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CN-121983371-A - Tungsten slurry with high viscosity stability and preparation method thereof

CN121983371ACN 121983371 ACN121983371 ACN 121983371ACN-121983371-A

Abstract

The application discloses a tungsten slurry with high viscosity stability and a preparation method thereof, belonging to the technical field of tungsten slurry, wherein the tungsten slurry comprises tungsten powder, the average particle size of which is 0.5-2.0 mu m; the organic solvent comprises tripropylene glycol monomethyl ether and butyl carbitol, wherein the composite organic solvent is formed by mixing tripropylene glycol monomethyl ether and butyl carbitol, and the additive comprises dibutyl phthalate and dodecanol ester. The tungsten slurry has excellent viscosity stability, and the application generates obvious synergistic effect through the combination of the specific solvent and the additive, for example, the viscosity is gradually reduced from 1.5W to 1.2W after being stored for 5 days at normal temperature, and the change range is extremely small, compared with the severe increase of the viscosity in the same period, which is a plurality of times or even tens of times, in the prior art, the application proves that the application solves the technical problem of poor slurry storage stability.

Inventors

  • LI JUN
  • YANG ZILI
  • SHI ZHEYUAN

Assignees

  • 君原电子科技(海宁)有限公司

Dates

Publication Date
20260505
Application Date
20251227

Claims (5)

  1. 1. A high viscosity stable tungsten paste comprising: tungsten powder, wherein the average particle size of the tungsten powder is 0.5-2.0 mu m; the compound organic solvent comprises tripropylene glycol monomethyl ether and butyl carbitol, and is formed by mixing tripropylene glycol monomethyl ether and butyl carbitol; An additive comprising dibutyl phthalate and dodecanol esters.
  2. 2. The tungsten paste with high viscosity stability according to claim 1, wherein the mass percentage of the composite organic solvent is 16-20%.
  3. 3. The tungsten slurry with high viscosity stability according to claim 1, wherein the mass ratio of tripropylene glycol monomethyl ether to butyl carbitol is 6:4-7:3, and the mass ratio of dibutyl phthalate to dodecyl alcohol ester is 3:2.
  4. 4. A high viscosity stable tungsten paste according to claim 3, wherein said dibutyl phthalate is added in an amount of 3% of the total mass of said tungsten paste, and said dodecanol ester is added in an amount of 2% of the total mass of said tungsten paste.
  5. 5. A method for preparing the high viscosity stability tungsten paste according to any one of claims 1 to 4, wherein the method comprises the steps of: Step 1, preparing a composite organic solvent Weighing tripropylene glycol monomethyl ether and butyl carbitol according to a proportion, placing the tripropylene glycol monomethyl ether and butyl carbitol in a container of stirring equipment, setting the rotating speed to 1900-2100 rpm for 300-400 s until the tripropylene glycol monomethyl ether and butyl carbitol are uniformly mixed, and obtaining a composite organic solvent; Step 2, preparing the carrier Weighing dibutyl phthalate and dodecyl alcohol ester, adding dibutyl phthalate and dodecyl alcohol ester into the composite organic solvent prepared in the step 1 in proportion, and dissolving the additive completely at the rotating speed of 2000-2100 rpm for 280-300 s to form a uniform and transparent carrier; step 3, mixing and rolling And (2) weighing tungsten powder, slowly adding the weighed tungsten powder into the carrier obtained in the step (2), and mixing for 2-2.5 hours on a three-roller machine until the fineness of the slurry meets the requirement and the appearance is uniform and fine, thus obtaining the high-viscosity high-stability tungsten slurry.

Description

Tungsten slurry with high viscosity stability and preparation method thereof Technical Field The invention relates to the technical field of tungsten slurry, in particular to tungsten slurry with high viscosity stability and a preparation method thereof. Background In the prior art, tungsten paste is needed for preparing the electrostatic chuck electrode layer, the tungsten paste is usually composed of tungsten powder, an organic solvent and a small amount of additives, the tungsten paste can be printed on a ceramic blank body in a screen printing mode to be used as the electrode paste, so that the electrostatic chuck is prepared, and in order to obtain proper printing viscosity, a single solvent or a simple mixed solvent is usually adopted. However, such formulations suffer from the significant disadvantage that the slurry viscosity is not stable during storage and is subject to dramatic changes over time. Disclosure of Invention The invention aims to provide the tungsten slurry with high viscosity stability and the preparation method thereof, and the stability of the tungsten slurry can be improved. In order to solve the technical problems, the technical scheme of the invention is as follows: in one aspect, the invention discloses a high viscosity stability tungsten slurry comprising: tungsten powder, wherein the average particle size of the tungsten powder is 0.5-2.0 mu m; the compound organic solvent comprises tripropylene glycol monomethyl ether and butyl carbitol, and is formed by mixing tripropylene glycol monomethyl ether and butyl carbitol; An additive comprising dibutyl phthalate and dodecanol esters. Preferably, the mass percentage of the composite organic solvent is 16-20%. Preferably, the mass ratio of the tripropylene glycol monomethyl ether to the butyl carbitol is 6:4-7:3, and the mass ratio of the dibutyl phthalate to the dodecanol ester is 3:2. Preferably, the dibutyl phthalate is added in an amount of 3% of the total mass of the tungsten paste, and the dodecanol ester is added in an amount of 2% of the total mass of the tungsten paste. The invention further discloses a preparation method of the tungsten slurry with high viscosity stability, which comprises the following steps of: Step 1, preparing a composite organic solvent Weighing tripropylene glycol monomethyl ether and butyl carbitol according to a proportion, placing the tripropylene glycol monomethyl ether and butyl carbitol in a container of stirring equipment, setting the rotating speed to 1900-2100 rpm for 300-400 s until the tripropylene glycol monomethyl ether and butyl carbitol are uniformly mixed, and obtaining a composite organic solvent; Step 2, preparing the carrier Weighing dibutyl phthalate and dodecyl alcohol ester, adding dibutyl phthalate and dodecyl alcohol ester into the composite organic solvent prepared in the step 1 in proportion, and dissolving the additive completely at the rotating speed of 2000-2100 rpm for 280-300 s to form a uniform and transparent carrier; step 3, mixing and rolling And (2) weighing tungsten powder, slowly adding the weighed tungsten powder into the carrier obtained in the step (2), and mixing for 2-2.5 hours on a three-roller machine until the fineness of the slurry meets the requirement and the appearance is uniform and fine, thus obtaining the high-viscosity high-stability tungsten slurry. By adopting the technical scheme, the method has the following beneficial effects: the application has the advantages that the application generates obvious synergistic effect through the combination of the specific solvent and the additive, for example, the viscosity is gradually reduced from 1.5W to 1.2W after being stored for 5 days at normal temperature, the change range is extremely small, compared with the severe increase of the viscosity in the same period, which is a plurality of times or even tens of times, of the prior art, the application is proved to solve the technical problem of poor slurry storage stability. The initial viscosity of the slurry provided by the invention is in a lower range of 1.5W to 2.8W, and the viscosity range is very suitable for a screen printing process, so that uniform and clear patterns are easy to obtain. The preparation method provided by the invention has the advantages of simple process and mild conditions, and the used equipment is conventional slurry preparation equipment, so that large-scale and industrial production is easy to realize, and the preparation method has high practical value and economic value. Detailed Description The following describes the invention in more detail. The description of these embodiments is provided to assist understanding of the present invention, but is not intended to limit the present invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other. In the prior art, if slurry which only uses tripropyle