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CN-121990249-A - Thin slice dyestripping machine with brilliant back outward appearance detects function

CN121990249ACN 121990249 ACN121990249 ACN 121990249ACN-121990249-A

Abstract

The invention discloses a thin slice dyestripping machine with a crystal back appearance detection function, which relates to the technical field of precision electronic component manufacturing equipment and comprises a mounting frame, a conveying unit, an anti-deflection unit, a dyestripping unit and a detection unit, wherein the mounting frame is used for providing a mounting and fixing foundation, the conveying unit is used for conveying thin slices, the anti-deflection unit is used for preventing deflection of the thin slices, the dyestripping unit is used for the dyestripping action of the thin slices, the detection unit is used for appearance detection of crystal backs, after the conveying unit conveys the thin slices to be processed to the dyestripping unit, the thin slices are subjected to posture adjustment through the anti-deflection unit, deflection is avoided when entering the dyestripping unit, pressure detection is carried out through the dyestripping process of the dyestripping unit, the dyestripping pressure is synchronously adjusted, the dyestripping process is prevented from being influenced by uneven dyestripping pressure, and the crystal back appearance is detected through the detection unit after the dyestripping is finished.

Inventors

  • HE SONGLIAN
  • Wei Binru
  • WANG YIFAN

Assignees

  • 江苏芯濂半导体有限公司

Dates

Publication Date
20260508
Application Date
20251226

Claims (10)

  1. 1. The thin sheet film tearing machine with the crystal back appearance detection function is characterized by comprising a mounting frame (1), wherein a controller is arranged on the mounting frame (1); A film tearing unit (4) is arranged on the mounting frame (1), a distance self-adjusting component is arranged on the film tearing unit (4), and the distance self-adjusting component monitors the pressed state of the sheet and adjusts the conveying pressure of the sheet; The film tearing unit (4) is provided with an anti-deflection unit (3), the anti-deflection unit (3) is provided with a self-deflection assembly, and the self-deflection assembly changes the conveying posture of the sheet, so that the long axis direction of the sheet and the long axis of the mounting frame (1) parallel to the controller are kept parallel.
  2. 2. The thin film tearing machine with the crystal back appearance detection function according to claim 1, wherein the film tearing unit (4) comprises an upper film tearing cylinder (47), a lower film tearing cylinder (48), an electromagnet (49), a stretching spring (410) and a magnetic block (411) and a supporting component, two ends of the upper film tearing cylinder (47) are fixedly connected with the magnetic block (411), the lower film tearing cylinder (48) is rotatably installed on the supporting component, the electromagnet (49) is fixedly installed on the supporting component, the electromagnet (49) is connected with the magnetic block (411) through the stretching spring (410), the magnetic block (411) is slidably installed on the supporting component, and the interval self-adjusting component consists of the electromagnet (49), the stretching spring (410) and the magnetic block (411) and is connected with the anti-deviation unit (3).
  3. 3. The film tearing machine with the crystal back appearance detection function according to claim 2, wherein a force measuring element is arranged on the surface of one end, close to the electromagnet (49), of the magnetic block (411).
  4. 4. The thin film tearing machine with the crystal back appearance detection function according to claim 2, wherein the anti-deflection unit (3) comprises a straight plate (31), a rotating rod (32), a connecting rod (33), a correction disc (34), an electric telescopic rod (35) and a pushing plate (36), two ends of the rotating rod (32) are connected with the straight plate (31) through torsion springs, one end of the connecting rod (33) is fixedly arranged on the rotating rod (32), the other end of the connecting rod (33) is fixedly connected with the correction disc (34), the telescopic end of the electric telescopic rod (35) is fixedly connected with the pushing plate (36), the telescopic end of the electric telescopic rod (35) is connected with a pull rope, the fixed end of the pull rope bypasses the electric telescopic rod (35) to be connected with the rotating rod (32), and the self-deflection assembly consists of the rotating rod (32), the connecting rod (33), the correction disc (34), the electric telescopic rod (35) and the pull rope.
  5. 5. The film tearing machine with crystal back appearance detection function according to claim 4, wherein the supporting component comprises a supporting frame (41), a telescopic motor (42), an adjusting frame (43), a winding motor (44), a winding roller (45), a connecting frame (46) and a waste roller (412), the supporting frame (41) is fixedly connected with a mounting frame (1), the telescopic motor (42) is fixedly installed on the supporting frame (41) at a fixed end, the output end of the telescopic motor (42) is fixedly connected with the adjusting frame (43), the adjusting frame (43) is in sliding connection with the supporting frame (41), the fixed end of the winding motor (44) is fixedly connected with the adjusting frame (43), the output end of the winding motor (44) is fixedly connected with the winding roller (45), the winding roller (45) is in rotary connection with the adjusting frame (43), a through groove is formed in the connecting frame (46), a rotary motor is arranged at one end of the waste roller (412), the rotary motor is fixedly installed on the adjusting frame (43), the upper film tearing drum (46) is installed on the lower film tearing drum (48) through the rotary drum (46), the electromagnet (49) is fixedly arranged in a through groove formed in the connecting frame (46), the magnetic block (411) is slidably arranged in the through groove in the connecting frame (46), and the straight plate (31) is fixedly arranged on the connecting frame (46).
  6. 6. The film tearing machine with the crystal back appearance detection function according to claim 4, wherein the deviation prevention unit (3) is connected with the conveying unit (2), and the conveying unit (2) conveys the to-be-processed film.
  7. 7. The thin film tearing machine with the crystal back appearance detection function according to claim 6, wherein the conveying unit (2) comprises a conveying motor (21), a fixing block (22), a long rod (23), a sliding block (24) and a containing plate (25), the fixing end of the conveying motor (21) is fixedly arranged on the mounting frame (1), the fixing block (22) is fixedly arranged on the mounting frame (1), the long rod (23) is fixedly connected with the fixing block (22), the sliding block (24) is in sliding connection with the long rod (23), the sliding block (24) is fixedly connected with the containing plate (25), and the containing plate (25) is fixedly connected with the fixing end of the electric telescopic rod (35).
  8. 8. The thin film tearing machine with the crystal back appearance detection function according to claim 7, wherein the conveying unit (2) further comprises a detection plate (26), a vertical rod (27), a fixing groove (28), a conductive piece (29) and a conductive block (210), the detection plate (26) is fixedly connected with the fixing groove (28), the fixing groove (28) is fixedly arranged at the end part of the conveying motor (21), the output end of the conveying motor (21) is fixedly connected with the containing plate (25) through the vertical rod (27), the conductive piece (29) is fixedly arranged in the fixing groove (28), the conductive block (210) is fixedly arranged on the supporting frame (41), and the conductive block (210) is electrically connected with the electric telescopic rod (35).
  9. 9. The film tearing machine with the crystal back appearance detection function according to claim 1, wherein the supporting component is fixedly connected with the detection unit (5), and the detection unit (5) is used for detecting the appearance of the crystal back of the film after film tearing.
  10. 10. The film tearing machine with crystal back appearance detection function according to claim 5, wherein the detection unit (5) comprises a shooting assembly (51), and the shooting assembly (51) is fixedly installed on an adjusting frame (43).

