CN-121986436-A - Cooling and mechanical structure for a distributed wrap multiphase force generator

CN121986436ACN 121986436 ACN121986436 ACN 121986436ACN-121986436-A

Abstract

A cooling system for a linear actuator is described. The cooling system includes a core having a plurality of slots, a specially shaped wound electrical coil, and a cooling plate. Each electrical coil is identical in shape and is in a ring-shaped configuration having two opposite sides configured to fit into rings in two different slots of the core. Each cooling plate may be shaped to mirror at least a portion of the contour of the coil to fit into at least one slot of the core. The special design of the coils and cooling plates allows them to be stacked into the slots of the core so that there are no volume conflicts with each other.

Inventors

Shen Taixi
A. GUPTA
ARJUN VERMA
N. R. Finney
S.Lu

Assignees

ASML荷兰有限公司

Dates

Publication Date: 20260505
Application Date: 20240916
Priority Date: 20231009

Claims (15)

1. A distributed wrap electromagnetic multiphase force generator comprising: a core defining a plurality of teeth and a plurality of slots, each slot disposed between a pair of teeth among the plurality of teeth; a plurality of cooling plates, wherein each cooling plate of the plurality of cooling plates is disposed in a slot of the plurality of slots and includes at least one end positioned outside the slot; a plurality of multi-phase coils, each multi-phase coil comprising a closed loop defining a first slot-filling portion and a second slot-filling portion positioned opposite the first slot-filling portion; Wherein each of the plurality of multiphase coils is disposed in both a first slot and a second slot among the plurality of slots such that the first slot filling portion is disposed in the first slot and the second slot filling portion is disposed in the second slot, and A cooling mechanism configured to provide a cooling fluid into the at least one end of each of the plurality of cooling plates.
2. The distributed wound electromagnetic multiphase force generator of claim 1, wherein at least one slot of the plurality of slots is filled with at least one cooling plate of the plurality of cooling plates and the first slot-filling portion or the second slot-filling portion of one multiphase coil of the plurality of multiphase coils.
3. The distributed wound electromagnetic multiphase force generator of claim 1, wherein at least one slot of the plurality of slots is filled with: at least one cooling plate among the plurality of cooling plates; the first slot filling portion or the second slot filling portion of a first multi-phase coil among the plurality of multi-phase coils, and The first slot-filling portion or the second slot-filling portion of a second multi-phase coil among the plurality of multi-phase coils, Wherein for each of at least one slot of the plurality of slots, the one cooling plate of the plurality of cooling plates is disposed between the first slot-filling portion or the second slot-filling portion of the first multi-phase coil and the first slot-filling portion or the second slot-filling portion of the second multi-phase coil.
4. The distributed wrap electromagnetic multiphase force generator of claim 1, wherein: the core includes a plurality of linearly stacked iron modules, each of the iron modules defining a subset of the plurality of slots and a subset of the plurality of slots, and The first slot filling portion and the second slot filling portion of each of the plurality of multi-phase coils are disposed in respective first slots and second slots belonging to the same iron module.
5. The distributed wrap electromagnetic multiphase force generator of claim 1, wherein: each slot defines an upper portion and a lower portion; Each first slot filling portion of each of the plurality of multi-phase coils being disposed in a lower portion of its corresponding first slot, and Each second slot fill portion of each of the plurality of multi-phase coils is disposed in an upper portion of its respective second slot.
6. The distributed wrap electromagnetic multiphase force generator of claim 1, configured to drive an actuator in a Deep Ultraviolet (DUV) lithography system or an Extreme Ultraviolet (EUV) lithography system.
7. A multiphase coil for installation in a distributed wound electromagnetic multiphase force generator, the multiphase coil comprising: a closed loop defining: a first groove filling portion; A second slot-filling portion positioned opposite the first slot-filling portion; A first terminal connector portion located between the first slot filling portion and the second slot filling portion, and A second terminal connection portion located between the first slot filling portion and the second slot filling portion and opposite to the first terminal connector portion; Wherein the first slot filling portion is configured to be disposed in a first slot of a core of the distributed wound electromagnetic multiphase force generator and the second slot filling portion is configured to be disposed in a second slot of the core of the distributed wound electromagnetic multiphase force generator, and Wherein the first and second terminal connector portions extend away from the second slot filling portion and both are positioned along a straight line with the second slot filling portion.
8. The multi-phase coil of claim 7, wherein: The first slot filling portion is further configured to be disposed in a lower portion of the first slot and the second slot filling portion is further configured to be disposed in an upper portion of the second slot, and The first terminal connector portion includes less than three marginal turns, and the second terminal connector portion includes less than three marginal turns, Wherein the multiphase coil is configured to cool an actuator in a Deep Ultraviolet (DUV) lithography system or an Extreme Ultraviolet (EUV) lithography system.
9. A multiphase coil for installation in a distributed wound electromagnetic multiphase force generator, the multiphase coil comprising: a closed loop defining: a first groove filling portion; A second slot-filling portion positioned opposite the first slot-filling portion; A first terminal connector portion located between the first slot filling portion and the second slot filling portion, and A second terminal connection portion located between the first slot filling portion and the second slot filling portion and opposite to the first terminal connector portion; Wherein the first slot filling portion is configured to be disposed in a first slot of the core of the distributed wound electromagnetic multiphase force generator such that the first slot filling portion spans the entire depth of the first slot, and the second slot filling portion is configured to be disposed in a second slot of the core of the distributed wound electromagnetic multiphase force generator such that the second slot filling portion spans the entire depth of the second slot.
10. The multi-phase coil of claim 9, wherein: the first and second terminal connector portions extending away from the second slot filling portion and both being positioned along a straight line with the second slot filling portion, and The first terminal connector portion includes less than three edge turns and the second terminal connector portion includes less than three edge turns.
11. The multi-phase coil of claim 9, wherein: The first slot filling portion extends along a first plane; The second slot filling portion extending along a second plane parallel to the first plane, and The first and second terminal connector portions extend along a third plane, the third plane is parallel to and between both the first plane and the second plane.
12. The multi-phase coil of claim 9, wherein the first terminal connector portion includes less than five edge turns and the second terminal connector portion includes less than five edge turns.
13. The multi-phase coil of claim 9, wherein both the first and second terminal connectors extend above and below both the first and second slot-filling portions.
14. The multi-phase coil of claim 13, wherein an extension above both the first slot fill portion and the second slot fill portion is symmetrical in shape with an extension below both the first slot fill portion and the second slot fill portion.
15. The multi-phase coil of claim 9, configured to cool an actuator in a Deep Ultraviolet (DUV) lithography system or an Extreme Ultraviolet (EUV) lithography system.

