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CN-121978825-A - Lens module and semiconductor defect detection device

CN121978825ACN 121978825 ACN121978825 ACN 121978825ACN-121978825-A

Abstract

The application provides a lens module and a semiconductor defect detection device, relates to the technical field of semiconductor defect detection, and aims to solve the technical problems that the overall size of an objective lens is increased and the difficulty of realizing light pollution resistance of the objective lens is higher in the existing mode that a diaphragm is integrated with the objective lens. The lens module comprises an objective lens and a zoom barrel lens, wherein an image space telecentric light path of the objective lens and an object space telecentric light path of the zoom barrel lens are in limited far conjugate splicing, the zoom barrel lens comprises a relay lens group, a diaphragm and a zoom lens group which are sequentially arranged, the relay lens group is positioned at one end of the zoom barrel lens, which is close to the objective lens, the diaphragm is provided with a target diaphragm hole which is coaxially arranged with the relay lens group, and the zoom lens group comprises a fixed lens group and a first focusing lens group which are sequentially arranged along an optical axis of the relay lens group. The lens module provided by the application transfers the diaphragm from the objective lens to the zoom barrel lens, so that the size of the objective lens can be reduced, the difficulty of resisting light pollution of the objective lens is reduced, and the whole length of the lens module is shortened.

Inventors

  • WANG YAN

Assignees

  • 深圳市新凯来工业机器有限公司

Dates

Publication Date
20260505
Application Date
20251218

Claims (10)

  1. 1. The utility model provides a camera lens module, its characterized in that includes objective (2) and zoom barrel lens (1), the image side telecentric light path of objective (2) with the limited far conjugate concatenation of the object side telecentric light path of zoom barrel lens (1), zoom barrel lens (1) is including setting gradually: the relay lens group (11) is positioned at one end of the zoom barrel lens (1) close to the objective lens (2); a diaphragm (12) provided with a target diaphragm aperture (1211) for coaxial arrangement with the relay lens group (11), and The zoom lens group (13) comprises a fixed lens group (131) and a first focusing lens group (132) which are sequentially arranged along the optical axis of the relay lens group (11), wherein the first focusing lens group (132) is used for moving along the optical axis to change the focal length of the zoom barrel lens (1).
  2. 2. The lens module according to claim 1, wherein the zoom lens group (13) further comprises a second focusing lens group (133), the second focusing lens group (133) being movable between a first preset position and a second preset position; in the first preset position, the second focusing lens group (133) and the first focusing lens group (132) are coaxially arranged and are positioned at one side of the first focusing lens group (132) away from the fixed lens group (131), and the second focusing lens group (133) and the first focusing lens group (132) are used for being matched together to change the focal length of the zoom barrel lens (1); in the second preset position, the projection of the second focusing lens group (133) and the projection of the first focusing lens group along the optical axis are not overlapped.
  3. 3. The lens module of claim 2, further comprising a second drive mechanism; the second driving mechanism is connected with the second focusing lens group (133) and is used for driving the second focusing lens group (133) to move between the first preset position and the second preset position.
  4. 4. Lens module according to claim 1, characterized in that the zoom barrel lens (1) further comprises a mirror group (14), the mirror group (14) being arranged on the side of the zoom lens group (13) facing away from the diaphragm (12); The reflecting mirror group (14) is used for reflecting light rays output by the zooming mirror group (13), the reflecting mirror group (14) is configured in such a way that the propagation direction of the light rays which are transmitted by the optical axis of the zooming mirror group (13) and reflected by the reflecting mirror group (14) is parallel to the optical axis of the relay mirror group (11), and the propagation direction is consistent with the direction of the zooming mirror group (13) pointing to the relay mirror group (11).
  5. 5. The lens module according to claim 4, wherein the mirror group (14) includes a first mirror (141) and a second mirror (142); The first reflecting mirror (141) is arranged on one side of the zoom lens group (13) away from the diaphragm (12), and the first reflecting mirror (141) is used for reflecting light output by the zoom lens group (13); The second reflecting mirror (142) and the first reflecting mirror (141) are arranged at intervals along the direction perpendicular to the optical axis, the second reflecting mirror (142) is used for reflecting light rays output by the first reflecting mirror (141), and the normal line of the second reflecting mirror (142) is perpendicular to the normal line of the first reflecting mirror (141).
  6. 6. The lens module of claim 4 or 5, further comprising a third driving mechanism; the third driving mechanism is connected with the reflector group (14) and is used for driving the reflector group (14) to move along the optical axis.
  7. 7. The lens module according to claim 1, wherein the diaphragm (12) comprises a diaphragm body (121) and a first driving mechanism; The diaphragm body (121) is provided with a plurality of diaphragm holes (1212) with different apertures, the first driving mechanism is used for driving the diaphragm body (121) to move so that one of the plurality of diaphragm holes (1212) is coaxial with the relay lens group (11), and one of the plurality of diaphragm holes (1212) which is coaxial with the relay lens group (11) is the target diaphragm hole (1211).
  8. 8. The lens module of claim 7, wherein the plurality of diaphragm holes (1212) are arranged around a first axis, the distance from the axis of each diaphragm hole (1212) to the first axis being the same, the first axis being parallel to the optical axis, the distance between the first axis and the optical axis being equal to the distance between the first axis and the axis of the diaphragm hole (1212); The first driving mechanism is used for driving the diaphragm body (121) to rotate around the first axis.
  9. 9. The lens module of claim 7, wherein the plurality of diaphragm holes (1212) are spaced apart along a first direction, the first direction being perpendicular to the optical axis; The first driving mechanism is used for driving the diaphragm body (121) to move along the first direction.
  10. 10. A semiconductor defect inspection apparatus, comprising: The lens module according to any one of claims 1 to 9, for receiving and outputting light reflected by an object to be measured, and And the image acquisition device (4) is used for receiving the light rays output by the lens module and generating an image.

