CN-121986081-A - Laminated piezoelectric ceramic element and device

Abstract

The invention provides a low-cost lead-free laminated piezoelectric ceramic element which has high insulation and high durability even if the thickness of a piezoelectric ceramic layer is reduced, and can maintain the insulation, and a device using the same. A laminated piezoelectric ceramic element (100) is formed by alternately laminating internal electrodes (104, 105) and piezoelectric ceramic layers (103), wherein the internal electrodes (104, 105) are composed of Ni as a main component, and the piezoelectric ceramic layer (103) is composed of a main phase containing an alkali niobate perovskite oxide and a sub-phase containing an oxide different from the alkali niobate perovskite oxide, and wherein the alkali niobate perovskite oxide contains Mn, ti and Sc.

Inventors

• Panshi kil
• ICHIKI KENTARO
• MARUYAMA KOJI
• YAMAZAKI MASATO

Assignees

• 日本特殊陶业株式会社

Dates

Publication Date

20260505

Application Date

20241030

Priority Date

20240315

Claims (6)

1. 1. A laminated piezoelectric ceramic element comprising an internal electrode and a piezoelectric ceramic layer alternately laminated, wherein the internal electrode contains Ni as a main component, the piezoelectric ceramic layer comprises a main phase containing an alkali niobate perovskite oxide and a sub-phase containing an oxide different from the alkali niobate perovskite oxide, The alkali niobate perovskite type oxide contains Mn, ti and Sc.
2. 2. The laminated piezoelectric ceramic element according to claim 1, wherein each layer of the piezoelectric ceramic layer has a thickness of 10 μm or more and 100 μm or less.
3. 3. The laminated piezoelectric ceramic element according to claim 1 or claim 2, wherein the molar ratios of Mn, ti, and Sc contained in the alkali niobate perovskite-type oxide to niobium (Nb) contained in the alkali niobate perovskite-type oxide satisfy 0.50≤mn/nb≤8.50, 0.50≤ti/nb≤6.00, and 0.05≤sc/nb≤8.80, respectively.
4. 4. The laminated piezoelectric ceramic element according to claim 1 or claim 2, wherein the oxide of the secondary phase contains Mn.
5. 5. An apparatus comprising the laminated piezoelectric ceramic element according to claim 1 or claim 2.
6. 6. The device of claim 5, selected from the group consisting of an actuator, a haptic feedback, a buzzer, and an ultrasonic sensor.

Description

Laminated piezoelectric ceramic element and device Technical Field The present invention relates to a laminated piezoelectric ceramic element that is displaced by application of a voltage, and an apparatus using the laminated piezoelectric ceramic element. Background In recent years, a laminated piezoelectric ceramic actuator which is small and can be driven with high displacement even at low voltage has been attracting attention. A PZT-based (lead zirconate titanate-based) piezoelectric ceramic containing lead that adversely affects the environment is used as a typical laminated piezoelectric ceramic element, and Pt and Pd are contained in an internal electrode at high cost. Therefore, a laminated piezoelectric ceramic member having a low environmental load and low cost is demanded. Therefore, lead-free laminated piezoelectric ceramics containing inexpensive base metal Ni as a main component have been proposed (see patent documents 1 and 2). Prior art literature Patent literature Patent document 1 Japanese patent No. 5862983 Patent document 2 Japanese patent No. 6094682 Disclosure of Invention Problems to be solved by the invention The laminated piezoelectric ceramic element can be displaced to a high level with respect to the same input voltage by reducing the thickness of each piezoelectric ceramic layer of the element. That is, by reducing the thickness of each piezoelectric ceramic layer of the element, a large displacement can be obtained even at a low voltage. However, if the thickness of the piezoelectric ceramic layer is reduced, the electric field applied to the piezoelectric ceramic layer increases, and therefore, if the insulation properties of the piezoelectric ceramic layer are not sufficiently ensured, the piezoelectric ceramic layer cannot be practically used. For example, patent documents 1 and 2 propose a laminated piezoelectric ceramic element in which an internal electrode mainly composed of Ni and a piezoelectric ceramic layer mainly composed of an alkali niobate perovskite oxide are alternately laminated. However, patent document 1 and patent document 2 do not consider the thickness and insulation of the piezoelectric ceramic layers of the laminated piezoelectric ceramic element. The present invention has been made in view of such circumstances, and an object thereof is to provide a low-cost and lead-free laminated piezoelectric ceramic element having high insulation properties and high durability even when the thickness of a piezoelectric ceramic layer is reduced, and capable of maintaining the insulation properties, and an apparatus using the same. Means for solving the problems (1) In order to achieve the above object, the laminated piezoelectric ceramic element of the present invention adopts the following means. That is, the multilayer piezoelectric ceramic element according to the application example of the present invention is a multilayer piezoelectric ceramic element in which internal electrodes and piezoelectric ceramic layers are alternately laminated, the internal electrodes containing Ni as a main component, and the piezoelectric ceramic layers being composed of a main phase containing an alkali niobate perovskite oxide and a sub-phase containing an oxide different from the alkali niobate perovskite oxide, wherein the alkali niobate perovskite oxide contains Mn, ti, and Sc. (2) In the laminated piezoelectric ceramic element according to the application example of (1), the thickness of each of the piezoelectric ceramic layers is 10 μm or more and 100 μm or less. (3) In the laminated piezoelectric ceramic element according to the application example of (1) or (2), the molar ratio of Mn, ti and Sc contained in the alkali niobate perovskite type oxide to niobium (Nb) contained in the alkali niobate perovskite type oxide satisfies 0.50≤Mn/Nb≤8.50, 0.50≤Ti/Nb≤6.00, and 0.05≤Sc/Nb≤8.80, respectively. (4) The laminated piezoelectric ceramic element according to any one of (1) to (3), wherein the oxide of the secondary phase contains Mn. (5) The device according to an application example of the present invention includes the laminated piezoelectric ceramic element according to any one of the above (1) to (4). (6) The device according to the application example of (5) above is selected from the group consisting of an actuator, a haptic feedback device, a buzzer, and an ultrasonic sensor. Effects of the invention According to the present invention, a low-cost and lead-free laminated piezoelectric ceramic element having high insulation properties and high durability even when the thickness of the piezoelectric ceramic layer is reduced and insulation properties can be maintained, or a device using the same can be produced. Drawings Fig. 1 is a front sectional view of a laminated piezoelectric ceramic element. Fig. 2 is a schematic diagram showing an example of a schematic configuration of an actuator as a device. Fig. 3 is a cross-sectional view showing an example of a schematic config