CN-121978503-A - Vacuum high-low temperature semi-automatic probe station

Abstract

The application provides a vacuum high-low temperature semiautomatic probe station which comprises a vacuum system, a refrigerating system and a heat conducting component, wherein the vacuum system comprises a vacuum cavity and a vacuum pump group connected with the vacuum cavity so as to establish and maintain a vacuum environment in the vacuum cavity, an operation opening is arranged at the top of the vacuum cavity, a transparent sealing plate is arranged at the operation opening to seal the operation opening, and the refrigerating system comprises at least two refrigerators arranged at the bottom of the vacuum cavity, a helium gas compressor for providing high-pressure helium gas for the refrigerators and the heat conducting component connected to a cold head of the refrigerator. The vacuum high-low temperature semi-automatic probe station adopts at least two stations for cooling simultaneously, optimizes the heat conduction belt and the heat conduction belt between the stations, enables the sample to reach lower temperature, and has higher practicability and optimal use performance.

Inventors

• ZHANG YONG
• YU FANGNENG

Assignees

• 芯铂微半导体设备(上海)有限公司

Dates

Publication Date

20260505

Application Date

20260127

Claims (10)

1. 1. Vacuum high low temperature semi-automatic probe platform, its characterized in that includes: the vacuum system comprises a vacuum cavity (4) and a vacuum pump set connected with the vacuum cavity (4) so as to establish and maintain a vacuum environment in the vacuum cavity (4), an operation port is arranged at the top of the vacuum cavity (4), and a transparent sealing plate (402) is arranged at the operation port to be sealed; the refrigerating system comprises at least two refrigerators (2) arranged at the bottom of the vacuum cavity (4), a helium gas compressor for providing high-pressure helium gas for the refrigerators (2) and a heat conduction component (8) connected to a cold head of the refrigerators (2); The sample bearing and positioning system comprises an X/Y/Z/T high-precision displacement mechanism (6) arranged in a vacuum cavity (4), a sample table (7) arranged on a moving platform of the X/Y/Z/T high-precision displacement mechanism (6) and a flexible heat conduction connecting piece connected between the heat conduction component (8) and the bottom of the sample table (7), wherein the flexible heat conduction connecting piece is used for transmitting cold energy from the heat conduction component (8) to the sample table (7), and a probe card support (11) is arranged right above the sample table (7).
2. 2. The vacuum high-low temperature semiautomatic probe station according to claim 1, further comprising a temperature control system comprising a heater (9) and a temperature sensor (10) mounted directly under the sample station (7) and connected to a temperature controller, which is connected to the heater (9) and the temperature sensor (10), for controlling the temperature of the sample station (7).
3. 3. The vacuum high-low temperature semiautomatic probe station according to claim 1, characterized in that the bottom of the vacuum cavity (4) is provided with a frame (1), the frame (1) is provided with a avoiding hole for accommodating the refrigerator (2), and a through support frame (102) is connected between the bottom of the refrigerator (2) and the frame (1).
4. 4. A vacuum high and low temperature semiautomatic probe station according to claim 3, characterized in that a microscope bridge (5) is mounted on the frame (1), and an electron microscope (12) is mounted on the microscope bridge (5).
5. 5. The vacuum high and low temperature semi-automatic probe station of claim 1, wherein the flexible thermally conductive connection is an oxygen free copper braid copper tape.
6. 6. The vacuum high-low temperature semi-automatic probe station according to claim 1, wherein the top of the vacuum cavity (4) is further provided with an access hole, and the access hole is fixed with an access cover (401) through bolts.
7. 7. A vacuum high-low temperature semiautomatic probe station according to claim 3, characterized in that a weight box (101) is arranged in the frame (1), and a plurality of balancing weights are placed in the weight box (101).
8. 8. The vacuum high-low temperature semiautomatic probe station according to claim 1, further comprising an electric control cabinet connected with the X/Y/Z/T high-precision displacement mechanism (6) through control lines for controlling the movement of the X/Y/Z/T high-precision displacement mechanism (6).
9. 9. A vacuum high and low temperature semiautomatic probe station according to claim 3, characterized in that the top of the frame (1) is also fitted with an operating unit (3) for integrating equipment control buttons.
10. 10. The vacuum high-low temperature semiautomatic probe station according to claim 2, wherein the vacuum pump group is connected with the vacuum cavity (4) through a corrugated pipe, the helium gas compressor is connected with the refrigerator (2) through a high-pressure helium gas pipeline, and the temperature controller is connected with the heater (9) and the temperature sensor (10) through a temperature control line.

