CN-121984376-A - Direct-drive piezoelectric flexible hinge platform

CN121984376ACN 121984376 ACN121984376 ACN 121984376ACN-121984376-A

Abstract

The invention discloses a direct-drive type piezoelectric flexible hinge platform which comprises a base, a working platform module and a direct-drive type cylindrical actuator module, wherein the working platform module comprises a flexible hinge platform, an upper cover plate and a lower cover plate, a movable end is arranged in the middle of the flexible hinge platform, the direct-drive type cylindrical actuator module is detachably arranged on the movable end and used for driving the movable end to generate precise displacement, the direct-drive type cylindrical actuator module is formed by assembling a shell, a fixed base, piezoelectric ceramics, a movable end output piece, a pretensioning mechanism and a disc spring, and the piezoelectric ceramics is fixed on the fixed base, and a hemispherical ceramic cap is arranged at the output end of the piezoelectric ceramics. The invention relates to the technical field of mechanical precision displacement driving, and discloses a platform which adopts a modularized design, is provided with a double pre-tightening mechanism, is convenient for the installation and replacement of an actuator, has excellent radial and torsion load resistance, and is used for improving the reliability, maintainability and service life of the platform.

Inventors

LIU GUIXIAN
YANG HUIXIAN
XIE KAI
CAI BINGLIAN
GAO HAIMIN

Assignees

广东工业大学
研精覃思(东莞)精密机械科技有限公司

Dates

Publication Date: 20260505
Application Date: 20260212

Claims (6)

1. A direct-drive type piezoelectric flexible hinge platform comprises a base, a working platform module and a direct-drive type cylindrical actuator module (4) and is characterized in that the working platform module comprises a flexible hinge platform (2), an upper cover plate (1) and a lower cover plate (5), a movable end is arranged in the middle of the flexible hinge platform (2), the movable end is detachably arranged on the direct-drive type cylindrical actuator module (4) and used for driving the direct-drive type cylindrical actuator module to generate precise displacement, the direct-drive type cylindrical actuator module (4) is formed by combining a shell (8), a fixed base (9), piezoelectric ceramics (7) and a movable end output piece (10) through a pre-tightening mechanism (11) and a disc-shaped spring (12), the piezoelectric ceramics (7) is fixed on the fixed base (9), a hemispherical ceramic cap (15) is arranged at the output end, a conical tail cap (14) is arranged on an output piece (10), the conical tail cap (14) is in contact fit with the hemispherical ceramic cap (15), the pre-tightening mechanism (11) is connected with the shell (8) and used for exerting a compression force on two sides of the ceramic output piece (10) through a pre-tightening mechanism (11) and a positioning pin (13), the positioning pin (13) is inserted into the guide groove and used for limiting radial movement and rotation of the movable end output piece (10).
2. The direct-drive piezoelectric flexible hinge platform as claimed in claim 1, wherein the moving end of the working platform module is provided with a threaded hole, and the direct-drive cylindrical actuator module (4) is matched with the threaded hole through a pre-tightening screw plug (3) to realize detachable fixed connection with the working platform module.
3. The direct-drive piezoelectric flexible hinge platform as claimed in claim 1, wherein the pre-tightening mechanism (11) is a threaded knob, and the compression amount of the belleville springs (12) is adjusted by screwing in or screwing out the shell (8) so as to realize fine adjustment of the pre-tightening force of the piezoelectric ceramics (7).
4. The direct-drive piezoelectric flexible hinge platform as claimed in claim 1, wherein disc springs (12) are symmetrically arranged between the movable end output piece (10) and the piezoelectric ceramics (7), and the pre-tightening mechanism (11) acts on the disc springs (12) to form dual pre-tightening guarantee for the piezoelectric ceramics (7).
5. The direct-drive piezoelectric flexible hinge platform as claimed in claim 4, wherein the output end of the movable end output piece (10) can be configured into one of an external thread, an internal thread or a ball head structure so as to adapt to the connection requirements of different application scenes.
6. The direct-drive piezoelectric flexible hinge platform as claimed in claim 1, wherein the inner conical surface of the conical tail cap (14) is matched with the spherical surface of the hemispherical ceramic cap (15) to form a self-adaptive aligning mechanism.

