Search

CN-121985771-A - Slide boat transfer equipment, substrate processing system and slide boat transfer method

CN121985771ACN 121985771 ACN121985771 ACN 121985771ACN-121985771-A

Abstract

The application relates to the technical field of semiconductor manufacturing processes, in particular to a carrier boat circulation device, a substrate processing system and a carrier boat circulation method, which comprise a carrier boat grabbing crown block, at least one group of carrier boat circulation components and at least one plug-in piece component, wherein the carrier boat circulation components comprise a paddle structure, a raw material buffer zone, a cooling buffer zone and a conveying mechanism which are distributed along the X direction, the paddle structure carries a carrier boat to enter and exit a cavity of the substrate processing device along the Y direction, the carrier boat grabbing crown block is arranged above the carrier boat circulation components, and the carrier boat is transferred among the paddle structure, the raw material buffer zone, the cooling buffer zone and the conveying mechanism; the carrier boat is transferred between the carrier boat and the flower basket by the conveying mechanism and between the running track of the boat-grabbing crown block and the carrier plate assembly. According to the application, the boat grabbing crown block is matched with the regular arrangement of all parts in the slide boat transfer assembly along the X direction, so that the transfer path of the slide boat is shortened, the transfer efficiency is improved, the number of devices is reduced, and the cost of the devices is reduced.

Inventors

  • YAN DA
  • TANG SONGBO

Assignees

  • 江苏微导纳米科技股份有限公司

Dates

Publication Date
20260505
Application Date
20260204

Claims (12)

  1. 1. Slide boat transfer apparatus comprising a boat-holding crown block (100), at least one set of slide boat transfer assemblies (200), and at least one plug-in tab assembly (300), the slide boat transfer assemblies (200) comprising: A paddle structure (201), a raw material buffer area (202), a cooling buffer area (203) and a conveying mechanism (204) distributed along an X direction, wherein the paddle structure (201) is configured to load a slide boat into and out of a chamber of a substrate processing device (400) along a Y direction, the boat capture crown block (100) is arranged above the slide boat transfer assembly (200), and the boat capture crown block (100) is configured to transfer the slide boat among the paddle structure (201), the raw material buffer area (202), the cooling buffer area (203) and the conveying mechanism (204); The patch assembly (300) is configured to transfer substrates between the slide boat and a flower basket (500), and the transport mechanism (204) is configured to transfer the slide boat between the operational trajectory of the boat-holding crown block (100) and the patch assembly (300).
  2. 2. The slide boat circulation apparatus of claim 1, wherein the cooling buffer (203) and the paddle structure (201) are disposed adjacent.
  3. 3. The slide boat transfer apparatus of claim 1 wherein the slide boat transfer assembly (200) includes two of the transport mechanisms (204), the paddle structure (201) and the cooling buffer (203) within the same slide boat transfer assembly (200) being located between the two transport mechanisms (204).
  4. 4. The slide boat transfer apparatus as in claim 3, wherein the number of slide boat transfer assemblies (200) is plural, and the raw material buffer (202) is disposed at a boundary position between two adjacent slide boat transfer assemblies (200) and is configured to be shared by the two slide boat transfer assemblies (200).
  5. 5. The slide boat circulation apparatus of any one of claims 1-4, wherein a plurality of the slide boat circulation assemblies (200) are distributed along the X-direction.
  6. 6. The slide boat transfer apparatus of claim 5 wherein the transport mechanism (204) transports the slide boat in the Y direction.
  7. 7. The slide boat transfer apparatus of any one of claims 1-4, wherein the socket wafer assembly (300) includes a boat side station (301), a basket side station (302), and a robot (303), the boat side station (301) engaged with the transport mechanism (204) for placing a slide boat, the basket side station (302) for placing the basket (500), the robot (303) disposed between the boat side station (301) and the basket side station (302) configured to transfer substrates between the slide boat and the basket (500).
  8. 8. The slide boat transfer apparatus of claim 7 wherein the boat side stations (301) and the basket side stations (302) are each provided in pairs.
  9. 9. The slide boat transfer apparatus of claim 7 wherein one of the peg tab assemblies (300) includes two of the boat-side stations (301) and at least two of the basket-side stations (302).
  10. 10. A substrate processing system, comprising: At least one substrate processing apparatus (400); The slide boat circulation device of any one of claims 1-9, wherein the substrate processing device (400) and corresponding paddle structures (201) in the slide boat circulation device are oppositely disposed along the Y-direction.
  11. 11. The substrate processing system of claim 10, wherein the substrate processing apparatus (400) has a plurality of chambers distributed along the Z-direction, the paddle structure (201) having a paddle body for carrying a slide boat, the paddle body being adjustable along the Z-direction to correspond to different chambers.
  12. 12. A slide boat transfer method suitable for use in the slide boat transfer apparatus of any one of claims 1-9, wherein the slide boat comprises a clinker boat and a raw material boat, the slide boat transfer method comprising the steps of: The paddle structure (201) takes out the clinker boat from the cavity of the substrate processing equipment (400), the boat grabbing crown block (100) transfers the clinker boat from the paddle structure (201) to the cooling buffer zone (203), after cooling is finished, the boat grabbing crown block (100) transfers the clinker boat from the cooling buffer zone (203) to the conveying mechanism (204), and the conveying mechanism (204) transfers the clinker boat to the plug-in sheet assembly (300); The conveying mechanism (204) transfers a raw material boat from the plug-in sheet assembly (300) to a station below the boat grabbing crown block (100), the boat grabbing crown block (100) transfers the raw material boat to a raw material buffer zone (202), and when feeding is needed, the boat grabbing crown block (100) transfers the raw material boat from the raw material buffer zone (202) to the paddle structure (201), and the paddle structure (201) sends the raw material boat into a chamber of the substrate processing equipment (400).

