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CN-121985764-A - Pneumatic leveling device

CN121985764ACN 121985764 ACN121985764 ACN 121985764ACN-121985764-A

Abstract

The invention relates to the technical field of semiconductors, and provides an air pressure leveling device which comprises a feeding mechanism, a detection carrier, a leveling mechanism and a carrying mechanism, wherein the leveling mechanism is used for leveling unqualified products, the carrying mechanism carries the products on a material taking position to the detection carrier for detection, the detection carrier detects qualified products and carries the qualified products back to the material taking position, and the unqualified products detected by the detection carrier are carried to the leveling mechanism for leveling and then are carried to the detection carrier again until the products are qualified. The invention realizes active leveling by uniformly introducing controllable air pressure into the gap between the chip and the bearing platform, eliminates the warpage by using the air pressure to lift and/or press the chip, can avoid mechanical damage in the leveling process, realizes high-precision active leveling, can adapt to different materials, and has the advantages of high efficiency, low damage and good compatibility.

Inventors

  • ZHAO KAI
  • LIN HAITAO
  • LIANG MENG
  • XU MIN
  • LU SHENG

Assignees

  • 上海世禹精密设备股份有限公司

Dates

Publication Date
20260505
Application Date
20260202

Claims (10)

  1. 1. An air pressure leveling device, comprising: the feeding mechanism (1) is used for conveying the tray (101) with the products (100) to the material taking position (191); a detection stage (5) for detecting the quality of the product (100); a leveling mechanism (4) for leveling unqualified products (100); The conveying mechanism (3) conveys the product (100) on the material taking position (191) to the detection carrying platform (5) for detection, conveys the qualified product (100) detected by the detection carrying platform (5) back to the material taking position (191), conveys the unqualified product (100) detected by the detection carrying platform (5) to the leveling mechanism (4) for leveling and conveys the unqualified product (100) to the detection carrying platform (5) again until the product (100) is qualified; And the blanking mechanism (2) stacks the qualified products (100) on the material taking position (191) into a pile.
  2. 2. The pneumatic leveling device according to claim 1, wherein the feeding mechanism (1) comprises a feeding layer stack distributing mechanism and a feeding shuttle mechanism, the feeding layer stack distributing mechanism is provided with a feeding position, the feeding position is used for containing a tray (101) with products (100), and the feeding layer stack distributing mechanism is connected with the discharging mechanism (2) through the feeding shuttle mechanism; the feeding stacking and distributing mechanism comprises a feeding bracket (11), a ball screw (12), a feeding cylinder (13), a feeding driving assembly (14), a feeding tray (15), a guide column (16) and a feeding supporting plate (17); The feeding cylinder (13) and the feeding supporting table (15) are arranged on the feeding bracket (11), the ball screw (12), the feeding driving assembly (14) and the guide column (16) are arranged on the feeding supporting table (15), the feeding supporting plate (17) is sleeved on the ball screw (12) and is in threaded fit with the ball screw (12), and the feeding driving assembly (14) is in driving connection with the ball screw (12); When the ball screw (12) is driven to rotate by the feeding driving assembly (14), the feeding supporting plate (17) can be driven to move upwards or downwards, and the guide column (16) penetrates through the feeding supporting plate (17) and guides the movement of the feeding supporting plate (17).
  3. 3. The pneumatic leveling device of claim 2, wherein the loading shuttle mechanism comprises a loading shuttle (18), a shuttle timing belt (19), a shuttle linear guide, and a shuttle drive assembly; the feeding shuttle (18) is slidably arranged on the shuttle linear guide rail, and the shuttle driving assembly can drive the shuttle synchronous belt (19) to rotate so as to drive the feeding shuttle (18) to slide on the shuttle linear guide rail; The shuttle linear guide rail is provided with a material taking position (191), and compression assemblies (1911) are arranged on two sides of the material taking position (191).
  4. 4. Pneumatic leveling device according to claim 1, characterized in that the blanking mechanism (2) comprises a non-return assembly (21), a jacking plate (22), a jacking cylinder (23), a blanking guide post (24) and a blanking bracket (25); One end of the jacking air cylinder (23) and one end of the blanking guide column (24) are arranged on the blanking support (25), the other end of the jacking air cylinder (23) is connected with the jacking supporting plate (22) and can drive the jacking supporting plate (22) to ascend or descend, the other end of the blanking guide column (24) penetrates through the jacking supporting plate (22) and guides the jacking supporting plate (22) to move up and down, and the check component (21) is arranged on the blanking support (25).