Description

Direct-drive piezoelectric flexible hinge platform Technical Field The invention relates to the technical field of mechanical precision displacement driving, in particular to a direct-drive piezoelectric flexible hinge platform for precision positioning, optical adjustment and micro-nano operation. Background The piezoelectric flexible hinge platform has the advantages of no transmission gap, high resolution, quick response and the like, and is widely applied to the field of precision engineering. Common direct-drive platforms generally adopt a piezoelectric actuator to directly drive a flexible hinge mechanism, so that displacement output with nanometer precision is realized. However, the following problems still remain in the prior art: Firstly, the pretensioning mechanism adopts a single axial pretensioning mode, such as a threaded sleeve or a belleville spring, the pretensioning force is difficult to keep uniform and stable in the working process, and the pretensioning mechanism is inconvenient to adjust, so that the performance of the actuator is easy to be reduced or the movement lag is easy to cause. Secondly, the actuator is fixedly connected with the platform main body, so that once the actuator is damaged or has poor performance, the actuator is very difficult to replace, and the actuator needs to be integrally disassembled and recalibrated, so that the use and maintenance efficiency is seriously affected. In addition, the conventional cylindrical piezoelectric actuator is sensitive to radial force and torque, and is easy to damage under non-pure axial load or complex working conditions, so that the reliability and the application scene of the platform are limited. Therefore, it is necessary to provide a novel direct-drive piezoelectric flexible hinge platform to solve the above problems, and improve maintainability, pre-tightening stability and complex load resistance of the platform. Disclosure of Invention Aiming at the situation, in order to overcome the prior technical defects, the invention provides the direct-drive piezoelectric flexible hinge platform which adopts a modularized design, is provided with a dual pre-tightening mechanism, is convenient for the installation and replacement of an actuator, has excellent radial and torsion load resistance, and is used for improving the reliability, maintainability and service life of the platform. The direct-drive piezoelectric flexible hinge platform comprises a base, a working platform module and a direct-drive cylindrical actuator module, wherein the working platform module comprises a flexible hinge platform, an upper cover plate and a lower cover plate, a movable end is arranged in the middle of the flexible hinge platform, the direct-drive cylindrical actuator module is detachably arranged on the movable end and used for driving the movable end to generate precise displacement, the direct-drive cylindrical actuator module is formed by assembling a shell, a fixed base, piezoelectric ceramics, a movable end output piece, a pre-tightening mechanism and a disc spring, the piezoelectric ceramics is fixed on the fixed base, a hemispherical ceramic cap is arranged at the output end of the piezoelectric ceramics, a conical tail cap is arranged on the movable end output piece and is in contact fit with the hemispherical ceramic cap, the pre-tightening mechanism is in threaded connection with the shell and used for adjusting the compressing force of the disc spring, the axial pre-tightening force is applied to the piezoelectric ceramics through the movable end output piece, guide grooves are formed in two sides of the movable end output piece, and positioning pins are correspondingly arranged on the shell and are inserted into the positioning pins and used for limiting the movement of the movable end output piece to rotate radially. Preferably, a threaded hole is formed in the moving end of the working platform module, and the direct-drive cylindrical actuator module is matched with the threaded hole through a pre-tightening screw plug to be detachably and fixedly connected with the working platform module. Preferably, the pre-tightening mechanism is a threaded knob, and the compression amount of the belleville springs is adjusted by screwing in or screwing out the shell, so that the fine adjustment of the pre-tightening force of the piezoelectric ceramics is realized. Preferably, disc springs which are symmetrically arranged are arranged between the movable end output piece and the piezoelectric ceramics, and the pre-tightening mechanism acts on the disc springs to form dual pre-tightening guarantee for the piezoelectric ceramics. Preferably, the output end of the mobile end output piece can be configured as one of external threads, internal threads or a ball head structure so as to adapt to the connection requirements of different application scenes. Preferably, the inner conical surface of the conical tail cap is matched with the spherical surface