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CN-121985439-A - Flatness controllable heating workbench

CN121985439ACN 121985439 ACN121985439 ACN 121985439ACN-121985439-A

Abstract

A flatness-controllable heating workbench relates to the technical field of heating platforms, and comprises a heating plate, a heat insulation backboard, a connecting plate, a heating pipe, a plurality of first connecting pieces and a plurality of second connecting pieces, wherein the heating plate is internally provided with the heating pipes, the first connecting pieces penetrate through the heat insulation plate and the heat insulation backboard and fixedly connect the heat insulation plate and the heat insulation backboard to form a heat insulation plate assembly, the periphery and the middle of the heat insulation plate assembly are respectively provided with the first connecting pieces, the second connecting pieces sequentially penetrate through the heating plate, the heat insulation plate assembly and the connecting plate and fixedly connect the heating plate, the heat insulation plate assembly and the connecting plate to form the workbench, the heating plate is connected with the heat insulation plate, the periphery of the workbench is provided with the second connecting pieces, and the positions of the first connecting pieces and the second connecting pieces are not overlapped. The invention aims to provide a heating workbench with controllable flatness, which solves the technical problem of poor flatness of a working surface of the heating workbench in the prior art to a certain extent.

Inventors

  • Jiao Longkang
  • YANG ZHI
  • ZHU LINTAO
  • WU JIE
  • JIA JINGXIAO

Assignees

  • 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所）

Dates

Publication Date
20260505
Application Date
20260203

Claims (10)

  1. 1. The flatness-controllable heating workbench is characterized by comprising a heating plate (1), a heat insulation plate (2), a heat insulation back plate (3), a connecting plate (4), heating pipes (5), a plurality of first connecting pieces (7) and a plurality of second connecting pieces (8), wherein a plurality of heating pipes (5) are arranged in the heating plate (1); The first connecting piece (7) penetrates through the heat insulation plate (2) and the heat insulation backboard (3) and fixedly connects the heat insulation plate (2) and the heat insulation backboard (3) to form a heat insulation plate assembly, and a plurality of first connecting pieces (7) are arranged at the peripheral position and the middle position of the heat insulation plate assembly; The second connecting piece (8) sequentially penetrates through the heating plate (1), the heat insulation plate assembly and the connecting plate (4) and fixedly connects the heating plate (1), the heat insulation plate assembly and the connecting plate (4) to form a workbench, wherein the heating plate (1) is connected with the heat insulation plate (2); the periphery position of the workbench is provided with a plurality of second connecting pieces (8), and the positions of the first connecting pieces (7) and the second connecting pieces (8) are not overlapped.
  2. 2. The flatness controllable heating table according to claim 1, characterized in that the heat shield (2) is provided with a plurality of first grooves (21), the first grooves (21) penetrating the heat shield (2) in the thickness direction of the heat shield (2), wherein the thickness direction of the heat shield (2) is parallel to the axial direction of the first connecting piece (7); All the first grooves (21) are not communicated with each other.
  3. 3. A flatness controllable heating table according to claim 2, characterized in that a plurality of the first grooves (21) form a plurality of groove rings each including a plurality of the first grooves (21) from the outer peripheral side of the heat insulating plate (2) to the central direction; Each groove ring is of a symmetrical structure.
  4. 4. A flatness controllable heating table according to claim 3, characterized in that the first grooves (21) of adjacent two of the groove rings are at least partially misaligned or that the portion between adjacent two of the first grooves (21) of the groove rings corresponds to the middle of the first grooves (21) of adjacent groove rings; The number of the first grooves (21) in the single groove ring is 2, 3, 4 or 6; the number of the groove rings is 2, 3, 4 or 6; The first groove (21) is linear or arc-shaped.
  5. 5. A flatness controllable heating table according to claim 3, characterized in that the first recess (21) is rectilinear; the number of the first grooves (21) in the single groove ring is 4; The number of the groove rings is n, and the outermost groove ring is the first groove ring from the peripheral side to the central direction of the heat insulation plate (2); When n is singular, the first groove (21) of the nth groove ring is perpendicular to the diagonal line of the heat insulation plate (2); When n is an even number, the first groove (21) of the nth groove ring is parallel to the edge of the heat insulation plate (2).
  6. 6. The flatness controllable heating table according to claim 2, characterized in that the first face of the heat shield (2) is further provided with a plurality of second grooves (22), the plurality of second grooves (22) intersecting on the axis of the heat shield (2); the second groove (22) is symmetrically arranged on the axis of the heat insulation plate (2); a plurality of second grooves (22) are provided in the circumferential direction of the axis of the heat insulating plate (2).
  7. 7. The flatness controllable heating table according to claim 6, characterized in that the first connection (7) is arranged between the first recess (21) and the second recess (22), on the first recess (21) and on the second recess (22); The positions of all the first connecting pieces (7) are distributed into symmetrical structures; The number of the second grooves (22) is 2,3, 4 or 6.
  8. 8. The flatness controllable heating workbench according to claim 1, characterized in that a plurality of tube grooves (11) are arranged in the heating plate (1), the tube grooves (11) are sequentially arranged at intervals along the same direction, and the tube grooves (11) are opened at two ends along the self extending direction; Each tube groove (11) accommodates two heating tubes (5) which are arranged at intervals.
  9. 9. The flatness controllable heating table according to claim 8, characterized in that the position of the heating pipe (5) within the pipe groove (11) is configured to be adjustable; and temperature sensors (6) which are in one-to-one correspondence with the heating pipes (5) are further arranged in the heating plate (1).
  10. 10. The flatness controllable heating table according to claim 9, characterized in that the temperature sensor (6) comprises a patch thermocouple; The heating pipe (5) is in threaded connection with the heating plate (1) so as to change the position of the heating pipe (5), or the heating pipe (5) is connected with a plug, and the size of the plug extending into the pipe groove (11) can be adjusted so as to change the position of the heating pipe (5); The number of the pipe grooves (11) is 2, 3,4 or 6; The heat insulation plate assembly is provided with a through hole (23) for the second connecting piece (8) to pass through, and the diameter of the through hole (23) is larger than that of the second connecting piece (8); The first connection element (7) and/or the second connection element (8) comprise screws or bolts; the first connecting pieces (7) and the second connecting pieces (8) are alternately arranged at the peripheral position of the workbench.