Description

Lens module and semiconductor defect detection device Technical Field The present application relates to the field of semiconductor defect detection technology, and in particular, to a lens module and a semiconductor defect detection device. Background Wafer defect detection is critical in semiconductor design, production, packaging, testing, and other processes, which are key to improving production yields. One way of wafer defect inspection is to use a semiconductor defect inspection device, to acquire an image of the wafer using optical imaging techniques, and to inspect the image for defects on the wafer. The semiconductor defect detecting device comprises an objective lens, a zoom barrel lens and a camera. After the wafer is irradiated by the light source, the light enters the objective lens in a reflection mode, and the light sequentially passes through the objective lens and the zoom barrel lens and reaches the camera to form an optical image. In the related art, an objective lens and a zoom barrel lens adopt an infinite conjugate splicing mode, and a diaphragm is generally integrated in the objective lens to ensure telecentricity of an image space of the objective lens. However, the overall size of the objective lens is generally smaller, and the objective lens is often used as the first lens in an optical system, which has higher performance requirements, for example, the optical pollution resistance of the objective lens needs to be stronger than that of a zoom barrel lens, and the way of integrating the diaphragm into the objective lens increases the overall size of the objective lens and makes the objective lens more difficult to realize optical pollution resistance. Disclosure of Invention The application discloses a lens module and a semiconductor defect detection device, which are used for solving the technical problems that the overall size of an objective lens is increased and the difficulty of realizing light pollution resistance of the objective lens is higher in the current mode that a diaphragm is integrated in the objective lens. In a first aspect, the present application provides a lens module, including an objective lens and a zoom barrel, where an image space telecentric optical path of the objective lens is spliced with an object space telecentric optical path of the zoom barrel in a limited far conjugate manner, and the zoom barrel includes: The relay lens group is positioned at one end of the zoom barrel lens, which is close to the objective lens; a diaphragm provided with a target diaphragm aperture for coaxial arrangement with the relay lens group, and The zoom lens group comprises a fixed lens group and a first focusing lens group which are sequentially arranged along the optical axis of the relay lens group, and the first focusing lens group is used for moving along the optical axis to change the focal length of the zoom barrel lens. According to the technical means, the lens module transfers the diaphragm from the objective lens to the zoom barrel lens, so that the size of the objective lens can be reduced, the difficulty of light pollution resistance of the objective lens is reduced, the problem that the horizontal space of the workbench is excessively occupied when the conventional diaphragm is arranged on the objective lens can be remarkably solved according to the application scene that the objective lens is vertically arranged on the workbench, in addition, the zoom barrel lens completes limited far conjugate splicing of a telecentric light path of a mirror image side and a telecentric light path of an object side by a relay lens group, and the overall length of the lens module is further reduced while double telecentric imaging of the object side and the image side is realized so as to ensure the stability of imaging multiplying power. In one possible embodiment, the zoom lens group further comprises a second focusing lens group movable between a first preset position and a second preset position; The second focusing lens group and the first focusing lens group are coaxially arranged at the first preset position and are positioned at one side of the first focusing lens group, which is away from the fixed lens group, and the second focusing lens group and the first focusing lens group are used for being matched together to change the focal length of the zoom barrel lens; and in the second preset position, the projection of the second focusing lens group and the focusing lens group along the optical axis is not overlapped. According to the technical means, the second focusing lens group is movably arranged along the direction perpendicular to the optical axis, and the focal length range of the zoom barrel lens is changed by cutting in the optical path or cutting out the optical path through the second focusing lens group, so that the zoom barrel lens has a larger zoom ratio. In one possible embodiment, the device further comprises a second driving mechanism; The second d