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CN-121992345-A - Evaporation method and application thereof

CN121992345ACN 121992345 ACN121992345 ACN 121992345ACN-121992345-A

Abstract

The invention provides an evaporation method and application thereof, and relates to the technical field of vacuum evaporation, comprising the steps of carrying out preheating treatment on an evaporation boat, a tungsten net and a solid aluminum source arranged on the tungsten net, carrying out premelting treatment to melt the solid aluminum source to form aluminum liquid covering part of the surface of the tungsten net, carrying out premelting treatment to evaporate the aluminum liquid to form an initial infiltration area, carrying out primary wire feeding stage, feeding the aluminum liquid melted by the aluminum wire into the initial infiltration area at a first wire feeding rate until the tungsten net is completely infiltrated by the aluminum liquid, carrying out secondary wire feeding stage, feeding the aluminum wire at a second wire feeding rate, completely consuming the tungsten net, and carrying out evaporation on a base film by an aluminum metal layer. The evaporation method provided by the invention improves the spreading uniformity and evaporation stability of the aluminum liquid, and solves the technical problems of narrow liquid level, frequent splashing and uneven coating thickness caused by uneven heat distribution in the traditional process.

Inventors

  • ZHANG MENGMENG
  • BU SHAONING
  • WU JUNWEI
  • WENG WEIJIA

Assignees

  • 江苏英联复合集流体有限公司

Dates

Publication Date
20260508
Application Date
20260228

Claims (10)

  1. 1. An evaporation method, characterized by comprising the following steps: Arranging a tungsten net in a material containing groove on the upper surface of an evaporation boat, arranging a solid aluminum source on the tungsten net, and preheating the evaporation boat, the tungsten net and the solid aluminum source arranged on the tungsten net to remove gas and moisture in the evaporation boat, the tungsten net and the solid aluminum source; Pre-melting to melt the solid aluminum source to form aluminum liquid covering part of the surface of the tungsten net; Pre-evaporating to evaporate the aluminum liquid to form an initial infiltration area; At a primary wire feeding stage, feeding aluminum wires at a first wire feeding rate, spreading molten aluminum liquid after the aluminum wires are melted in the initial infiltration area until the tungsten net is completely infiltrated by the aluminum liquid, and at least partially consuming the tungsten net; in the secondary wire feeding stage, aluminum wires are fed at a second wire feeding rate, and the tungsten net is completely consumed; And in the vapor deposition stage, vapor deposition of an aluminum metal layer is carried out on the base film.
  2. 2. The evaporation method according to claim 1, wherein the tungsten mesh is embedded in the bottom of the material containing groove on the upper surface of the evaporation boat; preferably, the mesh number of the tungsten mesh is 18-300 mesh and the wire diameter is 0.06-0.2 mm.
  3. 3. The vapor deposition method according to claim 1, wherein the volume ratio of the solid aluminum source to the evaporation boat upper surface material containing groove is 4-6:100; preferably, the solid aluminum source comprises one or both of an aluminum sheet and an aluminum wire.
  4. 4. The vapor deposition method according to claim 1, wherein the first wire feed rate is smaller than the second wire feed rate.
  5. 5. The evaporation method according to claim 1, wherein the preheated evaporation source power is not higher than 50% of the total evaporation source power at the time of the preheating treatment; Preferably, the preheating is carried out for a period of time ranging from 15 to 25 min.
  6. 6. The evaporation method according to claim 1, wherein the evaporation source power of the pre-melting treatment is 65% -75% of the total power of the evaporation source during the pre-melting treatment; Preferably, the pre-melting treatment is performed for a period of time ranging from 10 to 20 min.
  7. 7. The evaporation method according to claim 1, wherein the evaporation source power of the pre-evaporation treatment is 80% -85% of the total power of the evaporation source during the pre-evaporation treatment.
  8. 8. The vapor deposition method according to claim 4, characterized in that the vapor deposition method further satisfies at least one of the following conditions: (1) The evaporation source power of the primary wire feeding stage is 89% -92% of the total power of the evaporation source; Optionally, the time of the primary wire feeding stage is 3-8 min; Optionally, the first wire feeding speed is 150-200 mm/min; (2) The evaporation source power of the secondary wire feeding stage is 90-92% of the total power of the evaporation source; Optionally, the time of the secondary wire feeding stage is 3-8 min; optionally, the second wire feeding speed is 350-450 mm/min.
  9. 9. The evaporation method according to claim 1, wherein the evaporation source power in the evaporation stage is 87% -89% of the total evaporation source power in the evaporation stage.
  10. 10. Use of the evaporation method according to any of claims 1-9 for the preparation of a composite current collector.

