CN-121985464-A - Vacuum tube with self-inhalation function and preparation method thereof

Abstract

The invention relates to the technical field of particle accelerator vacuum, in particular to a vacuum tube with a self-sucking function and a preparation method thereof. The vacuum tube with the self-sucking function is of an integrated structure, and comprises a tube body, wherein a porous sucking structure is arranged on the inner surface of the tube body. The invention integrally forms the getter alloy powder into the vacuum tube by utilizing the 3D printing technology, and the inner wall of the vacuum tube directly forms a porous getter structure with huge specific surface area. Compared with the traditional coating process, the invention fundamentally solves the risk of falling off of the film layer, and remarkably improves the reliability and service life of the equipment. Meanwhile, the structure endows the vacuum tube with extremely high pumping speed and suction capacity, and can realize more excellent ultimate vacuum degree.

Inventors

• LI CHANGCHUN
• WAN YAPENG
• JIAO JIQIANG
• CHAI ZHEN
• XIE WENJUN
• MA XIANGLI
• HU ZHENJUN
• ZHANG XIPING
• ZHANG RENPING
• Zhong Kuangxia
• MENG JUN
• YANG JIANCHENG
• LIU JIANLONG
• ZHU XIAORONG
• YANG WEISHUN
• LUO CHENG
• Wei Ningfei
• LIN XIAOJIAN

Assignees

• 中国科学院近代物理研究所

Dates

Publication Date

20260505

Application Date

20251215

Claims (10)

1. 1. A vacuum tube with a self-sucking function is characterized by being of an integrally formed structure, and comprises a tube body, wherein a porous sucking structure is arranged on the inner surface of the tube body.
2. 2. The vacuum tube with self-sucking function as claimed in claim 1, wherein the porous sucking structure is formed of a plurality of holes arranged in one or more combinations of an array, a spiral shape, and a honeycomb shape.
3. 3. The vacuum tube with self-sucking function according to claim 1 or 2, wherein the porosity of the porous sucking structure is 40% -75%.
4. 4. A vacuum tube with self-gettering function according to any one of claims 1-3, characterized in that the vacuum tube is made of metal powder of 30-40 atomic% Ti, 30-40% Zr and 30-40% V, the sum of atomic% being 100%.
5. 5. The vacuum tube with self-sucking function as claimed in any one of claims 1 to 4, further comprising flanges connected to both ends of the pipe body.
6. 6. A method for manufacturing a vacuum tube with self-sucking function as claimed in any one of claims 1 to 5, comprising the steps of: preparing three metals of Ti, zr and V into spherical metal powder respectively, and mixing to obtain a composite metal powder material; The composite metal powder material is printed into a pipeline body by adopting a 3D printing technology, and a porous air suction structure is manufactured on the inner surface of the pipeline body, wherein the 3D printing parameters are set as follows, the laser power range is 200-350W, the scanning speed is 700-1200 mm/s, the powder paving thickness of each layer is 20-40 mu m, the distance between adjacent scanning tracks is controlled at 80-120 mu m, and meanwhile, the printing substrate is required to be preheated to 200-300 ℃.
7. 7. The method for manufacturing a vacuum tube with a self-sucking function according to claim 6, wherein the particle size distribution of the spherical metal powder is 20-35 μm.
8. 8. The method for manufacturing a vacuum tube with self-sucking function according to claim 6 or 7, comprising the step of vacuum annealing the vacuum tube obtained by the 3D printing technique.
9. 9. The method for manufacturing the vacuum tube with the self-sucking function according to any one of claims 6 to 8, wherein the annealing temperature of the vacuum annealing treatment is 800-900 ℃ and the heat preservation time is 1-3 h.
10. 10. The method for manufacturing a vacuum tube with self-sucking function according to any one of claims 6 to 9, wherein the spherical metal powder is manufactured by EIGA technology.

Description

Vacuum tube with self-inhalation function and preparation method thereof Technical Field The invention relates to the technical field of particle accelerator vacuum, in particular to a vacuum tube with a self-sucking function and a preparation method thereof. Background In large-scale scientific devices such as particle accelerators, synchrotron radiation light sources, tokamaks and the like, maintaining an ultra-high/extremely high vacuum environment is a key to ensuring normal operation of equipment. The vacuum pipeline is used as a core component for maintaining a vacuum environment in the devices, the performance of the vacuum pipeline directly influences the ultimate vacuum degree and pressure distribution of the system, and the optimal vacuum degree is a necessary condition for realizing higher beam lifetime. The conventional vacuum pipeline is generally made of stainless steel, oxygen-free copper or aluminum alloy and other materials, does not have any air suction performance, and only serves as a particle operation channel to provide a vacuum environment. Typically the vacuum line is provided with a plurality of flange interfaces for mounting a vacuum pump stack to achieve a target vacuum. As particle accelerators move to higher energies and higher current intensities, the vacuum system needs to reach higher vacuum targets to achieve higher beam lifetimes. In order to further improve the vacuum degree, a solution is generally adopted at present, wherein a getter film such as TiZrV is plated on the inner surface of a vacuum chamber, and the vacuum degree of a better system is realized by providing an air suction effect for heating and activating the getter. The above solution for plating the getter film in the vacuum chamber has a great limitation. In the scheme, the vacuum pipeline is separated from the getter, and the integrated design of the pipeline structure and the getter function is not realized. Meanwhile, large-scale magnetron sputtering equipment is required for the inner wall coating work of the vacuum chamber, the process is complex, the cost is high, and coating can not be realized for the vacuum chamber with complex internal channels and porous structures. The thickness of the getter film is usually controlled to be within a certain range (< 5 μm), and the film is peeled off due to the problem of stress caused by the excessive thickness. Due to the limited film thickness, the gettering capacity is limited. During the operation of the accelerator, the getter is easy to be saturated prematurely due to the bombardment of beam current or the generation of a large amount of air load in other modes, so that the vacuum performance of the system is deteriorated, and the normal operation of the accelerator is affected. Therefore, there is a strong need in the art for a novel vacuum chamber technology that overcomes the shortcomings of conventional coating schemes and achieves superior and more durable gettering performance. Disclosure of Invention The invention provides a vacuum tube with a self-sucking function and a preparation method thereof, which are used for solving the problems of the existing vacuum tube. According to a first aspect of the invention, the invention provides a vacuum tube with a self-sucking function, which is of an integrally formed structure, and comprises a pipeline body, wherein a porous sucking structure is arranged on the inner surface of the pipeline body. The vacuum tube provided by the invention is of an integrated structure, the inner surface of the vacuum tube is provided with the porous air suction structure, the vacuum tube body and the air suction material serving as a functional part are integrated into a whole, the problems of poor film binding force, easiness in falling, short service life and the like in the traditional vacuum tube and air suction film separation scheme are fundamentally solved, the integration of the structure and the function is realized, and the reliability and the service life of a vacuum part are obviously improved. Meanwhile, the porous structure of the inner surface provides huge surface area for air suction, so that the air suction device has distributed air suction capability and can realize excellent vacuum performance. According to the vacuum tube with the self-sucking function, the porous sucking structure is formed by a plurality of holes, and the arrangement mode is one or a combination of a plurality of arrays, spiral shapes and honeycombs. These specific and complex geometries of the present invention can be precisely designed by three-dimensional models and implemented using 3D printing techniques. These ordered structures can greatly increase specific surface area and form optimized gas transport channels compared to simple planar or irregular holes, so that residual gas molecules in the vacuum system can reach the suction surface and be captured more efficiently, thereby significantly improving suction rate and efficien