CN-121986011-A - Modular fluid delivery assembly

Abstract

A fluid assembly includes a base and at least one first device. The base includes a single piece body including a base outlet, a base inlet, and a first interface including a first interface inlet and a first interface outlet. The base also includes a first flow path section formed within the single-piece body that extends from the base inlet to the first interface outlet. The base also includes a second flow path section formed within the single-piece body, the second flow path section extending from the first interface inlet. The base also includes a ground path disposed within the one-piece body. The first device is attachable to the first interface to fluidly connect a first device inlet to the first interface outlet and a second device outlet to the second interface inlet.

Inventors

• R. MARTINEZ
• J. Langalazhan
• MUSTAFA SELIM
• T. K. Abichandani
• L. Sikola
• LIU SHIYOU
• H.X.Macro

Assignees

• 应用材料公司

Dates

Publication Date

20260505

Application Date

20240829

Priority Date

20230901

Claims (20)

1. 1. A fluid assembly, the fluid assembly comprising: a base, the base comprising: A single piece body comprising a base outlet, a base inlet, and a first interface comprising a first interface inlet and a first interface outlet; a first flow path section formed within the single-piece body extending from the base inlet to the first interface outlet; a second flow path section formed within the single-piece body extending from the first interface inlet, and And a ground path disposed within the single-piece body.
2. 2. The fluidic assembly of claim 1, wherein the single-piece body is formed by three-dimensional printing.
3. 3. The fluid assembly of claim 1, the base further comprising an integral valve comprising a first valve member formed within the one-piece body movable from an open position allowing fluid flow through the integral valve and a closed position blocking flow through the integral valve.
4. 4. A fluid assembly as defined in claim 3, wherein the first flow path comprises the integral valve, and wherein the first valve member blocks fluid flow through the first flow path when in the closed position.
5. 5. A fluid assembly as in claim 3, wherein the unitary valve and single-piece body are formed together by three-dimensional printing.
6. 6. The fluid assembly of claim 3, wherein the first valve member is attachable to a valve actuator configured to move the first valve member between the open and closed positions.
7. 7. The fluidic assembly of claim 1, wherein the ground path is formed by three-dimensional printing of conductive material while forming the single piece base.
8. 8. The fluid assembly of claim 1, wherein the ground path extends from a first contact at a first end of the base to a second contact at a second end of the base.
9. 9. The fluidic assembly of claim 1, further comprising: A first device attachable to the first interface to fluidly connect a first device inlet to the first interface outlet and a second device outlet to the second interface inlet.
10. 10. The fluidic assembly of claim 9, wherein the ground path extends to a first interface contact formed on the interface surface, the first interface contact configured to interface with a first device contact of the first device.
11. 11. The fluidic assembly of claim 9, the ground path comprising: a first ground section formed in the one-piece body and including a first interface contact formed on the interface surface; A second ground section formed in the one-piece body and including a second interface contact formed on the interface surface, and A third ground section is formed in the first device that is engageable with the first and second interface contacts when the first device is attached to the interface surface.
12. 12. The fluidic assembly of claim 9, wherein the first device is selected from the group consisting of a valve, a pressure transducer, a flow controller, a flow meter, a temperature sensor, a check valve, a pressure regulator, and a mixer.
13. 13. The fluidic assembly of claim 1, further comprising: The base comprises a second interface, and the second interface comprises a second interface outlet and a second interface inlet; The second flow path section in the single piece body extends from the first interface inlet of the first interface to the second interface outlet of the second interface; a third flow path section in the single-piece body extends from the second interface inlet of the second interface.
14. 14. The fluidic assembly of claim 13, further comprising a second device inlet and a second device outlet, the second device attachable to the base at the second interface to connect the second device inlet to the second interface outlet and the second device outlet to the second interface inlet.
15. 15. The fluid assembly of claim 13, wherein the third flow path section extends to the base outlet.
16. 16. A fluid conduit, the fluid conduit comprising: a one-piece conduit body including an interior flow path and an end portion; a plurality of connectors formed on the one-piece conduit body, each connector including an opening in communication with the internal flow path, and A nut disposed about the end portion; wherein the pipe body, the plurality of connectors, and the nut are formed by three-dimensional printing such that the nut is fixed to the end portion by at least one breaking member.
17. 17. The fluid conduit of claim 16, comprising: A ground path disposed in the single piece conduit body.
18. 18. The fluid conduit of claim 17, wherein the ground path extends to a first contact provided on the end portion, and wherein the ground path further extends to a connector contact formed on each connector.
19. 19. A valve, the valve comprising: a one-piece body comprising a valve opening and a flow path comprising a valve seat, wherein the one-piece body is formed by three-dimensional printing, and A valve member disposed in the valve opening formed by three-dimensional printing during the forming of the single-piece body, wherein the valve member is movable from an open position that allows fluid flow through the flow path and a closed position that engages the seat to block flow through the flow path.
20. 20. The valve of claim 19, wherein the valve member is a flexible diaphragm three-dimensionally printed within the single piece body.

