CN-121988500-A - Perovskite film coating equipment

Abstract

The invention discloses perovskite film coating equipment, and belongs to the technical field of photoelectric component coating. The perovskite film coating equipment comprises a conveying mechanism, a housing, an air supply device, a gate, a plurality of partition plates, a flow dividing mechanism, a controller and a solvent vapor concentration balancing device, wherein the space between the housing and the conveying mechanism can be divided into a cavity by the gate, a strip-shaped air inlet and a strip-shaped air outlet are formed in the side wall of the cavity, the air outlet is communicated with a stop valve, the air inlet is divided into a middle air passage and two side air passages by the partition plates, the middle air passage is opposite to the upper side of the middle of a base material, the flow dividing mechanism is communicated with the middle air passage and the two side air passages, one detection head is arranged above the middle of the base material, the other detection heads are symmetrically distributed above the two sides of the base material, and the controller adjusts the air inlet flow ratio of the middle air passage and the two side air passages so that the concentration of solvent vapor above the middle of the base material and the two sides of the base material is balanced. The perovskite film coating equipment disclosed by the invention can prevent uneven concentration of solvent vapor in an atmosphere environment where the surface of the perovskite film is positioned, and improves uniformity and compactness of a film layer.

Inventors

• LUO XIANGXIANG
• WEI JIANGLONG
• LI FENG

Assignees

• 商洛学院

Dates

Publication Date

20260508

Application Date

20260206

Claims (10)

1. 1. The utility model provides a perovskite film coating equipment, includes transport mechanism, housing and air feeder, and transport mechanism is used for conveying the substrate, and the top of transport mechanism is located to the housing, and air feeder is used for supplying protection gas, its characterized in that still includes: The gate is arranged on the housing and is attached to the conveying mechanism, the gate can divide the space between the housing and the conveying mechanism into a cavity, the side wall of the cavity is provided with a strip-shaped air inlet and a strip-shaped air outlet, the air inlet and the air outlet are opposite, the length directions of the air inlet and the air outlet are parallel to the upper surface of the base material, and the air outlet is communicated with the stop valve; The air inlet is divided into a middle air passage and two side air passages by the plurality of partition plates along the length direction of the air inlet, the middle air passage is opposite to the upper part of the middle part of the base material, and the two side air passages are opposite to the upper parts of the two sides of the base material respectively; the flow dividing mechanism is communicated with the air supply device and is communicated with the middle air passage and the air passages at two sides; the detection heads are arranged above the middle part of the base material, the rest detection heads are symmetrically distributed above two sides of the base material, and each detection head is used for detecting the concentration of solvent vapor at the position of the detection head in real time; And the controller is electrically connected with the flow dividing mechanism and the plurality of detection heads, and controls the flow dividing mechanism to act according to the concentration of the solvent vapor above the middle part of the base material and above the two sides of the base material so as to adjust the inlet flow ratio of the air passages at the middle part and the air passages at the two sides, so that the concentration of the solvent vapor above the middle part of the base material and above the two sides of the base material is balanced.
2. 2. The perovskite film coating apparatus as claimed in claim 1, wherein the housing is provided with a plurality of gates, the plurality of gates are arranged along a length direction of the transfer mechanism, the plurality of gates divide a space between the housing and the transfer mechanism into a plurality of mutually isolated and continuous cavities, the substrate sequentially passes through each cavity under the transfer of the transfer mechanism, each cavity is provided with the air inlet and the air outlet, each air inlet is communicated with the air supply device through a flow dividing mechanism, the air supply device is electrically connected with the controller, the controller presets a predetermined concentration of the solvent vapor in each cavity according to a predetermined concentration gradient, and the controller controls an air supply flow of the air supply device according to the concentration of the solvent vapor above the middle part of the substrate in each cavity, so that the concentration of the solvent vapor above the middle part of the substrate and above both sides of the substrate in the plurality of cavities presents a predetermined concentration gradient.
3. 3. The perovskite film coating apparatus as claimed in claim 2, wherein the flow dividing mechanism comprises an air duct, a driving mechanism and two flow dividing plates, the cross section of the air duct is identical to the structure of the air inlet, one end of the air duct is communicated with the air supply device, the other end of the air duct is communicated with the air inlet, the two flow dividing plates are symmetrically arranged on two sides of the central axis of the air duct, one flow dividing plate is hinged with a partition plate on one side of the middle air duct, the other flow dividing plate is hinged with a partition plate on the other side of the middle air duct, the driving mechanism is connected with the two flow dividing plates, the controller is electrically connected with the driving mechanism, and the driving mechanism is used for driving the two flow dividing plates to be close to or far away from each other, so that the air inflow ratio of the middle air duct is changed.
4. 4. A perovskite film coating apparatus as claimed in claim 3, wherein the gas supply means is in communication with a gas recovery section comprising a reversing valve in communication with a shut-off valve, a zeolite wheel in communication with the reversing valve for controlling the zeolite wheel in communication with the outlet of any one of the chambers, the zeolite wheel for adsorbing solvent vapour, and a gas pump in communication with the zeolite wheel, the controller being in electrical communication with the gas pump, the gas supply means being in communication with the gas pump, the gas supply means being capable of recovering a protective gas.
5. 5. The perovskite film coating apparatus as claimed in claim 1, wherein a stopper is provided on the transfer mechanism, and the stopper is used for limiting the posture of the substrate so that the central axis of the substrate is parallel to the central axis of the middle air passage.
6. 6. The perovskite film coating apparatus as claimed in claim 5, wherein a positioner is provided in the chamber, the positioner is used for positioning the central axis of the substrate, the controller is electrically connected with the positioner and the conveying mechanism, the controller controls the motion of the conveying mechanism according to the position of the central axis of the base material relative to the central axis of the middle air passage, so that the central axis of the base material and the central axis of the middle air passage are positioned in the same vertical plane.
7. 7. A perovskite film coating apparatus as claimed in claim 3, wherein a ventilation grille is provided between the air duct and the air supply means, the ventilation grille being for dispersing solvent vapour introduced by the air supply means uniformly.
8. 8. The perovskite film coating apparatus as claimed in claim 1, wherein a heater for heating the solvent vapor and the shielding gas is provided between the gas supply means and the gas guide pipe.
9. 9. The perovskite coating apparatus of claim 2, wherein the shielding gas provided by the gas supply means is high purity nitrogen.
10. 10. The perovskite film coating apparatus as claimed in claim 2, wherein the gate is provided with a gasket, and the gate is attached to the transfer mechanism through the gasket.

