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CN-121992343-A - Volcanic vent device for preventing evaporation source from being polluted

CN121992343ACN 121992343 ACN121992343 ACN 121992343ACN-121992343-A

Abstract

A volcanic vent device for preventing evaporation source pollution comprises a crucible assembly and a plurality of crucibles, wherein the crucibles are arranged above the turntable, a metal source is placed in each crucible, the turntable drives the crucible to rotate around the central axis of the crucible, the volcanic vent assembly comprises a rotary disc and a rotary shaft for driving the rotary disc to rotate, the rotary disc comprises a plurality of volcanic vents which are arranged corresponding to the crucibles, and the rotary shaft drives the rotary disc to rotate by a preset angle while the crucibles rotate, so that the volcanic vent is rotated to the position above the corresponding crucible. The application is suitable for single-layer and multi-layer metal film evaporation, a plurality of volcanic vents corresponding to metal sources in the crucible are arranged on the rotating disk, the rotating disk rotates at a preset angle while the crucible rotates, the volcanic vents with corresponding numbers are rotated to the upper part of the corresponding crucible, and the production efficiency is improved while the pollution of the metal sources is avoided.

Inventors

  • XU ZHUIMENG

Assignees

  • 上海新微技术研发中心有限公司

Dates

Publication Date
20260508
Application Date
20241108

Claims (10)

  1. 1. A volcanic vent device for preventing contamination of an evaporation source, comprising: the crucible assembly comprises a rotary table and a plurality of crucibles arranged above the rotary table, wherein a metal source is placed in each crucible, and the rotary table drives the crucibles to rotate around the central axis of the rotary table; The volcanic port assembly comprises a rotary disk and a rotary shaft for driving the rotary disk to rotate, and the rotary disk comprises a plurality of volcanic ports which are arranged corresponding to the crucible; And when the crucible rotates, the rotating shaft drives the rotating disc to rotate by a preset angle, and the volcanic vent rotates to the upper part of the corresponding crucible.
  2. 2. The crater device of claim 1, wherein the number of the crucibles is the same as the number of the craters, and different crucibles correspond to different numbers of the craters.
  3. 3. A volcanic vent device for preventing contamination of an evaporation source according to claim 2, wherein the preset angle by which the rotary disk is rotated is an integer multiple of 90 °.
  4. 4. A crater device for preventing contamination of an evaporation source according to claim 2, wherein the metal sources placed in different crucibles are different, the crater is made of the same or compatible material as the metal sources, and the crater is a single metal material.
  5. 5. The volcanic vent device for preventing contamination of an evaporation source according to claim 1, wherein the crucible comprises a crucible body and a carrying groove, and the crucible body is caught in the carrying groove.
  6. 6. The volcanic vent device for preventing evaporation source pollution according to claim 5, wherein a cooling layer is provided between the carrying groove and the crucible body, the cooling layer is surrounded on the periphery of the crucible body, and the cooling layer is a cooling water layer.
  7. 7. The volcanic vent device for preventing contamination of an evaporation source according to claim 1, wherein the rotary plate is detachably connected to the rotary shaft, and the rotary plate is fixedly connected to the crucible.
  8. 8. The volcanic vent device for preventing contamination of an evaporation source according to claim 7, wherein the rotary disk is a circular rotary disk, and the volcanic vents are uniformly distributed around a circumference of a central axis of the rotary disk.
  9. 9. The crater device of claim 1, wherein the crater device further comprises a drive assembly; The driving assembly is used for driving the rotary table to rotate so as to drive the crucible arranged above the rotary table to move relative to the central axis of the rotary table; the driving assembly is further used for driving the rotating shaft, and the rotating shaft drives the rotating disc to rotate at a target angle to enable the crater to rotate to the position above the corresponding crucible.
  10. 10. The crater device of claim 1, wherein the rotation direction of the rotation table is opposite to the rotation direction of the rotation shaft.

Description

Volcanic vent device for preventing evaporation source from being polluted Technical Field The invention belongs to the technical field of semiconductors, and particularly relates to a volcanic vent device for preventing evaporation source pollution. Background In the semiconductor manufacturing process, an electron gun emits electron beams after being heated by high voltage, the electron beams bombard the surface of an evaporation source such as a metal film material in a crucible and heat the evaporation source to melt the evaporation source, and after the temperature of the metal film material exceeds a critical temperature in a high vacuum environment, the solid metal film material becomes metal vapor to generate metal vapor flow, and metal atoms or molecules carried in the vapor flow are condensed and deposited into a solid film when encountering a wafer. The existing metal evaporation table is of a single-crater structure, and is subjected to various metal composite evaporation processes, so that crater metal is easy to fall off due to the difference of stress among films and the difference of metal melting points, the crater metal is seriously likely to fall into a crucible, and then pollution of a metal source and yield loss of wafers are caused. Disclosure of Invention The application provides a volcanic vent device for preventing evaporation source pollution, which is suitable for single-layer and multi-layer metal film evaporation, wherein a plurality of volcanic vents corresponding to metal sources in a crucible are arranged on a rotary disk, the rotary disk rotates at a corresponding angle while the crucible rotates, the volcanic vents with corresponding numbers are rotated above the corresponding crucible, and the production efficiency is improved while the metal sources are prevented from being polluted. Other objects and advantages of the present invention will be further appreciated from the technical features disclosed in the present invention. To achieve one or a part of or all of the above objects or other objects, the present invention provides a crater device for preventing contamination of an evaporation source. A volcanic vent device for preventing contamination of an evaporation source, comprising: the crucible assembly comprises a rotary table and a plurality of crucibles arranged above the rotary table, wherein a metal source is placed in each crucible, and the rotary table drives the crucibles to rotate around the central axis of the rotary table; The volcanic port assembly comprises a rotary disk and a rotary shaft for driving the rotary disk to rotate, and the rotary disk comprises a plurality of volcanic ports which are arranged corresponding to the crucible; And when the crucible rotates, the rotating shaft drives the rotating disc to rotate by a preset angle, and the volcanic vent rotates to the upper part of the corresponding crucible. The number of the crucibles is consistent with that of the volcanic vents, and different crucibles correspond to the volcanic vents with different numbers. The preset angle of rotation of the rotating disc is an integer multiple of 90 degrees. The metal sources placed in different crucibles are different, the crater is made of the same or compatible material as the metal sources, and the crater is made of a single metal material. The crucible comprises a crucible body and a bearing groove, and the crucible body is clamped into the bearing groove. The cooling layer is arranged between the bearing groove and the crucible body, the cooling layer is arranged around the periphery of the crucible body, and the cooling layer is a cooling water layer. The rotary table is detachably connected with the rotary shaft, and the rotary table is fixedly connected with the crucible. The rotary disk is a circular rotary disk, and the volcanic vents are uniformly distributed around the circumference of the central axis of the rotary disk. The crater device further comprises a drive assembly; The driving assembly is used for driving the rotary table to rotate so as to drive the crucible arranged above the rotary table to move relative to the central axis of the rotary table; the driving assembly is further used for driving the rotating shaft, and the rotating shaft drives the rotating disc to rotate at a target angle to enable the crater to rotate to the position above the corresponding crucible. The rotating direction of the rotating table is opposite to the rotating direction of the rotating shaft. Compared with the prior art, the invention has the beneficial effects that: 1. According to the application, the plurality of craters corresponding to the metal sources in the crucible are arranged on the rotating disc, and the rotating disc rotates at a corresponding angle while the crucible rotates, so that the craters with corresponding numbers rotate to the upper part of the corresponding crucible, and the falling-off of crater metals caused by the difference of