CN-121988558-A - Reflux type cleaning device and control method thereof

CN121988558ACN 121988558 ACN121988558 ACN 121988558ACN-121988558-A

Abstract

A reflux type cleaning device and a control method thereof are provided, wherein the reflux type cleaning device comprises a feeding and discharging unit, a carrying platform unit, a cleaning unit, a reversing platform unit and a drying unit. The carrying platform unit and the feeding and discharging unit are arranged side by side along the conveying direction. The cleaning unit is arranged side by side with the carrying platform unit along the conveying direction. The reversing table unit is arranged side by side with the cleaning unit along the conveying direction. The drying unit is located between the carrying platform unit and the reversing platform unit along the conveying direction and is arranged side by side with the cleaning unit along the interval direction. By arranging the carrying platform unit, the cleaning unit, the reversing platform unit and the drying unit, the carrying tray can flow back to the carrying box in the feeding and discharging unit, so that the convenience of recycling the carrying tray in the feeding and discharging unit is improved under the premise of realizing automatic cleaning.

Inventors

YANG ZHIREN
SHI GUOZHANG
ZHANG FANQING

Assignees

微劲精密有限公司

Dates

Publication Date: 20260508
Application Date: 20241105

Claims (10)

1. The backflow type cleaning device is suitable for cleaning at least one carrying disc located in a carrying box and is characterized by comprising a material inlet and outlet unit, a carrying platform unit, a cleaning unit, a reversing platform unit and a drying unit, wherein the carrying platform unit is arranged side by side with the material inlet and outlet unit along a conveying direction and comprises a carrying guide rail, a front carrying seat and a rear carrying seat which are movably arranged on the carrying guide rail along a spacing direction perpendicular to the conveying direction, the cleaning unit is arranged side by side with the carrying platform unit along the conveying direction, the cleaning unit is used for driving the carrying disc to move along the conveying direction and away from the carrying platform unit and is used for flushing the carrying disc, the reversing platform unit is arranged side by side with the cleaning unit along the conveying direction and comprises a reversing guide rail, and at least one reversing seat which is movably arranged on the reversing guide rail along the spacing direction, the reversing seat is used for driving the carrying disc to move along the spacing direction, and the drying unit is arranged between the carrying platform unit and the carrying platform unit along the conveying direction and the drying unit and is used for driving the carrying disc to move along the spacing direction and is close to the carrying disc.
2. The reflow cleaning apparatus of claim 1, wherein the feed/discharge unit includes a lift rail, a lift seat movably disposed on the lift rail in a vertical direction perpendicular to the conveying direction and the spacing direction, and a pushing module adjacent to a side of the lift seat opposite to the stage unit, the lift seat being configured to accommodate the cassette, the pushing module being configured to push the tray toward the stage unit.
3. The back flow type cleaning device of claim 1, wherein the front bearing seat is provided with a front seat body and two front conveying belts rotatably arranged at two sides of the front seat body, the front conveying belts are jointly used for driving the carrying disc to move along the conveying direction and approach the cleaning unit, the back bearing seat is provided with a back seat body and two back conveying belts rotatably arranged at two sides of the back seat body, and the back conveying belts are jointly used for driving the carrying disc to move along the conveying direction and far away from the drying unit.
4. The back flow type cleaning device according to claim 1, wherein the cleaning unit comprises a chemical washing module which is arranged side by side with the carrier unit along the conveying direction, a deionized water washing module which is arranged side by side with the chemical washing module along the conveying direction, the chemical washing module is provided with a first washing shell which is used for limiting a first washing space, a first conveying belt which is positioned in the first washing space and is used for driving the carrier plate to move along the conveying direction, at least one first washing nozzle which is positioned in the first washing space and is used for spraying chemical towards the carrier plate, and the deionized water washing module is provided with a second washing shell which is used for limiting a second washing space, a second conveying belt which is positioned in the second washing space and is used for driving the carrier plate to move along the conveying direction, and at least one second washing nozzle which is positioned in the second washing space and is used for spraying deionized water towards the carrier plate.
5. The reflow cleaning apparatus of claim 1, wherein the drying unit includes two air drying modules disposed at intervals along the conveying direction, each air drying module having an air drying housing defining an air drying space, an air drying conveyor belt disposed in the air drying space for driving the carrier tray to move along the conveying direction, and at least one air drying nozzle disposed in the air drying space for blowing air toward the carrier tray.
6. The back-flow type cleaning device of claim 1, wherein the reversing seat comprises a reversing seat body and two reversing conveying belts rotatably arranged on two sides of the reversing seat body.
