CN-121984181-A - Power supply device, semiconductor processing equipment and use method

Abstract

The invention discloses a power supply device, semiconductor processing equipment and a using method, wherein the power supply device is used for a reaction cavity, a base is arranged in the reaction cavity, the power supply device comprises a capacitor, the capacitor comprises a first polar plate and a second polar plate, the first polar plate is connected with the base, the second polar plate is connected with a power supply, the capacitor is used for discharging to the base, a first switch is connected between the capacitor and the base in series and used for controlling the discharging frequency of the capacitor, the input end of the first switch is connected with the first polar plate, the output end of the first switch is connected with the power supply, and the first switch is used for obtaining the residual electric quantity of the capacitor and controlling the power supply to charge the capacitor when the first switch is disconnected and the residual electric quantity of the capacitor is lower than a preset value. The invention can timely supplement the discharge electric quantity of the capacitor, thereby avoiding the problem of slow discharge speed of the capacitor caused by insufficient energy storage.

Inventors

• CHANG JIAN
• LIU YI

Assignees

• 中微半导体设备(上海)股份有限公司

Dates

Publication Date

20260505

Application Date

20241029

Claims (20)

1. 1. The power supply device is used for a reaction cavity, wherein a base is arranged in the reaction cavity, and is characterized by comprising: The capacitor comprises a first polar plate and a second polar plate, wherein the first polar plate is connected with the base, the second polar plate is connected with a power supply, and the capacitor is used for discharging to the base; a first switch connected in series between the capacitor and the base for controlling the discharge frequency of the capacitor, and And the input end of the first electric quantity control module is connected with the first polar plate, the output end of the first electric quantity control module is connected with the power supply, and the first electric quantity control module is used for obtaining the residual electric quantity of the capacitor and controlling the power supply to charge the capacitor when the first switch is disconnected and the residual electric quantity of the capacitor is lower than a preset value.
2. 2. The power supply device according to claim 1, wherein the preset value is 70% -90% of an initial electric quantity of the capacitor, and the initial electric quantity of the capacitor is a product of a rated voltage and a capacitance value of the capacitor.
3. 3. The power supply of claim 2, wherein the preset value is 80% of the initial charge of the capacitor.
4. 4. The power supply apparatus of claim 1, wherein the first power control module comprises: the first acquisition unit is connected with the first polar plate and is used for acquiring the discharge voltage and/or the discharge current of the capacitor; The first calculation unit is connected with the first acquisition unit and is used for calculating the discharge electric quantity of the capacitor according to the discharge voltage and/or the discharge current of the capacitor and calculating the residual electric quantity of the capacitor according to the discharge electric quantity of the capacitor; And the first control unit is connected with the first computing unit and the power supply and is used for controlling the power supply to charge the capacitor when the first switch is disconnected and the residual electric quantity of the capacitor is lower than the preset value.
5. 5. The power supply device of claim 4, further comprising a second power control module coupled to the second plate and the power source for obtaining a charge power of the capacitor.
6. 6. The power supply of claim 5, wherein the second power control module comprises: the second acquisition unit is connected with the second plate and used for acquiring the charging voltage and/or the charging current of the capacitor; and the second calculation unit is connected with the second acquisition unit and is used for calculating the charge quantity of the capacitor according to the charge voltage and/or the charge current of the capacitor.
7. 7. The power supply apparatus according to claim 6, wherein the second calculation unit is further connected to the first control unit to feed back a charge amount of the capacitor to the first control unit, so that the first control unit controls the power supply to stop charging the capacitor when the charge amount of the capacitor is equal to a discharge amount.
8. 8. The power supply apparatus according to claim 6, wherein the second power control module further comprises a second control unit connected to the second computing unit, the first computing unit, and the power supply for controlling the power supply to stop charging the capacitor when the charged power of the capacitor is equal to the discharged power.
9. 9. The power supply of claim 1, wherein the power source is a high voltage dc power source.
10. 10. The power supply device according to claim 9, wherein the voltage value of the high-voltage direct-current power supply is 10kv to 15kv.
11. 11. A semiconductor processing apparatus, comprising: A reaction chamber; A base arranged at the bottom of the reaction chamber, and At least one power supply device according to any one of claims 1 to 10, connected to the base.
12. 12. The semiconductor processing apparatus according to claim 11, wherein when the number of the power supply means is plural, plural power supply means are connected to the susceptor, respectively.
13. 13. The semiconductor processing apparatus of claim 12, wherein the discharge voltages of the capacitors in the plurality of power supply devices are different.
14. 14. The semiconductor processing apparatus of claim 11, wherein the reaction chamber is grounded through a second switch to allow the reaction chamber to discharge an electrical charge.
15. 15. The semiconductor processing apparatus of claim 11, wherein the reaction chamber is coupled to a drain through a second switch to allow the reaction chamber to discharge an electrical charge.
16. 16. The semiconductor processing apparatus of claim 15, wherein the means for discharging is a vacuum relay.
17. 17. The semiconductor processing apparatus of claim 15, wherein the means for discharging is a potential junction, and wherein the potential of the potential junction is not less than 2000V.
18. 18. A method of using the power supply device of any one of claims 1 to 10, comprising: Opening and closing the first switch at a preset frequency to control the discharging frequency of the capacitor to the base; Acquiring the residual electric quantity of the capacitor through a first electric quantity control module and And when the first switch is opened and the residual electric quantity of the capacitor is lower than a preset value, controlling a power supply to charge the capacitor through the first electric quantity control module.
19. 19. The method of claim 18, wherein the power supply device further comprises a second power control module, the first power control module comprises a first control unit, and the method of using the power supply device further comprises: Acquiring the charging electric quantity of the capacitor through the second electric quantity control module; And when the charge quantity of the capacitor is equal to the discharge quantity, controlling the power supply to stop charging the capacitor by the first control unit.
20. 20. The method of claim 18, wherein the power supply device further comprises a second power control module, the second power control module comprising a second control unit, and wherein the method of using the power supply device further comprises: Acquiring the charging electric quantity of the capacitor through the second electric quantity control module; and when the charge quantity of the capacitor is equal to the discharge quantity, controlling the power supply to stop charging the capacitor by the second control unit.

