CN-121988885-A - Laser-induced plasma processing device and processing method thereof

CN121988885ACN 121988885 ACN121988885 ACN 121988885ACN-121988885-A

Abstract

A laser-induced plasma processing device and a processing method thereof belong to the field of processing equipment. The novel water tank comprises an optical component, a water tank I, U pipe, a filtering device and a water tank II, wherein the optical component is arranged above the water tank I, a supporting table is fixedly connected in the water tank I through a frame body, a workpiece is fixed on the supporting table through a clamp, two ends of the U-shaped pipe are respectively arranged at the lower ends of the water tank I and the lower end of the water tank II, the filtering device is arranged in the middle of the U-shaped pipe and comprises a limiting component and a filtering component, the limiting component comprises a limiting block I and a limiting block II which are fixedly connected to the inner wall of the U-shaped pipe, the filtering component comprises a filtering barrel arranged between the limiting block I and the limiting block II, and the upper end of the filtering barrel is fixedly connected with an output shaft of a motor. According to the invention, impurities on the outer wall of the filter vat can be effectively removed and discharged through rotation of the filter vat, so that the occurrence of filter vat blockage caused by untimely manual cleaning is reduced.

Inventors

ZHANG CUICUI
YU DI
ZHAO JINGHE
LI MENGHAN
GENG YUYING

Assignees

长春光华学院

Dates

Publication Date: 20260508
Application Date: 20260304

Claims (10)

1. A laser-induced plasma processing device is characterized by comprising an optical assembly (1), a water tank I (2), a U-shaped pipe (6), a filtering device (7) and a water tank II (9), wherein the optical assembly (1) is arranged above the water tank I (2), a supporting table (5) is fixedly connected in the water tank I (2) through a frame body, a workpiece (3) is fixed on the supporting table (5) through a clamp (4), two ends of the U-shaped pipe (6) are respectively arranged at the lower ends of the water tank I (2) and the water tank II (9), and the filtering device (7) is arranged in the middle of the U-shaped pipe (6); The filtering device (7) comprises a limiting component (71) and a filtering component (72), wherein the limiting component (71) comprises a limiting block I (711) and a limiting block II (712) which are fixedly connected to the inner wall of a U-shaped pipe (6), the filtering component (72) comprises a filtering barrel (721) arranged between the limiting block I (711) and the limiting block II (712), and the upper end of the filtering barrel (721) is fixedly connected with an output shaft of a motor (8).
2. The laser-induced plasma processing device of claim 1, wherein the bottom end of the filter vat (721) is hollowed out, the lower end of the filter vat (721) is connected into an annular groove on the bottom wall of the U-shaped pipe (6) through a bearing, a plurality of rings (723) are vertically and uniformly distributed on the outer wall of the filter vat (721), a gap is reserved between any two vertically adjacent rings (723), a plurality of cushion blocks (724) are fixedly connected in the gap, sieve holes I (722) are formed in the filter vat (721), and sieve holes II (725) communicated with the corresponding sieve holes I (722) are formed in the cushion blocks (724).
3. The laser-induced plasma processing apparatus as set forth in claim 2, wherein the opposing faces of the stopper II (712) and the stopper I (711) are arc-shaped.
4. The laser-induced plasma processing apparatus as set forth in claim 3, wherein the outer circumferential surfaces of the annular ring (723) and the cushion block (724) have the same diameter as the arcuate surfaces of the limiting block II (712) and the limiting block I (711).
5. A laser-induced plasma processing device as set forth in claim 2 or 4, wherein a plurality of holes (716) are vertically formed in the limiting block II (712), a scraper (714) and a baffle (715) are arranged in each hole (716) in sliding fit with the limiting block II, the scraper (714) and the baffle (715) are fixedly connected, a return spring (713) is fixedly connected between the baffle (715) and the inner wall of the hole (716), a drainage channel (718) is formed in the side face of the hole (716), a through hole (61) communicated with the drainage channel (718) is formed in the U-shaped pipe (6), and the scraper (714) is in sliding fit with a gap between two corresponding adjacent circular rings (723).
6. The laser-induced plasma processing apparatus as set forth in claim 5, wherein the pad (724) is provided with inclined surfaces (728) on both sides thereof.
7. The laser-induced plasma processing device of claim 6, wherein a plurality of elastic rubber films (726) are fixedly connected to the inner wall of the filter vat (721), sieve holes II (725) on each cushion block (724) are communicated with a space surrounded by the corresponding rubber film (726) and the inner wall of the filter vat (721), and limiting columns (727) are fixedly connected to the bottom wall of the U-shaped tube (6).
8. A laser-induced plasma processing apparatus as set forth in claim 7, wherein the stopper posts (727) are disposed near the stopper II (712), and each of the rubber films (726) is deformed by the stopper posts (727) by being pressed against the stopper posts (727) when they are in contact with the stopper posts (727).
9. The laser-induced plasma processing device of claim 8, wherein the water level sensor (10) is arranged on the inner wall of the water tank II (9), the water supplementing tank (12) is arranged above the water tank II (9), the valve body (11) is arranged at the liquid outlet of the water supplementing tank (12), the valve body (11) and the water level sensor (10) are electrically connected with the controller, the pump body (13) is further arranged in the water tank II (9), and the pump body (13) is communicated with the water reservoir on the optical assembly (1) through the pipe (14).
10. The processing method of a laser-induced plasma processing apparatus according to claim 9, wherein: the processing method comprises the following steps: Firstly, installing a workpiece (3), and then storing a water tank I (2), a water tank II (9), a U-shaped pipe (6) and a water reservoir into a preset volume of water; Starting the optical assembly (1) to process the workpiece (3); Starting the motor (8) and the pump body (13), and enabling waste materials and the like generated in the processing process of the workpiece (3) to flow to the position of the filtering device (7) along with water flow; filtering the water body through a filtering device (7), and pumping the water in the water tank II (9) into a water receiver through a pump body (13); And fifthly, supplementing the water level of the water in the water tank II (9) through a water supplementing tank (12).