Description

Vacuum high-low temperature semi-automatic probe station Technical Field The invention belongs to the technical field of probe testing, and particularly relates to a vacuum high-low temperature semi-automatic probe station. Background In the technical field of probe testing, a probe station is an important tool for testing whether contact points of electronic elements and circuits in a PCB or a wafer are conducted or not, is mainly applied to testing of semiconductor industry, photoelectric industry, integrated circuits and packaging, is widely applied to research and development of precise electric measurement of complex and high-speed devices, aims at ensuring quality and reliability, and reduces research and development time and cost of a device manufacturing process, however, the existing probe station is mainly a manual or semi-automatic machine station at a normal low temperature (only at-60 ℃), has small coverage temperature area and low movement precision, has the problems of unstable structure and the like, and influences the accuracy and stability of a test result. Disclosure of Invention The invention aims to solve the defects in the prior art and provides a vacuum high-low temperature semi-automatic probe station. In order to achieve the above purpose, the technical scheme of the invention is realized as follows: the invention provides a vacuum high-low temperature semi-automatic probe station, comprising: The vacuum system comprises a vacuum cavity and a vacuum pump set connected with the vacuum cavity so as to establish and maintain a vacuum environment in the vacuum cavity, an operation port is arranged at the top of the vacuum cavity, and a transparent sealing plate is arranged at the operation port for sealing; the refrigerating system comprises at least two refrigerators arranged at the bottom of the vacuum cavity, a helium gas compressor for providing high-pressure helium gas for the refrigerators, and a heat conduction component connected to a cold head of the refrigerator; The sample bearing and positioning system comprises an X/Y/Z/T high-precision displacement mechanism arranged in the vacuum cavity, a sample table arranged on a motion platform of the X/Y/Z/T high-precision displacement mechanism, and a flexible heat conduction connecting piece connected between the heat conduction component and the bottom of the sample table, wherein the flexible heat conduction connecting piece is used for transmitting cold energy from the heat conduction component to the sample table, and a probe card support is arranged right above the sample table. In one embodiment, the temperature control system further comprises a temperature control system, wherein the temperature control system comprises a heater and a temperature sensor which are arranged right below the sample stage and a temperature controller, and the temperature controller is connected with the heater and the temperature sensor and is used for controlling the temperature of the sample stage. The bottom of vacuum cavity installs the frame, offer in the frame and be used for holding dodging the hole of refrigerator, be connected with through the support frame between the bottom of refrigerator and the frame. A microscope bridge is arranged on the frame, and an electron microscope is arranged on the microscope bridge. The flexible heat conduction connecting piece is an oxygen-free copper braid copper strip. The top of vacuum cavity has still seted up the access hole, the access hole is fixed with the access cover through the bolt. The inside of frame is provided with the weight case, a plurality of balancing weights have been placed to the weight incasement. The X/Y/Z/T high-precision displacement mechanism is connected with the X/Y/Z/T high-precision displacement mechanism through a control line, and is used for controlling the X/Y/Z/T high-precision displacement mechanism to move. An operation unit for integrating the control buttons of the equipment is also installed on the top of the rack. In one embodiment, the vacuum pump set is connected with the vacuum cavity through a corrugated pipe, the helium gas compressor is connected with the refrigerator through a high-pressure helium gas pipeline, and the temperature controller is connected with the heater and the temperature sensor through a temperature control line. Compared with the prior art, the vacuum high-low temperature semi-automatic probe station adopts at least two stations for cooling simultaneously, optimizes the heat conduction belt and the heat conduction belt between the stations, enables the sample to reach lower temperature, and has higher practicability and optimal use performance. Drawings FIG. 1 is a perspective view of a vacuum high and low temperature semi-automatic probe station of the present invention; FIG. 2 is a bottom view block diagram of the vacuum high and low temperature semi-automatic probe station of the present invention; FIG. 3 is a front view block dia