CN-121986585-A - Temperature-adjusting workbench and inspection device

Abstract

The temperature control workbench comprises a top plate, a heating part, a heat exchange part and a gas supply part, wherein the object to be processed is placed on the surface of the top plate, the heating part is arranged on the back surface or the inside of the top plate, the heat exchange part is arranged adjacent to the top plate or the heating part, a circulation space for gas to circulate is formed in the inside, and the gas supply part supplies the gas to the circulation space. The heat exchange section has a protrusion group region in which heat exchange with the gas is promoted by providing a plurality of protrusions formed of metal fibers and protruding into the flow space, and a non-provided region in which heat exchange with the gas is suppressed as compared with the protrusion group region by not providing the plurality of protrusions.

Inventors

• Xiao Linda
• NAKAYAMA HIROYUKI
• MORIUCHI HIDEKI
• HATANO SHUHEI

Assignees

• 东京毅力科创株式会社
• 巴川集团股份有限公司

Dates

Publication Date

20260505

Application Date

20241003

Priority Date

20231013

Claims (11)

1. 1. A temperature adjustment table is provided with: a top plate for placing the object to be processed on the surface; a heating unit disposed on the back surface or inside the top plate; a heat exchange portion disposed adjacent to the top plate or the heating portion and having a circulation space for circulating gas therein, and A gas supply unit configured to supply the gas to the flow space, The heat exchange section has: A convex portion group region including a plurality of convex portions formed of metal fibers and protruding into the circulation space to promote heat exchange with the gas, and And a non-installation region in which heat exchange with the gas is suppressed as compared with the protrusion group region by not providing the plurality of protrusions.
2. 2. The temperature-adjusting table according to claim 1, wherein, The non-installation region is provided at a portion of the flow space where the gas is introduced.
3. 3. The tempering table according to claim 1 or 2, wherein, The convex portion group region has a dense region in which gaps between the plurality of convex portions are narrow, and a sparse region in which gaps between the plurality of convex portions are wider than the dense region.
4. 4. A temperature-adjusting table according to claim 3, wherein, The circulation space has: an inner circulation space for circulating the gas in the center of the heat exchange portion, and An outer circulation space for circulating the gas outside the inner circulation space, The dense region is disposed in the inner flow space, The sparse region is arranged in the outer circulation space.
5. 5. The temperature-adjusting table as claimed in claim 4, wherein, One of the inner flow space and the outer flow space causes the gas to flow clockwise, and the other of the inner flow space and the outer flow space causes the gas to flow counterclockwise.
6. 6. The tempering table according to claim 1 or 2, wherein, The non-installation region includes a heat insulating member for suppressing heat transfer in the stacked structure between the flow space and the top plate.
7. 7. The tempering table according to claim 1 or 2, wherein, The non-installation region includes a heat-insulating space for suppressing heat transfer in the stacked structure between the flow space and the top plate.
8. 8. The tempering table according to claim 1 or 2, wherein, The non-installation region is provided with a heat insulation pipe which is formed by ceramics or resin and through which the gas flows.
9. 9. The tempering table according to claim 1 or 2, wherein, The thermostat connected to the heating unit is provided at a position exposed to the outside from the top plate or the heat exchange unit.
10. 10. The tempering table according to claim 1 or 2, wherein, The heating portion is formed by providing a polyimide heater on a heat diffusion plate that diffuses heat.
11. 11. An inspection apparatus includes a temperature adjustment table on which a substrate is placed, and a tester for electrically inspecting the substrate placed on the temperature adjustment table, The temperature adjustment table is provided with: A top plate for placing the substrate on a surface; a heating unit disposed on the back surface or inside the top plate; a heat exchange portion disposed adjacent to the top plate or the heating portion and having a circulation space for circulating gas therein, and A gas supply unit configured to supply the gas to the flow space, The heat exchange section has: a convex portion group region having a plurality of convex portions formed of metal fibers and protruding into the circulation space to promote heat exchange with the gas, and The non-installation region does not have the plurality of projections, and suppresses heat exchange with the gas as compared with the projection group region.

