), i.e. source meter, can accurately output voltage or current and simultaneously measure voltage and/or current, which is an instrument integrating the functions of a digital multimeter (DMM, digital Multimeter), a power supply, an actual current source, an electronic load, and a pulse generator. In semiconductor test equipment, a large number of source measurement units are required to measure various parameters of semiconductors, and currently commercially available finished source measurement units generally adopt 220V alternating current power supply, and an analog control loop is large in size, weight and price, so that the semiconductor test equipment is not beneficial to being integrated into the semiconductor test equipment in a large number. Based on the problems existing in the prior art, a source measurement circuit with high integration level and small volume is needed. Disclosure of Invention Embodiments described herein provide a source-measurement circuit and an electronic chip that solve the problems of the prior art. According to a first aspect of the present disclosure, there is provided a source measurement circuit, at least including a main control module, a first switch module, a voltage generation module, a voltage acquisition module, a current acquisition module, a resistance module, a first output port and a second output port; The main control module is configured to respond to the received working voltage or working current, current range and voltage range of a device to be tested submitted by a target object, generate a first voltage signal according to the working voltage or working current of the device to be tested, generate a first control signal to the first switch module according to the current range, generate a first gain adjustment signal to the voltage generation module according to the voltage range, and adjust the output first voltage signal according to a third voltage signal and a fourth voltage signal, wherein the device to be tested is a bare chip on a wafer; the first switch module is configured to determine a conduction mode of the resistor module between the output end of the voltage generation module and the first output port according to the first control signal, and determine a conduction mode of the resistor module between the output end of the voltage generation module and the first input end of the current acquisition module; The voltage generation module is configured to receive the first voltage signal and output a second voltage signal after adjusting the range of the first voltage signal according to the first gain adjustment signal; The voltage acquisition module is configured to acquire third voltage signals at two ends of the first output port and the second output port and feed the acquired third voltage signals back to the main control module; the current acquisition module is configured to acquire a fourth voltage signal of the resistor module connected between the output end of the voltage generation module and the first input end of the current acquisition module, and feed back the acquired fourth voltage signal to the main control module. In some embodiments of the present disclosure, the resistor module includes N resistors connected in series between an output of the voltage generation module and a first output port, the first switch module includes a first single-pole multi-throw switch and a second single-pole multi-throw switch, a first end of the first single-pole multi-throw switch is electrically connected to the first output port, a second end of the first single-pole multi-throw switch is electrically connected to a second end of the first resistor, an i-th end of the first single-pole multi-throw switch is electrically connected to a second end of the i-1 resistor, a first end of the second single-pole multi-throw switch is electrically connected to a first input of the current acquisition module, a second end of the second single-pole multi-throw switch is electrically connected to a second end of the first resistor, an i-th end of the second single-pole multi-throw switch is electrically connected to a second end of the i-1 resistor, a control end of the first single-pole multi-throw switch and the second single-throw switch receives the first control signal,。 In some embodiments of the present disclosure, the voltage generating module includes a first digital-to-analog converter, an attenuator, a first operational amplifier, and a high-voltage power amplifier, where an input end of the first digital-to-analog converter receives the first voltage signal, an output end of the first digital-to-analog converter is electrically conn