CN-121985784-A - Method for inspecting semiconductor storage container and cleaning apparatus

CN121985784ACN 121985784 ACN121985784 ACN 121985784ACN-121985784-A

Abstract

The present application relates to a method for inspecting a semiconductor memory container and a cleaning apparatus. The detection method comprises the steps of moving a semiconductor storage container to be cleaned to a detection unit, enabling a cover body of the semiconductor storage container to be located below a box body of the semiconductor storage container in the gravity direction of the semiconductor storage container, enabling the detection unit to be arranged in cleaning equipment, separating the cover body from the box body, enabling a detection space to exist between the cover body and the box body, and confirming whether foreign matters exist on the cover body from the detection space. The detection method does not prolong the cleaning period of the cleaning equipment, and further improves the cleaning effect of the cleaning equipment on the premise of ensuring the cleaning efficiency. In addition, the detecting unit is arranged inside the cleaning device, so that the space utilization efficiency inside the cleaning device of the semiconductor storage container is improved, and the size of the device is not required to be increased while the detecting device for the residual foreign matters in the semiconductor storage container is increased.

Inventors

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Assignees

江苏芯梦半导体设备有限公司

Dates

Publication Date: 20260505
Application Date: 20241029

Claims (10)

1. A method of inspecting a semiconductor storage container, the method comprising: A transferring step of transferring a semiconductor storage container to be cleaned to a detecting unit, and enabling a cover body of the semiconductor storage container to be positioned below a box body of the semiconductor storage container, wherein the detecting unit is arranged in a cleaning device and is positioned above a feeding unit, and the cleaning device is used for cleaning the semiconductor storage container; A container separation step, wherein a driving mechanism separates the cover body from the box body, and forms a detection space between the cover body and the box body, the driving mechanism is arranged on the detection unit, and the height of the detection space is smaller than a first preset threshold value; And a foreign matter detection step of confirming whether or not a foreign matter is present on the cover body from the detection space, the foreign matter being an object other than the semiconductor storage container.
2. The method for inspecting a semiconductor storage container according to claim 1, wherein in the transferring step, comprising: and moving the semiconductor storage container to be cleaned to the detection unit by using a transfer unit, wherein the transfer unit is far away from the detection unit after the semiconductor storage container is moved to the detection unit.
3. The method for inspecting a semiconductor storage container according to claim 1, wherein in the transferring step, comprising: And moving the semiconductor storage container to be cleaned to the detection unit by using a conveying mechanism.
4. The method for inspecting a semiconductor memory container according to claim 1, further comprising, after the foreign matter inspection step, the steps of: The driving mechanism drives the cover body and the box body to reset; The unlocking mechanism locks the box body and the cover body; sending a request signal to a control unit; The transferring unit moves to the detecting unit; The transfer unit grips the semiconductor storage container in the inspection unit.
5. The method of inspecting a semiconductor storage container according to claim 4, further comprising the step of, after the transfer unit grips the semiconductor storage container in the inspection unit: Removing the semiconductor storage container after the inspection from the inspection unit; When the cover body confirms that the foreign matters exist, the transfer unit performs a discharging action on the semiconductor storage container; and when the cover body confirms that the foreign matters are not present, the transfer unit transfers the semiconductor storage container to a cleaning unit, and the cleaning unit is used for cleaning the semiconductor storage container.
6. The method for inspecting a semiconductor storage container according to claim 1, further comprising the step of, before the transfer unit moves the semiconductor storage container to be cleaned to the inspection unit: and moving the semiconductor storage container to be cleaned to a feeding unit, and weighing and detecting the semiconductor storage container to be cleaned.
7. A method of inspecting a semiconductor storage container, the method comprising: A weighing detection step, namely weighing and detecting a semiconductor storage container to be cleaned in a feeding unit, and dividing the semiconductor storage container to be cleaned into the semiconductor storage container to be cleaned which is qualified in weighing detection and the semiconductor storage container to be cleaned which is unqualified in weighing detection; A transferring step, in which a transferring unit transfers the semiconductor storage container to be cleaned, which is unqualified in weighing detection, to a detecting unit, wherein a cover body of the semiconductor storage container is positioned below a box body of the semiconductor storage container, the detecting unit is arranged in cleaning equipment, and the cleaning equipment is used for cleaning the semiconductor storage container; A container separation step, wherein a driving mechanism separates the cover body and the box body of the disqualified semiconductor storage container to be cleaned from each other, and forms a detection space between the cover body and the box body, the driving mechanism is arranged in the detection unit, and the height of the detection space is smaller than a first preset threshold value; And a foreign matter detection step of confirming whether or not a foreign matter is present on the cover body from the detection space, the foreign matter being an object other than the semiconductor storage container.
8. The method of inspecting a semiconductor memory container according to claim 7, further comprising the step of, after said confirming from said inspection space whether or not there is a foreign matter on said cover: The driving mechanism drives the cover body and the box body to reset; The unlocking mechanism locks the box body and the cover body; sending a request signal to a control unit; The transferring unit moves to the detecting unit; The transfer unit grips the semiconductor storage container in the inspection unit.
9. The method of inspecting a semiconductor storage container according to claim 8, further comprising the step of, after the transfer unit grips the semiconductor storage container in the inspection unit: Removing the semiconductor storage container after the inspection from the inspection unit; When the cover body confirms that the foreign matters exist, the transfer unit performs a discharging action on the semiconductor storage container; and when the cover body confirms that the foreign matters are not present, the transfer unit transfers the semiconductor storage container to a cleaning unit, and the cleaning unit is used for cleaning the semiconductor storage container.
10. The cleaning equipment for the semiconductor storage container comprises a box body and a cover body, and is characterized by comprising a detection unit, a feeding unit, a cleaning unit and a transferring unit, The feeding unit is used for feeding the semiconductor storage container; The transfer unit is used for realizing the circulation of the semiconductor storage accommodated among the feeding unit, the cleaning unit and the detection unit; The cleaning unit is used for cleaning the semiconductor storage container which is detected by the detection unit; The detection unit includes a detection device including: The bearing mechanism is used for placing the semiconductor storage container, and when the semiconductor storage container is placed in the bearing mechanism, the cover body of the semiconductor storage container is positioned below the box body of the semiconductor storage container; The driving mechanism is used for driving the cover body or the box body so as to enable the cover body and the box body to generate relative displacement, and a gap exists between the cover body and the box body; the unlocking mechanism is used for unlocking and locking the box body and the cover body; A detection mechanism for confirming whether or not a foreign matter exists on the cover from the gap; And the control unit is electrically connected with the driving mechanism, the unlocking mechanism and the detection mechanism, and is used for dispatching the transferring unit.

