CN-121990512-A - Filling storage device for electronic grade hydrogen peroxide

CN121990512ACN 121990512 ACN121990512 ACN 121990512ACN-121990512-A

Abstract

The invention relates to a filling storage device for electronic grade hydrogen peroxide, which comprises a supporting seat, wherein a hollow cylinder is movably arranged in front of the supporting seat, the hollow cylinder is vertically arranged, a movable driving mechanism is arranged between the hollow cylinder and the supporting seat, a tank body sealing bag body, a tank opening sealing bag body, the hollow cylinder and a gas transmission expansion sealing mechanism are arranged among the supporting seat, and the tank body of a storage tank can be uniformly, completely, firmly and reliably sealed before the electronic grade hydrogen peroxide is filled, and then the tank opening of the storage tank can be uniformly and completely sealed, so that double sealing of the tank opening and the tank body of the storage tank can be realized.

Inventors

Luo shuang
HUANG YIJING
MA XIAOYAN
FAN JIANPING
FENG QIAO

Assignees

福建天甫电子材料有限公司

Dates

Publication Date: 20260508
Application Date: 20260212

Claims (8)

1. The filling storage device for the electronic grade hydrogen peroxide is characterized by comprising the following components: The support seat is movably provided with a hollow cylinder in front of the support seat, the hollow cylinder is vertically arranged, a movable driving mechanism is arranged between the hollow cylinder and the support seat, and a carrier is arranged on one side of the support seat; The bottom end surface of the hollow cylinder is provided with a plurality of filling pipes, a filling driving mechanism is arranged among the plurality of filling pipes, the hollow cylinder and the supporting seat, and an identification mechanism is arranged among the plurality of filling pipes and positioned on the bottom end surface of the hollow cylinder; The outer surface of the bottom end of the hollow cylinder is provided with a tank body sealing bag body, the outer surface of the bottom end of the hollow cylinder is positioned in the tank body sealing bag body at equal angle intervals, one end of the pre-expansion stabilizing rack is connected with the outer side of the top end surface of the inner part of the tank body sealing bag body, the other end of the pre-expansion stabilizing rack is rotationally arranged on the outer surface of the bottom end of the hollow cylinder, one end of the pre-expansion stabilizing rack is positioned on the outer side above the other end of the pre-expansion stabilizing rack, the pre-expansion stabilizing rack and the axis of the hollow cylinder are arranged at a preset angle, and a same moving mechanism is arranged between the pre-expansion stabilizing rack and the hollow cylinder; An extension ring plate is arranged on the outer surface of the middle upper end of the hollow cylinder, an upper sealing ring plate is arranged on the top end surface of the extension ring plate, a lower sealing ring plate is arranged on the bottom end surface of the extension ring plate, a tank opening sealing bag body is arranged between the upper sealing ring plate and the lower sealing ring plate and positioned on the outer side of the extension ring plate, and a gas transmission expansion sealing mechanism is arranged among the tank opening sealing bag body, the hollow cylinder and the supporting seat; When the movable driving mechanism drives the hollow cylinder to descend to the tank body sealing bag body and the tank opening sealing bag body which are respectively positioned in the tank body and the tank opening of the storage tank, the gas transmission expansion sealing mechanism only transmits a preset amount of gas to the tank body sealing bag body, and the plurality of pre-expansion stabilizing frames are driven to rotate at a preset angle towards the axis far away from the hollow cylinder at the same time, so that the tank body sealing bag body uniformly, stably and orderly expands and expands towards a preset direction until the outer side of the top end face of the expanded tank body sealing bag body uniformly and completely abuts against the top end face of the tank body inside of the storage tank; the gas transmission expansion sealing mechanism is used for only conveying a preset amount of gas to the tank opening sealing bag body after the movable driving mechanism drives the hollow cylinder to ascend for a preset vertical distance, so that the tank opening sealing bag body expands to be propped against the inner wall of the tank opening of the storage tank, and the inner wall of the tank opening of the storage tank is uniformly and completely sealed.
2. The filling and storing device for electronic grade hydrogen peroxide is characterized in that the gas delivery expansion mechanism comprises a gas delivery expansion plastic pipe, one end of the gas delivery expansion plastic pipe penetrates through the top end face of the hollow cylinder, one end of the gas delivery expansion plastic pipe is located inside the hollow cylinder, a first communication pipe penetrates through the hollow cylinder and is communicated with the tank body sealing body, the other end of the first communication pipe is communicated with the gas delivery expansion plastic pipe, a first electromagnetic valve is arranged between the first communication pipe and the gas delivery expansion plastic pipe, one end of the second communication pipe penetrates through the hollow cylinder, the extending annular plate and the tank opening sealing body, the other end of the second communication pipe is communicated with the gas delivery expansion plastic pipe, a second electromagnetic valve is arranged between the second communication pipe and the tank opening sealing plastic pipe, the top end face of the supporting seat is communicated with the tank body sealing body, the other end face of the supporting seat is located behind the movable driving mechanism, a expansion pump is arranged between the gas delivery expansion pump and the gas delivery expansion plastic pipe, and the gas delivery expansion pump is arranged between the second communication pipe and the gas delivery expansion plastic pipe, and the gas delivery pump is sealed in a flexible mode, and the gas delivery expansion pump is arranged between the gas delivery pump is sealed.