Description

Cooling and mechanical structure for a distributed wrap multiphase force generator Cross Reference to Related Applications The present application claims priority from U.S. application Ser. No. 63/543,169, filed on 10/9 of 2023, which is incorporated herein by reference in its entirety. Technical Field The present description relates generally to a distributed wound electromagnetic multiphase force generator. Background Linear actuators are known. Multiphase electromagnetic linear actuators, also known as permanent magnet linear synchronous motors (PMSMs), have been used as long stroke actuators in, for example, lithographic apparatus, metrology systems and other devices. Lithographic (e.g., projection) apparatus can be used, for example, in the manufacture of Integrated Circuits (ICs). In this case, the patterning device (e.g., mask) may contain or provide a pattern corresponding to an individual layer of the IC (the "design layout"), and this pattern may be transferred to a target portion (e.g., comprising one or more dies) on a substrate (e.g., a silicon wafer) that has been coated with a layer of radiation-sensitive material (the "resist") by a method such as irradiating the target portion of the pattern through the patterning device. Typically, a single substrate contains a plurality of adjacent target portions to which the lithographic projection apparatus successively transfers the pattern one target portion at a time. In one type of lithographic projection apparatus, the pattern on the entire patterning device is transferred to a target portion in one operation. Such devices are commonly referred to as steppers. In an alternative apparatus (commonly referred to as a step-and-scan apparatus), the projection beam is scanned across the patterning device in a given reference direction (the "scanning" direction) while simultaneously moving the substrate parallel or anti-parallel to the reference direction. Different portions of the pattern on the patterning device are gradually transferred to one target portion. Various movements of the lithographic apparatus may be facilitated by one or more linear actuators. In general, a linear actuator is only one type of force generator that may be used in a machine to cause movement. Different types of force generators in rotary and linear actuators, such as Interior Permanent Magnet (IPM) motors, detent motors, and PMSMs, are some examples of what may be used in lithographic apparatus, metrology systems, and other devices. It is desirable to develop new force generators that can improve the efficiency of these and other types of machines. Disclosure of Invention A distributed wrap electromagnetic multiphase force generator is described. According to one embodiment, a distributed wound electromagnetic multiphase force generator is provided comprising a core defining a plurality of teeth and a plurality of slots, each slot disposed between a pair of the plurality of teeth, a plurality of cooling plates, wherein each of the plurality of cooling plates is disposed in a slot of the plurality of slots and includes at least one end positioned outside the slot, a plurality of multiphase coils, each multiphase coil comprising a closed loop defining a first slot filling portion and a second slot filling portion positioned opposite the first slot filling portion, wherein each of the plurality of multiphase coils is disposed in both the first slot and the second slot of the plurality of slots such that the first slot filling portion is disposed in the first slot and the second slot filling portion is disposed in the second slot, and a cooling mechanism configured to provide a cooling fluid into at least one end of each of the plurality of cooling plates. In some embodiments, at least one slot of the plurality of slots is filled with at least one cooling plate of the plurality of cooling plates and the first slot filling portion or the second slot filling portion of one multi-phase coil of the plurality of multi-phase coils. In some embodiments, at least one slot of the plurality of slots is filled with at least one cooling plate of the plurality of cooling plates, the first slot-filling portion or the second slot-filling portion of a first multi-phase coil of the plurality of multi-phase coils, and the first slot-filling portion or the second slot-filling portion of a second multi-phase coil of the plurality of multi-phase coils. In some embodiments, for each of at least one slot of the plurality of slots, one cooling plate of the plurality of cooling plates is disposed between the first slot-filling portion or the second slot-filling portion of the first multi-phase coil and the first slot-filling portion or the second slot-filling portion of the second multi-phase coil. In some embodiments, the core comprises a plurality of linearly stacked iron modules, each of the iron modules defining a subset of the plurality of slots and a subset of the plurality of slots. In some embo