CN-121985711-A - Vacuum drying film forming device and method

CN121985711ACN 121985711 ACN121985711 ACN 121985711ACN-121985711-A

Abstract

The vacuum drying film forming device comprises a vacuum chamber, a bearing plate, a condensing plate and an air inlet device, wherein the vacuum chamber is configured to provide a pressure-variable environment, the bearing plate is arranged in the vacuum chamber and is configured to bear a film forming substrate to be dried, the condensing plate is arranged in the vacuum chamber and is positioned above the bearing plate and is configured to condense and capture solvent evaporated from the film forming substrate to be dried, and the air inlet device is arranged at the top of the vacuum chamber and is configured to introduce heated inert gas into the vacuum chamber.

Inventors

XIA LUYUN
DING WEI
LI WEIJI
HE KANG
MA KAI
YI JIN
CHEN JIANGLONG

Assignees

科迪华显示技术(绍兴)有限公司

Dates

Publication Date: 20260505
Application Date: 20260210

Claims (10)

1. A vacuum drying film forming apparatus, characterized by comprising: a vacuum chamber configured to provide a variable pressure environment; The bearing plate is arranged in the vacuum chamber and is configured to bear a film-forming substrate to be dried; A condensing plate disposed in the vacuum chamber and above the carrier plate, configured to condense solvent evaporated captured from the film-forming substrate to be dried; and the air inlet device is arranged at the top of the vacuum chamber and is configured to introduce heated inert gas into the vacuum chamber.
2. The vacuum drying film-forming apparatus according to claim 1, wherein the air inlet means includes a plurality of diffusers configured to filter and disperse the heated inert gas.
3. The vacuum drying film forming apparatus according to claim 1, wherein the air inlet device is connected to an air supply pipe, and a heater is provided on the air supply pipe, and the heater is mounted on a top surface of the vacuum chamber.
4. The vacuum drying film forming apparatus according to claim 1, further comprising: A heating device arranged on the outer wall of the vacuum chamber, and And the heat preservation device is used for wrapping the outer wall of the vacuum chamber.
5. The vacuum drying film forming apparatus according to any one of claims 1 to 4, further comprising: A vacuum pump having a heating function configured to heat the extracted air flow.
6. A vacuum drying film forming method, characterized in that the vacuum drying film forming method comprises the steps of: charging a heated inert gas into the vacuum chamber; Loading a film forming substrate to be dried to a bearing plate; Synchronously and dynamically adjusting the pressure in the vacuum chamber and the distance between the bearing plate and the condensing plate so that the space between the bearing plate and the condensing plate is basically always in the saturated vapor pressure of the solvent evaporated from the film-forming substrate to be dried in the drying process of the film layer on the film-forming substrate to be dried; and transferring the dried film-forming substrate out of the vacuum chamber.
7. The method according to claim 6, wherein the step of synchronously and dynamically adjusting the pressure in the vacuum chamber and the distance between the carrier plate and the condensing plate comprises the steps of: performing a depressurization stage operation to reduce the distance between the load plate and the condensing plate to a first distance while reducing the pressure of the vacuum chamber to a second pressure in stages; Performing a steady drying stage operation, while maintaining the vacuum chamber at a second pressure state, gradually increasing the distance between the carrier plate and the condensing plate to a second distance, and And performing a boosting stage operation, namely filling heated inert gas into the vacuum chamber to enable the pressure of the vacuum chamber to reach normal pressure, and adjusting the distance between the bearing plate and the condensing plate to reach an initial distance.
8. The vacuum drying film-forming method according to claim 6, characterized in that the vacuum film-forming method further comprises: And starting a heating device to preheat the vacuum chamber.
9. The vacuum drying film-forming method according to claim 6, characterized in that the vacuum film-forming method further comprises: and starting the vacuum pump to pump out the air in the vacuum chamber.
10. The vacuum drying film forming method according to any one of claims 6 to 9, characterized in that: the gas extraction operation in the vacuum chamber is performed using a vacuum pump having a heating function.