3. The filling and storing device for electronic grade hydrogen peroxide is characterized in that the synchronous mechanism comprises a plurality of rotating motors, the fixed ends of the rotating motors are arranged on the outer surface of the bottom end of the hollow cylinder and positioned in the can body sealing bag body, the rotating ends of the rotating motors are connected with the other end of the pre-expansion stabilizing frame, and a connecting plate is arranged between the rotating motors and the hollow cylinder.
4. The filling and storing device for electronic grade hydrogen peroxide is characterized in that the filling and driving mechanism comprises a middle swivel box, a filling plastic pipe, a storage box and a filling and driving flexible pipe, wherein the middle swivel box is arranged on the inner bottom end face of the hollow cylinder, the filling pipe penetrates through the hollow cylinder to be communicated with the middle swivel box, one end of the filling and driving plastic pipe penetrates through the top end face of the hollow cylinder to be communicated with the middle swivel box, the storage box is arranged behind the top end face of the supporting seat, the filling and driving pump is arranged on the top end face of the storage box, the filling and driving flexible pipe is arranged between the filling and driving pump and the other end of the filling and driving plastic pipe, a fourth electromagnetic valve is arranged between the filling and driving flexible pipe and the filling and driving pump, one end of the guiding pipe is located at the inner bottom end of the storage box, the other end of the guiding pipe penetrates through the storage box to be communicated with the filling and driving pump, and a sealing ring is arranged between the guiding pipe and the storage box.
5. The filling and storing device for electronic grade hydrogen peroxide according to claim 4, wherein the identification mechanism comprises a corrosion-resistant transparent plate, the corrosion-resistant transparent plate is arranged below the bottom end surface of the hollow cylinder and between the plurality of filling pipes, a connecting cover is arranged between the corrosion-resistant transparent plate and the bottom end surface of the hollow cylinder, a supporting cover is arranged on the top end surface of the corrosion-resistant transparent plate, and an industrial camera is arranged above the corrosion-resistant transparent plate and on the bottom end surface of the supporting cover.
6. The filling and storing device for electronic grade hydrogen peroxide is characterized by further comprising an air suction plastic pipe, a third communicating pipe and a fifth electromagnetic valve, wherein one end of the air suction plastic pipe penetrates through the top end face of the hollow cylinder, the inner side of the transfer ring box and the bottom end face of the hollow cylinder, one end of the air suction plastic pipe is positioned in the connecting cover, one end of the third communicating pipe penetrates out to the outer surface of the hollow cylinder, one end of the third communicating pipe is positioned between the tank body sealing bag body and the tank opening sealing bag body, the other end of the third communicating pipe is communicated with the air suction plastic pipe, a plurality of air suction holes are formed in the connecting cover, an air suction pump is arranged on the top end face of the supporting seat and in front of the flooding pump, an air suction flexible pipe is arranged between the other end of the air suction plastic pipe and the air suction pump, and a fifth electromagnetic valve is arranged between the air suction flexible pipe and the air suction pump; Before a filling driving mechanism and a plurality of filling pipes are matched with each other to fill a preset amount of electronic grade hydrogen peroxide into a tank body of a storage tank, a plurality of air suction holes are driven to suck air in the tank body of the storage tank; and the third communicating pipe is driven to pump out air among the tank opening sealing body, the tank body sealing body, the hollow cylinder and the tank opening of the storage tank before the filling driving mechanism and the filling tubes are mutually matched to fill the electronic grade hydrogen peroxide of a preset quantity into the tank body of the storage tank.
7. The filling and storing device for electronic grade hydrogen peroxide according to claim 1, wherein a first annular elastic belt is arranged between the upper sealing ring plate and the tank opening sealing bag body and above the extending ring plate, a plurality of first telescopic members are arranged between the upper sealing ring plate and the first annular elastic belt, and the plurality of first telescopic members are arranged on the upper sealing ring plate at equal angular intervals; a second annular elastic belt is arranged between the lower sealing ring plate and the tank opening sealing bag body and below the extending ring plate, a plurality of second telescopic members are arranged between the lower sealing ring plate and the second annular elastic belt, and the plurality of second telescopic members are arranged on the lower sealing ring plate at equal angular intervals; The first annular elastic belt and the second annular elastic belt are driven to simultaneously abut against the inner surface of the tank opening sealing bag body during the period that the gas transmission expansion sealing mechanism only conveys a preset amount of gas to the tank opening sealing bag body, so that the contact area and the pressure between the tank opening sealing bag body and the tank opening inner wall of the storage tank are increased.
8. The filling and storing device for electronic grade hydrogen peroxide is characterized in that the movable driving mechanism comprises a linkage annular plate and a linkage rod, wherein the linkage annular plate is arranged outside the top end of the hollow cylinder, one end of the linkage rod is arranged on the rear end face of the linkage annular plate, a vertical movement driving device is arranged in front of the top end face of the supporting seat, the other end of the linkage rod is connected with the vertical movement driving device, a longitudinal movement driving device is arranged between the vertical movement driving device and the supporting seat, a transverse movement driving device is arranged between the longitudinal movement driving device and the supporting seat, and the air transmission expansion plastic pipe, the filling and driving plastic pipe and the air suction plastic pipe are connected with the linkage rod through a cooperative seat.