Description

Thin slice dyestripping machine with brilliant back outward appearance detects function Technical Field The invention relates to the technical field of precision electronic component manufacturing equipment, in particular to a thin sheet film tearing machine with a crystal back appearance detection function. Background With the development of smaller processes and higher integration in the semiconductor and microelectronic industries, the surface quality requirements of thin slices such as chip carrier wafers reach nanometer or even atomic levels. The cleanliness and flatness of the back of the wafer (i.e. the non-circuit surface of the thin sheet) and the defects of scratch, particle pollution, residual offset printing and the like directly influence the photoetching alignment precision, the film deposition quality and the performance and yield of the final chip. Therefore, after the crystal back protective film is torn off, the rapid, accurate and non-contact appearance detection of the crystal back protective film becomes an indispensable link in the high-end manufacturing process. However, integrating the appearance detection function into the film tearing machine to realize the film tearing-detection integration faces a series of serious mechanical engineering challenges, and is mainly characterized in that the traditional wafer back detection is usually carried out at an independent detection station, and a workpiece needs to be carried for many times, so that the efficiency is low and the secondary pollution risk exists. In the process of transferring and positioning the film and the film to a detection station, microscopic sliding or rotation is easy to occur, so that the position deviation is caused, and when the film is torn, the stripping force generated by the stripping of the protective film is a stress with dynamic change and complex direction. The stress is transmitted to the thin sheet through the thin film, if the adsorption fixation is not firm or the force balance design is not good, the thin sheet is easily caused to translate or twist in a micron level on the adsorption table, so that the preset detection area is deviated. The materials such as wafers are extremely fragile and very sensitive to local pressure and point contact stress. In the integrated equipment, the damage prevention requirement is always that uneven contact pressure, hard sharp points or foreign matters exist during the film tearing clamping, and the wafer back can generate micro cracks or stress concentration areas which are difficult to be found by naked eyes but have serious influence. Disclosure of Invention The invention aims to provide a thin sheet film tearing machine with a crystal back appearance detection function, so as to solve the problems in the prior art. In order to achieve the above purpose, the present invention provides the following technical solutions: The sheet film tearing machine comprises a mounting frame, wherein a controller is arranged on the mounting frame; the mounting frame is provided with a film tearing unit, the film tearing unit is provided with a spacing self-adjusting assembly, and the spacing self-adjusting assembly monitors the pressed state of the sheet and adjusts the conveying pressure of the sheet; The film tearing unit is provided with an anti-deflection unit, the anti-deflection unit is provided with a self-deflection assembly, and the self-deflection assembly changes the conveying posture of the sheet, so that the long axis direction of the sheet and the long axis of the mounting frame parallel to the controller are kept parallel. In the film tearing process of the film tearing machine in the prior art, if films with different thicknesses are torn off, the film tearing pressure can not be actively regulated to ensure the stable film tearing pressure, the film tearing unit is used for actively regulating pressure to adapt to film tearing processes of sheets with different thicknesses, and meanwhile, an active deviation correcting mechanism is absent in the prior art. Further, the dyestripping unit includes dyestripping section of thick bamboo, lower dyestripping section of thick bamboo, electro-magnet, extension spring and magnetic path and supporting component, upward dyestripping section of thick bamboo both ends all with magnetic path fixed connection, lower dyestripping section of thick bamboo rotates and installs on supporting component, electro-magnet fixed mounting is on supporting component, the electro-magnet passes through extension spring and is connected with the magnetic path, magnetic path slidable mounting is on supporting component, interval self-adjusting component comprises electro-magnet, extension spring and magnetic path, supporting component is connected with the deviation preventing unit. In the prior art, the distance between the film tearing device cannot be adjusted on line, and the pressure value of film tearing conveyed by the thin sheet can be a