Description

Vacuum drying film forming device and method Technical Field The disclosure belongs to the technical field of semiconductor manufacturing, and in particular relates to a vacuum drying film forming device and method, which are suitable for OLED ink-jet printing, organic semiconductor device printing, perovskite thin film and other thin film manufacturing processes requiring low-temperature efficient drying. Background In the process of manufacturing an Organic Light-Emitting Diode (OLED) display panel, a core display layer, such as an electron transport layer, a Light Emitting layer, and a hole transport layer, is formed mainly by vapor deposition and solution processes. The ink jet printing technology in the solution process is considered as an important mode for realizing mass production of the large-sized OLED display panel because of higher material utilization rate and large size. In the process of manufacturing the OLED organic light-emitting film, high-boiling-point organic solvents are usually remained after an ink-jet printing process, the high-boiling-point organic solvents are difficult to remove rapidly, and the problems that film formation morphology is easily affected in a conventional drying mode such as wind heat drying, infrared drying and normal-pressure heating drying are easy to occur, so that the high-precision film manufacturing requirement is difficult to adapt. Current processes of inkjet printing technology include inkjet printing (IJP) processes, vacuum drying processes, and drying (Bake) processes. In the vacuum drying process, the drying speed of ink drops on a substrate to be dried and the evaporation uniformity of a solvent have important influences on the final appearance of a film, and the appearance of the film directly influences the display effect of an OLED display panel. Disclosure of Invention Some embodiments of the present disclosure provide a vacuum drying film forming apparatus including: a vacuum chamber configured to provide a variable pressure environment; The bearing plate is arranged in the vacuum chamber and is configured to bear a film-forming substrate to be dried; A condensing plate disposed in the vacuum chamber and above the carrier plate, configured to condense solvent evaporated captured from the film-forming substrate to be dried; and the air inlet device is arranged at the top of the vacuum chamber and is configured to introduce heated inert gas into the vacuum chamber. In some embodiments, the gas inlet means comprises a plurality of diffusers configured to filter and disperse heated inert gas. In some embodiments, the air inlet device is connected to an air supply pipeline, and a heater is arranged on the air supply pipeline and is installed on the top surface of the vacuum chamber. In some embodiments, the vacuum drying film forming apparatus further comprises: A heating device arranged on the outer wall of the vacuum chamber, and And the heat preservation device is used for wrapping the outer wall of the vacuum chamber. In some embodiments, the vacuum drying film forming apparatus further comprises: A vacuum pump having a heating function configured to heat the extracted air flow. Some embodiments of the present disclosure provide a vacuum drying film forming method comprising the steps of: charging a heated inert gas into the vacuum chamber; Loading a film forming substrate to be dried to a bearing plate; Synchronously and dynamically adjusting the pressure in the vacuum chamber and the distance between the bearing plate and the condensing plate so that the space between the bearing plate and the condensing plate is basically always in the saturated vapor pressure of the solvent evaporated from the film-forming substrate to be dried in the drying process of the film layer on the film-forming substrate to be dried; and transferring the dried film-forming substrate out of the vacuum chamber. In some embodiments, the synchronous dynamic adjustment of the pressure within the vacuum chamber and the distance between the carrier plate and the condensing plate comprises the steps of: performing a depressurization stage operation to reduce the distance between the load plate and the condensing plate to a first distance while reducing the pressure of the vacuum chamber to a second pressure in stages; Performing a steady drying stage operation, while maintaining the vacuum chamber at a second pressure state, gradually increasing the distance between the carrier plate and the condensing plate to a second distance, and And performing a boosting stage operation, namely filling heated inert gas into the vacuum chamber to enable the pressure of the vacuum chamber to reach normal pressure, and adjusting the distance between the bearing plate and the condensing plate to reach an initial distance. In some embodiments, the vacuum film forming method further comprises: And starting a heating device to preheat the vacuum chamber. In some embodiments, the vacuum film fo