Description

Power supply device, semiconductor processing equipment and use method Technical Field The invention relates to the technical field of semiconductor preparation, in particular to a power supply device, semiconductor processing equipment and a using method. Background The capacitor is an electronic device capable of rapidly storing and releasing a large amount of electric energy, and has the characteristics of high charging and discharging speed and high energy conversion efficiency. In the semiconductor manufacturing process, a capacitor may be selected as a Bias Source (Bias Source) and connected to the susceptor in the reaction chamber to direct the plasma in the reaction chamber to bombard the substrate carried on the susceptor. However, a voltage drop occurs during the discharging process of the capacitor, resulting in a slow discharging speed, which affects the manufacturing efficiency of the substrate. Disclosure of Invention The invention aims to provide a power supply device, semiconductor processing equipment and a using method thereof, which can timely supplement the discharge electric quantity of a capacitor, so as to avoid the problem that the discharge speed of the capacitor is slow due to insufficient energy storage. In order to achieve the above purpose, the present invention is realized by the following technical scheme: The power supply device is used for a reaction cavity, a base is arranged in the reaction cavity, and the power supply device comprises: The capacitor comprises a first polar plate and a second polar plate, wherein the first polar plate is connected with the base, the second polar plate is connected with a power supply, and the capacitor is used for discharging to the base; a first switch connected in series between the capacitor and the base for controlling the discharge frequency of the capacitor, and And the input end of the first electric quantity control module is connected with the first polar plate, the output end of the first electric quantity control module is connected with the power supply, and the first electric quantity control module is used for obtaining the residual electric quantity of the capacitor and controlling the power supply to charge the capacitor when the first switch is disconnected and the residual electric quantity of the capacitor is lower than a preset value. Optionally, the preset value is 70% -90% of the initial electric quantity of the capacitor, and the initial electric quantity of the capacitor is the product of the rated voltage and the capacitance value of the capacitor. Optionally, the preset value is 80% of the initial charge of the capacitor. Optionally, the first power control module includes: the first acquisition unit is connected with the first polar plate and is used for acquiring the discharge voltage and/or the discharge current of the capacitor; The first calculation unit is connected with the first acquisition unit and is used for calculating the discharge electric quantity of the capacitor according to the discharge voltage and/or the discharge current of the capacitor and calculating the residual electric quantity of the capacitor according to the discharge electric quantity of the capacitor; And the first control unit is connected with the first computing unit and the power supply and is used for controlling the power supply to charge the capacitor when the first switch is disconnected and the residual electric quantity of the capacitor is lower than the preset value. Optionally, the power supply device further comprises a second electric quantity control module connected with the second polar plate and the power supply and used for acquiring the charging electric quantity of the capacitor. Optionally, the second power control module includes: the second acquisition unit is connected with the second plate and used for acquiring the charging voltage and/or the charging current of the capacitor; and the second calculation unit is connected with the second acquisition unit and is used for calculating the charge quantity of the capacitor according to the charge voltage and/or the charge current of the capacitor. Optionally, the second calculating unit is further connected to the first control unit to feed back the charge amount of the capacitor to the first control unit, so that the first control unit controls the power supply to stop charging the capacitor when the charge amount of the capacitor is equal to the discharge amount. Optionally, the second electric quantity control module further comprises a second control unit, which is connected with the second computing unit, the first computing unit and the power supply and is used for controlling the power supply to stop charging the capacitor when the charging electric quantity of the capacitor is equal to the discharging electric quantity. Optionally, the power supply is a high voltage direct current power supply. Optionally, the voltage value of the high-voltage direct-cur