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CN-121985781-A - Vacuum chuck device for multi-specification quartz ring

CN121985781ACN 121985781 ACN121985781 ACN 121985781ACN-121985781-A

Abstract

The invention discloses a vacuum chuck device for a multi-specification quartz ring, and relates to the field of workshop devices. Including quartz vacuum chuck body, the center of quartz vacuum chuck body is equipped with central fixed disk, quartz vacuum chuck body with be equipped with a plurality of vacuum ring chamber between the central fixed disk, the vacuum ring chamber is equipped with ring chamber along the both ends on self diameter direction respectively and draws air cross bore and gas transmission cross bore, ring chamber draws air cross bore and the vertical hole intercommunication of drawing air of ring chamber, the vertical hole of drawing air of ring chamber communicates with the annular groove of drawing air, the gas transmission cross bore with the annular groove cuts off of drawing air. Through the adjustable connection of the gas circuit, when the annular cavity air extraction vertical hole is communicated with the through air extraction hole, the air extraction annular groove of the corresponding vacuum annular cavity is extracted to form negative pressure, and meanwhile, the annular cavity air extraction vertical hole is not communicated with the vacuum annular cavity communicated with the through air extraction hole, the gas circuit of the air extraction annular groove is communicated with the atmosphere, and the air circuit of the annular cavity air extraction vertical hole is not interfered with the air extraction annular groove of the negative pressure area.

Inventors

  • WANG ZIHAN
  • WU RANHONG
  • YANG JUN

Assignees

  • 杭州大和热磁电子有限公司

Dates

Publication Date
20260505
Application Date
20251231

Claims (10)

  1. 1. A vacuum chuck device for many specifications quartz ring, its characterized in that includes quartz vacuum chuck body (1), the center of quartz vacuum chuck body (1) is equipped with central fixed disk (19), quartz vacuum chuck body (1) with be equipped with a plurality of vacuum ring chamber between central fixed disk (19), vacuum ring chamber is equipped with ring chamber transverse air extraction hole (17) and gas transmission transverse hole (20) respectively along the both ends on self diameter direction, ring chamber transverse air extraction hole (17) and the vertical air extraction hole (18) intercommunication of ring chamber, the vertical air extraction hole (18) of ring chamber and air extraction annular (21) intercommunication, gas transmission transverse hole (20) with air extraction annular (21) cut off.
  2. 2. The vacuum chuck device for the multi-specification quartz ring according to claim 1, wherein the number of the vacuum ring cavities is at least two, a ring cavity sealing ring (10) is arranged between the vacuum ring cavities, the ring cavity sealing ring (10) is also arranged at the connecting position of the vacuum ring cavities and the quartz vacuum chuck body (1), the first vacuum ring cavity (11) is connected with the quartz vacuum chuck body (1), and one end of the quartz vacuum chuck body (1) is provided with a through air suction hole (23).
  3. 3. Vacuum chuck device for multi-gauge quartz ring according to claim 2, characterized in that the through-going pumping holes (23) are in communication with the gas transmission transversal holes (20) of the first vacuum ring chamber (11).
  4. 4. Vacuum chuck device for multi-gauge quartz ring according to claim 2, characterized in that the through pumping hole (23) is in communication with the ring cavity pumping cross hole (17) of the first vacuum ring cavity (11).
  5. 5. Vacuum chuck device for multi-specification quartz ring according to claim 2 or 3 or 4, characterized in that the through-air suction hole (23) is connected with the vacuum leather tube (4), a vacuum joint (2) is installed at the connection position of the through-air suction hole (23) and the vacuum leather tube (4), the inner wall of the vacuum joint (2) is fixedly connected with the vacuum leather tube (4), and the outer wall of the vacuum joint (2) is inserted into the through-air suction hole (23).
  6. 6. Vacuum chuck device for multi-gauge quartz rings according to claim 5, characterized in that a joint sealing ring (3) is provided between the vacuum joint (2) and the quartz vacuum chuck body (1).
  7. 7. The vacuum chuck device for the multi-specification quartz ring according to claim 1 or 2 or 3 or 4 or 6, wherein a press plate matching notch (24) is formed in the outer edge of the quartz vacuum chuck body (1), the quartz vacuum chuck body (1) is arranged on a workbench (5), a plurality of T-shaped sliding grooves (25) are formed in the upper surface of the workbench (5), and the T-shaped sliding grooves (5) are parallel to the press plate matching notch (24).
  8. 8. The vacuum chuck device for the multi-specification quartz ring according to claim 7, wherein a fixing assembly is slidably arranged at the T-shaped sliding groove (25), the fixing assembly comprises a T-shaped sliding block (7), a cushion block (9) and a pressing plate (6), and one end of the pressing plate (6) is connected with the pressing plate matching notch (24).
  9. 9. The vacuum chuck device for the multi-specification quartz ring according to claim 8, wherein the other end of the pressing plate (6) is fixedly connected with the T-shaped sliding block (7) and the cushion block (9) through bolts (8).
  10. 10. A vacuum chuck device for multi-specification quartz ring according to claim 1 or 2 or 3 or 4 or 6 or 8 or 9, characterized in that the top of the vacuum ring cavity is provided with a clamping groove piece mounting part (22), and the clamping groove piece mounting part (22) between two adjacent vacuum ring cavities is spliced with a fixed clamping groove piece (16).

