CN-121978938-A - Vibration isolation system direct disturbance suppression method based on driving force feedforward and linear active disturbance rejection control

CN121978938ACN 121978938 ACN121978938 ACN 121978938ACN-121978938-A

Abstract

The invention provides a direct disturbance suppression method of a vibration isolation system based on driving force feedforward and linear active disturbance rejection control, and belongs to the technical field of active vibration isolation. The method solves the problems that the existing active control method such as feedforward control and iterative learning control are respectively limited by model dependence, poor nonlinear adaptation and weak aperiodic disturbance processing capability. The dynamic model of the vibration isolation system is established, the vibration isolation system comprises a vibration isolation platform and a motion platform, the dynamic model is used for quantifying direct disturbance force caused by motion of the motion platform, a feedforward compensator is designed, feedforward compensation force is generated in real time according to a motion instruction of the motion platform, a linear active disturbance rejection controller is introduced, the feedforward compensation force is overlapped with the compensation force generated by the linear active disturbance rejection controller to obtain total compensation force, and the total compensation force is applied to the vibration isolation system to realize disturbance rejection. It is mainly used in the field of precision manufacture and measurement.

Inventors

YU CHENGLONG
Lv Shaoxun
LI ZHAOYUAN
ZHAO BO

Assignees

哈尔滨工业大学

Dates

Publication Date: 20260505
Application Date: 20260202

Claims (10)

1. A vibration isolation system direct disturbance rejection method based on driving force feedforward and linear active disturbance rejection control, the method comprising: Establishing a dynamic model of a vibration isolation system, wherein the vibration isolation system comprises a vibration isolation platform and a motion platform, and the dynamic model is used for quantifying direct disturbance force caused by the motion of the motion platform; Designing a feedforward compensator, and generating feedforward compensation force in real time according to a motion instruction of the motion platform; introducing a linear active disturbance rejection controller, wherein the linear active disturbance rejection controller comprises a linear expansion state observer and is used for estimating the total disturbance of the vibration isolation system, and the total disturbance comprises residual disturbance after feedforward compensation, model error and nonlinear factors; And superposing the feedforward compensation force and the compensation force generated by the linear active disturbance rejection controller to obtain total compensation force, and applying the total compensation force to the vibration isolation system to realize disturbance rejection.
2. The method for suppressing direct disturbance of a vibration isolation system based on driving force feedforward and linear active disturbance rejection control according to claim 1, wherein the establishing a dynamic model of the vibration isolation system is as follows: Wherein m is the mass of the table top, x is the displacement state of the table top, c is the damping coefficient of the vibration isolation system, k is the rigidity of the vibration isolation system, F d is external disturbance force, and F m is the output force of the Lorentz motor generated by the LADRC algorithm.
3. The method for suppressing direct disturbance of a vibration isolation system based on driving force feedforward and linear active disturbance rejection control according to claim 1, wherein the feedforward compensator calculates a direct disturbance force corresponding to the motion command of the motion stage through the dynamics model, and generates the feedforward compensation force in a reverse direction, and the generation of the feedforward compensation force is synchronized with the motion command to realize a hysteresis-free response.
4. The method for suppressing direct disturbance of vibration isolation system based on feedforward and linear active disturbance rejection control according to claim 2, wherein the linear extended state observer is used for uniformly estimating the system state and the total disturbance, and the equation is expressed as: Where z 1 is the system displacement estimate, z 2 is the system velocity estimate, z 3 is the estimate of the total disturbance, y is the measured value output by the system, 、、 In order for the observer gain parameter to be a function of, To control the gain.
5. The method for suppressing direct disturbance of a vibration isolation system based on driving force feedforward and linear active disturbance rejection control according to claim 4, wherein the observer gain parameter is set by parameter matching as follows: Wherein, the Is the bandwidth of the linear extended state observer.
6. The method for suppressing direct disturbance of a vibration isolation system based on driving force feedforward and linear active disturbance rejection control according to claim 4, wherein the control law of the linear active disturbance rejection controller is: Wherein, the Is the output of the PD controller.
7. The method for suppressing direct disturbance of a vibration isolation system based on driving force feedforward and linear active disturbance rejection control according to claim 6, wherein the PD controller is designed to: Wherein, the And In order for the controller to gain, Is a reference signal.
8. The method for suppressing direct disturbance of a vibration isolation system based on driving force feedforward and linear active disturbance rejection control according to claim 7, wherein the controller gain is set by parameter matching as follows: Wherein, the Is the bandwidth of the controller.
9. A computer device characterized by comprising a memory and a processor, wherein the memory stores a computer program, and when the processor runs the computer program stored in the memory, the processor executes a vibration isolation system direct disturbance rejection method based on driving force feedforward and linear active disturbance rejection control according to any one of claims 1 to 8.
10. A computer readable storage medium, characterized in that the computer readable storage medium has stored thereon a computer program which, when being executed by a processor, performs the steps of a method for suppressing direct disturbance of a vibration isolation system based on driving force feedforward and linear active disturbance rejection control according to any one of claims 1 to 8.

