Search

CN-121978906-A - Laser interference vibration measurement and active vibration suppression integrated method for nanoscale precision motion platform

CN121978906ACN 121978906 ACN121978906 ACN 121978906ACN-121978906-A

Abstract

The vibration measurement and active inhibition integrated method for the nanoscale precision motion platform aims to improve inhibition performance on time-varying and multi-degree-of-freedom vibration. The system realizes the weight update of the controller by collecting reference input and error signals and adopting a filtering algorithm, introduces a secondary path on-line identification module, carries out real-time estimation on a time-varying secondary path by combining a recursive least square method, and enhances the tracking capability of system change by utilizing inverse correlation matrix update and forgetting factors. Aiming at a multi-input multi-output vibration control scene, the method is expanded into a multi-channel architecture, and collaborative optimization between actuators and sensors is realized through weight updating in a tensor form. In order to reduce the calculation complexity, a frequency domain overlap preservation method is adopted to convert convolution operation into a frequency domain product, and the processing complexity is reduced to meet the real-time processing requirement of high-frequency vibration. The method effectively solves the problem of insufficient inhibition performance in the complex vibration environment, and has high real-time performance and strong adaptability.

Inventors

  • WANG XIAOXING

Assignees

  • 湖州普利姆半导体有限公司

Dates

Publication Date
20260505
Application Date
20251215

Claims (8)

  1. 1. The vibration measurement and active suppression integrated control system for the nanoscale precision motion platform is characterized by comprising the following components: The sensing module is used for measuring the key point vibration displacement or speed of the platform in real time with nanometer level and higher resolution by adopting a laser interferometer as a core sensor and outputting a reference signal x (n) and an error signal e (n); The control module is used as a system brain, operates a self-adaptive control algorithm based on a heterogeneous computing architecture, and calculates control signals required by vibration suppression in real time; And the execution module adopts a piezoelectric ceramic actuator or a voice coil motor to generate reverse acting force according to the signal y (n) output by the control module so as to actively counteract the vibration of the platform.
  2. 2. The system of claim 1, wherein the control module is configured to perform a method comprising, for each sample time n of vibration measurement of the motion platform, an algorithm performing the steps of: S1.1 collecting reference input signals provided by a laser interferometer Error sensor signal Wherein For the primary disturbance to be a primary disturbance, Is a secondary path impulse response; s1.2, updating a reference signal vector; Sample new reference signal Shifting in a reference signal vector; ; l is the length order of the weight coefficient of the adaptive filter, and the memory depth and modeling capacity of the system on the historical signals are determined; s1.3 calculating the filtered reference Signal For the estimated secondary path For reference signal vector Filtering; S1.4 computing controller output ; Convolving with the reference signal vector using the current adaptive filter weights, then The output is given by: ; Wherein the method comprises the steps of Sending weight coefficients for adaptive filtering; s1.5 updating Filter weights Using filtered reference signals And error signal Updating according to LMS rule, the formula is as follows: wherein Is the convergence step size; s1.6 is further based on online identification of the secondary path, and an online identification module based on RLS is introduced for solving the problem of time variation of the secondary path; s1.7, estimating an inverse correlation matrix for tracking a time-varying system; S1.8, based on multi-channel MIMO control, for a multi-degree-of-freedom complex vibration mode, the system is expanded into a multi-input multi-output (MIMO) architecture to obtain the output of the controller.
  3. 3. The system according to claim 2, wherein the S1.3 filtering uses the following calculation formula: ; For the estimated secondary path impulse response vector, M is the secondary path The filter reference signal vector is calculated as follows: 。
  4. 4. A system according to claim 3, further comprising: Error signal: ; and (5) weight updating: ; Wherein the method comprises the steps of For the LxJ x K dimension weight tensor, the collaborative optimization between a plurality of actuators and a plurality of sensors in the motion platform is realized, and the frequency domain self-adaptive filtering is carried out.
  5. 5. The system of claim 2, further comprising computationally accelerating input signal processing to convert time domain convolution into frequency domain products.
  6. 6. The system of claim 2, wherein the real-time processing requirement of high-frequency vibration is met, and a frequency domain overlap preservation method is adopted.
  7. 7. An electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, wherein the processor is operable to implement the control system functions of any one of claims 1-6 when the program is executed by the processor.
  8. 8. A computer readable storage medium, wherein a computer program is stored on the computer readable storage medium, wherein the program, when executed by a processor, performs the control system function of any of claims 1-6.

