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CN-121985778-A - Quality inspection device for wafer flow sheet

CN121985778ACN 121985778 ACN121985778 ACN 121985778ACN-121985778-A

Abstract

The application relates to a quality inspection device for wafer flow sheets, which relates to the technical field of chip manufacturing and comprises a connecting support column used for supporting a chip backboard, wherein the connecting support column is fixedly arranged on a conveying sliding block, and an adsorption port is arranged at the top of the connecting support column. The application supports and vacuum adsorbs from the lower part of the chip backboard (non-circuit surface) through the connecting support column, and then the chip is driven to horizontally move to the quality inspection station by the conveying chain. The process completely avoids the contact, compression or friction of components such as the suction nozzle and the like on the precise circuit on the front side of the chip, thereby thoroughly solving the core problem of scratching, polluting or electrostatically damaging the circuit of the chip due to the deviation of the adsorption position in the background technology, obviously improving the safety and yield of the chip in the transferring process, and being particularly suitable for the quality inspection circulation of high-precision and high-value chips.

Inventors

  • ZHANG MAOJIE
  • LIN HONGYING
  • Huang Bokai
  • LI PENGFEI
  • GAO TINGTING

Assignees

  • 安徽丰芯半导体有限公司

Dates

Publication Date
20260505
Application Date
20251217

Claims (6)

  1. 1. The quality inspection device for the wafer flow sheet is characterized by comprising a connecting support column (25) for supporting a chip backboard, wherein the connecting support column (25) is fixedly arranged on a conveying sliding block (17), and an adsorption port is formed in the top of the connecting support column (25).
  2. 2. The quality inspection device for wafer flow sheets according to claim 1, wherein a supporting base (6) is arranged on the frame, a conveying groove (5) is arranged on the supporting base (6), the conveying groove (5) is in sliding connection with a conveying sliding block (17), and the conveying sliding block (17) is arranged on a conveying chain (2).
  3. 3. The quality inspection device for wafer flow sheets according to claim 2, further comprising an auxiliary processing mechanism (3), wherein the auxiliary processing mechanism (3) comprises a limiting bottom plate (14), the limiting bottom plate (14) is fixedly installed on a rack, a sliding limiting column (11) is slidably arranged on the limiting bottom plate (14), a supporting bottom plate (21) is fixedly arranged at the top of the sliding limiting column (11), an adsorption disc (22) is arranged on the supporting bottom plate (21), and the distance between the supporting bottom plate (21) and the limiting bottom plate (14) is adjustable.
  4. 4. A wafer flow sheet quality inspection device according to claim 3, characterized in that a tension spring (12) is fixed between the supporting bottom plate (21) and the limiting bottom plate (14), a matching seat (13) is fixed at the bottom of the supporting bottom plate (21), an upper inclined surface (7) is arranged on the matching seat (13), an upper contact end (8) is arranged on the upper inclined surface (7), the upper contact end (8) is the bottommost end, a pushing seat (20) is slidably arranged on the limiting bottom plate (14), a lower inclined surface (10) is arranged on the pushing seat (20), and a lower contact end (9) is arranged on the lower inclined surface (10).
  5. 5. The wafer flow quality inspection device according to claim 4, wherein a side limit lever (18) is rotatably provided on the support base (6), the side limit lever (18) acts on the transfer slider (17) when the transfer slider (17) moves to the side limit lever (18) position, and the side limit lever (18) is fixedly mounted on the rotation base (26).
  6. 6. The wafer flow quality inspection device according to claim 5, wherein the rotating base (26) is rotatably mounted on the supporting base (6) through a torsion spring, a rotating disc (23) is fixed on a rotating shaft of the rotating base (26), the rotating shaft is rotatably connected with the supporting base (6), a rotating rod (24) is fixed on the rotating disc (23), a bottom limiting base (16) is fixed on the limiting base plate (14), a rotating limiting sliding block (19) is slidably arranged on the bottom limiting base (16), the rotating limiting sliding block (19) is fixedly connected with the pushing seat (20), and a connecting rod (15) is rotatably arranged on the rotating limiting sliding block (19), and the connecting rod (15) is fixedly connected with the rotating rod (24).

