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CN-121989376-A - Multi-wire cutting device and multi-wire cutting method

CN121989376ACN 121989376 ACN121989376 ACN 121989376ACN-121989376-A

Abstract

The invention discloses a multi-wire cutting device and a multi-wire cutting method, wherein the multi-wire cutting device comprises a multi-wire cutting machine and a slurry system, the multi-wire cutting machine is provided with a cutting position, the slurry system comprises a feeding loop, a cooling loop and a heat exchanger, the feeding loop comprises a slurry box, a liquid receiving structure, a liquid outlet structure and a detection structure, the detection structure is used for detecting the liquid outlet temperature and/or the liquid inlet temperature of the feeding loop, the cooling loop is arranged at a distance from the feeding loop and comprises a cooling structure and a valve structure which are connected, the heat exchanger is provided with a first heat exchange runner and a second heat exchange runner which mutually exchange heat, the first heat exchange runner is arranged in the feeding loop and is positioned at the upstream of the liquid outlet structure, the second heat exchange runner is arranged in the cooling loop, the valve structure is arranged between the cooling structure and the second heat exchange runner, and the opening of the valve structure is adjustable and is used for adjusting the medium flow of the second heat exchange runner according to the feeding amount of a driving structure and the detection result of the detection structure. Therefore, the product quality of the workpiece to be cut after being cut is improved conveniently.

Inventors

  • ZHANG ZIWEN
  • YANG YAOKANG

Assignees

  • 中环领先(徐州)半导体材料有限公司
  • 中环领先半导体科技股份有限公司

Dates

Publication Date
20260508
Application Date
20251230

Claims (11)

