CN-121984374-A - High-precision sub-nanometer displacement table

CN121984374ACN 121984374 ACN121984374 ACN 121984374ACN-121984374-A

Abstract

The invention provides a high-precision sub-nanometer displacement table, which comprises a guide transfer hinge, a displacement scaling driving assembly and a transfer frame assembly, wherein the displacement scaling driving assembly comprises a displacement scaling driving hinge and a piezoelectric actuator, the displacement scaling driving hinge is of an integrated sheet structure, the piezoelectric actuator is in contact with the input end of the displacement scaling driving hinge in a magnetic pre-tightening mode, an eccentric hinge structure is arranged in the displacement scaling driving hinge and is used for outputting input displacement of the piezoelectric actuator after being scaled down by a displacement output block, the guide transfer hinge is in hard connection with the displacement output block of the displacement scaling driving hinge, and the transfer frame assembly is used for fixedly mounting the guide transfer hinge and the displacement scaling driving assembly. The invention can meet the precision positioning requirements of semiconductor manufacture, synchronous radiation beam line regulation and control and other severe working conditions.

Inventors

WANG ZIMENG
JIANG SHUAIKANG
DU XUEWEI
Xu Zhanglang
ZHAO SHUAI
WANG QIUPING

Assignees

中国科学技术大学

Dates

Publication Date: 20260505
Application Date: 20260114

Claims (10)

1. The high-precision sub-nanometer displacement table is characterized by comprising a guide transfer hinge, a displacement scaling driving assembly and a transfer frame assembly, wherein the displacement scaling driving assembly comprises a displacement scaling driving hinge and a piezoelectric actuator, the displacement scaling driving hinge is of an integrated sheet structure, the piezoelectric actuator is in contact with the input end of the displacement scaling driving hinge in a magnetic pre-tightening mode, an eccentric hinge structure is arranged in the displacement scaling driving hinge and is used for outputting input displacement of the piezoelectric actuator through a displacement output block after the input displacement of the piezoelectric actuator is scaled down, the guide transfer hinge is hard-connected with the displacement output block of the displacement scaling driving hinge, and the transfer frame assembly is used for fixedly mounting the guide transfer hinge and the displacement scaling driving assembly.
2. The high-precision sub-nanometer displacement table according to claim 1, wherein the displacement scaling driving assembly further comprises a capacitance sensor pole plate, a piezoelectric actuator fixing seat, a pre-tightening magnet, a piezoelectric actuator top seat and a tungsten carbide gasket, wherein the piezoelectric actuator fixing seat and the piezoelectric actuator top seat are respectively arranged at two output ends of the displacement scaling driving hinge, the pre-tightening magnet is respectively arranged on the piezoelectric actuator fixing seat and the piezoelectric actuator top seat, the tungsten carbide gasket is arranged on the piezoelectric actuator top seat, the piezoelectric actuator is arranged between the piezoelectric actuator fixing seat and the piezoelectric actuator top seat, and the capacitance sensor pole plate is arranged on the displacement scaling driving hinge.
3. The high-precision sub-nanometer displacement table according to claim 2, wherein two pre-tightening magnets mounted on the piezoelectric actuator fixing seat and the piezoelectric actuator top seat are opposite to each other, and the output end of the piezoelectric actuator is in close contact with the tungsten carbide gasket through magnetic force action to realize pre-tightening.
4. The high-precision sub-nanometer displacement table according to claim 2, wherein a tungsten carbide gasket is fixedly installed on one side of the piezoelectric actuator footstock facing the piezoelectric actuator, and the output end of the piezoelectric actuator is in direct contact with the surface of the tungsten carbide gasket.
5. The high-precision sub-nanometer displacement table according to claim 1, wherein the displacement scaling driving hinge comprises an outer frame, a displacement output block, a first guiding flexible hinge and a second guiding flexible hinge, the displacement output block is located at the middle position of the outer frame, the first guiding flexible hinge is connected between the front end of the displacement output block and the outer frame, and the second guiding flexible hinge is connected between the rear end of the displacement output block and the outer frame.
6. The high-precision sub-nanometer displacement platform according to claim 5, wherein the displacement scaling driving hinge further comprises an eccentric hinge structure, wherein the eccentric hinge structure is symmetrically arranged on two sides of the displacement output block and connected between the displacement output block and the external frame, and the adjustment of the displacement scaling multiple is realized by changing the eccentricity.
7. The high-precision sub-nanometer displacement table according to claim 1, wherein the guiding transfer hinge comprises an outer frame, a guiding reinforcing hinge and a transfer table top, wherein the transfer table top is positioned in the middle of the outer frame, and the guiding reinforcing hinge is connected between the transfer table top and the outer frame.
8. The high precision sub-nanometer displacement table according to any one of claims 5 to 7, wherein the displacement output block of the displacement scaling driving hinge is hard-connected with the transfer table top of the guiding transfer hinge by a screw, and the outer frame of the displacement scaling driving hinge is hard-connected with the outer frame of the guiding transfer hinge by a screw.
9. The high-precision sub-nanometer displacement platform according to claim 8, wherein the outer frame of the displacement scaling driving hinge and the outer frame of the guiding transfer hinge are respectively provided with a positioning pin hole, and the positioning pins are inserted into the positioning pin holes to ensure the relative installation precision of the two outer frames.
10. The high-precision sub-nanometer displacement table according to claim 1, wherein the transfer frame assembly comprises a frame, a capacitance sensor and a pressing plate, the guide transfer hinge and the displacement scaling driving assembly are fixedly arranged on the frame through side fixing threaded holes after being combined, the frame is provided with a capacitance sensor mounting hole, the capacitance sensor is arranged in the capacitance sensor mounting hole and can be moved and adjusted along the axis direction of the hole, and the pressing plate is fixed on the frame and locks the capacitance sensor.

