CN-121984375-A - Four-sandwich type piezoelectric driver homodromous center symmetrical arrangement type multidimensional vibration platform and excitation method

CN121984375ACN 121984375 ACN121984375 ACN 121984375ACN-121984375-A

Abstract

The utility model provides a four sandwich type piezoelectric driver syntropy central symmetry arranges formula multidimensional vibration platform and excitation method, relate to high frequency vibration engineering and a little the nano field of controlling, it is serious to have structural asymmetry to lead to parasitic mode to have solved current a plurality of piezoelectric driver in practical application, asymmetric overall arrangement easily causes extra vibration mode, cause problem such as motion track distortion, this vibration platform includes terminal platform, four flexible hinges and four actuating units, terminal platform is the motion output part that has biax mirror symmetry, four actuating units are rectangular summit mode symmetry arrangement, and the integration is indulged and is vibrated, around Y axle and around Z axle curved ceramic group that shakes. Six-degree-of-freedom vibration output of triaxial translation and triaxial rotation can be realized through an in-phase or anti-phase excitation strategy. Each actuating unit realizes axial pretension through the first bolt, ensures piezoceramics reliability. The method is suitable for application scenes such as precise micromachining, ultrasonic-assisted manufacturing and the like which need high stability and multi-axis cooperative motion.

Inventors

LIU YINGXIANG
GUAN JINGHAN
YAN JIPENG
LI JING
DENG JIE
ZHANG SHIJING

Assignees

哈尔滨工业大学

Dates

Publication Date: 20260505
Application Date: 20260227

Claims (10)

