CN-121980754-A - Electromagnetic field simulation verification auxiliary radio frequency de-embedding method and device

CN121980754ACN 121980754 ACN121980754 ACN 121980754ACN-121980754-A

Abstract

The application provides an electromagnetic field simulation verification auxiliary radio frequency de-embedding method and device, which relate to the field of radio frequency de-embedding, and the method comprises the steps of constructing an integral test structure of a device to be tested according to a left test connection structure, a right test connection structure and the device to be tested; the method comprises the steps of constructing a de-embedding structure according to a left side test connection structure, a right side test connection structure and an asymmetric passive device structure, solving ABCD matrixes of the left side test connection structure and the right side test connection structure based on a pre-verified passive electromagnetic field simulation environment, the asymmetric passive device structure and the de-embedding structure, generating an ABCD matrix of the whole test structure of a device to be tested based on the whole test structure of the device to be tested, and generating an ABCD matrix of the device to be tested and other two-port network parameters based on the left side test connection structure, the right side test connection structure and the ABCD matrix of the whole test structure of the device to be tested. The application realizes the accurate acquisition of the de-embedding network parameters of the tested device under the high-frequency condition, and obviously improves the application range and the testing precision of de-embedding.

Inventors

FU JUN

Assignees

北方集成电路技术创新中心(北京)有限公司
清华大学

Dates

Publication Date: 20260505
Application Date: 20251219

Claims (10)

1. An electromagnetic field simulation verification auxiliary radio frequency de-embedding method is characterized by comprising the following steps of: constructing a whole test structure of a tested device according to a left test connection structure, a right test connection structure and the tested device, wherein the left test connection structure and the right test connection structure are asymmetric; Constructing a de-embedding structure according to the left test connection structure, the right test connection structure and the asymmetric passive device structure; solving an ABCD matrix of the left test connection structure and an ABCD matrix of the right test connection structure based on a pre-verified passive electromagnetic field simulation environment, the asymmetric passive device structure and the de-embedding structure; generating an ABCD matrix of the device under test overall test structure based on the device under test overall test structure; And generating the ABCD matrix of the device to be tested and other two-port network parameters based on the ABCD matrix of the left test connection structure, the ABCD matrix of the right test connection structure and the ABCD matrix of the whole test structure of the device to be tested.
2. The electromagnetic field simulation verification-assisted radio frequency de-embedding method as set forth in claim 1, wherein the asymmetric passive device structure comprises a first asymmetric passive device structure and a second asymmetric passive device structure, the de-embedding structure comprises a first de-embedding structure and a second de-embedding structure, the constructing the de-embedding structure according to the left side test connection structure, the right side test connection structure and the asymmetric passive device structure comprises: Constructing a first de-embedding structure according to the left test connection structure, the right test connection structure and the first asymmetric passive device structure; and constructing a second de-embedding structure according to the left test connection structure, the right test connection structure and the second asymmetric passive device structure.
3. The electromagnetic field simulation verification-assisted radio frequency de-embedding method of claim 2, wherein the solving the ABCD matrix of the left side test connection structure and the ABCD matrix of the right side test connection structure based on the pre-verified passive electromagnetic field simulation environment, the asymmetric passive device structure, and the de-embedding structure comprises: Performing passive electromagnetic field simulation on the first asymmetric passive device structure by utilizing a pre-verified passive electromagnetic field simulation environment to obtain first simulation ABCD matrix data; Performing passive electromagnetic field simulation on the second asymmetric passive device structure by using a pre-verified passive electromagnetic field simulation environment to obtain second simulation ABCD matrix data; Performing radio frequency test on the first de-embedding structure to obtain test ABCD matrix data of the first de-embedding structure; performing radio frequency test on the second de-embedded structure to obtain test ABCD matrix data of the second de-embedded structure; And solving the ABCD matrix of the left test connection structure and the ABCD matrix of the right test connection structure based on the first simulated ABCD matrix data, the second simulated ABCD matrix data, the test ABCD matrix data of the first de-embedding structure, the test ABCD matrix data of the second de-embedding structure, the network cascade relation of the first de-embedding structure and the network cascade relation of the second de-embedding structure.
4. The electromagnetic field simulation verification-assisted radio frequency de-embedding method of claim 3, wherein the solving the ABCD matrix of the left side test connection structure and the ABCD matrix of the right side test connection structure based on the first simulated ABCD matrix data, the second simulated ABCD matrix data, the first de-embedded structure's test ABCD matrix data, the second de-embedded structure's test ABCD matrix data, the first de-embedded structure's network cascading relationship, and the second de-embedded structure's network cascading relationship comprises: Generating a matrix computing model based on the network cascade relationship of the first de-embedding structure and the network cascade relationship of the second de-embedding structure; Substituting the first simulated ABCD matrix data, the second simulated ABCD matrix data, the test ABCD matrix data of the first de-embedding structure and the test ABCD matrix data of the second de-embedding structure into the matrix calculation model to obtain a six-element equation set of the ABCD matrix elements of the left test connection structure and the ABCD matrix elements of the right test connection structure; and solving the six-element equation set to obtain an ABCD matrix of the left test connection structure and an ABCD matrix of the right test connection structure.
5. The electromagnetic field simulation verification-assisted radio frequency de-embedding method of claim 1, wherein the generating an ABCD matrix of the device under test overall test structure based on the device under test overall test structure comprises: Performing radio frequency test on the whole test structure of the tested device to obtain test data of the whole test structure of the tested device; And obtaining the ABCD matrix of the whole test structure of the tested device based on the test data of the whole test structure of the tested device.
6. The electromagnetic field simulation verification-assisted radio frequency de-embedding method of claim 1, wherein the generating the ABCD matrix and other two-port network parameters of the device under test based on the ABCD matrix of the left side test connection structure, the ABCD matrix of the right side test connection structure, and the ABCD matrix of the device under test overall test structure comprises: Solving the ABCD matrix of the device under test based on the ABCD matrix of the left test connection structure, the ABCD matrix of the right test connection structure and the ABCD matrix of the whole test structure of the device under test; And converting the ABCD matrix of the tested device according to the requirement to obtain other two-port network parameters of the tested device.
7. An electromagnetic field simulation verification auxiliary radio frequency de-embedding device, which is characterized by comprising: The device under test comprises a test structure construction unit, a test structure detection unit and a test structure detection unit, wherein the test structure construction unit is used for constructing an overall test structure of the device under test according to a left test connection structure, a right test connection structure and the device under test; the de-embedding structure construction unit is used for constructing a de-embedding structure according to the left test connection structure, the right test connection structure and the asymmetric passive device structure; the first matrix solving unit is used for solving an ABCD matrix of the left test connection structure and an ABCD matrix of the right test connection structure based on a pre-checked passive electromagnetic field simulation environment, the asymmetric passive device structure and the de-embedding structure; the second matrix solving unit is used for generating an ABCD matrix of the whole test structure of the device under test based on the whole test structure of the device under test; And the network parameter generation unit is used for generating the ABCD matrix of the device to be tested and other two-port network parameters based on the ABCD matrix of the left test connection structure, the ABCD matrix of the right test connection structure and the ABCD matrix of the whole test structure of the device to be tested.
8. A computer device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, characterized in that the processor implements the steps of the electromagnetic field simulation verification-assisted radio frequency de-embedding method as claimed in any one of claims 1 to 6 when the computer program is executed by the processor.
9. A computer readable storage medium having stored thereon a computer program/instructions which when executed by a processor performs the steps of the electromagnetic field simulation verification-assisted radio frequency de-embedding method as claimed in any one of claims 1 to 6.
10. A computer program product comprising computer program/instructions which, when executed by a processor, implement the steps of an electromagnetic field simulation verification-assisted radio frequency de-embedding method as claimed in any one of claims 1 to 6.

