CN-121989125-A - Grinding equipment and corner grinding device for square silicon rod

CN121989125ACN 121989125 ACN121989125 ACN 121989125ACN-121989125-A

Abstract

The application discloses grinding equipment of square silicon rods and a corner grinding device thereof, wherein the grinding equipment comprises a machine base and a grinding guide rail which is arranged on the machine base and extends transversely, the corner grinding device comprises corner grinding carriers which are arranged on the grinding guide rail and can move transversely along the grinding guide rail and are used for laterally supporting the square silicon rods to be ground, the corner grinding carriers comprise a pair of oppositely arranged bearing seats, each bearing seat is provided with a swinging mechanism which is used for laterally supporting the square silicon rods and can drive the square silicon rods to perform reversing motion and swinging motion, the swinging mechanism is provided with a supporting component which is used for adjusting the axial lead of the laterally placed square silicon rods, and first and second corner grinding spindles which are respectively arranged on two opposite sides of the grinding guide rail and are used for performing corner grinding operation on two opposite side edges of the square silicon rods.

Inventors

LU JIANCHUN
GU BIN
PAN XUEMING
LI XIN
CAO QIFENG

Assignees

上海日进机床有限公司

Dates

Publication Date: 20260508
Application Date: 20241108

Claims (10)

1. A corner grinding device of a grinding apparatus, the grinding apparatus comprising a housing and a grinding rail disposed in the housing and extending in a lateral direction, the corner grinding device comprising: The angle grinding carrier is arranged on the grinding guide rail and can move transversely along the grinding guide rail and is used for laterally supporting a square silicon rod to be ground, and the angle grinding carrier comprises a pair of oppositely arranged bearing seats, wherein each bearing seat is provided with a swinging mechanism which is used for laterally supporting the square silicon rod and can drive the square silicon rod to perform reversing movement and swinging movement; The first angle grinding spindle and the second angle grinding spindle are respectively arranged on two opposite sides of the grinding guide rail and used for performing angle grinding operation on edges on two opposite sides of the square silicon rod.
2. The angle grinder of claim 1, wherein the rocking mechanism comprises a driving source and a rocking member connected to an output shaft of the driving source, the rocking mechanism has a reversing angle of ±90°, and the rocking mechanism has a preset rocking angle of ±5°.
3. The angle grinding device according to claim 1, wherein the angle grinding operation comprises chamfering operation of edges of the square silicon rod, wherein in the chamfering operation, side walls of the square silicon rod are placed on a pair of oppositely arranged bearing seats in a state of 45 degrees relative to the vertical, and the swinging mechanism is in a static state.
4. The corner grinding device according to claim 1, wherein the corner grinding operation is performed on edges of the square silicon rod, in the corner grinding operation, side walls of the square silicon rod are placed on a pair of bearing seats which are oppositely arranged in a state of 45 degrees relative to the vertical direction, and the swinging mechanism performs swinging motion by taking an axial lead of the square silicon rod as a rotating shaft.
5. The angle grinding device according to claim 1, wherein the supporting component is arranged on the swinging piece and comprises a first supporting component and a second supporting component which are used for supporting two adjacent side surfaces of the end part of the square silicon rod, and the supporting surfaces of the first supporting component and the second supporting component are 90 degrees.
6. The angle grinder of claim 5, wherein the first support assembly or the second support assembly comprises at least one pair of support cams and a compensation motor for driving each support cam to rotate, and an output shaft of the compensation motor and an axis of the support cams are eccentrically arranged to compensate for an error between an axis of the square silicon rod and an axis of the swing mechanism.
7. The angle grinder of claim 5, wherein the first support assembly or the second support assembly comprises a pallet for supporting the side surface of the Fang Gui bar, a linear displacement assembly connected with the pallet, and a servo motor for driving the linear displacement assembly to perform telescopic movement, wherein the servo motor is used for adjusting the axis of the square silicon bar supported by the pallet and the axis of the swinging mechanism to be positioned on the same axis by driving the linear displacement assembly to perform telescopic movement.
8. The corner grinding apparatus defined in claim 7 wherein the width of the pallet is less than the width of either side of the square silicon rod.
9. The angle grinding device according to claim 1, wherein a first end of the first or second angle grinding spindle is provided with a rough grinding wheel, a second end remote from the first end is provided with a fine grinding wheel, and the first or second angle grinding spindle performs an angle grinding operation on the square silicon rod by rotating 180 ° to switch the rough grinding wheel or the fine grinding wheel.
10. A grinding apparatus for square silicon rods, comprising: the grinding guide rail comprises a first section for transversely placing a square silicon rod to be subjected to surface grinding operation and a second section for transversely placing the square silicon rod to be subjected to angle grinding operation; The surface grinding device is correspondingly arranged on the first section and is used for carrying out surface grinding operation on the square silicon rod, and comprises a surface grinding carrier which is used for clamping two ends of the Fang Gui rod and can transversely move along the grinding guide rail, a first surface grinding spindle and a second surface grinding spindle which are respectively arranged on two opposite sides of the grinding guide rail and are used for carrying out surface grinding operation on two opposite sides of the square silicon rod, and The angle grinder of any one of claims 1 to 9, wherein the angle grinder is correspondingly arranged on the second section and is used for grinding angles of edges on two opposite sides of the square silicon rod.