1. The multi-dimensional vibration platform with the four sandwich type piezoelectric drivers arranged symmetrically in the same direction and the center is characterized by comprising an end platform (1), a flexible hinge (2) and an actuating unit (3); The actuating unit (3) is internally integrated with a plurality of sub-components, and each sub-component at least comprises an amplitude transformer (3-1), a piezoelectric driver (3-2), an end cover (3-3) and a first bolt (3-4); the terminal platform (1) is arranged in a central symmetry way, the terminal platform (1) comprises two mutually orthogonal mirror symmetry planes which are planes passing through the geometric center point of the terminal platform and parallel to an X-Z plane and an X-Y plane respectively, and the central symmetry way of the terminal platform (1) is matched with the orthogonal symmetry way of the four actuating units (3); The four actuating units (3) are symmetrically arranged at 90-degree equally-spaced orthogonal centers in a horizontal plane by taking the geometric center of the tail end platform (1) as a symmetrical reference, and all sub-components in each actuating unit (3) are collinear along the axis of the vibration transmission direction and are axially pre-tensioned through a first bolt (3-4); The variable-cross-section rod body is characterized in that the end faces of two ends of the variable-cross-section rod body are mutually parallel, the contact area of one end section is large, the contact area of the other end section is small, one end of the large-cross-section end is provided with an internal threaded hole, two end faces of the piezoelectric driver (3-2) are parallel, a through hole is formed in the axial direction, two end faces of the end cover (3-3) are parallel, an axial through hole is formed in the end faces of one side of the piezoelectric driver (3-2), the end face of the other side of the piezoelectric driver (3-2) is attached to the upper end face of the end cover (3-3), the end face of the other side of the piezoelectric driver is attached to the end face of the variable-cross-section rod (3-1), the first bolt (3-4) sequentially penetrates through the axial through hole of the end cover (3-3) and the through hole of the piezoelectric driver (3-2) and is screwed into the internal threaded hole of the large-cross-section end of the variable-cross-section rod (3-1) to realize axial fastening of the three parts, and the first bolt (3-4), the end face of the end cover (3-3) is collinear with the axis of the piezoelectric driver (3-2), and the end face of the first bolt (3-4) is attached to the lower end face of the end cover (3-2) is attached to the end face of the end cover; The thin end of the amplitude transformer (3-1) is connected with the lower end face of the flexible hinge (2), the upper end face of the flexible hinge (2) is fixedly connected to the lower end face of the tail end platform (1), and brackets for mounting and fixing are arranged on the circumference of the amplitude transformer (3-1) and the circumference of the piezoelectric driver (3-2) so as to realize the integral constraint of the platform and the efficient coupling of vibration energy.
2. The four-sandwich type piezoelectric actuator homodromous central symmetry arrangement type multidimensional vibration platform according to claim 1, wherein the tail end platform (1) is realized by adopting a plane structure with biaxial symmetry, namely a circle, a square or a cross shape, and is used for guaranteeing mirror symmetry of an X-Z plane and an X-Y plane.
3. The four-sandwich type piezoelectric driver homodromous central symmetry arrangement type multidimensional vibration platform according to claim 1, wherein the piezoelectric driver (3-2) is any one of a longitudinal vibration ceramic group, a bending vibration ceramic group around a Y axis and a bending vibration ceramic group around a Z axis, each ceramic group is respectively provided with a driving electrode and a grounding electrode, and a specific mode of longitudinal vibration, bending vibration around the Y axis or bending vibration around the Z axis is excited by applying an alternating voltage signal between the corresponding driving electrode and the grounding electrode.
4. The four-sandwich type piezoelectric actuator homodromous central symmetry arrangement type multidimensional vibration platform according to claim 2, wherein the piezoelectric actuator (3-2) is one of a stack type, a patch type, a piezoelectric tube type or any combination structure thereof.
5. The multi-dimensional vibration platform with the four-sandwich piezoelectric driver in the same-direction and center-symmetrical arrangement mode according to claim 1, wherein the flexible hinge (2) is fixed with the tail end platform (1) and the amplitude transformer (3-1) in a threaded connection, cementing, welding or integrated forming mode.
6. The four-sandwich type piezoelectric driver homodromous central symmetry arrangement type multidimensional vibration platform according to claim 1, wherein the flexible hinge (2) adopts a double-shaft symmetry type or universal type structure, is used for transmitting axial linear motion and multidirectional bending deformation output by the actuating unit (3), and is suitable for the six-degree-of-freedom motion requirement of the tail end platform (1).
7. The multi-dimensional vibration platform with the four-sandwich type piezoelectric drivers arranged in the same-direction and center-symmetrical mode according to claim 1, wherein the vibration platform is installed and fixed through any one of an amplitude transformer bracket, a piezoelectric driver bracket or a combination of the two modes, and is used for realizing coupling and stable supporting of vibration energy.
8. The multi-dimensional vibration platform with the four sandwich type piezoelectric drivers arranged in the same-direction and center-symmetrical mode according to claim 1 is characterized in that the axes of the four actuating units (3) are arranged in parallel, and the included angle between any two axes is smaller than 90 degrees.
9. The multi-dimensional vibration platform with the four-sandwich type piezoelectric drivers arranged in the same-direction and center symmetry mode according to claim 1, wherein the geometric center point, the X-Z symmetry plane and the X-Y symmetry plane of the tail end platform (1) in the vibration platform simultaneously meet the center symmetry and mirror symmetry.
10. A method for exciting a multi-dimensional vibration platform with four sandwich type piezoelectric drivers arranged in the same direction and center symmetry, which is characterized in that the method is realized based on the multi-dimensional vibration platform with the four sandwich type piezoelectric drivers arranged in the same direction and center symmetry according to claim 3, and comprises the following steps: Translational vibration of the tail end platform (1) along the X axis is excited by longitudinal vibration ceramic groups in four piezoelectric drivers (3-2) through applying in-phase alternating voltage signals, and the frequency of the longitudinal vibration ceramic groups is matched with that of a longitudinal vibration resonance mode; Translational vibration of the tail end platform (1) along the Y axis is excited by a bending vibration ceramic group around the Z axis in four piezoelectric drivers (3-2) through applying in-phase alternating voltage signals, and the frequency is matched with the bending resonance mode around the Z axis; translational vibration along the Z axis of the end platform (1) is excited by a bending vibration ceramic group around the Y axis in four piezoelectric drivers (3-2) through applying in-phase alternating voltage signals, and frequency matching is performed when bending resonance modes around the Y axis are adopted.

