CN-121989438-A - Protective film attaching device, protective film attaching method, protective film transfer device, and protective film transfer method

Abstract

The protective film sticking device of the present invention comprises affinity improving treatment means for improving the affinity with the liquid on the surface to be stuck of the 1 st frame member, liquid sticking means for sticking the liquid on the surface to be stuck on which the affinity improving treatment is carried out, and sticking means for sticking the protective film on the surface to be stuck on which the liquid is stuck.

Inventors

• M.D. Lima
• Ueda Kiyo
• The extension of oneself
• T. H. Duncan

Assignees

• 琳得科株式会社

Dates

Publication Date

20260508

Application Date

20251106

Priority Date

20241107

Claims (4)

1. 1. A protective film sticking device is provided with: an affinity improving treatment means for improving the affinity with the liquid on the adhered surface of the 1 st frame member, A liquid adhesion mechanism for adhering the liquid to the surface to be adhered subjected to the affinity improvement treatment, and And an adhering means for adhering a protective film to the adhered surface to which the liquid is adhered.
2. 2. A protective film transfer device is provided with: The protective film sticking apparatus according to claim 1, and And a transfer mechanism for transferring the protective film attached to the 2 nd frame member to the 1 st frame member.
3. 3. A protective film attaching method, comprising the steps of: an affinity improving treatment step of performing an affinity improving treatment for improving the affinity with the liquid on the surface to be bonded of the 1 st frame member; A liquid adhering step of adhering the liquid to the surface to be adhered to which the affinity improving treatment has been applied, and And a bonding step of bonding a protective film to the surface to be bonded to which the liquid is adhered.
4. 4. A protective film transfer method, the method comprising: the protective film sticking method as set forth in claim 3, and And a transfer step of transferring the protective film attached to the 2 nd frame member to the 1 st frame member.

Description

Protective film attaching device, protective film attaching method, protective film transfer device, and protective film transfer method Technical Field The invention relates to a protective film (PELLICLE FILM) attaching device and a protective film attaching method, and a protective film transfer device and a protective film transfer method. Background A protective film attaching device for attaching a protective film to an attached surface of a frame member is known (for example, see document 1: japanese patent application laid-open No. 2020-160345). In the device described in document 1, since water (liquid) may not be uniformly adhered to the portion 190A (the adhered surface) of the frame upper member 190 (the 1 st frame member), there is a possibility that the carbon nanotube self-supporting film 125 (the protective film) is unevenly adhered to the adhered surface of the 1 st frame member. Summary of the invention The invention aims to provide a protective film pasting device and a protective film pasting method, and a protective film transfer device and a protective film transfer method, which can prevent the protective film from being unevenly pasted on the pasted surface of a frame member. The protective film sticking device according to one embodiment is provided with an affinity improving treatment means for improving the affinity with the liquid on the surface to be stuck of the 1 st frame member, a liquid sticking means for sticking the liquid to the surface to be stuck on which the affinity improving treatment is performed, and a sticking means for sticking the protective film to the surface to be stuck on which the liquid is stuck. The protective film transfer apparatus according to one embodiment includes the protective film attaching device according to the one embodiment, and a transfer mechanism for transferring the protective film attached to the 2 nd frame member to the 1 st frame member. The protective film adhering method according to one embodiment includes an affinity improving treatment step of improving affinity with a liquid on an adherend surface of a1 st frame member, a liquid adhering step of adhering the liquid to the adherend surface on which the affinity improving treatment has been performed, and an adhering step of adhering a protective film to the adherend surface on which the liquid has been adhered. The method for transferring a pellicle according to one embodiment includes the steps of each step of the method for adhering a pellicle according to the one embodiment, and the step of transferring the pellicle adhered to the 2 nd frame member to the 1 st frame member. According to the apparatus and the method, since the affinity improving treatment is applied to the surface to be bonded of the 1 st frame member, the liquid uniformly adheres to the surface to be bonded, and the protective film can be prevented from being unevenly adhered to the surface to be bonded of the 1 st frame member. Drawings Fig. 1 is a front view of a protective film transfer apparatus according to an embodiment of the present invention. Fig. 2 is an explanatory diagram of the operation of the protective film transfer apparatus shown in fig. 1. Detailed Description An embodiment of the present invention will be described below with reference to the drawings. In the present embodiment, the X-axis, the Y-axis, and the Z-axis are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. In the present embodiment, when the direction is shown with reference to the front-side direction of fig. 1 parallel to the Y axis, the arrow direction of the Z axis is "up", the arrow direction of the Z axis is "down", the arrow direction of the X axis is "left", the arrow direction of the X axis is "right", the front "is the front-side direction of fig. 1 parallel to the Y axis, and the arrow direction of the Z axis is" rear ". The protective film adhering device EA is provided with an affinity improving treatment means 10 for improving the affinity of the adhered surface RF11 of the 1 st frame member RF1 with water WT, 1 or more kinds of low-molecular-weight alcohols, or a combination thereof, a liquid adhering means 20 for adhering the exemplary water WT to the adhered surface RF11 to which the affinity improving treatment is applied, and an adhering means 30 for adhering the protective film CS to the adhered surface RF11 to which the water WT is adhered. The affinity with the liquid is a property that the surface to be bonded RF11 to which the liquid is attached is easily wetted by the liquid, and the liquid is preferably easily spread uniformly on the surface to be bonded RF11, and the affinity improving treatment is preferably a treatment in which the contact angle of the liquid after the affinity improving treatment with respect to the surface to be bonded RF11 is reduced compared with that before the affinity improv