Description

Filling storage device for electronic grade hydrogen peroxide Technical Field The invention relates to the field of electronic grade hydrogen peroxide filling and storing devices, in particular to a filling and storing device for electronic grade hydrogen peroxide. Background The electronic grade hydrogen peroxide is a hydrogen peroxide solution with ultra-high purity and low impurity content, and is specially designed for precise cleaning, etching and oxidation processes in the electronic industry fields of semiconductors, integrated circuits, flat panel displays, photovoltaic cells and the like. And filling the electronic grade hydrogen peroxide into the storage tank through the filling storage device, so that the filling storage of the electronic grade hydrogen peroxide is completed. The existing filling storage device for electronic grade hydrogen peroxide has the following defects: Before filling electronic grade hydrogen peroxide into the tank body of the storage tank, the tank body of the storage tank cannot be uniformly, completely, firmly and reliably sealed, and then the tank opening of the storage tank cannot be uniformly and completely sealed, so that double sealing of the tank opening and the tank body of the storage tank cannot be realized; The electronic grade hydrogen peroxide can not be prevented from splashing or escaping from the tank opening of the storage tank to pollute the surrounding environment during the process of filling the electronic grade hydrogen peroxide into the tank body of the storage tank, and the electronic grade hydrogen peroxide can not be prevented from being polluted due to the fact that air enters the tank body of the storage tank to excessively contact with the electronic grade hydrogen peroxide and pollutants enter the tank body of the storage tank. The invention aims at solving the problems existing in the prior art and designs a filling and storing device for electronic grade hydrogen peroxide. Disclosure of Invention The invention aims to solve the problems of the prior art, and provides a filling storage device for electronic grade hydrogen peroxide, which can effectively solve at least one problem of the prior art. The technical scheme of the invention is as follows: An electronic grade hydrogen peroxide filling storage device, comprising: The support seat is movably provided with a hollow cylinder in front of the support seat, the hollow cylinder is vertically arranged, a movable driving mechanism is arranged between the hollow cylinder and the support seat, and a carrier is arranged on one side of the support seat; The bottom end surface of the hollow cylinder is provided with a plurality of filling pipes, a filling driving mechanism is arranged among the plurality of filling pipes, the hollow cylinder and the supporting seat, and an identification mechanism is arranged among the plurality of filling pipes and positioned on the bottom end surface of the hollow cylinder; The outer surface of the bottom end of the hollow cylinder is provided with a tank body sealing bag body, the outer surface of the bottom end of the hollow cylinder is positioned in the tank body sealing bag body at equal angle intervals, one end of the pre-expansion stabilizing rack is connected with the outer side of the top end surface of the inner part of the tank body sealing bag body, the other end of the pre-expansion stabilizing rack is rotationally arranged on the outer surface of the bottom end of the hollow cylinder, one end of the pre-expansion stabilizing rack is positioned on the outer side above the other end of the pre-expansion stabilizing rack, the pre-expansion stabilizing rack and the axis of the hollow cylinder are arranged at a preset angle, and a same moving mechanism is arranged between the pre-expansion stabilizing rack and the hollow cylinder; An extension ring plate is arranged on the outer surface of the middle upper end of the hollow cylinder, an upper sealing ring plate is arranged on the top end surface of the extension ring plate, a lower sealing ring plate is arranged on the bottom end surface of the extension ring plate, a tank opening sealing bag body is arranged between the upper sealing ring plate and the lower sealing ring plate and positioned on the outer side of the extension ring plate, and a gas transmission expansion sealing mechanism is arranged among the tank opening sealing bag body, the hollow cylinder and the supporting seat; When the movable driving mechanism drives the hollow cylinder to descend to the tank body sealing bag body and the tank opening sealing bag body which are respectively positioned in the tank body and the tank opening of the storage tank, the gas transmission expansion sealing mechanism only transmits a preset amount of gas to the tank body sealing bag body, and the plurality of pre-expansion stabilizing frames are driven to rotate at a preset angle towards the axis far away from the hollow cylinder at the same time, so th