7. The control method of the reflux type cleaning device comprises the steps of cleaning a plurality of carrier plates positioned in a carrier box through the reflux type cleaning device, wherein the reflux type cleaning device comprises a feeding and discharging unit, a carrying platform unit, a cleaning unit, a reversing platform unit and a drying unit, the carrying platform unit is arranged side by side with the cleaning unit along the conveying direction, the reversing platform unit is arranged side by side with the cleaning unit along the conveying direction, the drying unit is positioned between the carrying platform unit and the reversing platform unit along the conveying direction and is arranged side by side with the cleaning unit along the interval direction, the feeding and discharging unit comprises a lifting guide rail, a lifting seat movably arranged on the lifting guide rail along the up-down direction and used for accommodating the carrier box, and a pushing module adjacent to one side of the lifting seat opposite to the carrying platform unit, and the carrying platform unit comprises a bearing guide rail, and a front bearing seat and a rear bearing seat movably arranged on the bearing guide rail along the interval direction, and the control method of the reflux type cleaning device is characterized by comprising the following steps: (A) The material inlet and outlet unit sequentially sends a plurality of carrier plates of the carrier plates positioned in the carrier box into the carrier table unit until the drying unit receives any carrier plate of the carrier plates; (B) When the drying unit receives any carrying disc, the rear carrying seat of the carrying platform unit moves along the interval direction and approaches the drying unit so as to receive the carrying disc sent by the drying unit; (C) After the front bearing seat of the carrier unit moves along the interval direction and approaches the cleaning unit, the front bearing seat sends the carrier disc borne by the front bearing seat into the cleaning unit; (D) After the rear bearing seat of the carrier unit moves along the interval direction and approaches the material inlet and outlet unit, the rear bearing seat sends the carrier disc borne by the rear bearing seat into the carrier box in the material inlet and outlet unit; (E) The lifting seat of the feeding and discharging unit drives the carrier box to move along the up-down direction so that the other carrier plate of the carrier plate positioned in the carrier box approaches the carrier table unit along the up-down direction, and (F) The front bearing seat of the carrier unit moves along the interval direction and approaches the feeding and discharging unit so as to receive the other carrier disc which is sent out by the feeding and discharging unit and is positioned in the carrier box.
8. The method of controlling a reverse flow type cleaning device according to claim 7, wherein the step (A) comprises the sub-steps of: (A-1) enabling the lifting seat of the feeding and discharging unit to drive the carrier box to move along the up-down direction, and further enabling one of the carrier plates in the carrier box to be aligned with the pushing module, so that the pushing module can send one of the carrier plates into the front bearing seat of the carrier unit; (A-2) after the front bearing seat moves along the interval direction and approaches the cleaning unit, the front bearing seat sends the carrier tray carried by the front bearing seat into the cleaning unit, and And (A-3) returning to the step (A-1) after the front bearing seat moves along the interval direction and approaches the feeding and discharging unit until the drying unit receives any bearing plate.
9. The control method of the reflux type cleaning device comprises the steps of cleaning a plurality of carrier plates positioned in a carrier box through the reflux type cleaning device, wherein the reflux type cleaning device comprises a feeding and discharging unit, a carrying platform unit, a cleaning unit, a reversing platform unit and a drying unit, the carrying platform unit is arranged side by side with the cleaning unit along the conveying direction, the reversing platform unit is arranged side by side with the cleaning unit along the conveying direction, the drying unit is positioned between the carrying platform unit and the reversing platform unit along the conveying direction and is arranged side by side with the cleaning unit along the interval direction, the feeding and discharging unit comprises a lifting guide rail, a lifting seat movably arranged on the lifting guide rail along the up-down direction and used for accommodating the carrier box, and a pushing module adjacent to one side of the lifting seat opposite to the carrying platform unit, and the carrying platform unit comprises a bearing guide rail, and a front bearing seat and a rear bearing seat movably arranged on the bearing guide rail along the interval direction, and the control method of the reflux type cleaning device is characterized by comprising the following steps: (A) The material inlet and outlet unit sequentially sends a plurality of carrier plates of the carrier plates positioned in the carrier box into the carrier table unit until the drying unit receives any carrier plate of the carrier plates; (B) When the drying unit receives any carrying disc, the rear carrying seat of the carrying platform unit moves along the interval direction and approaches the drying unit so as to receive the carrying disc sent by the drying unit; (C) After the front bearing seat of the carrier unit moves along the interval direction and approaches the cleaning unit, the front bearing seat sends the carrier disc borne by the front bearing seat into the cleaning unit; (D) The front bearing seat of the carrier unit moves along the interval direction and approaches the feeding and discharging unit so as to receive the other carrier disc, which is positioned in the carrier box and is sent out by the feeding and discharging unit, of the carrier disc; (E) The lifting seat of the feeding and discharging unit drives the carrier box to move along the up-down direction, and (F) After the rear bearing seat of the carrier unit moves along the interval direction and approaches the material inlet and outlet unit, the rear bearing seat sends the carrier disc borne by the rear bearing seat into the carrier box in the material inlet and outlet unit.
10. The method of controlling a reverse flow type cleaning device according to claim 9, wherein the step (A) comprises the sub-steps of: (A-1) enabling the lifting seat of the feeding and discharging unit to drive the carrier box to move along the up-down direction, and further enabling one of the carrier plates in the carrier box to be aligned with the pushing module, so that the pushing module can send one of the carrier plates into the front bearing seat of the carrier unit; (A-2) after the front bearing seat moves along the interval direction and approaches the cleaning unit, the front bearing seat sends the carrier tray carried by the front bearing seat into the cleaning unit, and And (A-3) returning to the step (A-1) after the front bearing seat moves along the interval direction and approaches the feeding and discharging unit until the drying unit receives any bearing plate.

