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CN-121988469-A - Air inlet tool for semiconductor shower

CN121988469ACN 121988469 ACN121988469 ACN 121988469ACN-121988469-A

Abstract

The invention relates to the technical field of semiconductor device equipment, and particularly discloses an air inlet tool for a semiconductor shower head. According to the invention, the sleeve body is arranged on the semiconductor shower head and is connected with the semiconductor shower head through the annular connecting piece, so that the external air inlet pipe is communicated with the air inlet, then the air firstly enters the air homogenizing cavity, the air is uniformly distributed before entering the central air inlet cavity of the semiconductor shower head by utilizing the air homogenizing cavity, and then the air uniformly enters the central air inlet cavity of the semiconductor shower head after passing through the air homogenizing cavity, thereby realizing the uniformity of the air inlet of the semiconductor shower head, and effectively solving the problem that the semiconductor shower head in the prior art cannot realize uniform air inlet. At least one air inlet of the sleeve body can be matched with the external air inlet pipes in corresponding quantity according to actual needs, and universality of an air inlet tool for the semiconductor shower is improved.

Inventors

  • YAO LIJUN
  • MAO CHENGCHENG
  • ZHANG LINQIAO

Assignees

  • 宁波江丰芯创科技有限公司
  • 宁波江丰电子材料股份有限公司

Dates

Publication Date
20260508
Application Date
20260311

Claims (10)

  1. 1. A frock of admitting air for semiconductor gondola water faucet, its characterized in that includes: The sleeve body (1) is provided with a uniform air cavity (11) and at least one air inlet (12), wherein the air inlet (12) is communicated with the uniform air cavity (11) and can be communicated with an external air inlet pipe; The annular connecting piece (2) is sleeved on the outer wall of the sleeve main body (1), the sleeve main body (1) is arranged on the semiconductor shower head (3) and is connected with the semiconductor shower head (3) through the annular connecting piece (2), and the air homogenizing cavity (11) is communicated with the central air inlet cavity of the semiconductor shower head (3); The gas homogenizing cavity (11) can uniformly distribute gas entering from the gas inlet (12), so that the gas uniformly enters into the central gas inlet cavity of the semiconductor shower head (3).
  2. 2. The air inlet tooling for the semiconductor shower head according to claim 1, wherein the air inlet (12) is located at the top of the sleeve body (1) or at a side wall of the sleeve body (1).
  3. 3. The air inlet tool for the semiconductor shower head according to claim 1, wherein a first air inlet channel (13) and a second air inlet channel (14) which are symmetrically arranged along the axial direction are arranged on the side wall of the sleeve body (1), and the first air inlet channel (13) and the second air inlet channel (14) are communicated with the air homogenizing cavity (11) and are provided with the air inlet (12).
  4. 4. An air inlet tooling for a semiconductor shower head according to claim 3, wherein the first air inlet channel (13) is provided with a plurality of first air inlet holes (131), the second air inlet channel (14) is provided with a plurality of second air inlet holes (141), the plurality of first air inlet holes (131) are arranged at intervals along the axial direction of the sleeve main body (1), the plurality of second air inlet holes (141) are arranged at intervals along the axial direction of the sleeve main body (1), and the plurality of first air inlet holes (131) and the plurality of second air inlet holes (141) are arranged in a one-to-one correspondence.
  5. 5. The gas inlet fixture for a semiconductor shower according to claim 1, further comprising a fastener, wherein the annular connecting member (2) has a fitting hole (21), and wherein the fastener passes through the fitting hole (21) and is connected with the semiconductor shower (3).
  6. 6. The air inlet tool for the semiconductor shower head according to claim 5, wherein the number of the fastening pieces and the number of the assembly holes (21) are plural, the plurality of the assembly holes (21) are arranged at intervals along the circumferential direction of the annular connecting piece (2), and the plurality of the fastening pieces and the plurality of the assembly holes (21) are arranged in a one-to-one correspondence.
  7. 7. The gas inlet fixture for a semiconductor shower according to claim 1, further comprising a positioning pin, wherein the annular connecting member (2) has a positioning hole (22), and wherein the semiconductor shower (3) has a positioning groove, and wherein the positioning pin passes through the positioning hole (22) and is inserted into the positioning groove.
  8. 8. The air inlet tool for the semiconductor shower head according to claim 1, wherein the diameter of the air homogenizing cavity (11) is D, and D is more than or equal to 50mm and less than or equal to 60mm.
  9. 9. The gas inlet fixture for a semiconductor shower according to claim 1, further comprising a sealing member arranged between the sleeve body (1) and the semiconductor shower (3) and for sealing a gap between the sleeve body (1) and the semiconductor shower (3).
  10. 10. The air inlet tool for the semiconductor shower head according to claim 1, wherein the sleeve body (1) and the annular connecting piece (2) are made of aluminum.

