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CN-121989164-A - Machining clamping device and machining method for thin-wall annular product through vertical mill

CN121989164ACN 121989164 ACN121989164 ACN 121989164ACN-121989164-A

Abstract

The invention discloses a processing clamping device and a processing method of a vertical mill for a thin-wall annular product, wherein the vertical mill comprises a wax-bonding fixing base and a multi-specification replaceable product annular fixing piece, a receiving surface is arranged on the wax-bonding fixing base, a bonding limiting surface is arranged on the product annular fixing piece, and the wax-bonding fixing base and the product annular fixing piece form a vertical mill integral fixing structure with the thin-wall annular product to be processed through hot melt wax. The fixing of the thin-wall annular product and the aluminum oxide wax-sticking fixing base is realized by a hot melt wax bonding mode, and meanwhile, the auxiliary support produced by the annular fixing piece of the product is combined, so that the thin-wall annular product is uniformly stressed in the clamping process, the deformation and the cracking are effectively prevented, the hot melt wax has good filling property and buffering effect, can adapt to micro-unevenness of the surface of a workpiece, provides stable support, ensures uniform clamping force distribution, effectively reduces the influence of thermal stress, avoids additional stress caused by temperature change, and avoids the problem of stress concentration of the traditional mechanical clamping.

Inventors

  • LI JINGRU
  • HAN CHAOYANG
  • CHENG DONGYUAN
  • CHEN JUNHUA
  • XIE SHENGQIANG

Assignees

  • 浙江富乐德半导体材料科技有限公司

Dates

Publication Date
20260508
Application Date
20251226

Claims (10)

  1. 1. A vertical mill machining clamping device for a thin-wall annular product is characterized by comprising a wax-sticking fixed base (2) and a multi-specification replacement type product annular fixed part, wherein a bearing surface (23) is arranged on the wax-sticking fixed base (2), a bonding limiting surface is arranged on the product annular fixed part, and the wax-sticking fixed base (2) and the product annular fixed part form a vertical mill integral fixed structure (5) with the thin-wall annular product (1) to be machined through hot melt wax (6).
  2. 2. The vertical mill processing clamping device for the thin-wall annular product according to claim 1, wherein the wax-sticking fixed base (2) and the product ring surface fixed piece are respectively formed by precisely sintering and grinding high-purity alumina ceramics.
  3. 3. The vertical mill processing clamping device for the thin-wall annular product according to claim 1 is characterized in that a magnetic conductive alloy insert (7) is embedded at the bottom of the wax-sticking fixed base (2), and a positioning groove (9) is formed in the bottom plane of the wax-sticking fixed base (2).
  4. 4. The vertical mill processing clamping device for the thin-wall annular product, as claimed in claim 1, is characterized in that the product annular fixing part comprises a product outer annular fixing part (3) and a product inner annular fixing part (4), wherein the fit limiting surface on the product outer annular fixing part (3) is an arc fit surface (32) which is arranged on an inner cavity (31) of the outer annular fixing part and is matched with the shape of the outer annular wall of the thin-wall annular product, and the fit limiting surface on the product inner annular fixing part (4) is an outer wall fit surface (42) which is arranged on the outer wall and is matched with the shape of the inner annular wall of the thin-wall annular product.
  5. 5. The clamping device for vertical grinding of the thin-wall annular product according to any one of claims 1 to 4, wherein the hot melt wax (6) is low-temperature hot melt wax, and the melting point of the hot melt wax is 60-80 ℃.
  6. 6. A method for processing a thin-wall annular product by a vertical mill is characterized by adopting the clamping device as set forth in any one of claims 1 to 5, and comprising the following steps: s1, selecting a wax-sticking fixed base and a product ring surface fixed piece; s2, heating, namely heating a thin-wall annular product to be processed, a wax-sticking fixed base and a product ring surface fixing piece together; s3, waxing and fixing, namely bonding the bottom surface of the thin-wall annular product to be processed with the bearing surface of the wax bonding fixing base through hot melt wax, and completely bonding the bonding limiting surface of the product ring surface fixing piece with the thin-wall annular product to be processed through hot melt wax to form a bonding combination structure; S4, cooling and solidifying, namely cooling and solidifying the bonding combined structure to form an integral fixed structure; S5, mounting the cold body fixing structure on a magnetic force conversion platform of the vertical mill equipment for processing.
  7. 7. The method for vertically grinding the thin-wall annular product according to claim 6, wherein in the step 1, the diameter of a receiving surface of the wax-sticking fixed base is smaller than the outer diameter of the thin-wall annular product by 1-2 mm, and in the step 2, the thin-wall annular product to be processed, the wax-sticking fixed base and the product annular surface fixed piece are heated on the same heating platform in a rotating way, and the heating temperature is controlled to be 75+/-5 ℃ and the heat is preserved for at least 10 minutes.
  8. 8. The method for vertically grinding a thin-wall annular product according to claim 6, wherein in the step 3, the thickness of the hot melt wax coated on the bottom surface of the thin-wall annular product to be processed and the bonding limiting surface of the annular product fixing piece is 0.1-0.3 mm, and in the bonding process, the thin-wall annular product to be processed, the annular product fixing piece and the thin-wall annular product to be processed are slightly pressed and rotated to be completely bonded, so that the wax layer is uniformly distributed and bubbles are removed.
  9. 9. The method for processing the thin-wall annular product vertical mill according to claim 6, wherein in the step 4, the bonding combined structure is naturally cooled in a room temperature environment for at least 30 minutes, and in the step 5, a positioning groove at the bottom of the bonding wax fixing base is precisely matched with a positioning pin on the magnetic force conversion platform and is fixed through magnetic force absorption.
  10. 10. The method for vertically grinding a thin-walled annular product according to claim 6, further comprising the step of removing the thin-walled annular product from the wax-sticking fixed base, and removing the residual wax layer by using a cleaning agent after the step of removing the thin-walled annular product, wherein the step of removing the thin-walled annular product is performed, and the step of moving the integral fixed structure 5 to a heating platform and heating the integral fixed structure to 80+/-5 ℃ to melt the hot-melt wax.

