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CN-121985756-A - Chip wet etching machine convenient to adjust

CN121985756ACN 121985756 ACN121985756 ACN 121985756ACN-121985756-A

Abstract

The invention discloses a chip wet etching machine convenient to adjust, which comprises a mounting seat, a bearing plate and a wet etching machine body, wherein one end of the mounting seat is provided with a cavity, a screw rod is rotationally connected to the cavity, a first gear is fixedly sleeved on the screw rod, a second gear meshed with the first gear is arranged in the cavity, the second gear is rotationally connected with the inner wall of the cavity through a rotating rod, one end of the rotating rod penetrates through the inner wall of the cavity and is fixedly connected with a knob, the top of the mounting seat is fixedly connected with a supporting column, one side of the supporting column, which is close to the bearing plate, is provided with a sliding groove, the top of the screw rod penetrates through the inner wall of the cavity and extends into the sliding groove, one end of the screw rod, which is positioned in the sliding groove, is fixedly connected with the bearing plate, and the top of the mounting seat is provided with a plurality of symmetrically arranged guide grooves. According to the invention, through the arrangement of the plurality of adjusting mechanisms, the wet etching machine can be freely adjusted according to actual installation requirements, so that the installation efficiency of the wet etching machine is effectively improved.

Inventors

  • YU CUIPING

Assignees

  • 上海玄新生物科技有限公司

Dates

Publication Date
20260505
Application Date
20231219

Claims (9)

  1. 1. The chip wet etching machine convenient to adjust comprises a mounting seat (1), a bearing plate (2) and a wet etching machine body (3), and is characterized in that one end of the mounting seat (1) is provided with a cavity, a screw rod (4) is rotationally connected to the cavity, a first gear (5) is fixedly sleeved on the screw rod (4), a second gear (6) meshed with the first gear (5) is arranged in the cavity, the second gear (6) is rotationally connected with the inner wall of the cavity through a rotating rod (7), and one end of the rotating rod (7) penetrates through the inner wall of the cavity and is fixedly connected with a knob (8); The top of the mounting seat (1) is fixedly connected with a supporting column (9), one side, close to the bearing plate (2), of the supporting column (9) is provided with a sliding groove, the top of the screw rod (4) penetrates through the inner wall of the cavity and extends into the sliding groove, one end of the screw rod (4) positioned in the sliding groove is in threaded sleeve connection with a sliding block (10), one end of the sliding block (10) is fixedly connected with the bearing plate (2), the top of the mounting seat (1) is provided with a plurality of symmetrically arranged guide grooves, and a guide mechanism is fixedly connected in the guide grooves; The top of bearing plate (2) is equipped with the mounting groove that corresponds with wet etching machine body (3), the inner bottom of mounting groove is through a plurality of damping bumper shock absorber (11) sliding connection has backing plate (12), fixedly connected with a plurality of fixture blocks (13) that the symmetry set up on the outer wall of wet etching machine body (3), the top of bearing plate (2) is equipped with the fixed slot, fixedly connected with in the fixed slot locking mechanism that corresponds with fixture block (13).
  2. 2. The chip wet etching machine convenient to adjust according to claim 1, wherein the guide mechanism comprises a guide rod (14), a supporting block (15) is sleeved on the guide rod (14) in a sliding mode, the supporting block (15) is connected with the bottom of the bearing plate (2) through a connecting rod (16), and two ends of the connecting rod (16) are respectively connected with the supporting block (15) and the bearing plate (2) in a rotating mode.
  3. 3. The chip wet etching machine convenient to adjust according to claim 2, wherein the guide rod (14) is sleeved with a first spring (17), and two ends of the first spring (17) are fixedly connected with the supporting block (15) and the inner wall of the guide groove respectively.
  4. 4. The chip wet etching machine convenient to adjust according to claim 1, wherein the locking mechanism comprises a cross rod (18), an L-shaped clamping rod (19) is sleeved on the cross rod (18) in a sliding mode, and a clamping groove corresponding to the L-shaped clamping rod (19) is formed in the clamping block (13).
  5. 5. The chip wet etching machine convenient to adjust according to claim 4, wherein the cross rod (18) is sleeved with a second spring (20), and two ends of the second spring (20) are fixedly connected with the L-shaped clamping rod (19) and the inner wall of the fixing groove respectively.
  6. 6. The chip wet etching machine convenient to adjust according to claim 1, wherein one end of the knob (8) is rotatably connected with an arc-shaped inserting rod (22) through a rotating shaft (21), and a plurality of slots corresponding to the arc-shaped inserting rod (22) are formed in the outer wall of the mounting seat (1) in a surrounding mode.
  7. 7. The chip wet etching machine convenient to adjust according to claim 1, wherein a plurality of locking blocks (23) are fixedly connected to the bottom of the mounting seat (1), and locking openings are formed in the locking blocks (23).
  8. 8. The chip wet etching machine convenient to adjust according to claim 1, wherein the inner side wall of the mounting groove is provided with a supporting groove corresponding to the base plate (12), a fixing rod (24) is fixedly connected in the supporting groove, and the base plate (12) is provided with a through hole corresponding to the fixing rod (24).
  9. 9. The chip wet etching machine convenient to adjust according to claim 1, wherein the vertical rod (25) is fixedly connected in the sliding groove, a sliding opening corresponding to the vertical rod (25) is formed in the sliding block (10), a plurality of balls (26) are connected in the sliding opening in a sliding mode, and the edges of the balls (26) are in contact with the vertical rod (25).