Description

Slide boat transfer equipment, substrate processing system and slide boat transfer method Technical Field The application relates to the technical field of semiconductor manufacturing processes, in particular to a slide boat circulation device, a substrate processing system and a slide boat circulation method. Background The related art substrate processing system as shown in fig. 1, the transfer process of the slide boat is as follows: The paddle structure 1 'takes out the clinker boat from the chamber of the substrate processing apparatus 2', the outside gripping jaw 3 'transfers the clinker boat from the paddle structure 1' to the first transfer passage 4', the first transfer passage 4' transfers the clinker boat from the a region to the B region, the boat-gripping crown block 5 'transfers the clinker boat from the first transfer passage 4' to the cooling buffer 6 'and transfers the clinker boat from the cooling buffer 6' to the second transfer passage 7 'after cooling, the second transfer passage 7' transfers the clinker boat from the B region to the plug assembly and transfers the raw material boat from the plug assembly to the B region, the boat-gripping crown block 5 'transfers the raw material boat from the second transfer passage 7' to the raw material buffer 8 'and transfers the raw material boat from the raw material buffer 8' to the first transfer passage 4 'when loading is required, the outside gripping jaw 3' transfers the raw material boat from the first transfer passage 4 'to the paddle structure 1' transfers the raw material boat from the first transfer passage 4 'to the plug assembly and transfers the raw material boat from the plug assembly to the B region to the chamber of the substrate processing apparatus 2'. It can be seen that the boat taking and changing actions of the related slide boat transfer system are complex, and the adopted automatic equipment is relatively more, so that the equipment cost is high, the occupied area is large, fault maintenance points are increased, and the working efficiency is low. Disclosure of Invention The application aims to provide a slide boat circulation device, a substrate processing system and a slide boat circulation method, which solve the problems of complex boat taking and changing actions, high equipment cost and low working efficiency, and the specific scheme is as follows: a slide boat transfer apparatus comprising a boat-holding crown block, at least one set of slide boat transfer assemblies, and at least one plug-in tab assembly, the slide boat transfer assemblies comprising: The device comprises a paddle structure, a raw material buffer area, a cooling buffer area and a conveying mechanism, wherein the paddle structure, the raw material buffer area, the cooling buffer area and the conveying mechanism are distributed along the X direction, the paddle structure is configured to load a slide boat to enter and exit a chamber of substrate processing equipment along the Y direction, a boat grabbing crown block is arranged above a slide boat circulation assembly, and the boat grabbing crown block is configured to transfer the slide boat among the paddle structure, the raw material buffer area, the cooling buffer area and the conveying mechanism; The jack-in piece assembly is configured to transfer substrates between the slide boat and a flower basket, and the conveying mechanism is configured to transfer the slide boat between the boat-grabbing crown block running track and the jack-in piece assembly. Optionally, the cooling buffer and the paddle structure are disposed adjacent. Optionally, the slide boat circulation assembly includes two conveying mechanisms, and the paddle structure and the cooling buffer area in the same slide boat circulation assembly are located between the two conveying mechanisms. Optionally, the number of the slide boat circulation assemblies is multiple, and the raw material buffer area is disposed at the junction position of two adjacent slide boat circulation assemblies and is configured to be shared by the two slide boat circulation assemblies. Optionally, a plurality of the slide boat circulation assemblies are distributed along the X-direction. Optionally, the transport mechanism transports the slide boat in the Y-direction. Optionally, the plug-in piece assembly comprises a boat side station, a basket side station and a manipulator, wherein the boat side station is connected with the conveying mechanism and used for placing a slide boat, the basket side station is used for placing the basket, and the manipulator is arranged between the boat side station and the basket side station and is configured to transfer a substrate between the slide boat and the basket. Optionally, the boat side station and the basket side station are arranged in pairs. Optionally, one of the plug-in tab assemblies includes two of the boat-side stations and at least two of the basket-side stations. The present application also provides a su