  5. 5. Pneumatic leveling device according to claim 1, characterized in that the handling mechanism (3) comprises an X-axis assembly (31), a Y-axis assembly (32) and a Z-axis assembly (33), both ends of the Y-axis assembly (32) being slidably arranged on the X-axis assembly (31), and the Z-axis assembly (33) being arranged on the Y-axis assembly (32).
  6. 6. The pneumatic leveling device according to claim 5, wherein the X-axis assembly (31) comprises a first support (311), a second support (312), a first sliding rail (313), and an X-axis drive assembly (314), the first sliding rail (313) being arranged on top of the second support (312), the X-axis drive assembly (314) being arranged on top of the first support (311); The Y-axis assembly (32) comprises a Y-axis supporting frame (321), a Y-axis driving assembly (322) and a Y-axis side plate (323), one end of the Y-axis supporting frame (321) is slidably arranged on the first sliding rail (313), the other end of the Y-axis supporting frame (321) is in driving connection with the X-axis driving assembly (314), the X-axis driving assembly (314) can drive the other end of the Y-axis supporting frame (321) to move along the X-axis direction so that one end of the Y-axis supporting frame (321) slides on the first sliding rail (313), the Y-axis driving assembly (322) is arranged on the Y-axis supporting frame (321), the Y-axis side plate (323) is in driving connection with the Y-axis driving assembly (322), and the Y-axis driving assembly (322) can drive the Y-axis side plate (323) to move along the Y-axis direction.
  7. 7. The pneumatic leveling device of claim 6, wherein the Z-axis assembly (33) comprises a Z-axis drive assembly (331), a Z-axis side plate (332), a detection head (333), and a suction nozzle (334); The detection head (333) and one end of the Z-axis driving component (331) are both arranged on the Y-axis side plate (323), the Z-axis side plate (332) is in driving connection with the Z-axis driving component (331), the Z-axis driving component (331) can drive the Z-axis side plate (332) to move along the Z-axis direction, and the suction nozzle (334) is arranged on the Z-axis side plate (332).
  8. 8. The pneumatic leveling device according to claim 1, wherein the leveling mechanism (4) comprises a first support frame (41), a leveling stage (42), a leveling upper plate (43), a leveling driving mechanism (44), a leveling jacking cylinder (45), a sliding rail (46) and a base (47); The leveling driving mechanism (44) and the sliding rail (46) are both arranged on the base (47), the leveling carrying platform (42) is arranged at the top of the first supporting frame (41), the bottom of the leveling jacking cylinder (45) is in driving connection with the leveling driving mechanism (44), and the leveling upper plate (43) is arranged at the top of the leveling jacking cylinder (45); the leveling driving mechanism (44) can drive the leveling jacking air cylinder (45) to move along the Y-axis direction so as to drive the leveling upper plate (43) to move between a first position and a second position, wherein the leveling upper plate (43) is positioned right above the leveling carrying platform (42) when positioned at the first position, and when the leveling upper plate (43) is positioned at the second position, the product (100) is allowed to move up and down right above the leveling carrying platform (42); Leveling space is formed between the leveling upper plate (43) and the leveling carrying table (42) when the leveling upper plate and the leveling carrying table are buckled, the product (100) is configured in the leveling space, and leveling of the product (100) is achieved by inflating the upper part, the lower part or the upper part and the lower part of the product (100).
  9. 9. The pneumatic screeding device of claim 8, wherein said screeding stage (42) has a screeding station thereon for placing a product (100); the leveling carrying table (42) is provided with a plurality of first air inlets (421) which are arranged along the axial square at intervals, and the leveling upper plate (43) is provided with a plurality of second air inlets (431) which are arranged along the axial square at intervals.
  10. 10. The pneumatic leveling device according to claim 1, wherein the detection carrier (5) comprises a second supporting frame (51) and a bearing platform (52), the bearing platform (52) is configured at the top of the second supporting frame (51), the bearing platform (52) is used for fixing a product (100), ribs (521) are configured at the front, back, left and right sides of the bearing platform (52), square spaces are formed inside four ribs (521), and the product (100) is placed in the square spaces.

