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CN-121988866-A - Solar cell oxidation-preventing laser processing method and solar cell

CN121988866ACN 121988866 ACN121988866 ACN 121988866ACN-121988866-A

Abstract

The method comprises the steps of moving a semi-finished solar cell to a processing station, enabling a surface to be processed to face upwards, providing a protective gas flow field on at least the surface to be processed to isolate the surface to be processed from being in contact with air, and scanning the surface to be processed according to a preset pattern by laser passing through the protective gas flow field to finish processing. By the method, the protective gas flow field is formed on the surface to be processed of the semi-finished product of the solar cell, a protective gas atmosphere is provided for laser processing, and the technical problem of oxidation of a processing layer or a film layer adjacent to the processing layer caused by laser processing in the prior art is avoided.

Inventors

  • LU HONGYAN
  • ZHANG QIANG
  • ZHANG SONG
  • ZHU FAN

Assignees

  • 帝尔激光科技(无锡)有限公司

Dates

Publication Date
20260508
Application Date
20250103

Claims (20)

  1. 1. A laser processing method for preventing solar cells from oxidation is characterized by moving a semi-finished product of the solar cells to a processing station, enabling the surface to be processed to face upwards, providing a protective gas flow field on at least the surface to be processed to isolate the surface to be processed from being contacted with air, and scanning the surface to be processed according to a preset pattern by laser passing through the protective gas flow field to finish processing.
  2. 2. The method for laser processing solar cell according to claim 1, wherein the shielding gas is an inert gas or a mixture of an inert gas and a reducing gas.
  3. 3. The method for processing the solar cell oxidation-preventing laser according to claim 2, wherein the solar cell semi-finished product is placed on a bearing table, a driving device drives the bearing table to reach the processing station, the protective gas is blown out towards the solar cell semi-finished product through a gas outlet of a blowing device, a protective gas flow field is formed above the surface to be processed, laser of a laser processing module arranged above the processing station passes through the protective gas flow field to scan the surface to be processed of the solar cell semi-finished product according to the preset pattern, and processing is completed, wherein laser scanning is performed through a laser galvanometer and a field lens.
  4. 4. The method of claim 3, wherein the length of at least one of the air outlets or the connection line of the air outlets is not smaller than the projected length of the semi-finished product of the solar cell in the length direction of the air outlets, and/or, The height of the lowest point of the air outlet is 0-60 mm from the upper surface of the bearing table, and/or, The horizontal distance between the air outlet and the edge of the battery piece is 0-180 mm, and/or, The included angle between the air outlet and the horizontal plane is-6-5 degrees.
  5. 5. The method for anti-oxidation laser processing of solar cells according to claim 4, wherein the height of the lowest point of the air outlet is 0-20 mm from the upper surface of the bearing table, and the included angle between the air outlet and the horizontal plane is-3-5 degrees.
  6. 6. The method for anti-oxidation laser processing of solar cells according to claim 4, wherein the height of the lowest point of the air outlet is 20-40 mm from the upper surface of the bearing table, and the included angle between the air outlet and the horizontal plane is-6~3 degrees.
  7. 7. The method for anti-oxidation laser processing of solar cells according to claim 4, wherein the lowest point of the air outlet is 40-60 mm away from the upper surface of the bearing table, and the included angle between the air outlet and the horizontal plane is-6~0 degrees.
  8. 8. The method of claim 4, wherein the length of one gas outlet or the length of a connecting line of a plurality of gas outlets is not less than 1.2 times the projected length of the semi-finished solar cell in the direction of the gas outlet.
  9. 9. The method for processing the solar cell oxidation preventing laser according to claim 4, wherein the length of one air outlet or the length of a connecting line of a plurality of air outlets is 1.2-1.5 times the projection length of the solar cell semi-finished product in the direction of the air outlets.
  10. 10. The method for anti-oxidation laser processing of solar cells according to claim 4, wherein the width of the air outlet is 0.05-0.2 mm.
  11. 11. The method for preventing oxidation of a solar cell according to claim 10, wherein the air outlet is rectangular.
  12. 12. The method for processing the solar cell oxidation preventing laser according to claim 11, wherein the plurality of air outlets are arranged, the length of each air outlet is 1.5-2.5 mm, and the interval between adjacent air outlets is 2-3 mm.
  13. 13. The method for anti-oxidation laser processing of solar cells according to claim 4, wherein the width of the air outlet is 0.5-1 mm.
  14. 14. The method for processing the solar cell oxidation preventing laser of claim 13, wherein the plurality of air outlets are circular with the diameter of 0.5-1 mm, and the distance between every two adjacent air outlets is 7-15 mm.
  15. 15. The method for laser processing solar cell oxidation preventing according to claim 3, wherein a plurality of gas outlets of said gas blowing means are arranged at intervals in height to blow out said shielding gas toward said solar cell semi-finished product, and a plurality of said shielding gas flow fields are arranged at intervals in height above said surface to be processed.
  16. 16. The method for processing the solar cell oxidation-preventing laser according to claim 3, further comprising the step of performing dust extraction while performing laser processing, wherein the driving device is a rotary driving assembly, a plurality of bearing tables are uniformly arranged along the circumferential direction of the rotary driving device, the air blowing device is arranged on one side of the bearing tables close to the rotary driving device, an opening for the laser processing module to work is formed in the top of the dust extraction device, and the bottom of one side of the dust extraction device away from the air blowing device is lower than the upper surface of the bearing tables.
  17. 17. The method for anti-oxidation laser processing of solar cell according to claim 3, wherein the content of the shielding gas in the shielding gas flow field is not less than 95%.
  18. 18. The method for processing the solar cell oxidation prevention laser according to claim 3, wherein the air speed in the shielding gas flow field is 5-10 m/s, and the flow field thickness is 30-50 mm.
  19. 19. The method for processing the solar cell oxidation prevention laser according to claim 3, wherein the air speed in the shielding gas flow field is 5-20 m/s, and the flow field thickness is 5-10 mm.
  20. 20. The method for processing the solar cell oxidation preventing laser according to any one of claims 1 to 19, wherein the solar cell semi-finished product is a solar cell semi-finished product of which the electrode is not prepared after the surface passivation is completed; Wherein the preset pattern is a preset electrode pattern.