Description

Vibration isolation system direct disturbance suppression method based on driving force feedforward and linear active disturbance rejection control Technical Field The invention belongs to the technical field of active vibration isolation, and particularly relates to a direct disturbance suppression method of a vibration isolation system based on driving force feedforward and linear active disturbance rejection control. Background In the fields of precision manufacturing and measurement, such as ultra-precision equipment of a semiconductor photoetching machine, an atomic force microscope and the like, imaging blurring or measurement errors can be caused by any small-amplitude vibration, so that an active vibration isolation technology becomes a key for guaranteeing stable operation of the equipment. When the motion platform (such as a workpiece platform and a measuring sliding table) in the equipment moves at high speed and precision, direct disturbing force can be generated on the vibration isolation platform bearing the motion platform, and the disturbing force has the characteristics of strong correlation with a motion instruction, medium and low frequency coverage and large amplitude dynamic range, and meanwhile, the vibration isolation platform contains complex nonlinear components (such as friction force) and becomes a key bottleneck for limiting the final working precision and stability of the equipment. To address this challenge, the prior art generally employs a combination of passive vibration isolation and active control, but each of these approaches has inherent drawbacks. In the aspect of passive vibration isolation, a scheme of combining an air spring and a pendulum mechanism is mature, for example, the air spring can provide extremely low vertical natural frequency to isolate vertical base vibration, the pendulum mechanism realizes excellent low-frequency vibration isolation in the horizontal direction, and the passive vibration isolation unit provides a multi-degree-of-freedom and low natural frequency base support platform for precision equipment. However, the pure passive vibration isolation mechanism relies on the frequency isolation principle, and for the same-frequency or even low-frequency direct disturbance generated by the internal motion platform, the inhibition capability of the passive vibration isolation has inherent limitation due to the lack of active actuating force and possibly large disturbance amplitude, so that the severe requirement of ultra-precise occasions on residual vibration is difficult to meet. To remedy this deficiency, the prior scholars introduced active control techniques, but the prior active methods each have significant drawbacks. For example, model-based feedforward control can apply compensation force in advance according to a motion stage command, is quick in response, can inhibit deterministic disturbance components, but has performance highly dependent on the accuracy of a motion stage-vibration isolation platform coupling dynamics model, is very sensitive to system nonlinearity, parameter drift and the like, and once the model is out of alignment, the compensation effect is greatly reduced, and another common method is iterative learning control, which is suitable for repetitive tasks, can optimize control force through learning, but is difficult to process disturbance of aperiodic or dynamic change, and has obvious limitation in practical application. In summary, although the disturbance problem can be partially alleviated in the prior art, the passive vibration isolation has insufficient internal direct disturbance suppression capability, and the active control method, such as feedforward control and iterative learning control, is respectively limited by model dependence, poor nonlinear adaptation and weak aperiodic disturbance processing capability, so that the robustness and accuracy of the system are insufficient when facing complex working conditions. Therefore, an active control strategy that combines rapidity, accuracy and robustness is needed to specifically and efficiently suppress direct disturbance of the internal motion stage above the mature passive platform of the air spring-pendulum mechanism. Disclosure of Invention In view of the above, the present invention aims to provide a direct disturbance rejection method for a vibration isolation system based on driving force feedforward and linear active disturbance rejection control, so as to solve the problems of the existing active control methods such as feedforward control and iterative learning control, which are respectively limited by model dependency, poor nonlinear adaptation and weak aperiodic disturbance processing capability. In order to achieve the purpose, the invention adopts the following technical scheme that the method for directly suppressing disturbance of the vibration isolation system based on driving force feedforward and linear active disturbance rejection control com