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CN-121986221-A - Vibration isolation system with diagnosis function and diagnosis method

CN121986221ACN 121986221 ACN121986221 ACN 121986221ACN-121986221-A

Abstract

The present invention is based on the problem of further improving the performance of a vibration isolation system in order to improve the performance of a machine or unit to which the vibration isolation system is connected, or to be able to evaluate the performance in an improved manner. To this end, a vibration isolation system is provided by means of which a load mounted in a vibration-isolated manner can be supported, comprising at least one vibration isolator, preferably a plurality of vibration isolators, which is capable of counteracting vibrations occurring in operation by means of an actuator, and at least one sensor, preferably a plurality of sensors, which is configured to record measured values relating to the vibration isolation system and/or the mounted load and/or the environment and to provide them as input data to a computer-aided method for performance analysis of the vibration isolation system and/or the mounted load.

Inventors

  • A. Bilkner
  • ROBERT KAPPEL
  • O. SCHMIDT

Assignees

  • 集成动力工程股份有限公司

Dates

Publication Date
20260505
Application Date
20241010
Priority Date
20231023

Claims (20)

  1. 1. A vibration isolation system, in particular a diagnostic, preferably stationary active vibration isolation system, which can be used for supporting vibration isolation loads, comprising: At least one vibration isolator, preferably a plurality of vibration isolators, which is capable of counteracting vibrations occurring during operation by means of an actuator, At least one sensor, preferably a plurality of sensors, is designed to record measured values related to the vibration isolation system and/or the supporting load and/or the environment and to provide them as input data to a computer-aided method for performance analysis of the vibration isolation system and/or the supporting load.
  2. 2. A vibration isolation system according to the preceding claim wherein the computer-aided method comprises or is based on at least one artificial neural network.
  3. 3. Vibration isolation system (1), in particular according to any of the preceding claims, for supporting a load in a vibration-isolated manner, comprising at least one, preferably a plurality of vibration isolators (2 a-2 d) and at least one sensor (6 a-6 d) and a computing device (3), wherein the sensor (6 a-6 d) is designed to detect a motion variable, in particular a mechanical vibration, motion or acceleration, wherein the computing device (3) comprises an artificial neural network (10), wherein the artificial neural network (10) is designed to process the motion variable data provided by the at least one sensor (6 a-6 d) and to classify whether the vibration isolation system (1) and the supporting load are in an operating state with sufficiently small or too large motion disturbances, and to output the classification.
  4. 4. Vibration isolation system according to any of the preceding claims, wherein the motion variable data provided by the at least one sensor (6 a-6 d) comprises a spectrogram (20) comprising a time course of the amplitudes of a plurality of vibration frequencies.
  5. 5. A vibration isolation system according to any one of the preceding claims wherein a trained or learned artificial neural network is used in normal operation.
  6. 6. A vibration isolation system according to any one of the preceding claims wherein the support load is supported via three or four vibration isolators.
  7. 7. Vibration isolation system according to any of the preceding claims, wherein the support load comprises a processing machine or a component thereof, in particular in the semiconductor industry, such as a machine for processing semiconductor devices and/or nanostructured substrates or elements, in particular a machine for processing wafers, masks or displays, a lithographic apparatus, or a measurement apparatus or device, in particular a measurement apparatus or device for measuring semiconductor elements and/or nanostructured substrates, such as an electron microscope, or other sensitive apparatus, machine or system, for example a laboratory apparatus or a medical apparatus, such as an imaging examination apparatus, such as a Magnetic Resonance Imaging (MRI) scanner.
  8. 8. Vibration isolation system according to any of the preceding claims, wherein the input data comprises a vibration behavior of the vibration isolation system, in particular an amplitude, a period duration, a frequency or an acceleration.
  9. 9. A vibration isolation system according to any one of the preceding claims wherein the input data comprises temperatures at an installation site and/or at a component of the vibration isolation system and/or at a supporting load.
  10. 10. A vibration isolation system according to any one of the preceding claims wherein the input data comprises the strength of an electromagnetic field at the installation site.
  11. 11. A vibration isolation system according to any one of the preceding claims wherein the input data comprises the intensity of a sound field at an installation site.
  12. 12. Vibration isolation system according to any of the preceding claims, wherein a sensor is arranged in or on the vibration isolation system and/or on the supporting load and/or in the environment, in particular on the ground, a mounting surface or on a component or element in the vicinity of the vibration isolation system.
  13. 13. A vibration isolation system according to any one of the preceding claims, wherein the artificial neural network forms at least one model comprising at least one convolution stage (convolution layer) and/or at least one neuron stage (neural layer), and/or other components, such as an activation layer.
  14. 14. Vibration isolation system according to any of the preceding claims, wherein an artificial neural network can be trained, in particular during operation of the vibration isolation system, and/or using training data from a previous learning process.
  15. 15. The vibration isolation system according to any one of the preceding claims wherein the artificial neural network uses at least one of regression, machine learning or deep learning.
  16. 16. A vibration isolation system according to any one of the preceding claims wherein to train the artificial neural network the data sets are computer aided modified or transformed to obtain a plurality of training data sets.
  17. 17. A vibration isolation system according to any one of the preceding claims, wherein control parameters for controlling the vibration isolation system and/or the supporting load are generated based on the performance analysis.
  18. 18. A vibration isolation system according to any one of the preceding claims wherein a control parameter is used to control the vibration isolation system and/or the support load.
  19. 19. A method of controlling or regulating a vibration isolation system, preferably according to any of the preceding claims, wherein control parameters for controlling the vibration isolation system are obtained and used during operation by means of performance analysis.
  20. 20. Method for diagnosing a vibration isolation system, in particular for performance analysis, preferably a vibration isolation system according to any of the preceding claims 1 to 14.

