CN-121983369-A - Precise switching mechanism of ultrahigh vacuum feed-in large-stroke displacement reflecting mirror

CN121983369ACN 121983369 ACN121983369 ACN 121983369ACN-121983369-A

Abstract

The invention belongs to the technical field of synchronous radiation, and discloses an ultra-high vacuum feed-in large-stroke displacement mirror precise switching mechanism which is characterized by comprising a driving component, a vacuum motion transmission component and an execution component, wherein the driving component is arranged outside vacuum, the vacuum motion transmission component is arranged in the vacuum, the driving component is connected with the vacuum motion transmission component and is used for driving the vacuum motion transmission component to move along an axial direction in a straight line, the vacuum motion transmission component is in sealing connection with the execution component and is used for pushing a mirror frame to move along the axial direction in a straight line under the driving of the driving component, an anti-torsion telescopic mechanism is arranged between the driving component and the vacuum motion transmission component, and the anti-torsion telescopic mechanism has axial telescopic capability and is used for moving in coordination with the axial displacement of the driving component and bearing the torque and the gravity generated by the driving component. The invention breaks through the limitation of the flexible structure to the stroke, realizes larger linear switching stroke without increasing the whole size, improves the transmission efficiency and simplifies the structural design.

Inventors

TANG SHANZHI
Di Yiman
YU HAIHAN
KANG WENKAI
CHENG DA

Assignees

中国科学院高能物理研究所

Dates

Publication Date: 20260505
Application Date: 20260120

Claims (8)

1. The ultra-high vacuum feed-in large-stroke displacement reflector precise switching mechanism is characterized by comprising a driving component, a vacuum motion transmission component and an execution component, wherein the driving component is arranged outside vacuum; The driving assembly is connected with the vacuum motion transmission assembly and used for driving the vacuum motion transmission assembly to move linearly along the axial direction; The vacuum motion transmission assembly is in sealing connection with the execution assembly and is used for pushing the reflector frame to move linearly along the axial direction under the driving of the driving assembly; An anti-torsion telescopic mechanism is arranged between the driving assembly and the vacuum motion transmission assembly, and the anti-torsion telescopic mechanism has axial telescopic capability, is used for coordinating with axial displacement of the driving assembly and bears torque and gravity generated by the driving assembly.
2. The ultra-high vacuum feed-in large-stroke displacement mirror precise switching mechanism according to claim 1, wherein the driving assembly comprises a brake, a coupler and a ball screw, the anti-torsion telescopic mechanism comprises two side chains, each side chain comprises a plurality of blades, adjacent blades are connected through a shaft core, the blades at two ends of each side chain are connected through a clamp, one clamp is fixed on a fixed seat of the brake, the other clamp is fixed on a flange, an output shaft of the brake is rigidly connected with the ball screw through the coupler, the ball screw is driven to synchronously rotate when the brake rotates, and the ball screw is matched with a nut fixed on the flange to convert rotary motion into axial linear motion.
3. The ultra-high vacuum feed-in large-stroke displacement mirror precise switching mechanism according to claim 2 is characterized in that the vacuum motion transmission assembly comprises a corrugated pipe assembly and a thrust bearing assembly, the corrugated pipe assembly comprises a corrugated pipe and a thin pipe, the thrust bearing assembly comprises a thrust bearing retainer ring, a bidirectional thrust bearing and a thrust bearing sleeve, one end of the bidirectional thrust bearing is connected with the tail end of the ball screw and is used for bearing torque generated when the ball screw rotates, the thrust bearing retainer ring is used for fixing the bidirectional thrust bearing in the thrust bearing sleeve so that the thrust bearing assembly moves along with the ball screw in the axial direction, one end of the thin pipe is in sealing connection with one end of the corrugated pipe, one end of the thin pipe is in sealing connection with the flange, the other end of the thin pipe is in sealing connection with the outer wall of the other end of the corrugated pipe, the inner side of the corrugated pipe is in a vacuum environment, the outer side of the corrugated pipe is in an atmosphere environment, and the tail end of the thrust bearing sleeve is connected with the executing assembly and is used for isolating atmosphere from the vacuum environment, and the tail end of the thrust bearing sleeve is used for transmitting axial linear motion of the ball screw to the executing assembly.
4. The ultra-high vacuum feed-in large-stroke displacement mirror precise switching mechanism according to claim 3, wherein the actuating component is a double-flexible hinge support rod and comprises a long support rod and a short support rod, the tail end of the thrust bearing sleeve is connected with one end of the long support rod, the other end of the long support rod is connected with the short support rod through a first connecting piece, and the tail end of the short support rod is connected with the mirror bracket through a second connecting piece.
5. The ultra-high vacuum feed large-stroke displacement mirror precision switching mechanism of claim 4, wherein the first and second connectors are flexible hinges.
6. The ultra-high vacuum feed-in large-stroke displacement mirror precise switching mechanism according to claim 4, wherein the first connecting piece is a flexible hinge or a spherical hinge, and the second connecting piece is a vertical guide rail.
7. The ultra-high vacuum feed large stroke displacement mirror precision switching mechanism of claim 2, wherein the brake is a stepper motor with a brake.
8. The ultra-high vacuum feed large travel displacement mirror precision switching mechanism of claim 2, wherein the actuator is a manually adjustable actuator or other type of actuator.

