CN-121989149-A - Flexible ultra-precise polishing device and polishing method based on air wall constraint

CN121989149ACN 121989149 ACN121989149 ACN 121989149ACN-121989149-A

Abstract

The invention discloses a flexible ultra-precise polishing device and a polishing method based on air wall constraint, and relates to the technical field of ultra-precise polishing. The flexible ultra-precise polishing device based on the air wall constraint comprises a frame, a liquid conveying assembly and an air conveying assembly, wherein the liquid conveying assembly comprises a rotating shaft, an infusion disc and a rotary joint, the rotating shaft is rotatably assembled on the frame and provided with a first infusion channel, the infusion disc is fixedly arranged on the rotating shaft, the infusion disc is provided with a second infusion channel which is communicated with the first infusion channel and penetrates through the side wall of the infusion disc, the rotary joint is arranged on the first infusion channel, the air conveying assembly is provided with two groups and symmetrically arranged on the two axial sides of the infusion disc, the air conveying assembly comprises an air feeding disc rotatably assembled on the rotating shaft, and the air feeding disc is provided with an air feeding channel which extends along the radial direction and penetrates through the side wall of the air feeding disc. The flexible ultra-precise polishing device based on the air wall constraint can effectively restrict the distribution of polishing liquid in a processing area, and improves the polishing efficiency and the polishing quality.

Inventors

LIU YUHONG
WANG LIAOYUAN
FENG TIANXIANG
LIU GANG
WANG HAOYU
ZHANG LULU

Assignees

清华大学

Dates

Publication Date: 20260508
Application Date: 20260324

Claims (10)

1. Flexible ultraprecise burnishing device based on gas wall constraint, characterized by, include: A frame; The liquid conveying assembly comprises a rotating shaft, an infusion disc and a rotary joint, the rotating shaft is rotationally assembled on the frame, the rotating shaft is provided with a first infusion channel, the infusion disc is fixedly arranged on the rotating shaft, a plurality of second infusion channels extending along the radial direction are circumferentially arranged on the infusion disc, one end of each second infusion channel is communicated with the corresponding first infusion channel, the other end of each second infusion channel penetrates through the side wall of the corresponding infusion disc to form a liquid outlet hole, and the rotary joint is rotationally and hermetically matched with the other end of the corresponding first infusion channel and is used for conveying polishing liquid; the gas conveying assembly is provided with two groups of gas conveying assemblies which are symmetrically arranged on two axial sides of the infusion tray, the gas conveying assembly comprises a gas feeding tray, the gas feeding tray is rotationally assembled on the rotating shaft, a plurality of gas feeding channels extending along the radial direction are arranged on the gas feeding tray at intervals along the circumferential direction, the gas feeding channels penetrate through the side wall of the gas feeding tray to form gas spraying holes, and the gas feeding tray is used for rotating relative to the rotating shaft to form annular rotary gas flow on the shaft side of the infusion tray.
2. The flexible ultra-precise polishing device based on gas wall constraint of claim 1, wherein the gas delivery assembly further comprises a gas slip ring, the gas slip ring comprises a movable slip ring and a static slip ring which are rotatably and hermetically assembled, the movable slip ring and the static slip ring are communicated and used for delivering gas, the movable slip ring is fixedly assembled on the gas feeding disc, and the movable slip ring is provided with a gas feeding pipe connected with the gas feeding disc.
3. The flexible ultra-precise polishing device based on the air wall constraint according to claim 2, wherein the air conveying assembly further comprises an elastic sealing gasket and an air sealing cover, an annular air feeding groove is formed in one side, away from the infusion disc, of the air feeding disc, an air inlet communicated with the air feeding channel is formed in the groove bottom of the air feeding groove corresponding to the air feeding channel, the elastic sealing gasket and the air sealing cover are detachably arranged on the air feeding disc and used for sealing the air feeding groove, an air port communicated with the air feeding groove is formed in the elastic sealing gasket, an air receiving port communicated with the air port is formed in the air sealing cover, and the air receiving port is used for being connected with the air feeding pipe.
4. A flexible ultra-precise polishing device based on air wall constraint according to any one of claims 1-3, wherein the liquid delivery disc is provided with an axially extending inclined surface structure corresponding to the liquid outlet hole, the distance between the bottom surface of the inclined surface structure and the axis of the liquid delivery disc is reduced along the rotation direction of the liquid delivery disc, and the inclined surface structure is used for forming a dynamic pressure liquid film on the bottom surface by polishing liquid.
5. The flexible ultra-precise polishing device based on air wall constraint of claim 4, wherein an arc surface structure is arranged between two adjacent inclined surface structures, a slotted structure is arranged on the arc surface structure, and the slotted structure extends along the axial direction of the infusion disc and penetrates through two axial side surfaces of the infusion disc.
6. A flexible ultra-precise polishing device based on air wall constraint according to any one of claims 1-3, further comprising a first driving assembly, wherein the first driving assembly comprises a first motor fixedly arranged on the frame, and the first motor is in transmission connection with the rotating shaft so as to drive the rotating shaft to rotate.
7. The flexible ultra-precise polishing device based on air wall constraint according to any one of claims 1-3, further comprising a second driving assembly, wherein the second driving assembly comprises a second motor, a transmission shaft, a first transmission unit and a second transmission unit, the second motor is fixedly arranged on the frame, the transmission shaft is rotatably assembled on the frame and is in transmission fit with the second motor, the first transmission unit is fixedly arranged on the transmission shaft, the second transmission unit is fixedly arranged on the air supply disc, and the first transmission unit and the second transmission unit are in transmission fit to drive the air supply disc to rotate.
8. A polishing method, characterized in that the flexible ultra-precise polishing device based on the gas wall constraint according to any one of claims 1 to 7 comprises the following steps: s1, driving an infusion disc to rotate at a first speed, and driving two air supply discs to rotate at a second speed; s2, conveying gas into the gas feeding disc, and forming annular rotary air flows on two axial sides of the infusion disc through rotation of the gas feeding disc; and S3, conveying polishing liquid to the rotating shaft through the rotary joint, forming a polishing liquid film on the periphery of the infusion disc by the polishing liquid, enabling the infusion disc to be close to a workpiece, and polishing the surface of the workpiece through the polishing liquid film.
9. The polishing method as recited in claim 8, wherein, in step S1, The rotation direction of the infusion disc is the same as the rotation direction of the air feeding disc, and the value of the second speed is larger than the value of the first speed, or, The rotation direction of the infusion disc is opposite to the rotation direction of the air feeding disc.
10. The polishing method according to claim 8, wherein the infusion tray is provided with inclined surface structures extending in the axial direction corresponding to the liquid outlet holes, an arc surface structure is provided between two adjacent inclined surface structures, a groove structure is provided on the arc surface structure, and the distance between the bottom surface of the inclined surface structure and the axis of the infusion tray is reduced in the first direction, and in step S1, the infusion tray is driven to rotate in the first direction.