Description

Quality inspection device for wafer flow sheet Technical Field The invention relates to the technical field of chip manufacturing, in particular to a quality inspection device for wafer flow sheets. Background When the chip is in between, need fix the chip on the backplate, absorb the chip through the top to the backplate on absorbing the quality control position to realize the position transfer to the chip, but in-process, need leave fixed region on the backplate of chip for realize adsorbing, if there is the skew in adsorbed position, then can influence the quality of chip, cause certain influence to the circuit on the chip. Disclosure of Invention The invention aims to provide a quality inspection device for wafer flow sheets. The invention solves the technical problem of adsorption dislocation caused by adsorption on the upper part of the chip backboard in the prior art. The quality inspection device for the wafer flow sheet comprises a connecting support column used for supporting a chip backboard, wherein the connecting support column is fixedly arranged on a conveying sliding block, and an adsorption port is formed in the top of the connecting support column. The invention further technically improves that a support base is arranged on the frame, a conveying groove is arranged on the support base, the conveying groove is connected with a conveying sliding block in a sliding mode, and the conveying sliding block is arranged on a conveying chain. The invention further technically improves that the machine tool comprises an auxiliary machining mechanism, wherein the auxiliary machining mechanism comprises a limiting bottom plate, the limiting bottom plate is fixedly arranged on the frame, a sliding limiting column is arranged on the limiting bottom plate in a sliding mode, a supporting bottom plate is fixed at the top of the sliding limiting column, an adsorption disc is arranged on the supporting bottom plate, and the distance between the supporting bottom plate and the limiting bottom plate is adjustable. The invention further technically improves that a tension spring is fixed between the supporting bottom plate and the limiting bottom plate, a matching seat is fixed at the bottom of the supporting bottom plate, an upper inclined surface is arranged on the matching seat, an upper contact end is arranged on the upper inclined surface, the upper contact end is the bottommost end, a pushing seat is arranged on the limiting bottom plate in a sliding manner, a lower inclined surface is arranged on the pushing seat, and a lower contact end is arranged on the lower inclined surface. The invention further technically improves that a side limit rod is rotatably arranged on the supporting base, and when the conveying sliding block moves to the position of the side limit rod, the side limit rod acts on the conveying sliding block and is fixedly arranged on the rotating base. The invention further technically improves that the rotating base is rotatably arranged on the supporting base through a torsion spring, a rotating disc is fixed on a rotating shaft of the rotating base, the rotating shaft is rotatably connected with the supporting base, a rotating rod is fixed on the rotating disc, a bottom limiting base is fixed on a limiting bottom plate, a rotating limiting sliding block is slidably arranged on the bottom limiting base, the rotating limiting sliding block is fixedly connected with the pushing seat, a connecting rod is rotatably arranged on the rotating limiting sliding block, and the connecting rod is fixedly connected with the rotating rod. Compared with the prior art, the invention has the following beneficial effects: 1. The application supports and vacuum adsorbs from the lower part of the chip backboard (non-circuit surface) through the connecting support column, and then the chip is driven to horizontally move to the quality inspection station by the conveying chain. The process completely avoids the contact, compression or friction of components such as the suction nozzle and the like on the precise circuit on the front side of the chip, thereby thoroughly solving the core problem of scratching, polluting or electrostatically damaging the circuit of the chip due to the deviation of the adsorption position in the background technology, obviously improving the safety and yield of the chip in the transferring process, and being particularly suitable for the quality inspection circulation of high-precision and high-value chips. 2. The device designs a set of precise mechanical linkage mechanism (auxiliary processing mechanism). When the conveying sliding block for carrying the chip runs to the quality inspection station, the side limit rod is touched and pushed, and the motion is converted into horizontal motion of the pushing seat through a series of components such as the rotating base, the rotating disc, the rotating rod, the connecting rod and the like. The lower inclined surface on the pushing s