Description

Chip wet etching machine convenient to adjust Technical Field The invention relates to the technical field of chip processing, in particular to a chip wet etching machine convenient to adjust. Background The wafer is a basic material for manufacturing a semiconductor chip, the wet etching is performed by removing the surface material of a silicon wafer through a chemical reagent, and a general wet etching process is completed on a wet etching machine, wherein the wet etching machine mainly comprises an etching device, a water washing device and a drying device, but the current etching device is used for sucking and fixing the wafer by using a sucker and then spraying etching liquid; And then the wafer after etching is required to be washed, and the current washing device mainly sprays the surface of the wafer by a spray head in a washing chamber after the wafer enters the washing chamber, so that the wafer is washed in the conveying process. However, the external structure of the existing wet etching machine is simpler, and the wet etching machine cannot be freely adjusted according to the actual installation environment, so that the installation efficiency of the wet etching machine is affected. Disclosure of Invention The invention aims to solve the problem that the wet etching machine in the prior art is simple in external structure and cannot be freely adjusted according to the actual installation environment, and provides a chip wet etching machine convenient to adjust. In order to achieve the above purpose, the present invention adopts the following technical scheme: the chip wet etching machine comprises a mounting seat, a bearing plate and a wet etching machine body, wherein one end of the mounting seat is provided with a cavity, a screw rod is rotationally connected to the cavity, a first gear is fixedly sleeved on the screw rod, a second gear meshed with the first gear is arranged in the cavity, the second gear is rotationally connected with the inner wall of the cavity through a rotating rod, and one end of the rotating rod penetrates through the inner wall of the cavity and is fixedly connected with a knob; The top of the mounting seat is fixedly connected with a support column, one side of the support column, which is close to the bearing plate, is provided with a chute, the top of the screw rod penetrates through the inner wall of the cavity and extends into the chute, one end of the screw rod, which is positioned in the chute, is sheathed with a sliding block through threads, one end of the sliding block is fixedly connected with the bearing plate, the top of the mounting seat is provided with a plurality of symmetrically arranged guide grooves, and a guide mechanism is fixedly connected in the guide grooves; The top of bearing plate is equipped with the mounting groove that corresponds with wet etching machine body, the interior bottom of mounting groove has the backing plate through a plurality of damping bumper shock absorber sliding connection, a plurality of fixture blocks that fixedly connected with symmetry set up on the outer wall of wet etching machine body, the top of bearing plate is equipped with the fixed slot, fixedly connected with and the locking mechanism that the fixture block corresponds in the fixed slot. Preferably, the guide mechanism comprises a guide rod, a supporting block is sleeved on the guide rod in a sliding manner, the supporting block is connected with the bottom of the bearing plate through a connecting rod, and two ends of the connecting rod are respectively connected with the supporting block and the bearing plate in a rotating manner. Preferably, a first spring is sleeved on the guide rod, and two ends of the first spring are fixedly connected with the supporting block and the inner wall of the guide groove respectively. Preferably, the locking mechanism comprises a cross rod, an L-shaped clamping rod is sleeved on the cross rod in a sliding mode, and a clamping groove corresponding to the L-shaped clamping rod is formed in the clamping block. Preferably, the cross rod is sleeved with a second spring, and two ends of the second spring are fixedly connected with the L-shaped clamping rod and the inner wall of the fixing groove respectively. Preferably, one end of the knob is rotatably connected with an arc-shaped inserted rod through a rotating shaft, and a plurality of slots corresponding to the arc-shaped inserted rod are formed in the outer wall of the mounting seat in a surrounding mode. Preferably, a plurality of locking blocks are fixedly connected to the bottom of the mounting seat, and locking openings are formed in the locking blocks. Preferably, the inner side wall of the mounting groove is provided with a supporting groove corresponding to the base plate, a fixing rod is fixedly connected in the supporting groove, and the base plate is provided with a through hole corresponding to the fixing rod. Preferably, the sliding groove is internally fixedl