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CN-121990832-A - Ceramic composite material and ceramic nozzle

CN121990832ACN 121990832 ACN121990832 ACN 121990832ACN-121990832-A

Abstract

The ceramic composite material is formed by sintering powder, wherein the powder comprises silicon nitride, silicon carbide, a first metal oxide and a second metal oxide, and the weight ratio of the silicon nitride to the silicon carbide is 100:0.5-100:12. The first metal oxide may be alumina and the second metal oxide may be yttria. In another aspect, the first metal oxide may be magnesium oxide and the second metal oxide may be cerium oxide. The ceramic composite material can be used for ceramic mouths.

Inventors

  • You Huaizhen
  • XU XUNQING
  • WANG JIANZHI
  • HUA SHIHAO

Assignees

  • 财团法人工业技术研究院

Dates

Publication Date
20260508
Application Date
20241112
Priority Date
20241101

Claims (7)

  1. 1. A ceramic composite material is formed by sintering a powder, The powder comprises silicon nitride, silicon carbide, a first metal oxide and a second metal oxide, wherein the weight ratio of the silicon nitride to the silicon carbide is 100:0.5-100:12, and the first metal oxide is aluminum oxide or magnesium oxide; When the first metal oxide is alumina, the second metal oxide is yttria, and When the first metal oxide is magnesium oxide, the second metal oxide is cerium oxide.
  2. 2. The ceramic composite of claim 1, wherein the weight ratio of the silicon nitride to the first metal oxide is from 100:3 to 100:7.
  3. 3. The ceramic composite of claim 1, wherein the weight ratio of the silicon nitride to the second metal oxide is from 100:1 to 100:5.
  4. 4. The ceramic composite of claim 1, wherein the powder further comprises an impurity, and the impurity comprises titanium, iron, nickel, zirconium, lanthanum, or a combination thereof.
  5. 5. The ceramic composite of claim 4, wherein the weight ratio of the silicon nitride to the impurity is from 100:0.01 to 100:4.
  6. 6. The ceramic composite of claim 4, wherein the first metal oxide content is greater than the impurity content and the second metal oxide content is greater than the impurity content.
  7. 7. A ceramic nozzle comprising the ceramic composite of claim 1.

Description

Ceramic composite material and ceramic nozzle Technical Field The present invention relates to ceramic composite materials, and in particular to the use thereof in ceramic mouths. Background Wire bonding (wire bonding) is an indispensable bonding technique in the current semiconductor packaging industry such as IC and LED, and is aimed at connecting a chip (chip) and a lead frame (LEAD FRAME) with very fine (0.8-1.0 ml) metal wires so as to transmit the circuit signals of the chip to the outside. Wire bonding is currently the most widely used bonding technique due to the mature process and high flexibility of wiring, which is about nine times as much as all packaged products. The bonding wire is typically a gold wire. Gold has good ductility, conductivity and oxidation resistance. But the gold wire is expensive, and if the alloy wire is used for replacing the gold wire, the cost can be reduced by about 60 percent. However, the ceramic nozzle is easy to wear due to high hardness of alloy wires, so that a ceramic material with higher hardness and flexural strength needs to be developed for the ceramic nozzle. Disclosure of Invention The ceramic composite material provided by the embodiment of the invention is formed by sintering powder, wherein the powder comprises silicon nitride, silicon carbide, a first metal oxide and a second metal oxide, the weight ratio of the silicon nitride to the silicon carbide is 100:0.5-100:12, the first metal oxide is aluminum oxide or magnesium oxide, when the first metal oxide is aluminum oxide, the second metal oxide is yttrium oxide, and when the first metal oxide is magnesium oxide, the second metal oxide is cerium oxide. The ceramic nozzle provided by the embodiment of the invention comprises the ceramic composite material. Detailed Description The ceramic composite material provided by the embodiment of the invention is formed by sintering powder. The powder comprises silicon nitride, silicon carbide, a first metal oxide and a second metal oxide, and the weight ratio of the silicon nitride to the silicon carbide is 100:0.5 to 100:12, such as 100:0.9, 100:1, 100:2, 100:3, 100:4, 100:5, 100:6, 100:7, 100:8, 100:9, 100:10, 100:11, 100:11.5, or 100:12. If the amount of silicon carbide is too low, the hardness of the ceramic composite cannot be enhanced. If the amount of silicon carbide is too high, the hardness of the ceramic composite is rather reduced (compared to a ceramic composite sintered from a powder without silicon carbide). The powder consists essentially of silicon nitride, silicon carbide, a first metal oxide, and a second metal oxide, without other materials such as boron oxide, iron oxide, chromium oxide, or titanium oxide, which are common to sintered ceramics. In some embodiments, the first metal oxide is alumina and the second metal oxide is yttria. In some embodiments, the first metal oxide is magnesium oxide and the second metal oxide is cerium oxide. In some embodiments, the weight ratio of silicon nitride to first metal oxide is 100:3 to 100:7, such as 100:4, 100:5, or 100:6. If the amount of the first metal oxide is too low or too high, the hardness and flexural strength of the ceramic composite material are low. In some embodiments, the weight ratio of silicon nitride to second metal oxide is 100:1 to 100:5, such as 100:1.5, 100:2, 100:3, or 100:4. If the amount of the second metal oxide is too low or too high, the hardness and flexural strength of the ceramic composite material are low. In some embodiments, the powder further comprises an impurity, and the impurity comprises titanium, iron, nickel, zirconium, lanthanum, or a combination thereof. The impurities are mainly derived from the raw materials of silicon nitride, silicon carbide, a first metal oxide, and a second metal oxide. These raw materials can theoretically be further purified to remove impurities, but the purification step will greatly increase the cost of the ceramic composite. On the other hand, these impurities have limited impact on the properties of ceramic composites and therefore the raw materials are not deliberately purified to remove these impurities. It will be appreciated that if the commercial raw materials do not contain these impurities, the ceramic composite of the present invention is also subsequently protected from these impurities. In this way, the ceramic composite may be free of impurities. In some embodiments, the weight ratio of silicon nitride to impurities is 100:0.01 to 100:4. If the content of the impurities is too high, the characteristics of the ceramic composite material such as hardness and flexural strength are lowered. In some embodiments, the first metal oxide content is greater than the impurity content and the second metal oxide content is greater than the impurity content. For example, if the content of silicon nitride is 100 weight parts and the content of impurities is as high as 4 weight parts, the content of the first metal oxide is necessarily g