Description

High-precision sub-nanometer displacement table Technical Field The invention belongs to the fields of a large scientific device-synchronous radiation technology, semiconductor lithography, a high-precision displacement table, precise micro-adjustment and the like, and particularly relates to a high-precision sub-nanometer displacement table. Background With the rapid development of the fields of semiconductor lithography, synchronous radiation optical element adjustment, high-precision scanning tables and the like, urgent demands are provided for a linear displacement platform for realizing sub-nanometer stepping precision, hundred-micrometer stroke and kilonewton driving force in a vacuum environment. In the prior art, the flexible hinge mechanism based on the elastic deformation principle becomes a research hot spot in the field of precise micro-adjustment due to the characteristics of no friction, no gap, high resolution and the like. The Chinese patent application CN202320894400.6 discloses a driver with the stroke of tens of micrometers and the sub-nanometer displacement precision, the device adopts a displacement scaling hinge to scale down the output displacement of a piezoelectric actuator, and simultaneously amplifies the output force, and the closed-loop control is realized by matching with a displacement sensor. The structure mainly comprises a split type displacement scaling hinge, an independent lateral reinforced hinge, a piezoelectric actuator, a displacement sensor, a base and other components, wherein the components are assembled through threaded connection, and the piezoelectric actuator is ensured to be in contact with the input end of the hinge by adopting a tension spring mechanical pre-tightening mode. The driver can reduce the open-loop piezoelectric displacement of 10 nanometers to sub-nanometer output, and the driving force is improved to hundreds of newtons. However, the above-mentioned driver has the following technical problems in practical engineering applications: the split type structure is connected through screw thread assembly, the integral rigidity of each connecting interface is insufficient after the rigidity is overlapped, the bearing of a large load of more than 5kg is difficult, and the stable supporting requirement of heavy parts such as synchronous radiation beam line elements, precision optical lenses and the like cannot be met; the structure complexity and the volume problems are that the device is assembled by a plurality of discrete parts such as a displacement zoom hinge, a lateral reinforced hinge, a hinge lock, a base and the like, the number of the parts is large, the processing and assembling process is long, the whole volume is large, and the device is difficult to adapt to the requirement of compact space installation; the tension spring mechanical pre-tightening mechanism has stress relaxation, fretting wear and gas release risks in the ultra-high vacuum environment, and the pre-tightening force is linearly changed along with the deformation of the hinge, so that constant contact force is difficult to maintain, and the long-term stability and repeatability of sub-nanometer output are affected; the open loop driving unit is used for maintaining the position only by depending on the creep characteristics of the piezoelectric actuator after power failure, has poor external interference resistance and cannot meet the position maintenance and safety protection requirements of high-precision equipment in a non-working period; The assembly accuracy has strong dependence that the threaded connection of multiple parts needs repeated adjustment and positioning, and the assembly error accumulation directly influences the eccentricity accuracy and the guiding straightness of the displacement zoom hinge, thereby being unfavorable for mass production and quick maintenance. Disclosure of Invention In order to solve the technical problems, the invention provides a high-precision sub-nanometer displacement table, which has the advantages of ultrahigh vacuum compatibility, sub-nanometer displacement output, high rigidity, large stroke, large load, power failure self-locking and the like. The invention realizes the high load bearing capacity (more than or equal to 5 kg), the long-term stable work of the ultra-high vacuum environment and the structural integration on the basis of maintaining the sub-nano displacement resolution and the hundred-micron stroke so as to simplify the assembly, and the power-off self-locking and high anti-interference capacity, thereby meeting the precise positioning requirements under the severe working conditions of semiconductor manufacture, synchronous radiation beam line regulation and control and the like. In order to achieve the above purpose, the invention adopts the following technical scheme: The high-precision sub-nanometer displacement platform comprises a guide transfer hinge, a displacement scaling driving assembly and a transfer f