Description

Perovskite film coating equipment Technical Field The invention relates to the technical field of photoelectric component coating, in particular to perovskite coating equipment. Background The perovskite material has high photoelectric conversion efficiency, excellent carrier mobility and broad spectrum absorption characteristics, and has a potential application prospect in the photoelectric fields of photovoltaic cells, photoelectric detectors, light-emitting diodes and the like, so that the perovskite material has become a research hot spot in the current photoelectric material field. For perovskite-based devices, the film formation quality of the perovskite thin film directly determines the optoelectronic properties, stability and lifetime of the device. The main working flow of the perovskite film coating equipment is that perovskite precursor solution is uniformly coated on the surfaces of glass, flexible polymer and other base materials by means of spin coating, knife coating or slit coating, and then the base materials loaded with the perovskite solution are dried. The existing perovskite film coating equipment can regulate and control the release amount of solvent vapor in a closed cavity, creates an atmosphere environment suitable for film drying, utilizes the solvent vapor to inhibit the film surface layer from being rapidly solidified so as to relieve the coffee ring effect (after liquid is evaporated, solute can form annular deposition phenomenon at the edge of liquid drops, and in the perovskite film forming process, the effect can directly lead to defects of pores, cracks, uneven thickness and the like of the film layer), and simultaneously controls the overall solvent vapor concentration of the cavity by introducing protective gas and opening an exhaust valve, thereby avoiding the concentration from being too high and reducing the drying efficiency. When the concentration of the solvent vapor in the cavity exceeds the preset concentration in the film drying process, the introduced protective gas brings the excessive solvent vapor out to restore the preset concentration. However, when the perovskite film on the substrate is dried by the equipment, before the concentration of solvent vapor in the cavity is regulated and controlled, the cavity is relatively isolated, the air flow in the cavity is relatively static, and the inherent characteristics of the edge effect and the uneven air flow diffusion of the perovskite film are easy to cause the problems of uneven distribution of the solvent vapor concentration above the middle part of the substrate and the lower two sides of the perovskite film. Disclosure of Invention The invention aims to overcome the problems in the prior art, and provides perovskite film coating equipment which can prevent pinholes and holes from being generated in a perovskite film in the process of regulating and controlling the film forming speed of the perovskite film and promote the uniformity and compactness of a film layer. The invention provides perovskite film coating equipment, which comprises a conveying mechanism, a housing and a gas supply device, wherein the conveying mechanism is used for conveying a substrate, the housing is arranged above the conveying mechanism, and the gas supply device is used for supplying protective gas and further comprises: The gate is arranged on the housing and is attached to the conveying mechanism, the gate can divide the space between the housing and the conveying mechanism into a cavity, the side wall of the cavity is provided with a strip-shaped air inlet and a strip-shaped air outlet, the air inlet and the air outlet are opposite, the length directions of the air inlet and the air outlet are parallel to the upper surface of the base material, and the air outlet is communicated with the stop valve; The air inlet is divided into a middle air passage and two side air passages by the plurality of partition plates along the length direction of the air inlet, the middle air passage is opposite to the upper part of the middle part of the base material, and the two side air passages are opposite to the upper parts of the two sides of the base material respectively; the flow dividing mechanism is communicated with the air supply device and is communicated with the middle air passage and the air passages at two sides; the detection heads are arranged above the middle part of the base material, the rest detection heads are symmetrically distributed above two sides of the base material, and each detection head is used for detecting the concentration of solvent vapor at the position of the detection head in real time; And the controller is electrically connected with the flow dividing mechanism and the plurality of detection heads, and controls the flow dividing mechanism to act according to the concentration of the solvent vapor above the middle part of the base material and above the two sides of the base material so as to adjust the inle