Description

Flexible ultra-precise polishing device and polishing method based on air wall constraint Technical Field The invention relates to the technical field of ultra-precise polishing, in particular to a flexible ultra-precise polishing device and a polishing method based on air wall constraint. Background With the development of optical devices, semiconductor devices and high-end equipment manufacturing, requirements on the surface topography precision and the surface quality of workpieces are continuously improved. For hard and brittle materials such as monocrystalline silicon, silicon carbide, diamond and optical glass, the traditional mechanical polishing method is easy to scratch, subsurface damage, uneven processing and the like, and the requirements of the high-end manufacturing field on the quality of the nanoscale surface are difficult to meet. In the related art, the common technologies of chemical mechanical polishing, magnetorheological polishing, fluid polishing and the like can reduce damage caused by mechanical contact to a certain extent by removing materials on the surface of a workpiece by using abrasive particles or functional fluid in the polishing solution. However, in an actual machining process, the polishing liquid is easily diffused or splashed outside the machining area under the action of centrifugal force and fluid pressure, so that the utilization rate of the polishing liquid is reduced, the machining pressure is unstable, and the stability of the fluid state in the machining area is affected, thereby reducing the polishing efficiency and the machining quality. In addition, the fluid polishing method often has difficulty in forming a stable and controllable fluid action area in a processing area during the liquid supply process, and the pressure and flow state of the polishing liquid at a processing interface are difficult to accurately adjust, so that the stability and the processing precision of the processing process are further limited. Disclosure of Invention The present invention aims to solve at least one of the technical problems in the related art to some extent. Therefore, the embodiment of the invention provides the flexible ultra-precise polishing device based on the gas wall constraint, which can effectively restrict the distribution of polishing liquid in a processing area and improve the polishing efficiency and the polishing quality. The embodiment of the invention also provides a polishing method. The flexible ultra-precise polishing device based on the air wall constraint provided by the embodiment of the invention comprises: A frame; The liquid conveying assembly comprises a rotating shaft, an infusion disc and a rotary joint, the rotating shaft is rotationally assembled on the frame, the rotating shaft is provided with a first infusion channel, the infusion disc is fixedly arranged on the rotating shaft, a plurality of second infusion channels extending along the radial direction are circumferentially arranged on the infusion disc, one end of each second infusion channel is communicated with the corresponding first infusion channel, the other end of each second infusion channel penetrates through the side wall of the corresponding infusion disc to form a liquid outlet hole, and the rotary joint is rotationally and hermetically matched with the other end of the corresponding first infusion channel and is used for conveying polishing liquid; the gas conveying assembly is provided with two groups of gas conveying assemblies which are symmetrically arranged on two axial sides of the infusion tray, the gas conveying assembly comprises a gas feeding tray, the gas feeding tray is rotationally assembled on the rotating shaft, a plurality of gas feeding channels extending along the radial direction are arranged on the gas feeding tray at intervals along the circumferential direction, the gas feeding channels penetrate through the side wall of the gas feeding tray to form gas spraying holes, and the gas feeding tray is used for rotating relative to the rotating shaft to form annular rotary gas flow on the shaft side of the infusion tray. According to the flexible ultra-precise polishing device based on the air wall constraint, the infusion disc is driven to rotate through the rotation of the rotating shaft, polishing liquid is conveyed to the liquid outlet hole through the first conveying channel and the second conveying channel, the polishing liquid forms a polishing liquid film on the peripheral side of the infusion disc under the rotation of the infusion disc, the air feeding disc rotates relative to the rotating shaft and the infusion disc, air is sprayed at the air spraying hole through the air feeding channel in a rotating state, annular rotating air flow is formed on the axial side of the infusion disc by the air feeding disc, namely, a flexible air wall is formed on the periphery of a processing area, the air wall can limit the polishing liquid to diffuse and splash