Description

Four-sandwich type piezoelectric driver homodromous center symmetrical arrangement type multidimensional vibration platform and excitation method Technical Field The invention relates to the technical field of high-frequency vibration engineering and micro-nano control, in particular to a multi-dimensional vibration platform with four sandwich piezoelectric drivers arranged in the same-direction and center symmetry mode and an excitation method. Background In the prior art, a multi-dimensional vibration platform based on piezoelectric ceramics is widely applied to micro-operation, precise positioning and active vibration suppression systems. The traditional scheme mostly adopts a single or double-driver structure, and realizes two-dimensional or three-dimensional motion output through longitudinal vibration and bending vibration mode coupling. Although a plurality of piezoelectric drivers are tried to be introduced to improve the degree of freedom, such as a three-driver structure distributed in a triangle, in practical application, the problem still exists that parasitic modes are serious due to structural asymmetry, additional vibration modes are easy to be caused by asymmetric layout, so that motion track distortion is caused, vibration coupling is difficult to be inhibited, mutual interference between different degrees of freedom is avoided, and control accuracy is affected. Although the existing three-sandwich structure realizes better symmetry and six-degree-of-freedom output, the three-sandwich structure only has mirror symmetry characteristics, lacks of a central symmetry design, and limits the overall rigidity improvement and vibration decoupling capability. Therefore, a new multi-dimensional vibration platform structure and an excitation method thereof are needed to have the advantages of both center symmetry and mirror symmetry. Disclosure of Invention The invention aims to solve the problems that in the prior art, a plurality of piezoelectric drivers are adopted in a multi-dimensional vibration platform of piezoelectric ceramics, but in the practical application process, parasitic modes are serious due to structural asymmetry, additional vibration modes are easy to be caused by asymmetric layout, so that motion track distortion is caused, vibration coupling is difficult to inhibit, mutual interference among different degrees of freedom is difficult to occur, control precision is influenced and the like, and therefore, a novel multi-dimensional vibration platform structure with double advantages of central symmetry and mirror symmetry and an excitation method thereof are needed. Therefore, the invention provides the four-sandwich piezoelectric driver homodromous central symmetry arrangement type multidimensional vibration platform and the excitation method, wherein the homodromous directions are consistent with the vibration axis direction of each actuating unit, the central symmetry directions are 180-degree rotation symmetry about the geometric center of the tail end platform, and the four piezoelectric drivers are symmetrically arranged in a rectangular vertex mode and matched with a central symmetry flexible hinge and the tail end platform structure, so that higher structural rigidity, stronger vibration decoupling capacity and more stable six-degree-of-freedom motion output are realized. The invention is realized by the following technical scheme for solving the technical problems: The invention provides a multi-dimensional vibration platform with four sandwich type piezoelectric drivers arranged symmetrically in the same direction and center, which comprises a tail end platform, a flexible hinge and an actuating unit; The actuating unit is internally integrated with a plurality of sub-components, and each sub-component at least comprises a horn, a piezoelectric driver, an end cover and a first bolt; The terminal platform is arranged in a central symmetry way and comprises two mutually orthogonal mirror symmetry planes which are planes which pass through the geometric center points of the terminal platform and are parallel to an X-Z plane and an X-Y plane respectively; The four actuating units are symmetrically arranged at 90-degree equidistant orthogonal centers in a horizontal plane by taking the geometric center of the tail end platform as a symmetrical reference, and all sub-components in each actuating unit are collinear along the axis of the vibration transmission direction and realize axial pre-tightening through a first bolt; The amplitude transformer is a variable cross section rod body, the end surfaces of the two ends are parallel to each other, the contact area of the cross section of one end is large, and the contact area of the cross section of the other end is small; the first bolt sequentially passes through the axial through hole of the end cover and the through hole of the piezoelectric driver and is screwed into the internal threaded hole of the end with the large contact