  1. 1. A multi-wire cutting device is characterized by comprising a multi-wire cutting machine and a slurry system, wherein the multi-wire cutting machine comprises a driving structure for driving at least a piece to be cut to lift up and down and is provided with a cutting position, The slurry system includes: The feeding loop comprises a slurry box, a liquid receiving structure, a liquid outlet structure and a detection structure which are arranged in a matched manner, wherein the liquid outlet structure is used for discharging liquid towards the cutting position, the liquid receiving structure is arranged below the cutting position and used for receiving slurry flowing down from the cutting position, and the detection structure is used for detecting the liquid outlet temperature and/or the liquid inlet temperature of the feeding loop; a cooling circuit disposed in spaced relation to the charging circuit and including a cooling structure and a valve structure connected thereto; The heat exchanger is provided with a first heat exchange flow channel and a second heat exchange flow channel which exchange heat with each other, the first heat exchange flow channel is arranged on the feeding loop and is positioned at the upstream of the liquid outlet structure, the second heat exchange flow channel is arranged on the cooling loop, the valve structure is arranged between the cooling structure and the second heat exchange flow channel and is communicated with the driving structure, and the opening of the valve structure is adjustable and used for adjusting the medium flow of the second heat exchange flow channel according to the feeding amount of the driving structure and the detection result of the detection structure.
  2. 2. The multi-wire cutting apparatus of claim 1, wherein the slurry tank comprises: The box body is internally provided with a containing space, the box body is provided with a first inlet, a first outlet, a second inlet and a second outlet which are respectively communicated with the containing space, the liquid receiving structure is connected with the first inlet, the liquid outlet structure is connected with the first outlet, one end of the first heat exchange flow channel is connected with the second inlet, and the other end of the first heat exchange flow channel is connected with the second outlet; and the stirring mechanism is arranged on the box body and is used for stirring the slurry in the containing space.
  3. 3. The multi-wire cutting device according to claim 1, wherein the cutting position comprises a first winding shaft, a second winding shaft and a wire mesh, the first winding shaft and the second winding shaft are arranged in parallel and at intervals, the wire mesh is wound on the first winding shaft and the second winding shaft, the wire mesh comprises a plurality of wire bodies which are sequentially arranged along the axial direction of the first winding shaft, The liquid outlet structure comprises a first liquid outlet component and a second liquid outlet component, wherein one side, adjacent to the other, of each of the first winding shaft and the second winding shaft is provided with the first liquid outlet component, so as to be used for discharging liquid towards the wire net, and one side, far away from the other, of each of the first winding shaft and the second winding shaft is provided with the second liquid outlet component, so as to be used for discharging liquid towards the first winding shaft or the second winding shaft.
  4. 4. The multi-wire cutting apparatus of claim 1 wherein the detection structure comprises: A first temperature sensor arranged between the first outlet of the headbox and the discharge structure and in communication with the valve structure, and/or, And a second temperature sensor disposed between the first inlet of the slurry tank and the liquid receiving structure and in communication with the valve structure.
  5. 5. The multi-wire cutting apparatus of claim 1, wherein a third temperature sensor is disposed between the inlet of the second heat exchange flow passage and the valve structure, the third temperature sensor being in communication with the valve structure.
  6. 6. The multi-wire cutting apparatus of any one of claims 1-5 wherein the valve structure is connected between an outlet of the cooling structure and an inlet of the second heat exchange flow passage, The cooling circuit further includes: And one end of the communication bypass is connected between the inlet of the second heat exchange flow channel and the valve structure, and the other end of the communication bypass is connected between the inlet of the cooling structure and the outlet of the second heat exchange flow channel.
  7. 7. A multi-wire cutting method, characterized in that a piece to be cut is cut by the multi-wire cutting apparatus according to any one of claims 1 to 6, the detection structure being for detecting a liquid outlet temperature of the charging circuit, the multi-wire cutting method comprising: dividing the cutting process into a plurality of cutting stages according to the cutting depth of the piece to be cut; In a first cutting stage, adjusting the opening degree of the valve structure so as to enable the detection result of the detection structure to be stabilized at a first preset temperature; in a second cutting stage, adjusting the opening of the valve structure to enable the detection result of the detection structure to be reduced to a second preset temperature; In a third cutting stage, adjusting the opening degree of the valve structure to enable the detection result of the detection structure to be stable at the second preset temperature; In a fourth cutting stage, adjusting the opening degree of the valve structure so as to enable the detection result of the detection structure to rise to a third preset temperature; In a fifth cutting stage, the opening degree of the valve structure is adjusted so that the detection result of the detection structure rises to a fourth preset temperature, and the fourth preset temperature is larger than the first preset temperature.
  8. 8. The multi-wire cutting method of claim 7, wherein the multi-wire cutting method satisfies at least one of the following conditions: The temperature falling rate of the second cutting stage is greater than the temperature rising rate of the fourth cutting stage; the temperature rising rate of the fifth cutting stage is greater than the temperature rising rate of the fourth cutting stage; The temperature rising rate of the fifth cutting stage is greater than the temperature falling rate of the second cutting stage; the third preset temperature is greater than the first preset temperature; In the first cutting stage, the cutting depth of the workpiece to be cut is 0-17%, in the second cutting stage, the cutting depth of the workpiece to be cut is 17-25%, in the third cutting stage, the cutting depth of the workpiece to be cut is 25-60%, in the fourth cutting stage, the cutting depth of the workpiece to be cut is 60-90%, and in the fifth cutting stage, the cutting depth of the workpiece to be cut is 90-100%.
  9. 9. The multi-wire cutting method of claim 7 wherein the sensing structure is further configured to sense a feed liquid temperature of the feed circuit, And in a plurality of cutting stages, adjusting the opening degree of the valve structure so as to enable the detection result of the detection structure to be stabilized at a fifth preset temperature.
  10. 10. The multi-wire cutting method according to any one of claims 7-9, wherein the dividing the cutting process into a plurality of cutting stages according to the cutting depth of the piece to be cut comprises: And dividing a plurality of cutting stages according to the profile curve of the cutting piece formed by cutting the liquid outlet of the cutting position by using the liquid outlet structure.
  11. 11. A multi-wire cutting method, characterized in that a workpiece to be cut is cut by the multi-wire cutting device according to any one of claims 1 to 6, the detection structure being used for detecting the feed liquid temperature of the feed circuit, the multi-wire cutting method comprising: and in the cutting process, adjusting the opening degree of the valve structure so as to enable the detection result of the detection structure to be stabilized at a fifth preset temperature.