Description

Evaporation method and application thereof Technical Field The invention relates to the technical field of vacuum evaporation, in particular to an evaporation method and application thereof. Background In vacuum aluminum film steaming, especially in composite current collector production, the spreading uniformity and stability of aluminum liquid in the evaporation boat directly determine the evaporation efficiency and film coating quality. In the vacuum evaporation process of a composite current collector (such as aluminizing a polymer material base film of PET/PP, etc.), a heating mode of densely arranging a plurality of evaporation boats is often adopted. At present, the edge temperature of the evaporation boat is far higher than the temperature of the central area cooled by molten aluminum because of strong heat radiation between the boats. Molten aluminum liquid cannot spread to a high-temperature edge due to Ma Lage Nile effect (thermal capillary effect) in a boat, so that the problems of narrow liquid level, small evaporation area, poor evaporation uniformity, low efficiency and the like are caused, and splashing is easily caused due to uneven distribution of the aluminum liquid. In view of this, the present invention has been proposed. Disclosure of Invention The invention aims to provide an evaporation boat aluminum evaporation method based on a tungsten net, which at least solves one of the technical problems in the prior art. The second purpose of the invention is to provide an application of the evaporation boat aluminum evaporation method based on the tungsten net in preparing the composite current collector. In order to achieve the above object of the present invention, the following technical solutions are specifically adopted: In a first aspect, the present invention provides an evaporation method, comprising the steps of: Arranging a tungsten net in a material containing groove on the upper surface of an evaporation boat, arranging a solid aluminum source on the tungsten net, and preheating the evaporation boat, the tungsten net and the solid aluminum source arranged on the tungsten net to remove gas and moisture in the evaporation boat, the tungsten net and the solid aluminum source; Pre-melting to melt the solid aluminum source to form aluminum liquid covering part of the surface of the tungsten net; Pre-evaporating to evaporate the aluminum liquid to form an initial infiltration area; At a primary wire feeding stage, feeding aluminum wires at a first wire feeding rate, spreading molten aluminum liquid after the aluminum wires are melted in the initial infiltration area until the tungsten net is completely infiltrated by the aluminum liquid, and at least partially consuming the tungsten net; in the secondary wire feeding stage, aluminum wires are fed at a second wire feeding rate, and the tungsten net is completely consumed; And in the vapor deposition stage, vapor deposition of an aluminum metal layer is carried out on the base film. Further, the tungsten net is embedded at the bottom of the material containing groove on the upper surface of the evaporation boat; preferably, the mesh number of the tungsten mesh is 18-300 mesh and the wire diameter is 0.06-0.2 mm. Further, the volume ratio of the solid aluminum source to the material containing groove on the upper surface of the evaporation boat is 4-6:100; preferably, the solid aluminum source comprises one or both of an aluminum sheet and an aluminum wire. Further, the first wire feed rate is less than the second wire feed rate. Further, during the preheating treatment, the power of the preheated evaporation source is not higher than 50% of the total power of the evaporation source; Preferably, the preheating is carried out for a period of time ranging from 15 to 25 min. Further, during the pre-melting treatment, the power of the evaporation source in the pre-melting treatment is 65% -75% of the total power of the evaporation source; Preferably, the pre-melting treatment is performed for a period of time ranging from 10 to 20 min. Further, during the pre-evaporation treatment, the evaporation source power of the pre-evaporation treatment is 80% -85% of the total power of the evaporation source; Further, the vapor deposition method also satisfies at least one of the following conditions: (1) The evaporation source power of the primary wire feeding stage is 89% -92% of the total power of the evaporation source; Optionally, the time of the primary wire feeding stage is 3-8 min; Optionally, the first wire feeding speed is 150-200 mm/min; (2) The evaporation source power of the secondary wire feeding stage is 90-92% of the total power of the evaporation source; Optionally, the time of the secondary wire feeding stage is 3-8 min; optionally, the second wire feeding speed is 350-450 mm/min. Further, in the evaporation stage, the evaporation source power in the evaporation stage is 87% -89% of the total power of the evaporation source. In a seco