Description

Machining clamping device and machining method for thin-wall annular product through vertical mill Technical Field The invention relates to the technical field of clamping devices for semiconductor products, in particular to a clamping device and a clamping method for clamping thin-walled annular products, and the clamping device is suitable for clamping thin-edge annular materials such as silicon carbide. Background In recent years, the semiconductor industry in China presents an explosive growth situation, and currently, hundreds of enterprises engaged in semiconductor design and manufacturing are presented in China. However, in the field of semiconductor device ceramic component production, domestic market share is relatively limited, and many technical problems remain to be overcome. Taking plane processing of regular plane products as an example, the vertical mill equipment becomes an ideal choice by virtue of high-efficiency processing speed and high processing precision. The vertical mill equipment integrates multiple functions of crushing, drying, grinding, grading conveying and the like, and is widely applied to a plurality of industries such as building materials, metallurgy, electric power and the like. Silicon carbide, which is a key inorganic nonmetallic material, has the remarkable advantages of high hardness, high wear resistance, high temperature resistance and the like, and has wide application in the fields of machining, electronic devices and the like. In particular, the demand of the thin-edge annular silicon carbide material products is large, the requirements on the processing precision of the products are high, the processing difficulty is high, and the vertical mill equipment is certainly an ideal choice. However, in the application process, how to realize clamping and fixing with the vertical mill equipment of the thin-edge annular material is always a great technical challenge. Particularly in the processing link of the thin-edge annular silicon carbide material, the clamping device has more stringent requirements on the performance. In view of the characteristics of thin wall and poor rigidity of the thin-edge annular material, deformation, cracking and the like are very easy to occur during clamping, and further negative influence is generated on machining precision and product quality. When the existing clamping device is used for dealing with the thin-edge annular silicon carbide material, the problems of poor clamping stability, easiness in damaging the material and the like are exposed, and the actual processing requirement is difficult to meet. For example, chinese patent document CN209223719U discloses a fixture, in particular a ceramic ring mill inner hole fixture, and belongs to the technical field of ceramic ring processing equipment. The ceramic ring support positioning step comprises a bottom plate, a movable clamping ring and a fixed clamping ring, wherein the bottom plate is connected with the fixed clamping ring through bolts, the bottom plate is rotationally connected with the movable clamping ring through a pin shaft, the fixed clamping ring and the movable clamping ring are distributed on the same circumference, a sunken movable positioning step is arranged on one side of the movable clamping ring, facing the fixed clamping ring, of the movable clamping ring, a sunken fixed positioning step is arranged on one side of the fixed clamping ring, facing the movable clamping ring, of the movable clamping ring, and the movable positioning step and the fixed positioning step are connected to form a circular ceramic ring support positioning step. According to the technical scheme, the ceramic ring with the inner hole needing to be ground can be movably clamped, but the technical scheme cannot meet the machining clamping requirement of the thin-edge annular silicon carbide material on the vertical mill equipment. Disclosure of Invention The invention aims to solve the problems of high processing precision requirement, high processing difficulty, poor grinding and clamping stability, easy damage to products and the like of the existing thin-edge annular material by using a vertical mill device, and provides a vertical mill processing method and a clamping device for a thin-wall annular product, which can effectively solve the problems of high processing difficulty, easy deformation and easy breakage of the thin-wall annular material in the clamping process and improve the clamping stability and the processing precision. The technical scheme includes that the vertical mill processing clamping device for the thin-wall annular product comprises a wax-bonding fixing base and a multi-specification replacement type product annular fixing piece, wherein a bearing surface is arranged on the wax-bonding fixing base, a bonding limiting surface is arranged on the product annular fixing piece, and the wax-bonding fixing base and the product annular fixing piece form a vertical mill int