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CN-121990759-A - Automatic device and method for precision burning and welding of quartz round tube products

CN121990759ACN 121990759 ACN121990759 ACN 121990759ACN-121990759-A

Abstract

The invention discloses an automatic device for precision burning and welding of quartz round tube products and a precision burning and welding method of quartz round tube products applying the device. The device comprises a frame and a control module, wherein a lifting workpiece clamping rotating module and a flame processing module which are respectively electrically connected with the control module are installed on the frame, the flame processing module is positioned on one side of the workpiece clamping rotating module, the lifting workpiece clamping rotating module comprises a chuck and a main shaft, one end of the main shaft is in transmission connection with the chuck, the other end of the main shaft is connected with a lifting driving piece, and the lifting driving piece is also electrically connected with the control module. The invention has excellent processing quality and consistency, good flexibility, strong adaptability, traceable and optimized process and greatly improved production efficiency. Greatly reduces the labor intensity and the dependence on skilled workers.

Inventors

  • GENG JIAN
  • WANG ZHENLI
  • WU RANHONG
  • YANG JUN

Assignees

  • 杭州大和热磁电子有限公司

Dates

Publication Date
20260508
Application Date
20251230

Claims (10)

  1. 1. The utility model provides a quartz pipe class product finish burning and welding automation equipment, a serial communication port, including frame (1) and control module, install liftable work piece clamp rotary module and flame processing module that are connected with the control module electricity respectively on frame (1), flame processing module is located one side of work piece clamp rotary module, liftable work piece clamp rotary module includes chuck (2) and main shaft (3), the one end and the chuck (2) transmission of main shaft (3) are connected, the other end is connected with a lift driving piece, lift driving piece is also connected with the control module electricity.
  2. 2. The automated apparatus of claim 1, wherein the flame working module comprises a gun support slide (4) slidably coupled to the frame (1) and an adjustable gun (5) mounted on the gun support slide (4), the gun support slide (4) being drivingly coupled to a transverse drive mechanism.
  3. 3. An automated device according to claim 2, characterized in that the number of welding guns (5) is two and symmetrically arranged on both sides of the quartz tube workpiece being processed.
  4. 4. The automation device according to claim 2, characterized in that the welding gun (2) is provided with a pneumatic valve and an automatic igniter, which are electrically connected with the control module.
  5. 5. The automated device according to claim 2, characterized in that the welding torch (5) is mounted on a torch holder (6) with adjustable angle of the welding torch (5) and distance of the welding torch (5) from the workpiece, the torch holder (6) being fixed on the torch support slide (4).
  6. 6. The automated device according to claim 1, characterized in that a vertical guiding mechanism is further provided between the chuck (2) and the frame (1), and the lifting drive is an electric cylinder.
  7. 7. The automatic device according to claim 1, characterized in that a vertical guide mechanism is further arranged between the chuck (2) and the frame (1), the lifting driving piece comprises a servo motor and a ball screw, and the servo motor drives the spindle (3) to reciprocate along the vertical guide mechanism through the ball screw.
  8. 8. The automated device of claim 1, further comprising an automatic loading and unloading mechanism disposed beside the chuck (2).
  9. 9. The automated apparatus of claim 1, wherein the control module is a PLC or an industrial computer in which processing programs corresponding to various specifications of quartz round tube products are pre-stored.
  10. 10. A method for finish-firing or welding a tubular quartz product using the automated apparatus of any of claims 1-9, comprising the steps of: S1, clamping a quartz round tube workpiece on the liftable workpiece clamping rotary module; S2, controlling the flame processing module to ignite and generate stable flame through the control module; S3, under the synchronous control of the control module, the workpiece rotates at a constant speed and moves up and down at a constant speed, and meanwhile, the flame processing module is controlled to move transversely, so that flames cover all areas to be processed on the outer surface of the workpiece; S4, after the processing is finished, automatically extinguishing, and stopping all the moving parts; and S5, unloading the processed quartz round tube workpiece.

Description

Automatic device and method for precision burning and welding of quartz round tube products Technical Field The invention relates to the technical field of special glass processing equipment, in particular to an automatic device and method for precision burning and welding of quartz round tube products. Background In the semiconductor chip manufacturing process, quartz glass products (such as diffusion tubes, quartz boats, lining tubes, showerheads, etc.) are indispensable consumables and components in key processes such as diffusion, oxidation, chemical vapor deposition, etc. These parts tend to be complex in shape and extremely high in precision requirements, and the smoothness and cleanliness of the inner wall of the parts directly affect the uniformity of process gas and the yield of wafer products. In the subsequent processing of quartz products, especially for small-caliber and large-length-diameter-ratio quartz circular tube type revolving body products, a fine burning or fire polishing process is often needed to make a layer of quartz glass surface extremely thin quickly melt and flow to recondense by utilizing the high temperature of oxyhydrogen flame or oxy-acetylene flame, thereby obtaining a smooth mirror-like surface, effectively sealing surface micropores, reducing gas adsorption and improving the product purity. In addition, butt welding between quartz tubes also requires a similar high temperature flame treatment. At present, the precision burning and welding operation of the small-caliber quartz round tube in the industry generally depends on manual operation of a technical worker, and has the advantages of low processing precision, poor quality consistency, low production efficiency, high labor intensity and severe environment. Although there are some flame polishing devices on the market for flat glass or large quartz pieces, they are generally bulky in structure, unsuitable for precision machining of small-caliber pipes, and lack the capability of composite motion control for "rotation + lift + lateral follow" of a revolving body workpiece. Therefore, developing a special device which can replace manual work and realize the automation, high precision and consistency finish burning and welding of quartz round tube products becomes a technical problem to be solved in the field. The invention patent with publication number CN119371087A discloses a quick welding device for quartz tubes, which can reduce the thermal stress of the quartz tubes caused by temperature difference and assist welding, thereby solving the problem of crack generation caused by the thermal stress in the welding of the quartz tubes. However, the invention does not provide a technical scheme for realizing automatic finish burning or welding of quartz round tube products. Disclosure of Invention In order to overcome the defects of low machining precision, poor quality consistency, low production efficiency and high labor intensity caused by the lack of an automatic device suitable for precision machining of small-caliber quartz round tube products, the invention provides an automatic device for precision burning and welding of quartz round tube products, which can replace manual work to automatically finish precision burning and welding machining of quartz round tubes, greatly improve the consistency, production efficiency and automation level of product quality and reduce labor cost and labor intensity. The technical scheme is that the precision burning and welding automation device for the quartz round tube products comprises a frame and a control module, wherein a lifting workpiece clamping rotating module and a flame processing module which are respectively and electrically connected with the control module are arranged on the frame, the flame processing module is positioned on one side of the workpiece clamping rotating module, the lifting workpiece clamping rotating module comprises a chuck and a main shaft, one end of the main shaft is in transmission connection with the chuck to drive the chuck to rotate, the other end of the main shaft is connected with a lifting driving piece, and the lifting driving piece is also electrically connected with the control module. The device comprises a liftable workpiece clamping and rotating module, a flame processing module, a chuck, a lifting driving piece, a control module and a flame processing module, wherein the liftable workpiece clamping and rotating module is used for clamping and driving a quartz circular tube workpiece to rotate around the axis of the liftable workpiece clamping and rotating module, the flame processing module is used for generating high-energy flame for finely burning or welding the surface of the quartz circular tube workpiece, the chuck is used for coaxially clamping one end of the quartz circular tube workpiece, the lifting driving piece is used for driving the liftable workpiece clamping and rotating module and the quartz circular tube workpiece c