Description

Laser-induced plasma processing device and processing method thereof Technical Field The invention relates to a laser-induced plasma processing device and a processing method thereof, belonging to the field of processing equipment. Background Laser induced plasma processing is a high resolution, high precision, tool-less processing method. In laser-induced plasma processing, a workpiece is immersed in a transparent static or dynamic liquid, a beam of light is focused over the workpiece surface, the laser breaks through the dielectric, a plasma is generated, and the melting and vaporization temperatures of the workpiece material are exceeded, thereby achieving the purpose of removing the material. The laser-induced plasma processing has great application prospect in the micro-nano manufacturing field, can obtain higher material removal rate and larger depth-to-width ratio while guaranteeing resolution and processing precision, and is a novel and reliable hard and brittle material processing technology. The current common processing equipment in a vertical coaxial configuration, in use, propagates laser light through a specially made coaxial nozzle center. The center of the nozzle is an optical window (such as quartz glass), and the periphery of the nozzle is an annular water cavity, so that a stable annular laminar water curtain is formed. The laser light is surrounded by the water column at the moment of exiting the nozzle and impinges vertically on the workpiece surface together. Perfect axisymmetry can be ensured, which is the biggest advantage, and the water flow field, the laser energy field and the plasma expansion field are completely symmetrical in space. This brings about an excellent stability, the water layer is uniform, and the bubbles can be flushed symmetrically to the periphery. However, when the filter is used, water is required to be continuously introduced into the water receiver so as to ensure the water pressure, impurities cannot be contained in the water, and processing is avoided, so that a set of powerful filter equipment is required, the conventional filter equipment is required to be manually cleaned, the filter screen is easy to block, the water permeability is influenced, and therefore, the filter screen is required to be improved. Disclosure of Invention The invention aims to solve the problems in the prior art and provides a laser-induced plasma processing device and a processing method thereof. The invention achieves the above purpose, adopts the following technical scheme: The laser-induced plasma processing device comprises an optical component, a water tank I, U pipe, a filtering device and a water tank II, wherein the optical component is arranged above the water tank I, a supporting table is fixedly connected in the water tank I through a frame body, and a workpiece is fixed on the supporting table through a clamp; the filtering device comprises a limiting component and a filtering component, wherein the limiting component comprises a limiting block I and a limiting block II which are fixedly connected to the inner wall of a U-shaped pipe, the filtering component comprises a filtering barrel positioned between the limiting block I and the limiting block II, and the upper end of the filtering barrel is fixedly connected with an output shaft of a motor. A processing method of a laser-induced plasma processing apparatus, the processing method comprising the steps of: firstly, installing a workpiece, and then storing a water tank I, a water tank II, a U-shaped pipe and a water receiver into a preset volume of water; starting an optical assembly to process a workpiece; Starting the motor and the pump body, and enabling waste materials and the like generated in the processing process of the workpiece to flow to the position of the filtering device along with water flow; Filtering the water body by a filtering device, and pumping the water in the water tank II into a water receiver by a pump body; And fifthly, supplementing water level of water in the water tank II through a water supplementing tank. Compared with the prior art, the invention has the beneficial effects that impurities on the outer wall of the filter vat can be effectively removed and discharged through the rotation of the filter vat, and the occurrence of filter vat blockage caused by untimely manual cleaning is reduced. Drawings FIG. 1 is a front cross-sectional view of a laser-induced plasma processing apparatus of the present invention; FIG. 2 is a cross-sectional view taken along the direction A-A in FIG. 1; FIG. 3 is a top cross-sectional view of a confinement assembly of a laser-induced plasma processing apparatus according to the present invention; fig. 4 is a front view of a U-shaped tube of a laser-induced plasma processing apparatus according to the present invention; FIG. 5 is a front view of a stopper II of a laser-induced plasma processing apparatus according to the present invention; FIG. 6 is a top