Description

Air inlet tool for semiconductor shower Technical Field The invention relates to the technical field of semiconductor device equipment, in particular to an air inlet tool for a semiconductor shower head. Background At present, the central air inlet diameter of the semiconductor shower is larger, an air inlet pipe without adaptation is difficult to seal, uniform air inlet cannot be realized, so that the flow detection precision is low, the error is large, and an effective experimental result is difficult to obtain. Disclosure of Invention The invention aims to provide an air inlet tool for a semiconductor shower head, which aims to solve the problem that the semiconductor shower head in the prior art cannot realize uniform air inlet. In order to solve the problems, the invention provides an air inlet tool for a semiconductor shower, which comprises a sleeve body, an annular connecting piece and an annular connecting piece, wherein the sleeve body is provided with an air homogenizing cavity and at least one air inlet, the air inlet is communicated with the air homogenizing cavity and can be communicated with an external air inlet pipe, the annular connecting piece is sleeved on the outer wall of the sleeve body, the sleeve body is arranged on the semiconductor shower and is connected with the semiconductor shower through the annular connecting piece, the air homogenizing cavity is communicated with a central air inlet cavity of the semiconductor shower, and the air homogenizing cavity can uniformly distribute air entering from the air inlet so as to uniformly enter the central air inlet cavity of the semiconductor shower. As an alternative technical scheme of the air inlet tooling for the semiconductor shower, the air inlet is positioned at the top of the sleeve body or at the side wall of the sleeve body. As an alternative technical scheme of the air inlet tool for the semiconductor shower, the side wall of the sleeve body is provided with a first air inlet channel and a second air inlet channel which are axially symmetrically arranged, and the first air inlet channel and the second air inlet channel are communicated with the uniform air cavity and are provided with air inlets. As an alternative technical scheme of an air inlet tool for the semiconductor shower, the first air inlet channel is provided with a plurality of first air inlets, the second air inlet channel is provided with a plurality of second air inlets, the first air inlets are arranged at intervals along the axial direction of the sleeve main body, the second air inlets are arranged at intervals along the axial direction of the sleeve main body, and the first air inlets and the second air inlets are arranged in one-to-one correspondence. As an alternative technical scheme of the air inlet tooling for the semiconductor shower, the air inlet tooling for the semiconductor shower further comprises a fastener, wherein the annular connecting piece is provided with an assembly hole, and the fastener penetrates through the assembly hole and is connected with the semiconductor shower. As an alternative technical scheme of an air inlet tool for the semiconductor shower, the number of the fastening pieces and the number of the assembly holes are multiple, the assembly holes are arranged at intervals along the circumferential direction of the annular connecting piece, and the fastening pieces and the assembly holes are arranged in one-to-one correspondence. As an alternative technical scheme of the air inlet tool for the semiconductor shower, the air inlet tool for the semiconductor shower further comprises a positioning pin, the annular connecting piece is provided with a positioning hole, the semiconductor shower is provided with a positioning groove, and the positioning pin penetrates through the positioning hole and is inserted into the positioning groove. As an alternative technical scheme of an air inlet tool for the semiconductor shower, the diameter of the air homogenizing cavity is D, and D is more than or equal to 50mm and less than or equal to 60mm. As an alternative technical scheme of the air inlet tooling for the semiconductor shower, the air inlet tooling for the semiconductor shower further comprises a sealing element, wherein the sealing element is arranged between the sleeve main body and the semiconductor shower and is used for sealing a gap between the sleeve main body and the semiconductor shower. As an alternative technical scheme of the air inlet tool for the semiconductor shower, the sleeve body and the annular connecting piece are made of aluminum. The beneficial effects of the invention are as follows: The invention provides an air inlet tool for a semiconductor shower, which comprises a sleeve body and an annular connecting piece. Wherein, the sleeve main body is provided with a uniform air cavity and at least one air inlet. By adopting the air inlet tool for the semiconductor shower, the sleeve main body is arranged on the semi