Description

Flatness controllable heating workbench Technical Field The invention relates to the technical field of heating tables, in particular to a flatness-controllable heating workbench. Background The heating table penetrates through a plurality of links of electronic element manufacture and research and development, is more widely applied particularly in the aspects of circuit board printing manufacture and sheet type multi-ceramic element manufacture, and with the development of technology, higher requirements are put on the temperature control uniformity and flatness of the heating table. The heating table has different deformation structures for different application scenes, but is generally mainly composed of three parts of a heating plate 100, a heat insulation plate 200 and a connecting plate 300, wherein a plurality of heating pipes 400 are arranged in the heating plate 100, and the temperature requirements of the working table surface of the heating plate 100 are met by controlling the heating pipes 400 to raise the temperature, as shown in fig. 1. However, the conventional heating table has the problems that 1, when the heating pipe 400 heats up to heat the heating plate 100, the heat deformation process of the heating plate 100 itself is liable to cause a central protrusion phenomenon, thereby affecting the flatness of the working surface of the heating table 100, and 2, the conventional heating table structure is liable to cause stress inside the heat insulation plate 200 due to uneven heating of the heat insulation plate 200, i.e. the temperature of the connection surface between the heat insulation plate 200 and the heating plate 100 is higher, and the temperature of the connection surface between the heat insulation plate 200 and the connection plate 300 is lower, thereby affecting the flatness of the working surface of the heating table 100. Disclosure of Invention The invention aims to provide a heating workbench with controllable flatness, which solves the technical problem of poor flatness of a working surface of the heating workbench in the prior art to a certain extent. In order to achieve the above object, the present invention provides the following technical solutions: The heating workbench with the controllable flatness comprises a heating plate, a heat insulation backboard, a connecting plate, a heating pipe, a plurality of first connecting pieces and a plurality of second connecting pieces, wherein a plurality of heating pipes are arranged in the heating plate; the first connecting piece penetrates through the heat insulation plate and the heat insulation backboard, and the heat insulation plate and the heat insulation backboard are fixedly connected to form a heat insulation plate assembly; The second connecting piece sequentially penetrates through the heating plate, the heat insulation plate assembly and the connecting plate, and fixedly connects the heating plate, the heat insulation plate assembly and the connecting plate to form a workbench, wherein the heating plate is connected with the heat insulation plate; The periphery position of the workbench is provided with a plurality of second connecting pieces, and the positions of the first connecting pieces and the second connecting pieces are not overlapped. In any of the above technical solutions, optionally, the heat insulation board is provided with a plurality of first grooves, and the first grooves penetrate through the heat insulation board along the thickness direction of the heat insulation board, wherein the thickness direction of the heat insulation board is parallel to the axial direction of the first connecting piece; all the first grooves are not communicated with each other. In any one of the above-mentioned aspects, optionally, from an outer peripheral side to a central direction of the heat insulating plate, a plurality of the first grooves form a plurality of groove rings, each of the groove rings including a plurality of the first grooves; Each groove ring is of a symmetrical structure. In any of the above technical solutions, optionally, the first grooves of two adjacent groove rings are at least partially misaligned, or a portion between two adjacent first grooves of the groove rings corresponds to a middle portion of the first groove of the adjacent groove ring; The number of the first grooves in the single groove ring is 2,3,4 or 6; the number of the groove rings is 2, 3, 4 or 6; the first groove is linear or arc-shaped. In any of the above technical solutions, optionally, the first groove is linear; In the single groove ring, the number of the first grooves is 4; the number of the groove rings is n, and the outermost groove ring is the first groove ring from the outer peripheral side to the central direction of the heat insulation plate; When n is singular, the first groove of the nth groove ring is perpendicular to the diagonal line of the heat insulation plate; And when n is an even number, the first groove