Description

Pneumatic leveling device Technical Field The invention relates to the technical field of semiconductors, in particular to a pneumatic leveling device. Background Warpage of chips is a common and critical problem in the semiconductor industry, especially in the prior art, due to material stress, mismatch of thermal expansion coefficients, structural design, or other factors, local or global warpage may occur on the chip surface. Such warpage can affect subsequent processes. Pneumatic leveling is a technique for eliminating local height differences (such as warpage and roughness) by uniformly applying a gas pressure to the surface of an object to achieve surface leveling. In the prior art, the process is embedded and leveled, and the generation of warpage is reduced from the source by optimizing process parameters or introducing an auxiliary layer, but the prior technical scheme can only relieve slight warpage, and for wafers with large inherent stress or complex structure, the generation of warpage cannot be completely avoided, and the subsequent active leveling is still needed. Disclosure of Invention In view of the drawbacks of the prior art, an object of the present invention is to provide an air pressure leveling device. According to the present invention, there is provided an air pressure leveling device comprising: The feeding mechanism is used for conveying the tray with the products to the material taking position; the detection carrier is used for detecting the quality of the product; The leveling mechanism is used for leveling unqualified products; the conveying mechanism conveys the products on the material taking position to the detection carrier for detection, conveys qualified products detected by the detection carrier back to the material taking position, conveys unqualified products detected by the detection carrier to the leveling mechanism for leveling and conveys the unqualified products to the detection carrier again until the products are qualified; and the blanking mechanism stacks the qualified products on the material taking position into a pile. Preferably, the feeding mechanism comprises a feeding layer-stacked material distribution mechanism and a feeding shuttle mechanism, wherein the feeding layer-stacked material distribution mechanism is provided with a feeding position used for containing a material tray with products, and the feeding layer-stacked material distribution mechanism is connected with the discharging mechanism through the feeding shuttle mechanism; The feeding layer stacking and distributing mechanism comprises a feeding bracket, a ball screw, a feeding cylinder, a feeding driving assembly, a feeding tray, a guide column and a feeding supporting plate; The feeding cylinder and the feeding support table are arranged on the feeding support, the ball screw, the feeding driving assembly and the guide column are arranged on the feeding support table, the feeding support plate is sleeved on the ball screw and is in threaded fit with the ball screw, and the feeding driving assembly is in driving connection with the ball screw; the feeding driving assembly drives the ball screw to rotate and can drive the feeding supporting plate to move upwards or downwards, and the guide column penetrates through the feeding supporting plate and guides the movement of the feeding supporting plate. Preferably, the feeding shuttle mechanism comprises a feeding shuttle, a shuttle synchronous belt, a shuttle linear guide rail and a shuttle driving assembly; The feeding shuttle is slidably arranged on the shuttle linear guide rail, and the shuttle driving assembly can drive the shuttle synchronous belt to rotate so as to drive the feeding shuttle to slide on the shuttle linear guide rail; The shuttle linear guide rail is provided with a material taking position, and compression assemblies are arranged on two sides of the material taking position. Preferably, the blanking mechanism comprises a non-return component, a jacking supporting plate, a jacking cylinder, a blanking guide post and a blanking bracket; One end of the jacking cylinder and one end of the blanking guide post are both arranged on the blanking support, the other end of the jacking cylinder is connected with the jacking supporting plate and can drive the jacking supporting plate to ascend or descend, the other end of the blanking guide post penetrates through the jacking supporting plate and guides the jacking supporting plate to move up and down, and the non-return assembly is arranged on the blanking support. Preferably, the handling mechanism comprises an X-axis assembly, a Y-axis assembly and a Z-axis assembly, wherein two ends of the Y-axis assembly are slidably arranged on the X-axis assembly, and the Z-axis assembly is arranged on the Y-axis assembly. Preferably, the X-axis assembly comprises a first support, a second support, a first sliding rail and an X-axis driving assembly, wherein the first sliding rail is arrang