CN-121985274-A - Vibrating diaphragm for MEMS microphone and MEMS microphone

CN121985274ACN 121985274 ACN121985274 ACN 121985274ACN-121985274-A

Abstract

The invention discloses a vibrating diaphragm for an MEMS microphone and the MEMS microphone, wherein the vibrating diaphragm comprises a vibrating diaphragm main body and a pressure relief part, the pressure relief part is arranged on the vibrating diaphragm main body and comprises a first pressure relief slit and a second pressure relief slit, a first pressure relief port is arranged at the end part of the first pressure relief slit, the second pressure relief slit is arranged corresponding to the first pressure relief port, a second pressure relief port is formed at the end part of the second pressure relief slit, and a connecting line of the two second pressure relief ports is intersected with the first pressure relief slit or the first pressure relief port. Compared with the prior art, the pressure relief part with the first pressure relief slit and the second pressure relief slit is arranged on the vibrating diaphragm, and the second pressure relief slit is positioned at the tail end of the first pressure relief slit, so that the maximum stress can be reduced, the compliance of the vibrating diaphragm can be maintained/improved, and the air pressure release effect can be improved.

Inventors

FANG ZHIXUAN
CHEN YU

Assignees

瑞声科技(新加坡)有限公司

Dates

Publication Date: 20260505
Application Date: 20251229
Priority Date: 20251215

Claims (10)

1. A diaphragm for a MEMS microphone, comprising: a diaphragm body; The pressure relief part is arranged on the vibrating diaphragm body and comprises a first pressure relief slit and a second pressure relief slit, the end part of the first pressure relief slit is provided with a first pressure relief port, the second pressure relief slit is arranged corresponding to the first pressure relief port, the end part of the second pressure relief slit is provided with a second pressure relief port, and two connecting lines of the second pressure relief ports are intersected with the first pressure relief slit or the first pressure relief port.
2. The diaphragm for a MEMS microphone of claim 1, wherein the first pressure relief slits have a wavy structure, and the opposite ends of the first pressure relief slits are respectively formed with one first pressure relief port, and one second pressure relief slit is correspondingly disposed near each first pressure relief port.
3. The diaphragm for a MEMS microphone of claim 1, wherein the first pressure relief slits have a circular structure with a notch, and the opposite ends of the first pressure relief slits are respectively formed with one first pressure relief port, and one second pressure relief slit is correspondingly disposed near each first pressure relief port.
4. The diaphragm for a MEMS microphone of claim 1, wherein the second pressure relief slit has a circular structure with a notch, one of the second pressure relief ports is formed at each of opposite ends of the second pressure relief slit, and the first pressure relief port extends into the circular structure from the notch, or the first pressure relief port is located on a line connecting the two second pressure relief ports.
5. The diaphragm for a MEMS microphone of claim 1, wherein the second relief slit is formed of a plurality of separate pieces arranged at intervals, and the second relief port is formed at the separate ends of the head and tail ends.
6. The diaphragm for a MEMS microphone of claim 1, further comprising a third pressure relief slit, the third pressure relief slit being disposed corresponding to the second pressure relief port, an end of the third pressure relief slit being formed with a third pressure relief port, a line connecting two of the third pressure relief ports intersecting the second pressure relief slit or the second pressure relief port.
7. The diaphragm for a MEMS microphone of claim 6, wherein the first pressure relief port, the second pressure relief port, and the third pressure relief port are all circular ports.
8. The diaphragm for a MEMS microphone of claim 1, wherein the pressure relief portions are provided in plurality and are uniformly spaced apart from each other with respect to an axis of the diaphragm body.
9. The diaphragm for a MEMS microphone of claim 1, wherein the pressure relief portion is disposed proximate an edge of the diaphragm body.
10. A MEMS microphone comprising a diaphragm according to any one of claims 1-9.

Description

Vibrating diaphragm for MEMS microphone and MEMS microphone Technical Field The invention relates to the technical field of micro-electro-mechanical systems, in particular to a vibrating diaphragm for an MEMS microphone and the MEMS microphone. Background At present, one type of microphone which is more applied and better in performance is a Micro-Electro-Mechanical-System Microphone (MEMS) microphone, which is also called a silicon-based microphone or a silicon microphone because of being manufactured based on a silicon-based semiconductor material. The packaging volume is smaller than that of the traditional electret microphone, and the application is wider and wider. The silicon microphone comprises a substrate provided with a back cavity and a capacitance system arranged on the substrate and connected with the substrate in an insulating way, wherein the capacitance system comprises a vibrating diaphragm and a back plate arranged at intervals with the vibrating diaphragm, and when the silicon microphone is electrified and works, the back plate and the vibrating diaphragm can carry charges with opposite polarities, so that a capacitor is formed. When the vibrating diaphragm vibrates under the action of sound waves, the distance between the vibrating diaphragm and the back plate can be changed, so that the capacitance of the capacitance system is changed, and then sound wave signals are converted into electric signals, and the corresponding functions of the microphone are realized. The inner and outer spaces of the silicon microphone are divided into two parts, wherein the space part on the back cavity side is called a front cavity, and the space part on the back plate side is called a back cavity. The diaphragm is provided with a slit, when the diaphragm vibrates, the front cavity and the rear cavity are communicated through the slit, so that air is allowed to flow from the front cavity to the rear cavity, however, the amount of air exhaust is dependent on the design of the slit, the balance between higher stress formation and stronger air exhaust effect is needed, the point of maximum stress is always at the tail end of the slit, and the problem of how to realize the larger air release effect while inhibiting the high stress formation is solved. Disclosure of Invention The object of the present invention is to provide a diaphragm for a MEMS microphone and a MEMS microphone, which are capable of reducing maximum stress and maintaining/improving compliance of the diaphragm, to solve the technical problems in the prior art. In a first aspect, the present invention provides a diaphragm for a MEMS microphone, comprising: a diaphragm body; The pressure relief part is arranged on the vibrating diaphragm body and comprises a first pressure relief slit and a second pressure relief slit, the end part of the first pressure relief slit is provided with a first pressure relief port, the second pressure relief slit is arranged corresponding to the first pressure relief port, the end part of the second pressure relief slit is provided with a second pressure relief port, and two connecting lines of the second pressure relief ports are intersected with the first pressure relief slit or the first pressure relief port. In the diaphragm for a MEMS microphone as described above, preferably, the first pressure relief slits have a wavy structure, and two opposite ends of the first pressure relief slits are respectively formed with one first pressure relief port, and one second pressure relief slit is correspondingly disposed near each first pressure relief port. In the diaphragm for a MEMS microphone as described above, preferably, the first pressure relief slit has a circular structure with a notch, two opposite ends of the first pressure relief slit are respectively formed with one first pressure relief port, and one second pressure relief slit is correspondingly disposed near each first pressure relief port. In one embodiment, the second pressure relief slit has a circular structure with a notch, two opposite ends of the second pressure relief slit are respectively formed with one second pressure relief port, and the first pressure relief port extends into the circular structure from the notch, or the first pressure relief port is located on a connecting line of the two second pressure relief ports. In the diaphragm for a MEMS microphone as described above, it is preferable that the second pressure relief slit is formed of a plurality of split bodies arranged at intervals, and the second pressure relief port is formed at the distal ends of the split bodies at the front and rear ends. The diaphragm for the MEMS microphone as described above, preferably, further includes a third pressure relief slit, the third pressure relief slit is disposed corresponding to the second pressure relief port, a third pressure relief port is formed at an end of the third pressure relief slit, and a connection line of two third pressure relief p