Description

Electromagnetic field simulation verification auxiliary radio frequency de-embedding method and device Technical Field The application relates to the technical field of radio frequency de-embedding, in particular to an electromagnetic field simulation verification auxiliary radio frequency de-embedding method and device. Background The radio frequency de-embedding technology is one of basic technologies in the radio frequency device characteristic test, and has the core purpose of stripping parasitic parameters introduced by a test joint, a clamp, a test pressure welding block, a connecting wire and the like from original test data in the radio frequency test process, so that a measurement reference surface is accurately pushed to a port of a tested device, and network parameters reflecting the intrinsic characteristics of the device are obtained. Along with the continuous improvement of the working frequency of the radio frequency device, especially the microwave, millimeter wave or even higher frequency band is entered, the influence of parasitic effect is more remarkable, and higher requirements are put on the precision and the application range of the de-embedding method. In the prior art, a through-transmission line radio frequency de-embedding method assisted by electromagnetic field simulation verification has been proposed, the method comprises the steps of constructing a through de-embedding structure and a transmission line de-embedding structure, combining ABCD matrix test data of an overall test structure of a device to be tested, calculating main diagonal elements of the device to be tested and the transmission line in advance, performing parameter fitting and verification on a transmission line model by utilizing passive electromagnetic field simulation, and further solving auxiliary diagonal elements of the ABCD matrix of the device to be tested by means of a verified simulation result, thereby obtaining de-embedding network parameters of the device to be tested, and further converting to obtain two port parameters such as impedance parameters, admittance parameters or scattering parameters. The method improves the accuracy of radio frequency de-embedding under the high-frequency condition to a certain extent. However, the above prior art is generally based on the premise that the left side test connection structure and the right side test connection structure of the tested device are mirror images of each other, and the mathematical modeling and parameter solving processes depend on symmetry assumptions of the test structures. In practical engineering application, due to different demands of input ends and output ends on current density, electrical performance or layout constraint, the left and right test connection structures often have differences in connection line width, thickness or morphology, and meanwhile, in a multilayer metal device or a complex circuit structure, the connection lines of the left and right test connection structures can be distributed in different metal layers, so that the test connection structure presents obvious asymmetric characteristics. Under the asymmetric test scene, the conventional radio frequency de-embedding method which relies on the symmetry assumption is difficult to accurately describe the influence of parasitic parameters, and limits the applicability and measurement accuracy of the method in actual high-frequency test. Therefore, a radio frequency de-embedding method suitable for a general asymmetric test connection structure is needed to meet the requirement of high-precision radio frequency parameter extraction under complex test conditions. This section is intended to provide a background or context to the embodiments of the invention that are recited in the claims. The description herein is not admitted to be prior art by inclusion in this section. Disclosure of Invention Aiming at the problems in the prior art, the embodiment of the application provides an electromagnetic field simulation verification auxiliary radio frequency de-embedding method and device, which can solve the problems that the conventional radio frequency de-embedding method generally depends on a laterally symmetrical test connection structure, and parasitic parameters are difficult to accurately strip under the high-frequency test condition that wiring, layering and electrical parameters are asymmetric in practice, and the actual electrical characteristics of a tested device are obtained. In one aspect of the invention, an electromagnetic field simulation verification auxiliary radio frequency de-embedding method is provided, and the method comprises the following steps: constructing a whole test structure of a tested device according to a left test connection structure, a right test connection structure and the tested device, wherein the left test connection structure and the right test connection structure are asymmetric; Constructing a de-embedding structure according