Description

Grinding equipment and corner grinding device for square silicon rod Technical Field The application relates to the technical field of silicon materials, in particular to grinding equipment for square silicon rods and a corner grinding device thereof. Background The single crystal silicon rod is pulled out from the single crystal furnace and then needs to be continuously subjected to a series of working procedures including cutting, squaring, grinding, angle grinding and other mechanical working procedures, the silicon rod is glued and then is subjected to slicing, cleaning, chamfering, grinding, corrosion, re-cleaning and the like, and finally, the silicon wafer is subjected to working procedures such as texturing, diffusion, bonding, coating, sintering and the like to manufacture a semiconductor device or a solar silicon wafer for photovoltaic power generation. Generally, for grinding a silicon block which is a semi-finished material for manufacturing a silicon wafer, a rectangular parallelepiped silicon rod is subjected to a face grinding operation of four faces and a corner grinding operation (such as chamfering or rounding) of four sides before slicing and molding. When the silicon rod is subjected to the angle grinding operation, most manufacturers adopt different equipment to process silicon rods with different specifications, for example, when square rods with square cross sections and half rods with rectangular cross sections formed by half-cutting are required to be subjected to the angle grinding operation, most manufacturers adopt different equipment to process the square rods and the half rods respectively, and therefore production cost is increased. Therefore, how to provide a corner grinding device suitable for silicon rods with different specifications to save production cost is a technical problem to be solved by those skilled in the art. Disclosure of Invention In view of the above-mentioned drawbacks of the related art, an object of the present application is to provide a grinding apparatus for square silicon rods and a corner grinding device thereof, which are used for solving the technical problem that the corner grinding device in the related art cannot be applied to processing of silicon rods with different specifications, resulting in increased production cost. To achieve the above and other related objects, a first aspect of the present application provides a corner grinding device of a grinding apparatus, the grinding apparatus including a stand and a grinding rail disposed on the stand and extending in a lateral direction, the grinding device including a corner grinding carrier disposed on the grinding rail and movable in the lateral direction along the grinding rail, the corner grinding carrier including a pair of oppositely disposed carrying seats, each carrying seat being provided with a swinging mechanism for laterally supporting the square silicon rod and driving the square silicon rod to perform a reversing motion and a swinging motion, the swinging mechanism being provided with a support assembly for adjusting a laterally disposed square silicon rod shaft, and first and second corner grinding spindles disposed on opposite sides of the grinding rail, respectively, for performing corner grinding operations on opposite side edges of the square silicon rod. The second aspect of the application provides grinding equipment for square silicon rods, which comprises a machine base, wherein the machine base is provided with a grinding guide rail extending along the transverse direction, the grinding guide rail comprises a first section used for transversely placing square silicon rods to be subjected to surface grinding operation and a second section used for transversely placing the square silicon rods to be subjected to angle grinding operation, surface grinding devices are correspondingly arranged on the first section and used for carrying out surface grinding operation on the square silicon rods, the surface grinding devices comprise surface grinding carriers used for clamping two ends of the Fang Gui rods and capable of transversely moving along the grinding guide rail, and a first surface grinding spindle and a second surface grinding spindle which are respectively arranged on two opposite sides of the grinding guide rail and used for carrying out surface grinding operation on two opposite sides of the square silicon rods, and the angle grinding devices are correspondingly arranged on the second section and used for carrying out angle grinding operation on two opposite side edges of the square silicon rods. In summary, the grinding equipment and the corner grinding device for the square silicon rod provided by the application have the advantages that the corner grinding device comprises the first corner grinding main shaft and the second corner grinding main shaft which are arranged on the two opposite sides of the grinding guide rail and the corner grinding carrier which is ar