Description

Method for inspecting semiconductor storage container and cleaning apparatus Technical Field The present application relates to the field of semiconductor technology, and in particular, to a method for detecting a semiconductor storage container and a cleaning apparatus for the same. Background During semiconductor wafer fabrication, wafers are stored in FOUPs (Front Opening Unified Pod, front opening unified pods) for transfer between different process tools. Since the wafer is subjected to different processes, particularly a wet chemical process, contaminants adhere to the wafer surface, and when stored inside the FOUP, the contaminants contaminate the FOUP by contacting, thereby contaminating the next lot of stored wafers. Therefore, the FOUP is sent to special equipment for cleaning at regular intervals to ensure the cleanliness of the FOUP. In fact, in the case where there is a residual wafer in the FOUP that is fed into the full-automatic cleaning machine for cleaning, the wafer or wafer fragment remaining in the FOUP may not only damage the full-automatic cleaning machine, but also damage the residual wafer, causing a large loss to the wafer processing factory. Therefore, it is necessary to confirm whether or not a wafer remains in the FOUP before cleaning the FOUP. However, a separate inspection mechanism is required to confirm whether a wafer remains in the FOUP, affecting the cleaning efficiency of the cleaning apparatus. Disclosure of Invention In view of the above, embodiments of the present application provide a method and a cleaning apparatus for inspecting a semiconductor storage container to solve at least one of the problems in the related art. In a first aspect, an embodiment of the present application provides a method for detecting a semiconductor storage container, including: A transferring step of transferring a semiconductor storage container to be cleaned to a detecting unit, and enabling a cover body of the semiconductor storage container to be positioned below a box body of the semiconductor storage container, wherein the detecting unit is arranged in a cleaning device and is positioned above a feeding unit, and the cleaning device is used for cleaning the semiconductor storage container; A container separation step, wherein a driving mechanism separates the cover body from the box body, and forms a detection space between the cover body and the box body, the driving mechanism is arranged on the detection unit, and the height of the detection space is smaller than a first preset threshold value; And a foreign matter detection step of confirming whether or not a foreign matter is present on the cover body from the detection space, the foreign matter being an object other than the semiconductor storage container. With reference to the first aspect of the present application, in an optional implementation manner, in the transferring step, the method includes: and moving the semiconductor storage container to be cleaned to the detection unit by using a transfer unit, wherein the transfer unit is far away from the detection unit after the semiconductor storage container is moved to the detection unit. With reference to the first aspect of the present application, in an optional implementation manner, in the transferring step, the method includes: And moving the semiconductor storage container to be cleaned to the detection unit by using a conveying mechanism. With reference to the first aspect of the present application, in an optional implementation manner, after the foreign object detection step, the method further includes the step of: The driving mechanism drives the cover body and the box body to reset; The unlocking mechanism locks the box body and the cover body; sending a request signal to a control unit; The transferring unit moves to the detecting unit; The transfer unit grips the semiconductor storage container in the inspection unit. With reference to the first aspect of the present application, in an optional implementation manner, after the transferring unit grabs the semiconductor storage container in the detecting unit, the method further includes the steps of: Removing the semiconductor storage container after the inspection from the inspection unit; When the cover body confirms that the foreign matters exist, the transfer unit performs a discharging action on the semiconductor storage container; and when the cover body confirms that the foreign matters are not present, the transfer unit transfers the semiconductor storage container to a cleaning unit, and the cleaning unit is used for cleaning the semiconductor storage container. In combination with the first aspect of the present application, in an alternative embodiment, before the transferring unit moves the semiconductor storage container to be cleaned to the inspection unit, the method further includes the steps of: and moving the semiconductor storage container to be cleaned to a feeding unit, and weighing and de