CN-121985710-A - Apparatus and method for manufacturing display apparatus

Abstract

An apparatus and method for manufacturing a display device are disclosed. The apparatus includes a chamber, a deposition source, a showerhead, a substrate holder, and an anti-deposition member. The deposition source is located outside the chamber and evaporates or sublimates the deposition material. A showerhead is located in the chamber, connected to at least one deposition source, and simultaneously sprays deposition material onto the entire surface of the display substrate. The substrate holder is connected to the chamber and moves linearly, wherein the display device is mounted on the substrate holder. The deposition preventing member surrounds an edge portion of the showerhead and an edge portion of the substrate holder in the chamber. The deposition preventing member is heated during the deposition process.

Inventors

• HAN SHANGCHEN
• JIANG YOUZHEN
• Pu Junhe
• XU MINKUI
• LI YOUZHONG
• Han Zhongfen
• Gao Yiner
• Pu Shengzhong

Assignees

• 三星显示有限公司

Dates

Publication Date

20260505

Application Date

20180410

Priority Date

20170410

Claims (20)

1. 1. An apparatus for manufacturing a display device, the apparatus comprising: A chamber; At least one deposition source located outside the chamber to evaporate or sublimate a deposition material; A showerhead located in the chamber and connected to the at least one deposition source, the showerhead simultaneously spraying the deposition material onto the entire surface of the display substrate; a substrate holder coupled with the chamber, wherein the substrate holder is configured to mount the display device and linearly move to adjust a vertical distance between the showerhead and the display substrate; an anti-deposition member surrounding an edge portion of the showerhead and an edge portion of the substrate holder in the chamber, wherein the anti-deposition member is to be heated during a deposition process, and A gas-blocking supply configured to supply a gas-blocking to form a continuous annular gas curtain around the edge portion of the showerhead, wherein the gas-blocking is supplied from the edge portion of the showerhead toward a side edge of the display substrate to define a deposition flow path between the showerhead and the display substrate by restricting lateral spreading of deposition material.
2. 2. The apparatus of claim 1, wherein the at least one deposition source comprises: deposition source chamber, and At least one crucible located in the deposition source chamber.
3. 3. The apparatus of claim 2, wherein the at least one crucible comprises a plurality of crucibles.
4. 4. The apparatus of claim 3, wherein the crucibles are stacked.
5. 5. The apparatus of claim 3, wherein the at least one deposition source comprises a plurality of source heaters that are respectively disposed on the crucible and independently heat the crucible.
6. 6. The apparatus of claim 2, wherein the at least one deposition source comprises: A connection pipe connecting the deposition source chamber and the showerhead, and And a valve in the connection pipe to adjust an opening degree of the connection pipe.
7. 7. The apparatus of claim 1, wherein the at least one deposition source comprises: A quantitative material supply part that supplies a predetermined quantitative amount of deposition material supplied from an external source; An aerosol generator connected to the quantitative material supply part, the aerosol generator dispersing the predetermined amount of the deposition material supplied from the quantitative material supply part, and A fast evaporator that evaporates or sublimates the deposition material supplied from the aerosol generator.
8. 8. The apparatus of claim 7, wherein the at least one deposition source comprises: a connection pipe connecting the flash evaporator with the spray head, and And a valve in the connection pipe to adjust an opening degree of the connection pipe.
9. 9. The apparatus of claim 1, wherein the spray head comprises: A supply tube connected to the at least one deposition source, and The spray head body is connected with the supply pipe and includes a space in the spray head body and a plurality of discharge holes.
10. 10. The apparatus of claim 9, wherein the spray head comprises: a baffle plate is positioned in the showerhead body to disperse a flow path of the deposition material.
11. 11. The apparatus of claim 9, wherein the spray head comprises: a head operating member located between the supply pipe and the head body, Wherein the head operating member moves the head body.
12. 12. The apparatus of claim 9, wherein the spray head comprises at least one head heater located in the spray head body.
13. 13. The apparatus of claim 12, wherein: the at least one head heater includes a plurality of head heaters, and The head heaters operate independently.
14. 14. The apparatus of claim 9, wherein: The at least one deposition source includes a plurality of deposition sources, an The showerhead includes a mixer connected with the deposition source to mix deposition materials supplied from the deposition source.
15. 15. The apparatus of claim 9, wherein the spray head body comprises: the first spray head body is connected with the supply pipe; A protruding surface located in the first showerhead body and forming a first space with the first showerhead body, the protruding surface guiding deposition material in the first space into the chamber, and A second showerhead body spaced apart from the bottom surface of the protruding surface and forming a second space with the protruding surface, the second showerhead body directing deposition material in the second space into the chamber.
16. 16. The apparatus of claim 15, wherein the supply tube comprises: a first supply pipe connected to the first space, and And a second supply pipe separated from the first supply pipe and connected to the second space.
17. 17. The apparatus of claim 1, wherein the substrate holder comprises: A mounting board on which the display substrate is mounted, and And the connecting piece is connected with the mounting plate to be rotated.
18. 18. The apparatus of claim 17, wherein: The substrate holder includes a mounting plate manipulator located between the mounting plate and the connector, and The mounting plate operating member is configured to move the mounting plate.
19. 19. The apparatus of claim 17, wherein the substrate holder comprises at least one temperature adjustment member positioned in the mounting plate to adjust the temperature of the mounting plate.
20. 20. The apparatus of claim 19, wherein the at least one temperature adjustment member comprises a plurality of temperature adjustment members that operate independently.