Description

Multi-wire cutting device and multi-wire cutting method Technical Field The invention relates to the technical field of silicon wafer production, in particular to a multi-wire cutting device and a multi-wire cutting method. Background Silicon wafers are used as a core base material in the semiconductor industry and are located at the front end of the entire industry chain. Currently, more than 90% of integrated circuit chips are still manufactured on a silicon wafer basis. In the silicon wafer preparation flow, slicing is the first procedure of production and processing, and the processing level has direct influence on the overall level of silicon wafer manufacturing. As technology continues to advance and demand for more efficient production increases, silicon wafer sizes continue to increase, with silicon wafer diameters gradually transitioning from 200 millimeters (i.e., 8 inches) to 300 millimeters (i.e., 12 inches). At the same time, as semiconductor technology continues to advance toward smaller process nodes, silicon wafers are required to have better surface planarity/WARP. However, in the related art, the surface flatness of the silicon wafer cut by the multi-wire cutting device is poor, which is not beneficial to the subsequent further processing of the silicon wafer. Disclosure of Invention The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, the invention provides the multi-wire cutting device and the multi-wire cutting method, wherein the multi-wire cutting device can enable the slurry temperature of the liquid outlet structure and the heat generated at the cutting position to have good adaptation degree, and is beneficial to improving the quality of a product cut by a piece to be cut. According to the embodiment of the first aspect of the invention, the multi-wire cutting device comprises a multi-wire cutting machine and a slurry system, wherein the multi-wire cutting machine comprises a driving structure for driving at least a piece to be cut to rise and fall, the multi-wire cutting machine is provided with a cutting position, the slurry system comprises a feeding loop, a cooling loop and a heat exchanger, the feeding loop comprises a slurry box, a liquid receiving structure, a liquid outlet structure and a detection structure which are cooperatively arranged, the liquid outlet structure is used for discharging liquid towards the cutting position, the liquid receiving structure is arranged below the cutting position and is used for receiving slurry flowing down from the cutting position, the detection structure is used for detecting the liquid outlet temperature and/or the liquid inlet temperature of the feeding loop, the cooling loop is arranged at a distance from the feeding loop and comprises a cooling structure and a valve structure which are connected with the cooling loop, the heat exchanger is provided with a first heat exchange runner and a second heat exchange runner which are arranged at the upper stream of the liquid outlet structure, the valve structure is arranged between the cooling loop and the second heat exchange runner and is communicated with the driving structure, and the opening degree of the valve structure is adjustable, and the valve structure is used for adjusting the medium flow of the second heat exchange runner according to the feeding amount of the driving structure and the detection result. According to the multi-wire cutting device provided by the embodiment of the invention, the first heat exchange flow channel is positioned at the upstream of the liquid outlet structure, the slurry after heat exchange of the first heat exchange flow channel can be fully mixed in the slurry box and then is conveyed to the liquid outlet structure to cool the cutting position, so that the temperature fluctuation sprayed by the liquid outlet structure is smaller, and the detection structure is arranged to detect the liquid outlet temperature and/or the liquid inlet temperature of the feeding loop, so that whether the slurry temperature regulation of the liquid outlet structure is effective or not can be fed back, the adaptation degree of the slurry temperature of the liquid outlet structure and the heat generated at the cutting position is better, and the quality of a product cut by a workpiece to be cut is improved. In some embodiments, the slurry tank comprises a tank body and a stirring mechanism, wherein a containing space is arranged in the tank body, the tank body is provided with a first inlet, a first outlet, a second inlet and a second outlet which are respectively communicated with the containing space, the liquid receiving structure is connected with the first inlet, the liquid outlet structure is connected with the first outlet, one end of the first heat exchange flow channel is connected with the second inlet, the other end of the first heat exchange flow channel is connected with the second outlet, and the s