Description

Laser interference vibration measurement and active vibration suppression integrated method for nanoscale precision motion platform Technical Field The invention belongs to the technical field of ultra-precise measurement and control, and particularly relates to a vibration measurement and active inhibition integrated method for a nanoscale precision motion platform. Background Along with the rapid development of the fields of semiconductor manufacturing, precise optical processing and the like, the requirements on the positioning precision and stability of a motion platform are up to the nanometer or even sub-nanometer level. The internal and ground vibration of the platform, bearing, and the external micro vibration of sound waves become key factors limiting the performance of the platform. Currently, vibration measurement with high accuracy mainly depends on a laser interferometer, and vibration suppression depends on an active vibration isolation table or a piezoelectric actuator mounted inside the platform. However, the prior art mostly adopts a "discrete" design, that is, the vibration measuring system and the vibration suppressing system are relatively independent in terms of hardware and control. The structure has the inherent defects that data of the laser interferometer needs to be transmitted to an independent controller through a longer path and then is calculated and output, so that non-negligible control delay is introduced, the vibration suppression bandwidth of the system is limited, and the vibration measurement and vibration suppression controllers are respectively administrative and difficult to realize the optimal overall performance. The vibration suppressing action may interfere with the positioning movement of the platform and vice versa. Traditional feedback control (such as PID) belongs to post-hoc compensation, and can not carry out prospective suppression on predictable disturbance, so that the problem of insufficient vibration suppression performance can not be effectively solved. Therefore, an integrated solution capable of effectively improving vibration suppression performance and having a prospective vibration suppression capability is urgently needed. Disclosure of Invention The invention aims to provide a vibration measurement and active suppression integrated method for a nanoscale precision motion platform, so as to alleviate the technical problems in the prior art. In a first aspect, the present invention provides an integrated vibration measurement and active suppression system for a nanoscale precision motion platform, comprising: And the sensing module adopts a laser interferometer as a core sensor, measures the key point vibration displacement or speed of the platform in real time with nanometer level and higher resolution, and outputs a reference signal x (n) and an error signal e (n). And the control module is used as a system brain, runs the self-adaptive control algorithm based on the heterogeneous computing architecture of FPGA and DSP, and calculates control signals required by vibration suppression in real time. Other processing architectures may be used by the control module of the present invention, and the present invention is not particularly limited. The execution module is usually a piezoelectric ceramic actuator or a voice coil motor, and generates reverse acting force according to a signal y (n) output by the control module to actively counteract the vibration of the platform. The three modules realize the control of vibration through feedback control closed loop of sensing-decision-executing. In a second aspect, the present invention provides a control method for correspondingly executing a vibration measurement and active suppression integrated system control module of a nanoscale precision motion platform, including: For each sampling instant n of the vibration measurement of the moving platform, the algorithm performs the following steps: s1.1 obtaining a reference input and an error Signal Collecting reference input signals provided by a laser interferometerError sensor signalWhereinFor the primary disturbance to be a primary disturbance,Is the secondary path impulse response. S1.2 updating reference Signal vector Sample new reference signalShifting in reference signal vectors L is the length order of the weight coefficient of the adaptive filter, and the memory depth and modeling capacity of the system on the historical signals are determined; s1.3 calculating the filtered reference Signal For the estimated secondary pathFor reference signal vectorFiltering is carried out by adopting the following calculation formula: for the estimated secondary path impulse response vector, m is the secondary path The filter reference signal vector is calculated as follows: S1.4 computing controller output Convolving with the reference signal vector using the current adaptive filter weights, thenThe output is given by: Wherein the method comprises the steps of T