Description

Precise switching mechanism of ultrahigh vacuum feed-in large-stroke displacement reflecting mirror Technical Field The invention belongs to the technical field of synchronous radiation, and relates to an ultra-high vacuum feed-in large-stroke displacement reflector precise switching technology. Background The fourth generation synchrotron radiation light source has the characteristics of extremely low emittance, high brightness and high coherence, and strict requirements are put on the beam line station. The KB mirror box, which is the end core of the beam line station, has a structural function that directly affects the final performance of the beam line station. The fourth generation of synchrotron radiation light source in a low energy region can generate high-quality soft X-rays. In order to exert the potential of multi-modal experiments, the KB mirror boxes equipped therewith need to have the ability to switch different facet mirrors in an ultra-high vacuum environment. The conventional vacuum internal switching scheme is difficult to meet the requirement of ultra-high vacuum, and the vacuum external driving scheme is limited by insufficient travel or excessively complex structure, so that the comprehensive optimization compromise is needed to be solved. In summary, developing a multi-mirror switching mechanism suitable for ultra-high vacuum is a key technology for developing an advanced beam line station KB mirror box, and has a great challenge. Investigation shows that the mechanism capable of realizing large-stroke displacement switching of the mirror body in vacuum at present is mainly designed as a universal mirror box of Europe XFEL, and a six-rod parallel mechanism is adopted, wherein 5 support rods are driven by a stepping motor, so that the mechanism has active adjustment capability, and 1 non-driving support rod is used for fixing the position in the direction of a light beam and is not used as an adjustment degree of freedom. The stepping motor drives the screw rod for the translation in X, Y directions, the stroke can reach +/-50 mm, and the resolution reaches 70nm. A piezoelectric ceramic stack is integrated into a portion of the struts for rotational fine tuning about the X, Z axis to provide higher resolution and dynamic response. The use of flexible joints made of stainless steel rope segments at both ends of the struts allows the struts to deflect slightly in multiple directions while maintaining high axial stiffness. Through adjusting the length of a plurality of supporting rods, the translation and rotation of the mirror body in the three-dimensional space are realized, the mirror body can be completely moved out of a light beam path or accurately aligned to the center of a light beam, a motor moves linearly along with a lead screw, torque and motor gravity are borne by a flexible mechanism, and the total stroke can reach 100mm. The lead of the used lead screw is 1mm, the resolution of 70nm is realized by matching with a stepping motor with a reduction ratio of 72:1, and the piezoelectric ceramic provides sub-nanometer micro-motion, so that the piezoelectric ceramic is suitable for high-frequency dynamic compensation. The specific structure is shown in figure 1. The screw driving part adopts nuts and sliding bearings as guiding and converting mechanisms, and an internal lubrication channel is designed to ensure long-term operation. The torque of the motor is borne by a special flexible structure. Based on the closest prior art described above, the main drawbacks are as follows: (1) And the contradiction between the stroke and the volume is that the stepping motor directly drives the screw rod, and the displacement stroke is mainly determined by the length of the screw rod. Along with the increase of the stroke, the deformation of the flexible structure used for bearing the torque of the motor is increased, the stress is also increased, the structure is easy to fail, the force required for compressing the flexible structure is also increased, and the burden of the motor is increased. To increase the size of the flexible structure within the yield stress of the material is not suitable for compact beam-line stations. (2) The screw driving part is converted by the sliding bearing, the generated sliding friction can reduce the efficiency of the ball screw, and the designed lubrication track can reduce the friction force between the screw and the bearing, but does not change the essence of the sliding friction and can increase the complexity of the structure. Disclosure of Invention Aiming at the problems existing in the prior art, the invention aims to provide an ultra-high vacuum feed-in large-stroke displacement mirror precise switching mechanism which is suitable for switching ultra-high vacuum mirrors in the field of soft X rays of fourth generation synchrotron radiation light sources, can realize switching of different surface mirrors in an ultra-high vacuum environment, is provide