Description

Solar cell oxidation-preventing laser processing method and solar cell Technical Field The invention relates to the technical field of solar cells, in particular to an anti-oxidation laser processing method of a solar cell and the solar cell. Background In the laser processing of solar cells, laser processing has been paid attention to and applied as a processing mode with high efficiency and high precision. However, during laser processing, the high processing temperatures at the moment ionize oxygen in ambient air, resulting in oxidation of the processed layer or its adjacent film. For example, for laser grooving processes, thick and dense oxide layers are easily formed on the exposed surface layers (e.g., silicon substrate or doped polysilicon layer) after grooving, and when base metal electrodes are prepared in such grooves, such oxide layers can adversely affect ohmic contact of the base metal electrodes with the contact layer. For the laser sintering process, an oxide layer is generated on the electrode, and the electric connection effect of the photovoltaic module is affected. Disclosure of Invention The invention provides an anti-oxidation laser processing method of a solar cell and the solar cell, and aims to solve the technical problem of oxidation of a processing layer or a film layer adjacent to the processing layer caused by laser processing in the prior art. In order to achieve the technical purpose, the invention adopts the following technical scheme. On the one hand, the invention provides an anti-oxidation laser processing method of a solar cell, which comprises the steps of moving a semi-finished product of the solar cell to a processing station, enabling a surface to be processed to face upwards, providing a protective gas flow field on at least the surface to be processed so as to isolate the surface to be processed from being contacted with air, and scanning the surface to be processed according to a preset pattern by laser passing through the protective gas flow field to finish processing. In the method for anti-oxidation laser processing of the solar cell of some embodiments, the shielding gas is an inert gas or a mixed gas of an inert gas and a reducing gas. The solar cell anti-oxidation laser processing method comprises the steps of placing a solar cell semi-finished product on a bearing table, driving the bearing table to reach a processing station by a driving device, blowing out protective gas towards the solar cell semi-finished product through an air outlet of an air blowing device, forming a protective gas flow field above a surface to be processed, and scanning the surface to be processed of the solar cell semi-finished product according to the preset pattern by laser of a laser processing module arranged above the processing station through the protective gas flow field to finish processing, wherein laser scanning is performed through a laser galvanometer and a field lens. According to the anti-oxidation laser processing method for the solar cell, at least one air outlet is provided, the length of one air outlet or the connection length of a plurality of air outlets is not smaller than the projection length of the semi-finished product of the solar cell in the length direction of the air outlet, and/or the height of the lowest point of the air outlet is 0-60 mm away from the upper surface of a bearing table, and/or the horizontal distance between the air outlet and the edge of a cell is 0-180 mm, and/or the included angle between the air outlet and the horizontal plane is-6-5 degrees. According to the anti-oxidation laser processing method for the solar cell, in some embodiments, the height of the lowest point of the air outlet is 0-20 mm away from the upper surface of the bearing table, and the included angle between the air outlet and the horizontal plane is-3-5 degrees. According to the anti-oxidation laser processing method for the solar cell, in some embodiments, the height of the lowest point of the air outlet is 20-40 mm away from the upper surface of the bearing table, and the included angle between the air outlet and the horizontal plane is-6~3 degrees. According to the anti-oxidation laser processing method for the solar cell, in some embodiments, the height of the lowest point of the air outlet is 40-60 mm away from the upper surface of the bearing table, and the included angle between the air outlet and the horizontal plane is-6~0 degrees. The length of at least one air outlet or the length of a connecting line of a plurality of air outlets is not less than 1.2 times of the projection length of the solar cell semi-finished product in the length direction of the air outlet, the height of the lowest point of the air outlet is 0-20 mm higher than the surface of the bearing table, and the horizontal distance between the air outlet and the edge of the solar cell semi-finished product is 100-180 mm. According to the anti-oxidation laser processing method for the solar