Description

Apparatus and method for manufacturing display apparatus Cross Reference to Related Applications Korean patent application No. 10-2017-0046300, entitled "apparatus and method for manufacturing display device" filed on 4/10/2017, is incorporated herein by reference in its entirety. Technical Field One or more embodiments described herein relate to an apparatus and method of manufacturing a display device. Background Various mobile electronic devices have been developed. Examples include mobile phones and tablet personal computers. These devices include a display, and various components for driving the display. Recently, displays have been designed to bend from a flat orientation to a predetermined angle. Disclosure of Invention According to one or more embodiments, an apparatus for manufacturing a display device includes a chamber, at least one deposition source located outside the chamber to evaporate or sublimate a deposition material, a showerhead located in the chamber and connected with the at least one deposition source, the showerhead spraying the deposition material onto an entire surface of a display substrate at the same time, a substrate holder connected with the chamber and linearly moving, the display device mounted on the substrate holder, and a deposition preventing member surrounding an edge portion of the showerhead and an edge portion of the substrate holder in the chamber, the deposition preventing member to be heated during a deposition process. The at least one deposition source may include a deposition source chamber and at least one crucible, wherein the at least one crucible is located in the deposition source chamber. The at least one crucible may comprise a plurality of crucibles. The crucibles may be stacked. The at least one deposition source may include a plurality of source heaters that are respectively disposed on the crucible and independently heat the crucible. The at least one deposition source may include a connection pipe connecting the deposition source chamber with the showerhead, and a valve in the connection pipe to adjust an opening degree of the connection pipe. The at least one deposition source may include a quantitative material supply part to supply a predetermined amount of deposition material supplied from an external source, an aerosol generator connected to the quantitative material supply part, the aerosol generator dispersing the predetermined amount of deposition material supplied from the quantitative material supply part, and a fast evaporator to evaporate or sublimate the deposition material supplied from the aerosol generator. The at least one deposition source may include a connection pipe connecting the flash evaporator with the showerhead, and a valve in the connection pipe to adjust an opening degree of the connection pipe. The showerhead may include a supply pipe connected with at least one deposition source and a showerhead body connected with the supply pipe and including a space in the showerhead body and a plurality of exhaust holes. The showerhead may include a baffle positioned in the showerhead body to disperse a flow path of the deposition material. The spray head may include a head operating member located between the supply pipe and the spray head body, wherein the head operating member moves the spray head body. The spray head may include at least one head heater, the at least one head heater being located in the spray head body. The at least one head heater may include a plurality of head heaters, and the head heaters may be independently operated. The at least one deposition source may include a plurality of deposition sources, and the showerhead includes a mixer connected with the deposition sources to mix deposition materials supplied from the deposition sources. The showerhead body may include a first showerhead body connected with the supply pipe, a protruding surface in the first showerhead body and forming a first space with the first showerhead body, the protruding surface guiding the deposition material in the first space into the chamber, and a second showerhead body spaced apart from a bottom surface of the protruding surface and forming a second space with the protruding surface, the second showerhead body guiding the deposition material in the second space into the chamber. The supply pipe may include a first supply pipe connected to the first space and a second supply pipe separated from the first supply pipe and connected to the second space. The substrate holder may include a mounting plate on which the display substrate is mounted and a connection member connected with the mounting plate to be rotated. The substrate holder may include a mounting plate manipulator located between the mounting plate and the connector, and the mounting plate manipulator is for moving the mounting plate. The substrate holder may include at least one temperature adjustment member positioned in the mounting plate to adjust the temperature of