Description

Vibration isolation system with diagnosis function and diagnosis method Technical Field The present invention relates to a vibration isolation system, preferably stationary, with diagnostic function and a diagnostic method. In particular, the present invention relates to an active, fixed vibration isolation system on which a machine for processing semiconductor devices and/or nanostructured substrates or elements, in particular a wafer, a mask or a display such as a flat panel display, or a machine for measuring semiconductor devices and/or nanostructured substrates, such as an electron microscope, is arranged. Furthermore, laboratory and/or medical equipment, such as imaging examination equipment, for example a Magnetic Resonance Tomography (MRT), or a microscope, can also be arranged on the stationary vibration isolation system. Background Active, fixed vibration isolation systems are used in particular in the semiconductor industry to support processing machines (e.g., lithographic apparatus) and measurement equipment (e.g., electron microscopes) in order to support sensitive equipment for processing semiconductor components in a vibration-isolated manner. Such vibration isolation systems for machines or machine parts are generally composed of a plate supported in vibration isolation on at least three, usually four, sometimes more than four vibration isolators, each comprising springs. Alternatively or additionally, one or more vibration isolators may be used which are not arranged on the board but between two components in the apparatus, for example between the pedestal and the stage or granite board. The vibration isolators may also be disposed outside the machine, for example, the entire machine may be placed on one or more vibration isolators. This protects the machine or machine component from vibrations. The machine or machine component together with the possible plates constitutes a vibration-isolating load. Active vibration isolation systems are particularly known in practice, in which the vibration isolator comprises, in addition to the springs, an actuator, in particular a magnetic actuator, which actively counteracts the vibrations. Vibration isolation systems also exist in which additional sensors or actuators are attached as separate units to other components of the machine, separate from the vibration isolator. Vibrations are detected by sensors that are disposed either at the base of the vibration isolator and/or near the base of one or more vibration isolators or on the vibration isolation load. Based on the sensor signal, the actuator is controlled to compensate for the vibration by generating a reaction force. Such active control may be used to counteract vibrations entering the system from the outside as well as vibrations generated by the vibration isolation load itself (e.g., vibrations generated by a movable platform (e.g., a carrier) or a mobile robot). The applicant's patent specification EP2 295 829 B1 shows a vibration isolation system in which actuators are provided to generate compensation forces in multiple degrees of freedom. Such vibration isolation systems comprise a control unit (often referred to as a controller) for processing the sensor signals, which control unit detects the sensor signals and generates control signals based on the sensor signals, by means of which control signals the actuators are controlled to generate the compensation force. The control unit may be designed as a central processing unit to which the sensors and actuators of all vibration isolators of the vibration isolation system are connected. Applicant's document EP 3,726,094 A1 describes a method of controlling such a fixed vibration isolation system. Disclosure of Invention The present invention is based on the task of further improving or better evaluating the performance of a vibration isolation system, thereby improving or better evaluating the performance of a machine or device connected to the vibration isolation system, or optimizing the usability of the machine. In particular, the invention is based on the task of obtaining further data about vibration isolation systems and/or vibration isolation machines or devices, with which it is possible, for example, to determine or predict the performance of the machine or device, or to enable early detection of changes on the machine or in its environment, such as signs of wear, and to provide information for taking remedial action. In this respect, the performance of the machine is understood to be its precision, accuracy, availability and productivity. The inventors have undertaken this task. This object is achieved by a vibration isolation system with diagnostic function and a method for diagnosing a vibration isolation system and/or a load supported thereon in a vibration-isolated manner according to one of the independent claims. Preferred embodiments and further developments of the invention can be found in the respective dependent claims.