Description

Reflux type cleaning device and control method thereof Technical Field The present invention relates to a cleaning device, and more particularly, to a reflux type cleaning device and a control method thereof. Background In recent years, since the processing operation of semiconductor chips is quite precise, and the amount of semiconductor chips used is significantly increased, it is an important issue at present how to achieve quality improvement with an increase in yield. However, the cleaning operation of the semiconductor chip is usually performed by manual rinsing, which consumes much labor and time. It is apparent that a set of automated cleaning devices is currently developed by developers in the relevant field to reduce the overall cost of the current effort. Disclosure of Invention The object of the present invention is to provide a reflux type cleaning device and a control method thereof, which can overcome the above-mentioned drawbacks. The invention relates to a reflux type cleaning device which is suitable for cleaning at least one carrying disc positioned in a carrying box. The backflow type cleaning device comprises a feeding and discharging unit, a carrying platform unit, a cleaning unit, a reversing platform unit and a drying unit, wherein the carrying platform unit is arranged side by side with the feeding and discharging unit along a conveying direction and comprises a bearing guide rail, a front bearing seat and a rear bearing seat which are movably arranged on the bearing guide rail along a spacing direction perpendicular to the conveying direction, the cleaning unit is arranged side by side with the carrying platform unit along the conveying direction and is used for driving a carrying disc to move along the conveying direction and away from the carrying platform unit and is used for flushing the carrying disc, the reversing platform unit is arranged side by side with the cleaning unit along the conveying direction and comprises a reversing guide rail and at least one reversing seat which is movably arranged on the reversing guide rail along the spacing direction, the drying unit is positioned between the carrying platform unit and the reversing platform unit along the conveying direction and is arranged side by side with the cleaning unit along the spacing direction and is used for driving the drying unit to move along the carrying disc and is close to the carrying disc. The invention discloses a reflux type cleaning device, wherein a material feeding and discharging unit comprises a lifting guide rail, a lifting seat movably arranged on the lifting guide rail along the up-down direction perpendicular to the conveying direction and the interval direction, and a pushing module adjacent to one side of the lifting seat opposite to a carrying platform unit, wherein the lifting seat is used for accommodating a carrying box, and the pushing module is used for pushing a carrying disc to approach the carrying platform unit. The back-flow type cleaning device disclosed by the invention has the advantages that the front bearing seat is provided with the front seat body and two front conveying belts which are rotatably arranged at the two sides of the front seat body, the front conveying belts are jointly used for driving the carrying disc to move along the conveying direction and approach the cleaning unit, the back bearing seat is provided with the back seat body and two back conveying belts which are rotatably arranged at the two sides of the back seat body, and the back conveying belts are jointly used for driving the carrying disc to move along the conveying direction and far away from the drying unit. The invention discloses a reflux type cleaning device, which comprises a medicament washing module, a deionized water washing module and at least one deionized water washing nozzle, wherein the medicament washing module is arranged side by side with a carrier unit along the conveying direction, the deionized water washing module is arranged side by side with the medicament washing module along the conveying direction, the medicament washing module is provided with a first washing shell which is used for defining a first washing space, a first conveying belt which is positioned in the first washing space and is used for driving a carrier plate to move along the conveying direction, at least one first washing nozzle which is positioned in the first washing space and is used for spraying medicament towards the carrier plate, the deionized water washing module is provided with a second washing shell which is used for defining a second washing space, a second conveying belt which is positioned in the second washing space and is used for driving the carrier plate to move along the conveying direction, and at least one second washing nozzle which is positioned in the second washing space and is used for spraying deionized water towards the carrier plate. The invention discloses a reflux type cleaning