Description

Modular fluid delivery assembly Technical Field Embodiments of the present disclosure generally relate to fluid assemblies for fluid delivery modules of semiconductor manufacturing systems. Background Integrated circuits are typically formed on a semiconductor substrate by sequentially depositing conductive, semiconductive, and/or insulative layers over the substrate. The fluid is used to facilitate the formation of integrated circuits. The fluid is transported through a fluid transport system that includes piping and fluid transport devices connected from a fluid source to the substrate manufacturing platform. Such piping and fluid handling devices must be assembled. For example, the conduit may be formed from multiple pieces of tubing and fittings that are attached together. Such multi-piece tubing and fluid handling devices may be attachable to one or more multi-piece flow substrates with seals between the interfaces of each of the multi-piece flow substrates. Furthermore, flexible tubing may be included between the different components of the fluid delivery system. As a result, assembly of the fluid delivery system is time consuming and has multiple sealing interfaces that may fail over time. Thus, there is a need in the art for a more compact and modular fluid delivery system that requires less assembly and reduces the number of seals. In addition, some fluids used in integrated circuit fabrication cause static electricity build-up within the fluid delivery system. The electrostatic discharge may damage the fluid delivery system, such as creating holes in the component that lead to leaks. Thus, there is a need in the art for a fluid delivery system that mitigates static discharge. In addition, some tubing connectors require insertion of a dilator sleeve prior to engagement of the tubing with the tubing connector. There is a need in the art for a tubing connector that does not include a dilator sleeve. Disclosure of Invention In one embodiment, a fluid assembly includes a base and at least one first device. The base includes a single-piece body including a base outlet, a base inlet, and a first interface including a first interface inlet and a first interface outlet. The base also includes a first flow path section formed within the single-piece body that extends from the base inlet to the first interface outlet. The base also includes a second flow path section formed within the single-piece body that extends from the first interface inlet. The base also includes a ground path disposed within the single-piece body. The first device is attachable to the first interface to fluidly connect the first device inlet to the first interface outlet and the second device outlet to the second interface inlet. In one embodiment, a fluid conduit includes a one-piece conduit body including an internal flow path and an end portion. The fluid conduit further includes a plurality of connectors formed on the single piece conduit body, each connector including an opening in communication with the internal flow path. The fluid conduit further comprises a nut disposed about the end portion. The pipe body, the plurality of connectors, and the nut are formed by three-dimensional printing such that the nut is secured to the end portion by at least one break-off member. In one embodiment, a valve includes a single piece body including a valve opening and a flow path. The flow path includes a valve seat. The single body is formed by three-dimensional printing. The valve also includes a valve member disposed in the valve opening, the valve member being formed by three-dimensional printing during formation of the one-piece body. The valve member is movable from an open position allowing fluid flow through the flow path and a closed position engaging the seat to block flow through the flow path. In one embodiment, an atomizing nozzle unit includes a one-piece body formed by additive manufacturing and a ground path disposed in the one-piece body. The single piece body includes a first flow path, a second flow path, and a nozzle. The nozzle includes an outer portion, an inner portion, and an annular chamber. The outer portion includes a nozzle port. The inner portion includes a third flow path configured to receive liquid from the second flow path. An annular chamber is disposed within the one-piece body about the inner portion. The annular chamber is configured to distribute gas from the first flow path to mix with liquid exiting the third flow path of the inner portion. Drawings So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only exemplary embodiments of this disclosure and are therefore not to be considered limiting of its scope, for th