Description

Vacuum chuck device for multi-specification quartz ring Technical Field The invention relates to the field of workshop devices, in particular to a vacuum chuck device for a multi-specification quartz ring. Background The quartz ring and cake products are necessary products in semiconductor equipment, in the prior art, after the conventional quartz products are heated on a heating platform, high-strength paraffin is coated on the products and a quartz fixed disc to enable the products and the fixed disc to be well adhered, then the products and the fixed disc are cooled, the fixed disc is clamped on a machine tool workbench by a clamp, after the processing is finished, the fixed disc adhered with the products is placed on the heating platform to be heated to enable the paraffin to be dissolved, and the grease is washed by boiling water. Because in the operation process, the degree of coincidence of product and fixed disk is difficult to guarantee, and the electric quantity consumption is great simultaneously, and the repeated handling work load is big, and clamping location is time-consuming, and frequently glues dewaxing and go up the unloading and cause artificial fish tail easily, bump etc. bad. Publication number CN118418313a discloses "a quartz ring vacuum chuck jig", and it can adsorb the fixed to the quartz ring through flexible chuck deformation laminating quartz ring's shape, but can not adjust its adsorption structure to the quartz ring of equidimension, and the size of the quartz ring that can adsorb has the limitation. Disclosure of Invention The invention aims to form quartz ring adsorption disc structures with different adsorption areas according to the needs by arbitrarily splicing and combining the ring cavity air suction cross holes and the air transmission cross holes, and the vacuum ring cavities are mutually independent, so that the air paths are not mutually interfered, and the air suction efficiency is ensured. The invention further aims to freely combine and splice different vacuum ring cavity structures by arranging a plurality of vacuum ring cavities, and limit the connection combination between ring cavity air extraction transverse holes and air transmission transverse holes of different vacuum ring cavities by symmetrically distributed clamping groove sheet mounting parts, so that the invention can adapt to the fixation of different disc-shaped or annular quartz rings in a large size range. The invention achieves the aim of the invention by the following technical means: The utility model provides a vacuum chuck device for quartzy ring of many specifications, includes quartzy vacuum chuck body, the center of quartzy vacuum chuck body is equipped with central fixed disk, quartzy vacuum chuck body with be equipped with a plurality of vacuum ring chamber between the central fixed disk, the vacuum ring chamber is equipped with the ring chamber along the both ends on self diameter direction respectively and draws air cross bore and defeated gas cross bore, the ring chamber draws air cross bore and the vertical hole intercommunication of drawing air of ring chamber, the vertical hole of drawing air of ring chamber and the annular intercommunication of drawing air, defeated gas cross bore with the annular wall of drawing air. Further, the vacuum ring cavity at least comprises two, a ring cavity sealing ring is arranged between the vacuum ring cavities, the ring cavity sealing ring is also arranged at the connecting position of the vacuum ring cavity and the quartz vacuum chuck body, the first vacuum ring cavity is connected with the quartz vacuum chuck body, and one end of the quartz vacuum chuck body is provided with a through air suction hole. Further, the through air suction hole is communicated with the air transmission transverse hole of the first vacuum annular cavity. Preferably, the through air suction hole is communicated with the annular cavity air suction transverse hole of the first vacuum annular cavity. Further, the through air suction hole is connected with the vacuum leather tube, a vacuum joint is arranged at the connection position of the through air suction hole and the vacuum leather tube, the inner wall of the vacuum joint is fixedly connected with the vacuum leather tube, and the outer wall of the vacuum joint is inserted into the through air suction hole. Further, a joint sealing ring is arranged between the vacuum joint and the quartz vacuum chuck body. Further, a pressing plate matching notch is formed in the outer edge of the quartz vacuum chuck body, the quartz vacuum chuck body is arranged on the workbench, a plurality of T-shaped sliding grooves are formed in the upper surface of the workbench, and the T-shaped sliding grooves are parallel to the pressing plate matching notch. Further, the T-shaped sliding groove is provided with a fixing assembly in a sliding mode, the fixing assembly comprises a T-shaped sliding block, a cushion block and a pressing plate, a