CN-121988112-A - Method and device for removing SiO in simple harmonic dust remover matched with crystal pulling furnace

CN121988112ACN 121988112 ACN121988112 ACN 121988112ACN-121988112-A

Abstract

After the production operation of the crystal pulling furnace is completed, preliminary oxidation reaction is carried out by passively taking in air, compressed air is introduced into an ash bin at the lower part of the simple harmonic type dust collector after the primary oxidation is finished, the introduced compressed air is diffused in the simple harmonic type dust collector, so that SiO on the surface layer is oxidized, meanwhile, the compressed air permeates into the deep SiO, and the oxidation reaction of the SiO in the simple harmonic type dust collector is completed in a safe and controllable state by controlling the air inflow of the compressed air. The invention can ensure that SiO completes oxidation reaction under a safe and controllable state, avoids burning filter materials and dust explosion during ash cleaning operation, and achieves the purposes of protecting filter materials and preventing dust particles from being discharged out of the atmosphere.

Inventors

LIU FENGYUE
SHI YANG
SHAN HAITAO

Assignees

北京中兴汇融节能科技有限公司

Dates

Publication Date: 20260508
Application Date: 20201020

Claims (7)

1. A method for removing SiO in a simple harmonic type dust remover matched with a crystal pulling furnace is characterized in that after the production operation of the crystal pulling furnace is finished, preliminary oxidation reaction is carried out by taking in air passively, after the primary oxidation is finished, compressed air is introduced into an ash bin at the lower part of the simple harmonic type dust remover, the introduced compressed air diffuses in the simple harmonic type dust remover, so that SiO on the surface layer is oxidized, meanwhile, the compressed air permeates into the deep SiO, and the oxidation reaction of the SiO in the simple harmonic type dust remover is finished in a safe and controllable state by controlling the air inflow of the compressed air.
2. The method for removing SiO in a simple harmonic type dust remover matched with a crystal pulling furnace according to claim 1, wherein the pressure of the introduced compressed air is 0.01MPa to 0.02MPa.
3. The utility model provides a supporting simple harmonic formula dust remover of crystal pulling furnace interior SiO remove device which characterized in that, including compressed air connector, air-vent valve, flow control valve and the diffusion room that connects gradually, compressed air connector free end is used for being connected with compressed air outlet pipe, flow control valve pass through the pipeline with the diffusion room is connected, be equipped with the outlet duct on the diffusion room, the outlet duct is used for being connected with simple harmonic formula dust remover lower part ash bin.
4. The device for removing SiO in a simple harmonic dust remover matched with a crystal pulling furnace according to claim 3, wherein a drain pipe is arranged at the bottom of the diffusion chamber, and a drain valve is connected to the drain pipe.
5. A device for removing SiO in a simple harmonic precipitator associated with a crystal puller as set forth in claim 3 wherein a manual flow control valve is disposed on the connection line between the flow control valve and the diffusion chamber.
6. The SiO cleaning device for a simple harmonic precipitator associated with a crystal pulling furnace according to claim 5, wherein said manual flow control valve is a manual ball valve.
7. The SiO cleaning apparatus in a simple harmonic precipitator associated with a crystal pulling furnace according to any of claims 3-6, wherein said flow control valve is a solenoid valve.

Description

Method and device for removing SiO in simple harmonic dust remover matched with crystal pulling furnace Technical Field The invention relates to the technical field of semiconductor preparation, in particular to a method and a device for removing SiO in a simple harmonic dust remover matched with a crystal pulling furnace. Background In the production of single crystal silicon rods in the photovoltaic industry, silicon raw materials and quartz crucibles produce silicon monoxide (SiO) which reacts extremely readily with oxygen at high temperatures. In the prior art, an electromagnetic valve is generally used for controlling air to slowly enter the simple harmonic type dust remover, and the reaction (primary oxidation) speed of SiO and air is controlled in a mode of controlling the air inlet amount so as to reduce the heating value of the reaction. The existing SiO dust primary oxidation system adopts a passive intake mode, air is passively taken into the simple harmonic type dust remover through an electromagnetic valve and a flow device, when the air pressure in the simple harmonic type dust remover is consistent with the external atmospheric pressure, the pressure difference disappears, and air intake is stopped. The passive intake of SiO is limited by the volume of the equipment, the reactive consumption of SiO is limited, and the passive intake of SiO has limited air permeability, which is easy to cause the oxidation of the deposited SiO surface layer and the unoxidization of the deep layer. At present, with the further increase of the continuous operation time of the crystal pulling furnace, the production amount of SiO is far more than before, and the SiO cannot be completely consumed by a primary oxidation process adopting passive air inlet. When the ash cleaning operation is carried out, the SiO which is not oxidized in the ash bin at the lower part of the simple harmonic type dust remover contacts a large amount of air, a large amount of heat is generated by rapid oxidation, and the high-temperature baking can cause burning loss of the filter material at the upper part and even dust explosion. The burnt filter material loses the filtering function, if the filter material is not found and replaced in time, the generated SiO dust in the production process directly enters the dry vacuum pump at the rear end along with the air flow, so that the components of the vacuum pump are worn, the service life of the vacuum pump is shortened, the vacuum pump can be blocked by the dust under the more serious condition, and the whole production system is stopped and the dust of an external exhaust body exceeds the standard. Disclosure of Invention The invention aims to provide a method and a device for removing SiO in a simple harmonic dust remover matched with a crystal pulling furnace, so that the SiO can complete oxidation reaction in a safe and controllable state, and the phenomena of burning filter materials and dust explosion during ash removal operation are avoided, so that the problems in the prior art are solved. In order to solve the technical problems, the invention adopts the following technical scheme: According to the method for removing SiO in the simple harmonic type dust remover matched with the crystal pulling furnace, after the production operation of the crystal pulling furnace is finished, preliminary oxidation reaction is carried out by passively taking in air, after the primary oxidation is finished, compressed air is introduced into the ash bin at the lower part of the simple harmonic type dust remover, the introduced compressed air diffuses in the simple harmonic type dust remover, so that SiO on the surface layer is oxidized, meanwhile, the compressed air permeates into the deep SiO, and the oxidation reaction of SiO in the simple harmonic type dust remover is finished in a safe and controllable state by controlling the air inflow of the compressed air. Further, the pressure of the compressed air is 0.01MPa-0.02MPa. The invention also provides a device for removing SiO in the simple harmonic dust remover matched with the crystal pulling furnace, which comprises a compressed air connector, a pressure regulating valve, a flow control valve and a diffusion chamber which are sequentially connected, wherein the free end of the compressed air connector is used for being connected with a compressed air outlet pipeline, the flow control valve is connected with the diffusion chamber through a pipeline, an air outlet pipe is arranged on the diffusion chamber, and the air outlet pipe is used for being connected with an ash bin at the lower part of the simple harmonic dust remover. Further, a drain pipe is arranged at the bottom of the diffusion chamber, and a drain valve is connected to the drain pipe. Further, a manual flow control valve is arranged on a connecting pipeline between the flow control valve and the diffusion chamber. Still further, the manual flow control valve is a manual ball valve.