Description

Temperature-adjusting workbench and inspection device Technical Field The present disclosure relates to a temperature adjustment table and an inspection apparatus. Background The inspection apparatus includes a tester for electrically inspecting a substrate as an object to be processed. In the electrical inspection, the substrate generates heat by supplying power from the tester. If the heat generation amount of the substrate is large, the target temperature for inspection is easily exceeded. In order to reduce the temperature of a substrate during such inspection, patent document 1 discloses an inspection apparatus including a cooling flow path provided in a substrate mounting table (temperature adjustment table), and a cooling unit for circulating a refrigerant through the cooling flow path. < Prior art document > < Patent document > Patent document 1 Japanese patent laid-open No. 2021-128965 Disclosure of Invention < Problem to be solved by the invention > The present disclosure provides a technique capable of efficiently adjusting the temperature of a subject to be treated and promoting the homogenization of the in-plane temperature distribution of the subject to be treated. < Means for solving the problems > According to one aspect of the present disclosure, there is provided a temperature adjustment table including a top plate on which an object to be processed is placed, a heating portion disposed on a back surface or inside the top plate, a heat exchange portion disposed adjacent to the top plate or the heating portion and having a circulation space in which a gas is supplied to circulate, and a gas supply portion for supplying the gas to the circulation space, the heat exchange portion including a protrusion group region in which heat exchange with the gas is promoted by including a plurality of protrusions formed of metal fibers protruding into the circulation space, and a non-installation region in which heat exchange with the gas is suppressed as compared with the protrusion group region by not including the plurality of protrusions. < Effect of the invention > According to one aspect, the temperature of the object to be processed can be efficiently adjusted, and the uniformity of the in-plane temperature distribution of the object to be processed can be promoted. Drawings Fig. 1 is a schematic vertical cross-sectional view showing the structure of an inspection apparatus according to an embodiment. Fig. 2 is an exploded perspective view showing the structure of the mounting table. Fig. 3 is a schematic longitudinal sectional view showing the structure of the mounting table. Fig. 4A is a schematic plan sectional view showing a flow path of air in the flow-through space. Fig. 4B is a schematic plan sectional view showing an arrangement form of a plurality of convex portions in the circulation space. Fig. 5 is a side view showing an enlarged structure of a convex portion disposed in the flow space. Fig. 6 is a schematic vertical cross-sectional view showing the structure of a table according to modification 1. Fig. 7 is a schematic plan view showing a concave container of a table according to modification 2. Fig. 8A is a schematic plan view showing a concave container of a table according to modification 3. Fig. 8B is a perspective view of the thermal insulation piping. Fig. 9 is a schematic plan view showing a part of a concave container of a table according to modification 4. Detailed Description The following describes modes for carrying out the present disclosure with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and a repetitive description thereof may be omitted. Fig. 1 is a schematic vertical cross-sectional view showing the structure of an inspection apparatus 1 according to an embodiment. As shown in fig. 1, an inspection apparatus 1 according to the embodiment performs electrical inspection of a wafer W as an example of a substrate. On the wafer W, a plurality of semiconductor devices as inspection targets are formed. The substrate is not limited to the wafer W, and may be a carrier, a glass substrate, a chip unit, an electronic circuit board, or the like on which the semiconductor device is disposed. The inspection apparatus 1 includes a loader 10 for transporting wafers W, a housing 20 disposed adjacent to the loader 10, a tester 30 disposed above the housing 20, a table 40 accommodated in the housing 20, and a controller 90 for controlling the respective components of the inspection apparatus 1. The loader 10 takes out the wafer W from FOUP (Front Opening Unified Pod), not shown, and places the wafer W on the table 40 that moves in the housing 20. The loader 10 takes out the inspected wafer W from the table 40 and stores the wafer W in the FOUP. The frame 20 is formed as a substantially rectangular box, and has an inspection space 21 for inspecting the wafer W therein. In the inspection space 21, a table 40 for conveying th